KR870003010A - 실란의 제조방법 - Google Patents

실란의 제조방법 Download PDF

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Publication number
KR870003010A
KR870003010A KR1019860007233A KR860007233A KR870003010A KR 870003010 A KR870003010 A KR 870003010A KR 1019860007233 A KR1019860007233 A KR 1019860007233A KR 860007233 A KR860007233 A KR 860007233A KR 870003010 A KR870003010 A KR 870003010A
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KR
South Korea
Prior art keywords
silane
component element
producing
silicon
yield
Prior art date
Application number
KR1019860007233A
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English (en)
Other versions
KR900000445B1 (ko
Inventor
마사요시 이도오
히로하루 미야가와
마사미 무라까미
도모히로 아베
가오루 이노우에
게이이찌 이께다
Original Assignee
도쯔까 야스아끼
미쯔이도오아쯔가가꾸 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60193253A external-priority patent/JPH0714810B2/ja
Priority claimed from JP60193254A external-priority patent/JPH0714811B2/ja
Priority claimed from JP60193251A external-priority patent/JPH0714808B2/ja
Priority claimed from JP60193250A external-priority patent/JPH078722B2/ja
Priority claimed from JP60193252A external-priority patent/JPH0714809B2/ja
Application filed by 도쯔까 야스아끼, 미쯔이도오아쯔가가꾸 가부시기가이샤 filed Critical 도쯔까 야스아끼
Publication of KR870003010A publication Critical patent/KR870003010A/ko
Application granted granted Critical
Publication of KR900000445B1 publication Critical patent/KR900000445B1/ko

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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/04Hydrides of silicon
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B25/00Phosphorus; Compounds thereof
    • C01B25/06Hydrogen phosphides
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/04Hydrides of silicon
    • C01B33/043Monosilane
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B6/00Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic compounds ; Compounds containing at least one metal-hydrogen bond, e.g. (GeH3)2S, SiH GeH; Monoborane or diborane; Addition complexes thereof
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B6/00Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic compounds ; Compounds containing at least one metal-hydrogen bond, e.g. (GeH3)2S, SiH GeH; Monoborane or diborane; Addition complexes thereof
    • C01B6/06Hydrides of aluminium, gallium, indium, thallium, germanium, tin, lead, arsenic, antimony, bismuth or polonium; Monoborane; Diborane; Addition complexes thereof

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

내용 없음

Description

실란의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 규소-마그네슘합금에 있어서, SiH4및 Si2H6의 수율과 제3성분인 Al의 함량간의 관계를 도시하는 그래프.

Claims (6)

  1. 일반식 SinH2n+2(식중(n=1 또는 2)로 표시되는 실란의 제조방법에 있어서,
    (a) 제3성분원소로서 Li,Na,K,Ca,Ba,Ti,Zr,Nb,Cr,Mo,Mn,Fe,Co,Ni,Pd,Cu,Ag,Zn,Cd,Al,Sn,Pb,Bi,Se, S 및 C로 이루어진 군에서 선택된 적어도 하나의 원소를 함유하는 규소-마그네슘함금을 제조하고,
    (b) 제3성분원소를 함유하는 합금을 암모니아 용매중에서 산과 반응시킴으로써,
    (c) SiH4에 대한 Si2H6의 생성비를 변화시키는 것을 특징으로 하는 실란의 제조방법.
  2. 제1항에 있어서,
    제3성분원소의 함유량은 규소의 그램원자에 대하여 적어도 0.1%인 것을 특징으로 하는 실란의 제조방법.
  3. 제1항에 있어서,
    제3성분원소의 함유량은 규소의 그램원자에 대하여 적어도 0.2%인 것을 특징으로 하는 실란의 제조방법.
  4. 제2항에 있어서,
    제3성분원소를 다량함유량으로써 Si2H6의 수율을 증가시키는 것을 특징으로 하는 실란의 제조방법.
  5. 제3항에 있어서,
    제3성분원소를 다량함유량으로써 Si2H6의 수율을 증가시키는 것을 특징으로 하는 실란의 제조방법.
  6. 제1항에 있어서,
    산은 염화암모늄 또는 브롬화암모늄인 것을 특징으로 하는 실란의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019860007233A 1985-09-03 1986-08-30 실란의 제조 방법 KR900000445B1 (ko)

Applications Claiming Priority (15)

Application Number Priority Date Filing Date Title
JP193253 1985-09-03
JP60-193253 1985-09-03
JP60-193252 1985-09-03
JP60193253A JPH0714810B2 (ja) 1985-09-03 1985-09-03 水素化ケイ素の製造方法
JP60-193250 1985-09-03
JP60-193254 1985-09-03
JP193250 1985-09-03
JP60193254A JPH0714811B2 (ja) 1985-09-03 1985-09-03 水素化ケイ素の製造方法
JP60193251A JPH0714808B2 (ja) 1985-09-03 1985-09-03 水素化ケイ素の製造方法
JP193251 1985-09-03
JP193252 1985-09-03
JP60193250A JPH078722B2 (ja) 1985-09-03 1985-09-03 水素化ケイ素の製造方法
JP60193252A JPH0714809B2 (ja) 1985-09-03 1985-09-03 水素化ケイ素の製造方法
JP193254 1985-09-03
JP60-193251 1985-09-03

Publications (2)

Publication Number Publication Date
KR870003010A true KR870003010A (ko) 1987-04-14
KR900000445B1 KR900000445B1 (ko) 1990-01-30

Family

ID=27529073

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860007233A KR900000445B1 (ko) 1985-09-03 1986-08-30 실란의 제조 방법

Country Status (6)

Country Link
US (1) US4808392A (ko)
EP (1) EP0215606B1 (ko)
KR (1) KR900000445B1 (ko)
AU (1) AU585641B2 (ko)
CA (1) CA1266161A (ko)
DE (1) DE3671204D1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006041272A1 (en) * 2004-10-12 2006-04-20 The Ministry Of Education And Sciences Of Republic Kazakhstan Republican State Enterprise 'center Of Chemical-Technological Researches' Method of silane production
US8163261B2 (en) * 2005-04-05 2012-04-24 Voltaix, Llc System and method for making Si2H6 and higher silanes
FR2950336B1 (fr) * 2009-09-23 2011-10-07 Air Liquide Production de silanes par broyage de grains d'alliage de silicium sous atmosphere hydrogene
FR2950337B1 (fr) * 2009-09-23 2011-10-21 Air Liquide Production de silanes par broyage de grains de silice melanges a un metal tel que mg ou al sous atmosphere hydrogene
FR2950335B1 (fr) * 2009-09-23 2011-10-07 Air Liquide Production de silanes par broyage de grains de silicium melange a un metal tel que mg, al, ca, zn sous atmosphere hydrogene
FR2950334B1 (fr) * 2009-09-23 2011-10-07 Air Liquide Production de silanes par broyage de grains de silicium sous atmosphere hydrogene

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE926069C (de) * 1952-09-17 1955-04-04 Metallgesellschaft Ag Verfahren zur Herstellung von Silanen aus Magnesiumsilicid
GB946105A (en) * 1959-04-27 1964-01-08 Ishizuka Hiroshi Continuous process for the manufacture of pure monosilane and apparatus therefor
US4610859A (en) * 1983-12-29 1986-09-09 Mitsui Toatsu Chemicals, Inc. Process for producing silicon hydrides

Also Published As

Publication number Publication date
KR900000445B1 (ko) 1990-01-30
EP0215606A2 (en) 1987-03-25
EP0215606B1 (en) 1990-05-16
AU6200486A (en) 1987-03-05
US4808392A (en) 1989-02-28
EP0215606A3 (en) 1987-05-20
CA1266161A (en) 1990-02-27
AU585641B2 (en) 1989-06-22
DE3671204D1 (de) 1990-06-21

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