KR20220027028A - Cutting devices and manufacturing methods of cutting products - Google Patents

Abstract

Provided is a cutting apparatus which can calculate a height of at least a part of a spindle unit regardless of a horizontal position of the spindle unit. The cutting apparatus comprises the spindle unit, a movement unit, and a detector. The spindle unit comprises a blade that cuts a work. The movement unit contains and supports the spindle unit and moves the spindle unit in a horizontal direction. The detector comprises a light emitting unit and a light receiving unit that receives light emitted from the light emitting unit, and is installed on the movement unit. The detector is configured to detect the light blocked by at least a part of the spindle unit.

Description

CUTTING DEVICES AND MANUFACTURING METHODS OF CUTTING PRODUCTS

The present invention relates to a cutting device and a method for manufacturing a cut product.

Japanese Patent Application Laid-Open No. 2014-192271 (Patent Document 1) discloses a cutting device that performs a cutting process on a workpiece. This cutting device includes blade detection means for detecting the cutting degree. The blade detection means includes a light emitting unit and a light receiving unit. The blade detection means detects that the cut angle exists at a predetermined height position as the cut degree blocks the light emitted by the light emitting unit. Based on the detection result, the amount of wear of the cut is detected. In this cutting device, the blade detection means is provided on the moving table which holds the chuck table (refer patent document 1).

Japanese Patent Laid-Open No. 2014-192271

In the cutting device disclosed by the said patent document 1, the detection of a cutting degree existing at a predetermined height is possible only in the chuck table vicinity. That is, there are limited places where it is possible to detect that the cut is at a predetermined height.

The present invention has been made to solve such a problem, and an object thereof is to provide a cutting device or the like capable of detecting that at least a portion of the spindle portion is present at a predetermined height regardless of the position in the horizontal direction of the spindle portion.

A cutting device according to a certain aspect of the present invention includes a spindle unit, a moving unit, and a detector. The spindle unit includes a blade for cutting the work. The moving unit is configured to hold the spindle unit and move the spindle unit in the horizontal direction. The detector includes a light emitting unit and a light receiving unit that receives the light emitted by the light emitting unit, and is provided in the moving unit. The detector is configured to detect that at least a portion of the spindle portion has blocked the light beam.

The manufacturing method of the cut product which concerns on another situation of this invention manufactures a cut product by cutting a workpiece|work using the said cutting device.

ADVANTAGE OF THE INVENTION According to this invention, the cutting device etc. which can detect that at least a part of a spindle part exists at a predetermined height irrespective of the position in the horizontal direction of a spindle part can be provided.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows typically the plane of a part of a cutting device.
It is a figure which shows typically the front of a part of a cutting device.
3 is a diagram for explaining a procedure for detecting a control coordinate origin using a CCS block.
Fig. 4 is a diagram showing the relationship between the spindle unit and the detector.
5 is a diagram for explaining an example of the optical configuration of the detector.
It is a figure which shows typically the plane of a part of the cutting device which is a comparison object.
7 is a view for explaining a process of moving a reference dog to a predetermined height.
It is a flowchart which shows the manufacturing procedure of the cut product in a cutting device.
It is a figure which shows an example of the cutting device in case a work holding unit moves in the arrow XY direction.
FIG. 10 is a diagram for explaining an example of detecting a control coordinate origin by bringing a reference dog into contact with a CCS block.
11 is a diagram for explaining another example of an optical system.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail, referring drawings. In addition, the same code|symbol is attached|subjected to the same or equivalent part in drawing, and the description is not repeated.

[One. Configuration of cutting device]

1 : is a figure which shows typically the plane of a part of the cutting device 10 which concerns on this embodiment. FIG. 2 : is a figure which shows typically the front surface of a part of the cutting device 10. As shown in FIG. In addition, in each figure, each direction indicated by arrow XYZ is common.

The cutting device 10 is comprised so that the workpiece|work W1 may be divided into pieces by cutting the workpiece|work W1 into pieces (full cut). Moreover, the cutting device 10 is comprised so that a groove|channel may be formed in the workpiece|work W1 by removing a part of the workpiece|work W1 (half cut). That is, the concept of the term "cutting" included in the name (cutting device) of the cutting device 10 includes separating a cutting object into a plurality and removing a part of the cutting object. The work W1 is, for example, a package substrate. In a package substrate, the board|substrate or lead frame to which the semiconductor chip was mounted is resin-sealed. That is, the work W1 is a resin-molded substrate. In the following description, the sealing-side surface of the work W1 is also referred to as "package surface", and the surface on the substrate or lead frame side is also described as "substrate surface".

Examples of the package substrate include a Ball Grid Array (BGA) package substrate, a Land Grid Array (LGA) package substrate, a Chip Size Package (CSP) package substrate, a Light Emitting Diode (LED) package substrate, and a Quad Flat No-leaded (QFN) package. and a substrate.

As shown in FIGS. 1 and 2 , the cutting device 10 is a cutting unit 100 , a work holding unit 200 , a CCS (Contact Cutter Set) block 300 and a detector 400 . and a control unit 500 .

The cutting unit 100 is configured to cut the work W1 , and includes a spindle part 110 , sliders 103 and 104 , a support body 105 , and a guide 106 . In addition, although the cutting device 10 is a twin spindle structure including two sets of the spindle part 110 and the sliders 103, 104, the set of the spindle part 110 and the sliders 103, 104 is only one set. A single spindle configuration may be included.

The guide 106 is a metal rod-shaped member and extends in the arrow Y direction. The support body 105 is a metal rod-shaped member, and is comprised so that it may move along the guide 106 in the arrow Y direction. A guide G1 extending in the longitudinal direction (arrow X direction) is formed on the support 105 . The support body 105 is an example of the moving part in this invention.

The slider 104 is a metal, rectangular plate-shaped member, and is provided on the support body 105 in a state movable in the direction of the arrow X along the guide G1. The slider 104 is provided with a guide G2 extending in the longitudinal direction (arrow Z direction). The slider 103 is a metal-made rectangular plate-shaped member, and is provided in the slider 104 in the state which is movable along the guide G2 in the height direction (arrow Z direction).

The spindle unit 110 includes a spindle unit main body 102 , a blade 101 provided on the spindle unit main body 102 , and a reference dog 107 provided on the spindle unit main body 102 . The blade 101 cuts the work W1 by rotating at a high speed, and separates the work W1 into a plurality of cut products (semiconductor packages). The reference dog 107 is a protrusion that protrudes downward from the spindle unit main body 102 , and is used to detect the wear state and the notch state of the blade 101 . The reference dog 107, unlike the blade 101, is hardly worn. The reference dog 107 is used for specifying a height position to be referenced, for example, in the case of detecting the wear state and the cut-out state of the blade 101 . The reference dog 107 will be described in detail later.

The spindle main body 102 is attached to the slider 103 . The spindle unit 110 is configured to move to a desired position in the cutting device 10 according to the horizontal or vertical movement of the sliders 103 and 104 and the support 105 .

The work holding unit 200 is configured to hold the work W1 , and includes a cutting table 201 and a rubber 202 disposed on the cutting table 201 . In this embodiment, the cutting device 10 of the twin cut table structure which has the two workpiece|work holding units 200 is illustrated. In addition, the number of the work holding units 200 is not limited to two, One may be sufficient as it, and three or more may be sufficient as it.

The rubber 202 is a rubber plate-shaped member, and a plurality of holes are formed in the rubber 202 . A work W1 is disposed on the rubber 202 . The cutting table 201 hold|maintains the workpiece|work W1 by adsorb|sucking the workpiece|work W1 arrange|positioned on the rubber 202 from the package surface side below. The cutting table 201 is rotatable in the θ direction. The work W1 is cut by the spindle unit 110 from the substrate surface side in a state held by the work holding unit 200 . In addition, the work holding unit 200 does not necessarily include the rubber 202, and instead of the rubber 202, another member for adsorbing the work W1 disposed above from the package surface side below is included. You can do it.

The CCS block 300 is used for detection of the control coordinate origin in the control of the height position of the spindle unit 110 . The control coordinate origin is a reference position on control in the height direction of the spindle unit 110, and includes, for example, an electrical origin.

FIG. 3 is a diagram for explaining a procedure for detecting the control coordinate origin using the CCS block 300 . In the cutting device 10, the height H1 of the CCS block 300 is memorize|stored previously. As shown in FIG. 3 , in the cutting device 10 , the control coordinate origin in the height direction of the spindle unit 110 is detected by bringing the blade 101 into contact with the CCS block 300 .

In addition, the detection of the control coordinate origin using the CCS block 300 applies a relatively large load to the blade 101 in order to physically bring the blade 101 into contact with the CCS block 300 . Therefore, in the cutting device 10, detection of the control coordinate origin using the CCS block 300 is performed at limited timing, such as after exchange of the blade 101 is performed, for example.

1 and 2 again, the detector 400, for example, at least a portion of the spindle unit 110 (eg, the blade 101, the reference dog 107) is present at a predetermined height position It is used for the detection of what is done, the detection of the worn state and the cut-out state (the diameter of the blade 101 ) of the blade 101 , and the control coordinate origin in the control of the height position of the spindle part 110 .

The detector 400 includes a light emitting unit 401 and a light receiving unit 402 . The light emitting unit 401 is configured to emit light toward the light receiving unit 402 . The light receiving unit 402 is configured to receive the light emitted by the light emitting unit 401 . Each of the light emitting unit 401 and the light receiving unit 402 is provided on the support 105 . That is, the light emitting unit 401 and the light receiving unit 402 move in the horizontal direction together with the support 105 .

The light emitting unit 401 is provided near one end of the support 105 in the long side direction, and the light receiving unit 402 is provided near the other end of the support 105 in the long side direction. For example, if the support 105 is divided into three regions at equal intervals in the long side direction, the light emitting unit 401 is provided in an area at one end, and the light receiving unit 402 is provided in the area at the other end. do.

FIG. 4 is a diagram showing the relationship between the spindle unit 110 and the detector 400 . In the cutting device 10, each height position of the light emitting part 401 and the light receiving part 402 is memorize|stored beforehand. In addition, the height positions of the light emitting unit 401 and the light receiving unit 402 are the same. 4, in the cutting device 10, in the control part 500 (FIG. 1), for example, the blade 101 is between the light emitting part 401 and the light receiving part 402 in the arrow X direction. In a state in which it exists, the blade 101 is moved downward. The control unit 500 detects that the blade 101 is at a predetermined height by detecting that the light beam is blocked by the blade 101 . In addition, the control unit 500 detects the control coordinate origin in the height direction of the spindle unit 110 by detecting that the light beam is blocked by the blade 101 .

In addition, since the detection of the control coordinate origin using the detector 400 does not bring the blade 101 into contact with an object such as the CCS block 300 , a large load is not applied to the blade 101 . Therefore, in the cutting device 10, the detection of the control coordinate origin using the detector 400 is performed every time cutting of the one workpiece|work W1 is completed, for example. That is, the detection of the control coordinate origin using the detector 400 is performed more frequently than the detection of the control coordinate origin using the CCS block 300 . In addition, detection of the control coordinate origin does not necessarily need to be performed by both methods, and may be performed only by either method.

In addition, as described above, the detector 400 is also used for detection of the wear state of the blade 101 and the cut-out state (the diameter of the blade 101 ). The detection method of the wear state and the cut-out state of the blade 101 will be described in detail later.

5 is a diagram for explaining an example of the optical configuration of the detector 400 . 5 , the light emitting unit 401 includes a light emitting device 601 and an optical system 610 . The light receiving unit 402 includes a light receiving element 609 and an optical system 612 . The light-emitting element 601 is constituted of, for example, a light-transmitting fiber of a fiber sensor, and the light-receiving element 609 is constituted of, for example, a light-receiving-side fiber of a fiber sensor. The light emitting element 601 emits light in a direction substantially parallel to the direction in which the rotation axis of the blade 101 extends, and the light receiving element 609 emits light from a direction approximately parallel to the direction in which the rotation axis of the blade 101 extends. Receive the incoming light beam. The state of detection of light by the light receiving element 609 is notified to the control unit 500 . Also, the detector 400 is not necessarily realized by a fiber sensor. The detector 400 may be realized by, for example, an LED and a light receiving element that receives the light emitted by the LED.

The optical system 610 includes a pin hole 602 , a stop 603 , a lens 604 , and a wedge mirror 605 . In the optical system 610, the pinhole 602, the stop 603, the lens 604, and the wedge mirror 605 are arrange|positioned sequentially from the light emitting element 601 side. The pinhole 602 is configured such that the spot diameter of the light emitted from the light emitting element 601 is a predetermined diameter. The lens 604 is constituted by a biconvex lens of a unit conjugate ratio design. The stop 603 is disposed at the focal position of the lens 604 . Thereby, light projection becomes parallel light. That is, the optical system 610 may be referred to as a telecentric optical system. The wedge mirror 605 is configured to bend the light beam emitted by the light emitting element 601 at a predetermined angle (eg, 10°). Thereby, the angle formed by the traveling direction of the light beam emitted by the light emitting part 401 and the direction in which the rotation axis of the blade 101 extends becomes a predetermined angle larger than 0° (for example, 10°) .

The optical system 612 includes a wedge mirror 606 , a lens 607 , and a stop 608 . In the optical system 612 , a stop 608 , a lens 607 , and a wedge mirror 606 are arranged sequentially from the light receiving element 609 side. The wedge mirror 606 is configured to bend the light beam emitted by the light emitting unit 401 by a predetermined angle (eg, 10°). The traveling direction of the light beam bent by the wedge mirror 606 is substantially parallel to the extending direction of the rotation axis of the blade 101 . The lens 607 is constituted by a biconvex lens having a unit conjugate ratio design. The stop 608 is disposed at the focal position of the lens 607 . That is, the optical system 612 may be referred to as a telecentric optical system.

When the light beam emitted by the light emitting unit 401 is blocked by the blade 101 , the light beam does not enter the light receiving element 609 . In the cutting device 10, as light is not detected by the light receiving element 609, it is detected that the blade 101 exists in a predetermined height position. In addition, the optical structure of the detector 400 shown in FIG. 5 is an example to the last, and the detector 400 may be implemented with another structure.

1 and 2 again, the control unit 500 includes a central processing unit (CPU), random access memory (RAM), and read only memory (ROM), and controls each component according to information processing. is configured to do. The control part 500 is comprised so that the cutting unit 100, the workpiece|work holding unit 200, and the detector 400 may be controlled, for example.

As described above, in the cutting device 10 , the detector 400 is provided in the support 105 . Next, in the cutting device 10, the reason the detector 400 is provided in the support body 105 is demonstrated.

[2. The reason why the detector is installed on the support (moving part)]

6 : is a figure which shows typically the plane of a part of cutting device 10X which is a comparison object. As shown in FIG. 6 , the cutting device 10X includes a detector 400X instead of the detector 400 described above. The detector 400X is not provided on the support body 105X, and is independent from the support body 105X.

Cutting device 10X includes two detectors 400X. Each detector 400X is arranged in the vicinity of the work holding unit 200 . Each detector 400X includes a light emitting unit and a light receiving unit, and is configured to detect blocking of light by the blade 101 . One detector 400X is used to detect that a part of the spindle part 110 is present at a predetermined height, and the detector 400X on the other side determines that a part of the spindle part 110 on the other side has a predetermined height. It is used for detection of what is present at a height position.

In this case, for example, detection of the presence of a part of the spindle unit 110 at a predetermined height position is possible only at the location where the detector 400X is disposed. That is, in order to perform such detection, it is necessary to move the blade 101 to the location of the detector 400X. When the blade 101 is positioned at the position of the detector 400X, other operations by, for example, the work holding unit 200 are restricted. For example, a transfer operation, a rotation operation, and the like of the work W1 are restricted. As a result, the productivity of a cut product falls.

In addition, as mentioned above, each detector 400X is located in the vicinity of the workpiece holding unit 200 . Therefore, at the time of cutting the workpiece|work W1, cutting water (processing fluid) penetrates easily into the detector 400X.

In the cutting device 10 which concerns on this embodiment, the detector 400 is provided in the support body 105, and the detector 400 moves together with the support body 105. Therefore, according to the cutting device 10, regardless of the position in the horizontal direction of the spindle part 110, it can detect that at least a part of the spindle part 110 exists in a predetermined height position. Further, according to the cutting device 10 , regardless of the position in the horizontal direction of the spindle unit 110 , the detection of the control coordinate origin in the height direction of the spindle unit 110 , and wear of the blade 101 . The state and the cut-out state can be detected.

Various detection operations with respect to the spindle unit 110 are performed in a place that does not interfere when the work holding unit 200 or the like performs other operations, so that the work holding unit 200 or the like performs different operations at each detection. can be done As a result, the productivity of a cut product does not fall. In addition, since the detector 400 moves together with the support 105 , when the spindle part 110 moves, the detector 400 does not block the movement of the spindle part 110 , and the detector 400 is disturbed. does not go In addition, since the detector 400 moves together with the support 105 , the spindle unit 110 does not need to move as far as the vicinity of the detector 400 for various types of detection. As a result, the amount of movement of the spindle unit 110 can be reduced. Further, since each of the light emitting unit 401 and the light receiving unit 402 is located near the end of the support 105 , the possibility that cutting water enters the detector 400 when cutting the work W1 is low. For the above reasons, the detector 400 is provided on the support 105 .

[3. Judgment method regarding the wear state and cut-out state of the blade]

The diameter of the blade 101 is detected based on the difference in the relative positions of the blade 101 and the reference dog 107 in the height direction. In addition, when the diameter of the blade 101 is shorter than predetermined, the control unit 500 determines that the blade 101 is in a worn state or a cut-out state.

7 is a view for explaining a process of moving the reference dog 107 to a predetermined height. As shown in FIG. 7 , the control unit 500 ( FIG. 1 ) controls the reference dog 107 in a state where the reference dog 107 is present between the light emitting unit 401 and the light receiving unit 402 in the arrow X direction. ) is moved downwards. The control unit 500 detects that the reference dog 107 is present at a predetermined height position by detecting that the light beam is blocked by the reference dog 107 . The control unit 500 stores the control coordinates in the Z-axis direction. In addition, when detecting that the reference dog 107 exists at a predetermined height position, the blade 101 is separated from the spindle unit body 102 , but the blade 101 is always separated from the spindle unit main body 102 . it doesn't have to be

Referring again to FIG. 4 , after the control coordinates in the Z-axis direction at the time when it is detected that the reference dog 107 is present at a predetermined height position is stored, the blade 101 is placed on the spindle body 102 . is installed The control part 500 (FIG. 1) moves the blade 101 downward, for example in a state where the blade 101 exists between the light emitting part 401 and the light receiving part 402 in the arrow X direction. The control unit 500 detects that the blade 101 is at a predetermined height by detecting that the light beam is blocked by the blade 101 . In addition, by moving the blade 101 downward from the position serving as the focal point of both the light emitting unit 401 and the light receiving unit 402 , the detection accuracy of the blade 101 can be further improved. The control unit 500 stores the control coordinates in the Z-axis direction. The control unit 500 includes control coordinates in the Z-axis direction when the reference dog 107 is present at a predetermined height position, and the Z-axis direction when the blade 101 is present at a predetermined height position. Calculate the diameter of the blade 101 based on the difference in the control coordinates. Moreover, in the cutting device 10, the relationship between the difference of control coordinates and the diameter of the blade 101 is memorize|stored beforehand.

In addition, when the calculated diameter of the blade 101 is shorter than a predetermined diameter, the control unit 500 determines that the blade 101 is in a worn state or a cut-out state. By the above method, the detection of the diameter of the blade 101 and the determination regarding the wear state and the notch state of the blade 101 are performed.

[4. movement]

FIG. 8 : is a flowchart which shows the manufacturing procedure of the cut product in the cutting device 10. As shown in FIG. The processing shown in this flowchart is executed in the case of cutting the work W1 after the blade 101 is replaced.

Referring to FIG. 8 , the control unit 500 is configured to bring the blade 101 into contact with the CCS block 300 in order to detect the control coordinate origin in the height direction of the spindle unit 110 , the spindle unit 110 . is controlled (step S100). The control unit 500 controls the height position of the spindle unit 110 so that the reference dog 107 blocks the light beam emitted by the light emitting unit 401 (step S110). And the control coordinates in the Z-axis direction when the reference dog 107 exists at a predetermined height position are memorize|stored. In addition, in the cutting device 10, the positional relationship of the upper surface of the CCS block 300 and the upper surface of the cutting table 201 of FIG. 2 is memorize|stored previously.

The control unit 500 controls the height position of the spindle unit 110 so that the blade 101 blocks the light beam emitted by the light emitting unit 401 (step S120). And the control coordinates in the Z-axis direction when the blade 101 exists at a predetermined height position are memorize|stored.

The control unit 500 calculates the diameter of the blade 101 based on the difference between the control coordinates stored in step S110 and the control coordinates stored in step S120 . Moreover, in the cutting device 10, the relationship between the difference of the control coordinate memorize|stored by step S110 and the control coordinate memorized by step S120, and the diameter of the blade 101 is memorize|stored beforehand. Further, the control unit 500 determines whether the blade 101 is in a worn state or a cut-out state based on whether or not the diameter of the blade 101 is shorter than predetermined (step S130 ). For example, when the blade 101 is in a worn state or a cut-out state, a warning is displayed on a screen (not shown).

The control unit 500 controls the spindle unit 110 to adjust the height position of the spindle unit 110 based on the detected diameter of the blade 101 (step S140). The control unit 500 controls the spindle unit 110 to cut the workpiece W1 while adjusting the height position of the spindle unit 110 (step S150).

[5. Characteristic]

As described above, in the cutting device 10 , the detector 400 is provided in the support 105 . Therefore, according to the cutting device 10, regardless of the position in the horizontal direction of the spindle part 110, it can detect that at least a part of the spindle part 110 exists in a predetermined height position. Further, according to the cutting device 10 , regardless of the position in the horizontal direction of the spindle unit 110 , the detection of the control coordinate origin in the height direction of the spindle unit 110 , and wear of the blade 101 . The state and the cut-out state can be detected. Various detection operations with respect to the spindle unit 110 are performed in a place that does not interfere when the work holding unit 200 or the like performs other operations, so that the work holding unit 200 or the like performs different operations at each detection. can be done As a result, the productivity of a cut product does not fall. In addition, since the detector 400 moves together with the support 105 , when the spindle part 110 moves, the detector 400 does not block the movement of the spindle part 110 , and the detector 400 is disturbed. does not go In addition, since the detector 400 moves together with the support 105 , the spindle unit 110 does not need to move as far as the vicinity of the detector 400 for various types of detection. As a result, the amount of movement of the spindle unit 110 can be reduced.

Moreover, in the cutting device 10, the angle formed by the advancing direction of the light ray emitted from the light emitting part 401, and the direction in which the rotation axis of the blade 101 extends is larger than 0 degree. That is, the traveling direction of the light beam emitted by the light emitting unit 401 is oblique with respect to the extending direction of the rotation axis of the blade 101 . Thereby, since it is not necessary to arrange|position the light emitting part 401 and the light receiving part 402 outside the edge part of the support body 105 in the X-axis direction (FIG. 1), the enlargement of the cutting device 10 can be suppressed. there is.

[6. Other embodiments]

The idea of the said embodiment is not limited to the embodiment demonstrated above. Hereinafter, an example of another embodiment to which the idea of the said embodiment can be applied is demonstrated.

In the above embodiment, the angle formed by the traveling direction of the light beam emitted by the light emitting unit 401 and the extending direction of the rotation axis of the blade 101 was greater than 0°. However, the angle formed by the traveling direction of the light beam emitted by the light emitting unit 401 and the extending direction of the rotation axis of the blade 101 does not necessarily have to be greater than 0°. For example, the angle formed by the traveling direction of the light ray emitted from the light emitting unit 401 and the direction in which the rotation axis of the blade 101 extends may be 0°.

