KR880011362A - 장식 및 내마모 피막의 진공 아크 플라즈마 증착 방법 및 장치 - Google Patents
장식 및 내마모 피막의 진공 아크 플라즈마 증착 방법 및 장치 Download PDFInfo
- Publication number
- KR880011362A KR880011362A KR870012679A KR870012679A KR880011362A KR 880011362 A KR880011362 A KR 880011362A KR 870012679 A KR870012679 A KR 870012679A KR 870012679 A KR870012679 A KR 870012679A KR 880011362 A KR880011362 A KR 880011362A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- coating
- titanium
- dopant
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000000151 deposition Methods 0.000 title claims description 10
- 238000000576 coating method Methods 0.000 title claims 39
- 238000000034 method Methods 0.000 claims 76
- 239000000758 substrate Substances 0.000 claims 46
- 239000011248 coating agent Substances 0.000 claims 38
- 239000002019 doping agent Substances 0.000 claims 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 24
- 239000007789 gas Substances 0.000 claims 22
- 150000001875 compounds Chemical class 0.000 claims 14
- 239000010936 titanium Substances 0.000 claims 14
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 12
- 229910052799 carbon Inorganic materials 0.000 claims 12
- 229910052757 nitrogen Inorganic materials 0.000 claims 12
- 239000013077 target material Substances 0.000 claims 12
- 229910052719 titanium Inorganic materials 0.000 claims 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 11
- 239000010931 gold Substances 0.000 claims 11
- 229910052737 gold Inorganic materials 0.000 claims 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 10
- 239000000203 mixture Substances 0.000 claims 9
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 claims 8
- 229910052760 oxygen Inorganic materials 0.000 claims 8
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 7
- 229910001093 Zr alloy Inorganic materials 0.000 claims 7
- PMTRSEDNJGMXLN-UHFFFAOYSA-N titanium zirconium Chemical compound [Ti].[Zr] PMTRSEDNJGMXLN-UHFFFAOYSA-N 0.000 claims 7
- 229910052726 zirconium Inorganic materials 0.000 claims 7
- 229910000838 Al alloy Inorganic materials 0.000 claims 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 6
- 239000001301 oxygen Substances 0.000 claims 6
- 239000000463 material Substances 0.000 claims 5
- 229910001369 Brass Inorganic materials 0.000 claims 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 4
- 239000010951 brass Substances 0.000 claims 4
- 239000004033 plastic Substances 0.000 claims 4
- 239000010935 stainless steel Substances 0.000 claims 4
- 229910001220 stainless steel Inorganic materials 0.000 claims 4
- 229910052725 zinc Inorganic materials 0.000 claims 4
- 239000011701 zinc Substances 0.000 claims 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 3
- 229910001297 Zn alloy Inorganic materials 0.000 claims 3
- 229910052709 silver Inorganic materials 0.000 claims 3
- 239000004332 silver Substances 0.000 claims 3
- 229910001315 Tool steel Inorganic materials 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 239000010938 white gold Substances 0.000 claims 2
- 229910000832 white gold Inorganic materials 0.000 claims 2
- 229910000906 Bronze Inorganic materials 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 239000010974 bronze Substances 0.000 claims 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims 1
- 238000005034 decoration Methods 0.000 claims 1
- 150000002632 lipids Chemical class 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2520787A | 1987-03-12 | 1987-03-12 | |
| US025207 | 1987-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR880011362A true KR880011362A (ko) | 1988-10-28 |
Family
ID=21824663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR870012679A Ceased KR880011362A (ko) | 1987-03-12 | 1987-11-11 | 장식 및 내마모 피막의 진공 아크 플라즈마 증착 방법 및 장치 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS63223161A (cg-RX-API-DMAC10.html) |
| KR (1) | KR880011362A (cg-RX-API-DMAC10.html) |
| CH (1) | CH675258A5 (cg-RX-API-DMAC10.html) |
| DE (1) | DE3731127A1 (cg-RX-API-DMAC10.html) |
| FR (1) | FR2612204A1 (cg-RX-API-DMAC10.html) |
| NL (1) | NL8702404A (cg-RX-API-DMAC10.html) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0404973A1 (de) * | 1989-06-27 | 1991-01-02 | Hauzer Holding B.V. | Verfahren und Vorrichtung zur Beschichtung von Substraten |
| DE4006456C1 (en) * | 1990-03-01 | 1991-05-29 | Balzers Ag, Balzers, Li | Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface |
| WO1992019789A1 (fr) * | 1991-04-29 | 1992-11-12 | Nauchno-Proizvodstvennoe Predpriyatie 'novatekh' | Evaporateur a arc electrique de metaux |
| JP2793772B2 (ja) * | 1994-05-13 | 1998-09-03 | 神鋼コベルコツール株式会社 | 密着性に優れた硬質皮膜被覆工具および硬質皮膜被覆部材 |
| DE19745407C2 (de) * | 1996-07-31 | 2003-02-27 | Fraunhofer Ges Forschung | Verfahren zur Glanzbeschichtung von Kunststoffteilen, vorzugsweise für Fahrzeuge, und danach beschichtetes Kunststoffteil |
| DE19809409A1 (de) * | 1998-03-05 | 1999-09-09 | Leybold Systems Gmbh | Messingfarbige Beschichtung mit einer farbgebenden nitridischen Schicht |
