FR2950334B1 - Production de silanes par broyage de grains de silicium sous atmosphere hydrogene - Google Patents

Production de silanes par broyage de grains de silicium sous atmosphere hydrogene

Info

Publication number
FR2950334B1
FR2950334B1 FR0956551A FR0956551A FR2950334B1 FR 2950334 B1 FR2950334 B1 FR 2950334B1 FR 0956551 A FR0956551 A FR 0956551A FR 0956551 A FR0956551 A FR 0956551A FR 2950334 B1 FR2950334 B1 FR 2950334B1
Authority
FR
France
Prior art keywords
silan
production
hydrogen atmosphere
under hydrogen
silicon grains
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0956551A
Other languages
English (en)
Other versions
FR2950334A1 (fr
Inventor
Dominique Belot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR0956551A priority Critical patent/FR2950334B1/fr
Priority to PCT/FR2010/051813 priority patent/WO2011036366A1/fr
Publication of FR2950334A1 publication Critical patent/FR2950334A1/fr
Application granted granted Critical
Publication of FR2950334B1 publication Critical patent/FR2950334B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane
FR0956551A 2009-09-23 2009-09-23 Production de silanes par broyage de grains de silicium sous atmosphere hydrogene Expired - Fee Related FR2950334B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0956551A FR2950334B1 (fr) 2009-09-23 2009-09-23 Production de silanes par broyage de grains de silicium sous atmosphere hydrogene
PCT/FR2010/051813 WO2011036366A1 (fr) 2009-09-23 2010-09-01 Production de silanes par broyage de grains de silicium sous atmosphere hydrogene

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0956551A FR2950334B1 (fr) 2009-09-23 2009-09-23 Production de silanes par broyage de grains de silicium sous atmosphere hydrogene

Publications (2)

Publication Number Publication Date
FR2950334A1 FR2950334A1 (fr) 2011-03-25
FR2950334B1 true FR2950334B1 (fr) 2011-10-07

Family

ID=42244301

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0956551A Expired - Fee Related FR2950334B1 (fr) 2009-09-23 2009-09-23 Production de silanes par broyage de grains de silicium sous atmosphere hydrogene

Country Status (2)

Country Link
FR (1) FR2950334B1 (fr)
WO (1) WO2011036366A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114105148B (zh) * 2021-12-01 2022-08-12 全椒亚格泰电子新材料科技有限公司 利用等离子球磨裂解合成高阶硅烷的方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1233321A (fr) * 1959-08-10 1960-10-12 Du Pont Production du silane par hydrogénation d'un fluosilicate ou d'un composé ayant des groupes siloxy en présence d'un métal électropositif et d'un halogénure d'aluminium
DE1139103B (de) * 1960-04-07 1962-11-08 Metallgesellschaft Ag Verfahren zur Herstellung von Monosilan
DE1150959B (de) * 1961-06-08 1963-07-04 Metallgesellschaft Ag Verfahren zur Herstellung von Silan
US4676967A (en) * 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
FR2556708B1 (fr) 1983-12-19 1986-05-02 Air Liquide Procede de production d'hydrures de silicium, application et appareil de mise en oeuvre
AU585641B2 (en) * 1985-09-03 1989-06-22 Mitsui Toatsu Chemicals Inc. Process for producing silanes
WO2006041272A1 (fr) 2004-10-12 2006-04-20 The Ministry Of Education And Sciences Of Republic Kazakhstan Republican State Enterprise 'center Of Chemical-Technological Researches' Procede de production de silane

Also Published As

Publication number Publication date
WO2011036366A1 (fr) 2011-03-31
FR2950334A1 (fr) 2011-03-25

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20160531