In addition, in the said embodiment, it was assumed that the spindle part 110 moves in arrow XY direction. However, the spindle unit 110 does not necessarily have to move in the arrow XY direction. For example, instead of the spindle part 110 not moving in the arrow XY direction, the workpiece holding unit 200 moves in the arrow XY direction, whereby the workpiece W1 is moved to the lower cutting position of the spindle part 110 . may be returned to

9 : is a figure which shows an example of the cutting device in case the workpiece|work holding unit 200 moves in arrow XY direction. In the cutting device 10A shown above in FIG. 9, the cutting table 201A moves to arrow XY direction, and in the cutting device 10B shown below in FIG. 9, the cutting table 201B is arrow XY direction. move to In the cutting device 10A, the advancing direction of the light ray emitted from the light emitting part 401A is oblique with respect to the direction in which the rotation axis of the blade 101A extends.

On the other hand, in the cutting device 10B, the detector 400B is provided next to the cutting table 201B. By arrange|positioning the detector 400B next to the cutting table 201B, the movement range in the arrow X direction of the spindle part 110B becomes wider than 10A of cutting devices. That is, the cutting device 10B becomes larger than the cutting device 10A. In this way, even when the work holding unit 200 moves in the arrow XY direction, by making the traveling direction of the light emitting unit 401A oblique with respect to the extending direction of the rotation axis of the blade 101A, the device size can be reduced.

Moreover, in the said embodiment, the control coordinate origin in the height direction of the spindle part 110 was detected by using the CCS block 300. As shown in FIG. However, the control coordinate origin in the height direction of the spindle unit 110 does not necessarily need to be detected by using the CCS block 300 . The control coordinate origin in the height direction of the spindle unit 110 may be detected, for example, by using a touch sensor that detects the contact of the blade 101 . In any of the examples, detection is performed based on the conduction state of the auxiliary member. In addition, the portion in contact with the CCS block 300 or the touch sensor when the control coordinate origin is detected does not necessarily have to be the blade 101 . For example, the reference dog 107 of the spindle unit 110 may contact the CCS block 300 or a touch sensor.

FIG. 10 is a diagram for explaining an example of detecting the control coordinate origin by bringing the reference dog 107 into contact with the CCS block 300 . As shown in FIG. 10 , in the cutting device 10C, the control coordinate origin in the height direction of the spindle unit 110 is detected by bringing the reference dog 107 into contact with the CCS block 300 .

In addition, in the said embodiment, in step S130 of FIG. 8, the diameter of the blade 101 was calculated based on the difference between the control coordinate memorize|stored in step S110 and the control coordinate memorize|stored in step S120. However, for the calculation of the diameter of the blade 101, the control coordinates in step S110 do not necessarily have to be used. For example, the diameter of the blade 101 may be calculated based on the difference between the control coordinate origin stored in step S100 and the control coordinates stored in step S120. In this case, the relationship between the difference between the control coordinate origin stored in step S100 and the control coordinates stored in step S120 and the diameter of the blade 101 is stored in advance in the cutting device 10 . Also, in this case, the reference dog 107 may not be included in the spindle unit 110 .

In addition, as described above, the configuration of each optical system included in the detector 400 is not limited to the optical systems 610 and 612 .

11 is a diagram for explaining another example of an optical system. 11 , the detector 400D includes a light emitting unit 401D and a light receiving unit 402D. The light emitting unit 401D includes a light emitting element 601 and an optical system 610D. The light receiving unit 402D includes a light receiving element 609 and an optical system 612D. The light emitted by the light emitting element 601 reaches the light receiving element 609 through the optical systems 610D and 612D. The state of detection of light by the light receiving element 609 is notified to the control unit 500 .

The optical system 610D includes lenses 604D and 650D and a wedge mirror 605 . In the optical system 610D, the lens 650D, the lens 604D, and the wedge mirror 605D are arrange|positioned sequentially from the light emitting element 601 side. The lens 650D is constituted by a monoconvex lens of an infinite conjugate ratio design. In the lens 650D, a convex portion is formed on the lens 604D side. The focal length of the lens 650D is, for example, 10 mm. The light emitting element 601 is disposed at the focal position of the lens 650D. The light emitted by the light emitting element 601 passes through the lens 650D, and thus becomes substantially parallel to the rotation axis of the blade 101 .

The lens 604D is constituted by a monoconvex lens of an infinite conjugate ratio design. In the lens 604D, a convex portion is formed on the lens 650D side. The focal length of the lens 604D is, for example, 400 mm. Light passing through the lens 604D is slightly refracted. The wedge mirror 605D is configured to bend the light beam passing through the lens 604D by a predetermined angle (eg, 10°).

The optical system 612D includes a wedge mirror 606D and lenses 607D and 651D. In the optical system 612D, a lens 651D, a lens 607D, and a wedge mirror 606D are arranged sequentially from the light receiving element 609 side. The wedge mirror 606D is configured to bend the light beam emitted by the light emitting unit 401D by a predetermined angle (eg, 10°). The lens 607D is constituted by a monoconvex lens of an infinite conjugate ratio design. In the lens 607D, a convex portion is formed on the lens 651D side. The focal length of the lens 607D is, for example, 400 mm. The light transmitted through the lens 607D is slightly refracted to be substantially parallel to the axis of rotation of the blade 101 .

The lens 651D is constituted by a monoconvex lens of an infinite conjugate ratio design. In the lens 651D, a convex portion is formed on the lens 607D side. The focal length of the lens 651D is, for example, 10 mm. The light receiving element 609 is disposed at the focal position of the lens 651D. The light passing through the lens 651D is detected with high precision by the light receiving element 609 .

The light beam emitted by the light emitting unit 401D is focused between the light emitting unit 401D and the light receiving unit 402D. For example, in this focusing position, when the light beam emitted by the light emitting portion 401D is blocked by the blade 101, the light beam does not enter the light receiving element 609 . As the light is not detected by the light receiving element 609, it is detected that the blade 101 is at a predetermined height position. The condensing diameter at the focusing position is, for example, 0.3 mm.

In such an optical system, the light transmitted through the lens 650D is substantially parallel to the rotation axis of the blade 101 . In addition, the light transmitted through the lens 607D becomes substantially parallel to the rotation axis of the blade 101 . Therefore, even if each of the distance between the lens 604D and the lens 650D and the distance between the lens 607D and the lens 651D are shortened, an optical problem does not arise. Accordingly, by shortening these distances, the size of the detector 400D can be reduced.

In the above, embodiments of the present invention have been exemplarily described. That is, for illustrative purposes, the detailed description and accompanying drawings have been disclosed. Therefore, components that are not essential for solving the problem may be included among the components described in the detailed description and the accompanying drawings. Therefore, just because those non-essential components are described in the detailed description and the accompanying drawings, it is not immediately admitted that those non-essential components are essential.

In addition, the said embodiment is only an illustration of this invention in all points. Various improvement and change are possible in the said embodiment within the scope of the present invention. That is, in the practice of the present invention, a specific configuration can be appropriately adopted depending on the embodiment.

10: cutting device
100: cutting unit
101: blade
102: spindle unit body
103, 104: slider
105: support (an example of a moving part)
106: guide
107: reference dog
110: spindle unit
200: work holding unit
201: cutting table
202: rubber
300: CCS block
400, 400D: detector
401, 401D: light emitting part
402, 402D: light receiver
500: control
601: light emitting element;
602: pin hole
603, 608: aperture
604, 607, 604D, 607D, 650D, 651D: Lens
605, 606, 605D, 606D: Wedge Mirror
609: light receiving element
610, 612, 610D, 612D: Optical
G1, G2: Guide
W1: work

Claims (6)

A spindle unit including a blade for cutting the work;
a moving part holding the spindle part and configured to move the spindle part in a horizontal direction;
A detector comprising a light emitting unit and a light receiving unit for receiving the light emitted by the light emitting unit, the detector provided in the moving unit;
wherein the detector is configured to detect that at least a portion of the spindle portion has blocked the light beam. The cutting device according to claim 1, wherein the angle formed by the traveling direction of the light emitting unit and the direction in which the rotational axis of the blade extends is greater than 0°. The cutting device according to claim 1 or 2, further comprising a control unit configured to detect a diameter of the blade based on a detection result by the detector. The cutting device according to any one of claims 1 to 3, wherein the control unit is configured to make a determination regarding the wear state or the notch state of the blade based on a detection result by the detector. The cutting device according to any one of claims 1 to 4, wherein the work is a resin-molded substrate. The manufacturing method of the cut product which manufactures a cut product by cutting the said workpiece|work using the cutting device in any one of Claims 1-5.

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