| DE19905881A1 (de) * | 1999-01-22 | 2000-08-03 | Muerrle Norbert | Verfahren zur Beschichtung eines aus Edelmetall oder einem Nicht-Edelmetall gefertigten Schmuckstücks sowie ein derartiges Schmuckstück |
| DE10001381A1 (de) * | 2000-01-14 | 2001-07-19 | Hauzer Techno Coating Europ B | PVD-Verfahren zur Herstellung einer gefärbten, gegenüber Fingerabdrücken unempfindlichen Beschichtung auf Gegenständen sowie Gegenstände mit einer solchen Beschichtung |
| RU2196847C2 (ru) * | 2000-05-18 | 2003-01-20 | Уральский электрохимический комбинат | Катод электродугового испарителя |
| US9997338B2 (en) * | 2005-03-24 | 2018-06-12 | Oerlikon Surface Solutions Ag, Pfäffikon | Method for operating a pulsed arc source |
| JP5073998B2 (ja) * | 2006-08-28 | 2012-11-14 | 眞 八藤 | 銀器類の改良方法 |
| RU2495150C1 (ru) * | 2012-06-26 | 2013-10-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Способ получения многослойного покрытия для режущего инструмента |
| CA2916640A1 (en) | 2013-06-26 | 2014-12-31 | Siegfried Krassnitzer | Decorative hipims - hard-material layer |
| JP7014816B2 (ja) * | 2017-12-19 | 2022-02-01 | 日清エンジニアリング株式会社 | 複合粒子および複合粒子の製造方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3625848A (en) * | 1968-12-26 | 1971-12-07 | Alvin A Snaper | Arc deposition process and apparatus |
| US3793179A (en) * | 1971-07-19 | 1974-02-19 | L Sablev | Apparatus for metal evaporation coating |
| US3900592A (en) * | 1973-07-25 | 1975-08-19 | Airco Inc | Method for coating a substrate to provide a titanium or zirconium nitride or carbide deposit having a hardness gradient which increases outwardly from the substrate |
| JPS50123579A (cg-RX-API-DMAC10.html) * | 1974-03-19 | 1975-09-29 | ||
| CH619344B (de) * | 1977-12-23 | Balzers Hochvakuum | Verfahren zur herstellung goldfarbener ueberzuege. | |
| CH624817B (de) * | 1979-09-04 | Balzers Hochvakuum | Verfahren zur herstellung goldfarbener ueberzuege. | |
| US4351855A (en) * | 1981-02-24 | 1982-09-28 | Eduard Pinkhasov | Noncrucible method of and apparatus for the vapor deposition of material upon a substrate using voltaic arc in vacuum |
| DE3107914A1 (de) * | 1981-03-02 | 1982-09-16 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren und vorrichtung zum beschichten von formteilen durch katodenzerstaeubung |
| GB2105729B (en) * | 1981-09-15 | 1985-06-12 | Itt Ind Ltd | Surface processing of a substrate material |
| US4415521A (en) * | 1982-03-15 | 1983-11-15 | Celanese Corporation | Process for achieving higher orientation in partially oriented yarns |
| SU1128618A1 (ru) * | 1982-10-10 | 1987-03-07 | Всесоюзный Научно-Исследовательский Инструментальный Институт | Материал износостойкого покрыти металлорежущего инструмента |
| US4540596A (en) * | 1983-05-06 | 1985-09-10 | Smith International, Inc. | Method of producing thin, hard coating |
| US4430184A (en) * | 1983-05-09 | 1984-02-07 | Vac-Tec Systems, Inc. | Evaporation arc stabilization |
| US4556471A (en) * | 1983-10-14 | 1985-12-03 | Multi-Arc Vacuum Systems Inc. | Physical vapor deposition apparatus |
| IL71530A (en) * | 1984-04-12 | 1987-09-16 | Univ Ramot | Method and apparatus for surface-treating workpieces |
| DE3428951A1 (de) * | 1984-08-06 | 1986-02-13 | Leybold-Heraeus GmbH, 5000 Köln | Mit einer deckschicht aus gold oder einem goldhaltigen material ueberzogener dekorativer gebrauchsgegenstand und verfahren zu seiner herstellung |
| JPS61183458A (ja) * | 1985-02-08 | 1986-08-16 | Citizen Watch Co Ltd | 黒色イオンプレ−テイング膜 |
| EP0211413A3 (en) * | 1985-08-09 | 1989-03-15 | The Perkin-Elmer Corporation | Arc ignition device |
-
1987
- 1987-08-26 FR FR8711938A patent/FR2612204A1/fr not_active Withdrawn
- 1987-09-16 DE DE19873731127 patent/DE3731127A1/de active Granted
- 1987-09-22 JP JP62238596A patent/JPS63223161A/ja active Granted
- 1987-09-24 CH CH3706/87A patent/CH675258A5/de not_active IP Right Cessation
- 1987-10-09 NL NL8702404A patent/NL8702404A/nl not_active Application Discontinuation
- 1987-11-11 KR KR870012679A patent/KR880011362A/ko not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| DE3731127C2 (cg-RX-API-DMAC10.html) | 1990-11-15 |
| NL8702404A (nl) | 1988-10-03 |
| DE3731127A1 (de) | 1988-09-22 |
| CH675258A5 (cg-RX-API-DMAC10.html) | 1990-09-14 |
| FR2612204A1 (fr) | 1988-09-16 |
| JPS63223161A (ja) | 1988-09-16 |
| JPH045750B2 (cg-RX-API-DMAC10.html) | 1992-02-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19871111 |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 19921002 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 19871111 Comment text: Patent Application |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 19950220 Patent event code: PE09021S01D |
|
| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
Patent event date: 19950703 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 19950220 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |