JP6491044B2 - Manufacturing apparatus and manufacturing method - Google Patents

Description

  The present invention relates to a manufacturing apparatus and a manufacturing method for manufacturing a plurality of separated products by cutting an object to be cut.

  A substrate composed of a printed circuit board, a lead frame, or the like is virtually partitioned into a plurality of grid-like areas, and chip-like elements (for example, semiconductor chips) are attached to the respective areas, and then the entire board is sealed with resin. This is called a sealed substrate. A product obtained by cutting a sealed substrate by a cutting mechanism using a rotary blade or the like and dividing it into individual region units becomes a product.

  Conventionally, a predetermined region of a sealed substrate is cut by a cutting means such as a rotary blade using a cutting mechanism in a manufacturing apparatus. First, a sealed substrate as an object to be cut is placed on a cutting table and sucked. Next, the sealed substrate is aligned (positioned). By aligning, the position of a virtual cutting line that divides a plurality of regions is set. Next, the cutting table that adsorbs the sealed substrate and the cutting mechanism are relatively moved. The cutting water is sprayed onto the cut portion of the sealed substrate, and the sealed substrate is cut along the cutting line set on the sealed substrate by the cutting mechanism. An individualized product is manufactured by cutting the sealed substrate.

  In the cutting mechanism, the rotary blade and the drive mechanism are connected via a rotating shaft. The cutting mechanism cuts the sealed substrate by rotating the rotary blade at a high speed by the drive mechanism. The rotating blade is gradually worn by repeated cutting. When the rotary blade is worn, the diameter of the rotary blade is reduced. Therefore, it is necessary to increase the cutting depth corresponding to the amount of wear. Therefore, it is required to always detect the amount of wear of the rotary blade and adjust the cutting depth. The “cutting depth” refers to the depth at which the rotary blade cuts into the workpiece (entered in the thickness direction). The “predetermined cutting depth” refers to a depth such that the lowermost end of the outer edge of the rotary blade slightly protrudes from the lower surface of the workpiece.

  If cutting of the sealed substrate is continued, the blade edge of the rotary blade may be damaged (chipped or chipped) due to the influence of clogging or clogging of abrasive grains of the rotary blade, cutting load, and the like. If breakage occurs, normal cutting cannot be performed and the quality of cutting deteriorates. If breakage occurs, defective products may be generated unless the rotary blade is replaced. Therefore, it is required to always grasp whether or not damage has occurred. In cutting using a rotary blade, it is required to always grasp both wear of the rotary blade and breakage of the rotary blade.

  As a cutting device that can accurately detect both breakage and wear of a cutting blade, “a cutting blade that cuts a workpiece, a blade detection sensor that optically detects the state of the cutting blade, and a blade A cutting device has been proposed comprising a moving means for moving the detection sensor toward or away from the outer periphery of the cutting blade, and a blade state detection unit for detecting breakage and wear of the cutting blade based on the detection result of the blade detection sensor. (See, for example, paragraph [0012] of Patent Document 1 and FIGS. 4 to 6).

JP 2006-287111 A

  However, according to the cutting device disclosed in Patent Document 1, the following problem occurs. As shown in FIGS. 4 to 6 of Patent Document 1, the breakage detection of the cutting blade is performed while the workpiece is being cut. When detecting breakage of the cutting blade, the blade detection sensor 30 located at the wear detection position is moved to the breakage detection position by the moving means. The blade state detection unit 40 is switched to the breakage detection unit 50, and the breakage detection unit 50 detects breakage of the cutting blade 22 while the cutting blade 22 is cutting the workpiece. Wear detection of the cutting blade is performed while the workpiece is not being cut. When detecting the wear of the cutting blade, the blade detection sensor 30 located at the breakage detection position is moved to the wear detection position by the moving means. The blade state detection unit 40 is switched to the wear detection unit 60, and the wear detection unit 60 detects wear of the cutting blade 22 while the cutting blade 22 is not cutting the workpiece (for example, periodically).

  According to the conventional cutting apparatus, both the breakage and wear of the cutting blade 22 can be detected by the single blade detection sensor 30. However, it is necessary to move the blade detection sensor 30 to the breakage detection position and the wear detection position by the independent movement means 70 independently. In addition, it is necessary to electrically (as an electric circuit) switch the blade state detection unit 40 between the breakage detection unit 50 and the wear detection unit 60 in accordance with the position of the blade detection sensor 30. Therefore, it is necessary to provide a dedicated moving means 70 for moving the blade detection sensor 30 and a switching means for the blade state detection unit 40. These complicate the configuration of the cutting device, which increases the manufacturing cost of the cutting device.

  The present invention solves the above-described problems, and an object of the present invention is to provide a manufacturing apparatus and a manufacturing method capable of detecting both breakage and wear of a rotary blade and suppressing manufacturing cost.

In order to solve the above-described problems, a manufacturing apparatus according to the present invention moves a workpiece placed on a table in a biaxial direction of a three-dimensional orthogonal coordinate system with respect to a rotary blade of a cutting mechanism. A manufacturing apparatus that manufactures a plurality of products by cutting an object to be cut by relatively moving in a direction including a direction, provided in a cutting mechanism, and arranged to sandwich an outer peripheral portion of a rotary blade A sensor mechanism including a light emitting means and a light receiving means is fixed to one side with respect to the rotation axis, and is fixed to the cutting mechanism. The other side of the rotating member opposite the side is relatively pushed down to rotate the rotating member, and the sensor mechanism is moved away from the center of the rotary blade, and the cutting mechanism fixed to the cutting mechanism and the cutting mechanism for the table Relative to And a stop member that stops the rotating member so as to regulate the position of the sensor mechanism in a state in which the push-down member does not push down the other side due to a simple lowering, The light receiving means receives the irradiation light from the light emitting means not blocked by the rotating blade at a predetermined cutting position in a state where the rotating member stops the rotating member without being pushed down, and obtains the first received light amount. The light receiving means receives light emitted from the light emitting means that is not blocked by the rotary blade at a predetermined standby position in a state where the object is not cut and the pressing member is pressed down on the other side, thereby obtaining a second light receiving amount. Then, the position of the optical axis between the light emitting means and the light receiving means is adjusted so that the first received light amount is smaller than the second received light amount, and the breakage of the rotary blade is detected based on the change in the first received light amount. The rotary blade based on the change in the second received light amount It is configured to detect the wear.
In the manufacturing apparatus according to the present invention, in the above-described manufacturing apparatus, the stop member is brought into contact with one side of the rotating member when the cutting mechanism descends relative to the table, thereby restricting the position of the sensor mechanism. Thus, the rotating member is stopped.

  The manufacturing apparatus according to the present invention is characterized in that, in the above-described manufacturing apparatus, the light emitting means and the light receiving means are provided above the rotary blade.

  In the manufacturing apparatus according to the present invention, in the above-described manufacturing apparatus, the relationship between the change in the photocurrent generated by the light receiving unit based on the amount of received light and the position of the optical axis in a state where the optical axis is positioned at a predetermined standby position. The optical axis is located at a central part of a range having linearity or a predetermined part where the amount of received light increases from the central part.

Manufacturing apparatus according to the present invention, in the above-described manufacturing apparatus, based on the wear amount calculated by sensing changes in the second receiving light quantity, by relatively lowering the cutting mechanism relative to the table, rotating The lower end of the blade is lowered to a predetermined cutting position.

Manufacturing apparatus according to the present invention, in the above-described manufacturing apparatus, characterized in that it comprises a slit provided in at least one of and between the receiving means and the rotary blade and the light emitting unit rotary blade.

  The manufacturing apparatus according to the present invention is characterized in that, in the above-described manufacturing apparatus, the object to be cut is a sealed substrate.

  The manufacturing apparatus according to the present invention is characterized in that, in the above-described manufacturing apparatus, the object to be cut is a plate-like member in which functional elements are formed in a plurality of regions respectively corresponding to a plurality of products.

In order to solve the above-described problems, the manufacturing method according to the present invention uses the above-described manufacturing apparatus to cut a workpiece and manufacture a plurality of products.

According to the present invention, it is possible to detect breakage of the rotary blade and wear of the rotary blade by using one sensor mechanism and moving the sensor mechanism as the cutting mechanism moves . Therefore, since the configuration of the manufacturing apparatus can be simplified, the manufacturing cost of the apparatus can be suppressed.

FIG. 1A is a schematic diagram illustrating a state in which breakage of a rotary blade is detected in a state where the lower end of the rotary blade is positioned at a predetermined cutting position when the sealed substrate is cut by the cutting mechanism. FIG. 1B is a front view of the rotary blade viewed from the front side. In the cutting mechanism shown in FIG. 1, it is the schematic which shows the state which has detected the abrasion of a rotary blade in the state where the optical axis was located in the predetermined | prescribed standby position which does not cut | disconnect the sealed board | substrate, FIG. ) Is a front view, and FIG. 2B is a side view as seen from the rotary blade side. In the cutting mechanism shown in FIG. 1, targeting the state where the rotary blade is worn, FIG. 3 (a) shows the state where the optical axis is located at a predetermined standby position when the sealed substrate is not cut. 3 (b) is a schematic view showing a state in which wear of the rotary blade is detected. In the cutting mechanism shown in FIG. 1, targeting the state where the rotary blade is broken, FIG. 4A is a state where the lower end of the rotary blade is located at a predetermined cutting position when the sealed substrate is cut. FIG. 4B is a schematic diagram showing a state in which breakage of the rotary blade is detected. It is the schematic which shows the structure of a sensor mechanism in the cutting | disconnection mechanism shown in FIG. It is a top view which shows the outline | summary of the manufacturing apparatus which concerns on this invention.

  As shown in FIG. 1, the cutting mechanism 1 is provided with a rotary blade detection mechanism 12 having a sensor mechanism 13, a rotary member 14, a rotary shaft 15, and a push-down member 17. By substantially raising and lowering the sensor mechanism 13 using the drive mechanism 4 for the Z axis, the sensor mechanism 13 is positioned at the predetermined cutting position and the predetermined standby position when the lower end of the rotary blade 10 is positioned. The position of the sensor mechanism 13 in a state where the optical axis AX of the sensor mechanism 13 is positioned is selected. Damage to the rotary blade 10 is detected in a state where the lower end of the rotary blade 10 is located at a predetermined cutting position when the sealed substrate 11 is cut. Wear of the rotary blade 10 is detected in a state where the optical axis AX is located at a predetermined standby position when the sealed substrate 11 is not cut. By using one sensor mechanism 13 and one Z-axis drive mechanism 4, both wear and breakage of the rotary blade 10 are detected.

  As an example of the manufacturing apparatus according to the present invention, a cutting mechanism for cutting a sealed substrate will be described with reference to FIGS. Any figure in the present application document is schematically omitted or exaggerated as appropriate for easy understanding. About the same component, the same code | symbol is attached | subjected and description is abbreviate | omitted suitably.

  As shown in FIG. 1, the cutting mechanism 1 included in the manufacturing apparatus includes a fixing plate 2. When the fixing plate 2 moves in the X direction along the X-axis guide rail (not shown), the cutting mechanism 1 moves in the X direction. The fixed plate 2 is provided with a Z-axis guide rail 3 and a Z-axis drive mechanism 4. As the drive mechanism 4, for example, a servo motor or a stepping motor is fixed to the fixed plate 2. The drive mechanism 4 moves the elevating member 6 up and down via the ball screw 5. A spindle body 7 is fixed to the elevating member 6. When the drive mechanism 4 rotates the ball screw 5, the spindle main body portion 7 fixed to the elevating member 6 can be moved up and down along the Z-axis guide rail 3.

A spindle 8 is attached inside the spindle body 7. A rotary blade 10 is attached to the tip of the rotary shaft 9 of the spindle 8. The rotary blade 10 is detachable from the rotary shaft 9 and can be exchanged. A spindle motor (not shown) rotates the rotary blade 10 at a high speed, whereby the sealed substrate 11 as an object to be cut is cut. FIG. 1 shows a state where the lower end of the rotary blade 10 of the spindle body 7 is lowered to a predetermined cutting position and the sealed substrate 11 is cut by the rotary blade 10. The predetermined cutting position refers to the position of the lower end of the rotary blade 10 in a state where the rotary blade 10 is lowered until the lower end of the outer edge of the rotary blade 10 is located at a predetermined cutting depth.

  As shown in FIG. 1A, the cutting mechanism 1 is provided with a rotary blade detection mechanism 12 for detecting wear and breakage of the rotary blade 10. The rotary blade detection mechanism 12 has a sensor mechanism 13 provided as an optical detection means on the front side (side on which the rotary blade 10 is attached) of the spindle body 7. The rotary blade detection mechanism 12 includes a rotary member 14 to which a sensor mechanism 13 is fixed as a mechanical component. The rotating member 14 has, for example, a bar shape. A rotating shaft 15 is provided at the intermediate portion of the rotating member 14. The rotating member 14 partially rotates around the rotating shaft 15. A stopper 16 for restricting the lower position of the sensor mechanism 13 is attached to the front side of the spindle body 7 below the rotating member 14. The sensor mechanism 13 is fixed to one end (the left end in the figure) of the rotating member 14.

  On the stationary platen 2, a push-down member 17 that is opposed to the other end (the right end in the figure) of the rotating member 14 is attached. The push-down member 17 is, for example, a cam follower or a roller follower. When the right end of the rotating member 14 is pushed downward by the push-down member 17, the rotating member 14 partially rotates clockwise about the rotating shaft 15. In a state where the right end portion of the rotating member 14 is not in contact with the push-down member 17, in other words, in a state where the right end portion is not pressed downward by the push-down member 17, the rotating member 14 contacts the stopper 16. In this state, the position of the rotating member 14 is adjusted so that the rotating member 14 is substantially horizontal. In other words, the rotating member 14 comes into contact with the stopper 16 and stops at a certain position where the rotating member 14 is substantially horizontal.

  As shown in FIG. 1B, the sensor mechanism 13 fixed to the left end of the rotating member 14 extends in a direction perpendicular to the direction in which the rotating member 14 extends (the −Z direction in the drawing). Provided. As shown in FIG. 1A, the sensor mechanism 13 is an optical non-contact sensor including a light emitting unit 18 and a light receiving unit 19. The light emitting means 18 and the light receiving means 19 have the same optical axis (common optical axis) AX. Irradiation light 20 is emitted from the light emitting means 18 toward the light receiving means 19. The shapes of the light emitting area of the light emitting means 18 and the light receiving area of the light receiving means 19 are circular having the same effective diameter D (see FIG. 1C) centered on the same optical axis AX. The light emitting region and the light receiving region each having an effective diameter D are referred to as an irradiation range S. The range in which the irradiation light 20 is irradiated toward the rotary blade 10 and the irradiation range S are the same.

  For example, the light emitting means 18 is a light emitting diode (LED), and the light receiving means 19 is a photodiode (PD). The light emitting means 18 and the light receiving means 19 are preferably arranged so as to sandwich the upper part of the outer edge of the rotary blade 10. More preferably, the light emitting means 18 and the light receiving means 19 are arranged so as to sandwich the uppermost end of the outer edge of the rotary blade 10. By these things, it is suppressed that the droplet resulting from the cutting water, cooling water, etc. which are supplied to the vicinity of the part by which a to-be-cut material is cut | disconnects adheres to the light emission means 18 and the light-receiving means 19.

  As shown in FIG. 1A, the rotary blade 10 exists between the light emitting means 18 and the light receiving means 19. A part of the irradiation light 20 irradiated toward the rotary blade 10 is blocked by the rotary blade 10. Of the irradiation light 20, the irradiation light 20 not blocked by the rotary blade 10 reaches the light receiving means 19. The light receiving means 19 receives the irradiation light 20 that has reached the light receiving means 19 as incident light 21. The light receiving means 19 generates a photocurrent having a value corresponding to the intensity (light receiving amount) of the received incident light 21. As a result, the light receiving means 19 detects the intensity of the incident light 21. If the photocurrent generated in the light receiving means 19 is large, the extent to which the irradiation light 20 is blocked by the rotary blade 10 is small. If the photocurrent generated in the light receiving means 19 is small, the extent to which the irradiation light 20 is blocked by the rotary blade 10 is large.

  The adjustment of the position of the irradiation light 20 emitted from the light emitting means 18 along the Z direction in the sensor mechanism 13 will be described. In other words, it will be described that the position of the same optical axis AX of the light emitting means 18 and the light receiving means 19 is adjusted along the Z direction.

  As shown in FIG. 2 (b), when the spindle body 7 is raised, the upper surface of the right end of the rotating member 14 at the certain height position (position along the Z direction) Touch the bottom surface. By continuing to raise the spindle body 7, the push-down member 17 relatively pushes down the right end of the rotating member 14. Thereby, in the rotary blade detection mechanism 12, the rotary member 14 starts to rotate clockwise around the rotary shaft 15. As the rotating member 14 adjusted to be substantially horizontal rotates, the entire sensor mechanism 13 extending along the −Z direction rotates clockwise. As a result, the same optical axis AX of the light emitting means 18 and the light receiving means 19 rotates along an arc centered on the rotation axis 15.

  When the amount by which the push-down member 17 pushes down the right end of the rotation member 14 is relatively small, the rotational movement of the optical axis AX of the sensor mechanism 13 extending along the −Z direction extends along the + Z direction. Approximate linear motion along a short line segment. Accordingly, it is approximated that the amount of rise of the contact spindle main body 7 starting from the time when the upper surface of the right end of the rotating member 14 contacts the lower surface of the push-down member 17 is equal to the amount of rise of the optical axis AX. In other words, the optical axis AX is substantially raised by raising the spindle body 7 and causing the push-down member 17 to push down the rotating member 14 relatively. When the spindle body 7 is lowered and the rotary shaft 15 is lowered as seen from the push-down member 17, the optical axis AX is substantially lowered.

  By adjusting the height position of the irradiation light 20 emitted from the light emitting means 18, the amount of the irradiation light 20 not blocked by the rotary blade 10 can be adjusted. In other words, the amount of light received by the light receiving means 19 as the incident light 21 can be adjusted. Therefore, by adjusting the height position of the sensor mechanism 13, strictly speaking, the height position of the optical axis AX of the sensor mechanism 13, the amount of light received by the light receiving means 19 can be adjusted. By adjusting the height position of the optical axis AX of the sensor mechanism 13, one Z-axis drive mechanism 4 for moving the rotary blade 10 along the Z direction, one sensor mechanism 13, and Can be used to detect both wear and breakage of the rotary blade 10 (described later).

  With reference to FIG. 1, the operation | movement which detects the failure | damage of the rotary blade 10 is demonstrated as 1st operation | movement. The sensor mechanism 13 provided in the rotary blade detection mechanism 12 is used to detect breakage of the rotary blade 10. First, outside the sealed substrate 11, with the rotary blade 10 rotated, the spindle body 7 is lowered until the lower end of the rotary blade 10 is located at a predetermined cutting position. In other words, the spindle body 7 is lowered until the lowermost end of the outer edge of the rotary blade 10 is located at a predetermined cutting depth. Next, the rotary blade 10 is rotated at a high speed, for example, at about 30,000 to 40,000 rpm. By relatively moving the rotary blade 10 and the sealed substrate 11 placed on a cutting table (not shown) (in FIG. 1B, by moving the sealed substrate 11 in the + Y direction). ) Cut the sealed substrate 11 along the cutting line.

  In a state where the lower end of the rotary blade 10 is positioned at a predetermined cutting position when the sealed substrate 11 is cut, the irradiation light 20 is irradiated from the light emitting means 18 toward the light receiving means 19 facing the light emitting means 18. As shown in FIGS. 1B and 1C, the irradiation light 20 irradiated by the light emitting means 18 has a circular irradiation range S having an effective diameter Dmm. In a state where the lower end of the rotary blade 10 is positioned at a predetermined cutting position when the rotary blade 10 cuts the sealed substrate 11, the height position of the optical axis AX (see FIG. 1A) in the sensor mechanism 13 is set. It is adjusted in advance as follows. The height position of the optical axis AX is adjusted in advance so that most of the irradiation range S of the irradiation light 20 irradiated from the light emitting means 18 is blocked by the rotary blade 10. For example, when the rotary blade 10 is new and not worn, the incident light 21 incident on the light receiving means 19 without being blocked by the rotary blade 10 occupies an area of about 5% of the irradiation range S of the irradiation light 20. In addition, the height position of the optical axis AX is adjusted in advance. In other words, the height position of the optical axis AX is set in advance so that about 95% of the irradiation range S of the irradiation light 20 is blocked by the rotary blade 10.

  As the rotary blade 10 wears, the area blocked by the rotary blade 10 in the irradiation range S of the irradiation light 20 decreases. As an example, a case where the effective diameter D of the irradiation light 20 is 1 mm is assumed. When the rotary blade 10 is worn to some extent, the area that is blocked by the rotary blade 10 out of an effective diameter of 1 mm is small. Therefore, it becomes difficult to detect breakage of the rotary blade 10. For this reason, it is preferable that the irradiation range S of the sensor mechanism 13 has a certain size. Therefore, it is preferable that the effective diameter D of the irradiation range S is a certain size. Specifically, the effective diameter D between the light emitting area and the light receiving area is preferably 3 mm or more, and more preferably 4 mm or more.

  On the other hand, if the effective diameter D of the light emitting area and the light receiving area becomes too large, the ratio of the area of breakage of the rotary blade 10 to the area corresponding to the effective diameter D decreases. Therefore, the sensitivity for detecting breakage of the rotary blade 10 is reduced. From the viewpoint of keeping the sensitivity for detecting breakage of the rotary blade 10 above a certain level, the effective diameter D is preferably 6 mm or less, and more preferably 5 mm or less.

  Assume that the rotary blade 10 is new and not damaged at all. As set in advance, the incident light 21 incident on the light receiving means 19 is about 5% of the irradiation light 20 emitted from the light emitting means 18. Incident light 21 gradually increases as the rotary blade 10 wears. When the outer peripheral portion of the rotary blade 10 is damaged, the incident light 21 enters the light receiving means 19 from the damaged portion. As a result, the amount of received light detected by the light receiving means 19 in the damaged portion is increased in a pulse manner only for a short time. Therefore, the light receiving means 19 detects a change (increase) in the incident light 21 that has passed through the rotary blade 10 as a change in the amount of received light, whereby the breakage of the rotary blade 10 can be detected. This makes it possible to detect breakage of the rotary blade 10 using the rotary blade detection mechanism 12 in a normal production state without adding a process.

  The relationship between the effective diameter D of the irradiation range S and the range of the amount of wear that can detect the breakage of the rotary blade 10 will be described. The term “abrasion amount” means a difference between a diameter of the rotary blade 10 in a new state and a diameter after wear.

  The range of the amount of wear that can detect the breakage of the rotary blade 10 depends on various conditions such as the size and shape of the breakage of the rotary blade 10, the number of rotations, the diameter, and the like of the rotary blade 10. For example, breakage of the rotary blade 10 can be detected from a state where the rotary blade 10 is new until about 25% of the irradiation range S of the irradiation light 20 is blocked by the rotary blade 10. In other words, it is possible to detect breakage of the rotary blade 10 from the state where the rotary blade 10 is new until the incident light 21 gradually increases to about 75% of the irradiation light 20 as wear progresses. When the rotary blade 10 is new, about 95% of the irradiation range S of the irradiation light 20 is blocked by the rotary blade 10 (so that about 5% of the irradiation light 20 is received). The height position of AX is preset. Thus, the range in which the breakage of the rotary blade 10 can be detected is a range in which the incident light 21 corresponds to about 5 to 75% of the irradiation light 20. Therefore, the range in which breakage of the rotary blade 10 can be detected is about 70% (= 75% -5%) of the effective diameter D as the width.

  When the sensor mechanism 13 having an effective diameter D of 4 mm in the irradiation range S is used, the wear amount is about 2.8 mm, which is equivalent to 70% (= 75% -5%) of the effective diameter D of 4 mm. Up to, the breakage of the rotary blade 10 can be detected. Therefore, it is possible to detect breakage of the rotary blade 10 without changing the height position of the optical axis AX until the rotary blade 10 reaches a wear amount of about 2.8 mm from a new state. When the sensor mechanism 13 having the effective diameter D of the irradiation range S of 5 mm is used, the rotating blade 10 has a wear amount of about 3.5 mm, which corresponds to 70% of the effective diameter D of 5 mm. Damage can be detected.

  In the above-described example, the rotating member 14 is in a substantially horizontal state by contacting the stopper 16, and the rotating blade 10 starts rotating from a new state until the amount of wear reaches about 2.8 mm. Breakage of the blade 10 can be detected. Thereby, it is possible to detect breakage of the rotary blade 10 while the rotary blade 10 is worn from a new state to a wear amount of about 2.8 mm without changing the height position of the optical axis AX. Therefore, it is possible to detect breakage of the rotary blade 10 until the wear amount reaches a certain value (for example, 2.8 mm) without providing a dedicated drive mechanism for moving the sensor mechanism 13.

  With reference to FIG. 2, the operation | movement which detects abrasion of the rotary blade 10 is demonstrated as 2nd operation | movement. Wear of the rotary blade 10 is detected using a sensor mechanism 13 provided in the rotary blade detection mechanism 12. After the cutting of the sealed substrate 11 is completed, the spindle body 7 is raised using the Z-axis drive mechanism 4 until the optical axis AX is positioned at a predetermined standby position. As shown in FIG. 2B, when the spindle body 7 is raised, the upper surface of the right end of the rotating member 14 comes into contact with the lower surface of the push-down member 17 at a certain position. Subsequently, by slightly raising the spindle body 7, the rotating member 14 slightly rotates clockwise about the rotating shaft 15. When the rotating member 14 rotates slightly, the optical axis AX of the sensor mechanism 13 moves slightly upward (in the + Z direction). When the optical axis AX reaches a predetermined standby position, the ascent of the spindle body 7 is stopped.

  For example, as shown in FIGS. 2B and 2C, the predetermined standby position means that 50% of the irradiation light 20 emitted from the light emitting means 18 of the sensor mechanism 13 reaches the light receiving means 19. This means the position of the optical axis AX in the height direction. In other words, 50% of the irradiation light 20 is blocked by the rotary blade 10 so that the optical axis AX coincides with the predetermined standby position. When the spindle body 7 does not cut the sealed substrate 11, the sensor mechanism 13 is stopped so that the optical axis AX is at a predetermined standby position. Hereinafter, this is referred to as “stop the sensor mechanism 13 at a predetermined standby position”.

  At the predetermined standby position, the light receiving means 19 receives 50% of the irradiation light 20. As a result, the wear of the rotary blade 10 is detected at the center of the range where the change in the amount of received light is proportional to the change in the photocurrent. In other words, the wear of the rotary blade 10 is detected in the center of the range where the relationship between the change in the amount of received light and the change in the photocurrent is linear. Therefore, wear of the rotary blade 10 can be detected stably and accurately.

  The phrase “50% of the irradiation light 20” means that the amount of light received by the light receiving unit 19 is 50% of the irradiation light 20. In addition, the phrase “50% of the irradiation light 20” includes a case where the amount of light received by the light receiving unit 19 is in the vicinity of the center of the range where the change in the amount of received light is proportional to the change in the photocurrent. The term “predetermined standby position” refers to the height position of the optical axis AX in the central portion (including the vicinity of the central portion) of the range where the relationship between the height position of the optical axis AX and the change in photocurrent is linear. means.

  Operations for detecting wear of the rotary blade 10 will be described in order. First, in a state where the lower end of the rotary blade 10 is positioned at a predetermined cutting position when the sealed substrate 11 is cut by the rotary blade 10, it is confirmed that the rotary blade 10 is not damaged using the sensor mechanism 13. To do.

  Next, after the cutting of the sealed substrate 11 is completed, the spindle body 7 is raised to a predetermined standby position. Even at a predetermined standby position where the sealed substrate 11 is not cut, the rotary blade 10 is rotated at the same number of rotations as when cutting or less than when cutting.

  Next, at a predetermined standby position, the light receiving unit 19 receives the light that is not blocked by the rotary blade 10 among the irradiation light 20 emitted from the light emitting unit 18 as the incident light 21. In a state where the rotating blade 10 which is new and has no wear is attached to the rotating shaft 9, the standby position of the spindle body 7 is set in advance so that the light receiving amount received by the light receiving means 19 is about 50% of the irradiation light 20. It is decided.

  In the state where the spindle body 7 is stopped at the predetermined standby position, the optical axis AX of the sensor mechanism 13 is always maintained at the same height position in the cutting mechanism 1. When the diameter of the rotary blade 10 is reduced by wear of the rotary blade 10, the light that is not blocked by the rotary blade 10 in the irradiation light 20, that is, the incident light 21 increases. Therefore, the amount of incident light 21 received by the light receiving means 19 is increased. The relationship between the change in the amount of wear of the rotary blade 10 and the change in the amount of received light 21 is checked in advance, and the relationship is stored in a control unit (not shown). The control unit compares the stored relationship with the increase in the amount of received light. As a result, the amount of wear of the rotary blade 10 can be detected. Therefore, the wear of the rotary blade 10 can be detected in the normal production state using the rotary blade detection mechanism 12 without adding a process.

  By providing the rotary blade detection mechanism 12 in the cutting mechanism 1, damage is detected in a state where the lower end of the rotary blade 10 is located at a predetermined cutting position when the sealed substrate 11 is cut, and the sealed substrate 11 is detected. It is possible to detect wear at a predetermined standby position when the is not cut. Therefore, both the breakage and wear of the rotary blade 10 can be detected in the normal production process without adding a process for detecting breakage and wear of the rotary blade 10. In addition, by using one sensor mechanism 13 and one Z-axis drive mechanism 4, both wear and breakage of the rotary blade 10 can be detected.

  As shown in FIG. 3, when cutting of the sealed substrate 11 is continued over a plurality of sheets, the rotary blade 10 is gradually worn and the diameter of the rotary blade 10 is reduced. In FIG. 3, the rotating blade 10 in a state where the rotating blade 10 is new and not worn is shown as a new rotating blade 10a, and the worn rotating blade is shown as a rotating blade 10b. When the new rotary blade 10a is worn and becomes the state of the rotary blade 10b, the light that is not blocked by the rotary blade 10b in the irradiation light 20, that is, the incident light 21 increases. Therefore, the amount of incident light 21 received by the light receiving means 19 is increased. The amount of wear of the rotary blade 10 can be calculated by detecting this change (increase) in the amount of received light.

  An operation for detecting wear of the rotary blade 10 will be specifically described. First, the relationship between the amount of wear and the ratio of the amount of received light to the amount of emitted light is obtained in advance by experiments. For example, the amount of light received when the rotary blade 10 is new, the amount of light received when it is worn 0.1 mm, the amount of light received when it is worn 0.2 mm, the amount of light received when it is worn 0.3 mm,... Xmm The amount of light received when worn is measured in advance by experiments. It is assumed that the ratio between the received light amount obtained by the experiment and the emitted light amount of the irradiation light 20 is a0%, a1%, a2%, a3%,. The relationship between each wear amount and the ratio of the received light amount to the emitted light amount is formulated into a mathematical expression. The obtained relational expression is stored in a control unit (not shown). The relationship between each wear amount and the ratio of the received light amount to the emitted light amount may be used as a lookup table (LUT), and the LUT may be stored in the control unit. The amount of wear of the rotary blade 10 can be calculated by comparing the amount of received light detected by the light receiving means 19 with the relational expression or LUT stored in the control unit.

  Next, as shown in FIG. 3A, in the state where the sensor mechanism 13 stops at a predetermined standby position and the rotary blade 10 is rotating, the wear of the rotary blade 10 is detected. In this state, first, the sensor mechanism 13 is configured such that the light received from the light emitting means 18 is not blocked by the new rotary blade 10a, that is, the amount of incident light 21 received is 50%. The height position of is adjusted in advance. Thereby, the sensor mechanism 13 is stopped at a predetermined standby position.

  Next, as shown in FIG. 4A, a case where the sealed substrate 11 is cut using the worn rotary blade 10b will be described. In this case, it is necessary to lower the spindle body 7 to a position where the lowermost end of the worn rotary blade 10b is deeper than the lower surface of the sealed substrate 11 (a position corresponding to a predetermined cutting depth). When the worn rotary blade 10b is used, it is necessary to lower the spindle body 7 by the amount of wear of the worn rotary blade 10b as compared to the depth of cut when using a new rotary blade 10a. is there. In this embodiment, the light receiving amount is measured using the light receiving means 19 in a state where the sensor mechanism 13 is stopped at a predetermined standby position when the sealed substrate 11 is not cut.

  In order to calculate the amount of wear of the rotating blade 10b worn by measuring the amount of received light using the light receiving means 19, one of the following two methods is used. The first method is a method of calculating the wear amount of the worn rotary blade 10b by comparing the measured received light amount with the relational expression or LUT stored in the control unit. The wear amount of the worn rotary blade 10b can be calculated by comparing the measured amount of received light with the relational expression or LUT stored in the control unit.

  The second method uses the Z-axis drive mechanism 4 from the state in which the optical axis AX is located at a predetermined standby position until the measured amount of received light is substantially equal to 50%, and the spindle body 7 Is a method of lowering. The distance by which the spindle main body portion 7 is lowered approximates to the distance by which the optical axis AX of the sensor mechanism 13 is lowered. The wear amount of the worn rotary blade 10b can be calculated by calculating the distance by which the spindle body 7 is lowered using the Z-axis drive mechanism 4 (≈the distance by which the optical axis AX is lowered). It can be approximated when the distance by which the spindle body 7 is lowered from the state where the optical axis AX is located at the predetermined standby position is equal to the wear amount of the rotary blade 10b.

The first method and the second method may be combined. In the case where the wear amount of the rotary blade 10b is calculated using the second method, when the wear of the rotary blade 10b progresses, the following state may occur. This is a state where the measured amount of received light exceeds 50% at a certain position where the spindle body 7 is lowered and the rotating member 14 becomes substantially horizontal (see FIG. 1B) . As shown in FIG. 1B, in this state, the rotating member 14 comes into contact with the stopper 16, so that the rotating member 14 cannot be further rotated counterclockwise. Therefore, this state is a state where the amount of received light cannot be reduced to 50% . In this state, the method for calculating the wear amount of the rotary blade 10b is changed from the second method to the first method. As a result, even when the amount of received light exceeds 50%, the wear amount of the worn rotary blade 10b can be continuously calculated using the first method.

  In the state where the optical axis AX is located at a predetermined standby position, the light receiving means 19 receives 50% of the irradiation light 20. Instead, in the state where the optical axis AX is located at a predetermined standby position, the ratio of the irradiated light 20 received by the light receiving means 19 may be set to a value larger than 50% (for example, 75%). In the state where the optical axis AX is located at a predetermined standby position, the ratio of the irradiation light 20 received by the light receiving means 19 is the median value in a range where the relationship between the change in the amount of received light and the change in the photocurrent is linear or Any predetermined value that exceeds the median value may be used. In other words, the optical axis AX only needs to be positioned at the center or a predetermined portion where the amount of received light increases from the center in a range where the relationship between the change in the amount of received light and the change in photocurrent is linear. Thereby, when wear of the rotary blade 10b progresses, the width (measurement range) of the wear amount that can be detected using the second method described above can be increased.

  The spindle body 7 is lowered by a length equal to the calculated wear amount. Correction according to the wear amount is performed, and the lowermost end of the worn rotary blade 10b reaches a predetermined cutting depth. Thus, the sealed substrate 11 is cut in a state where the lowermost end of the worn rotary blade 10b is made to reach a predetermined cutting depth. Therefore, it is possible to control the cutting depth of the rotary blade 10b worn when the sealed substrate 11 is cut in a normal production state without adding a process. Since the cutting depth of the rotary blade 10 can be kept constant, the cutting quality when cutting the sealed substrate 11 can be stably maintained.

  The configuration of the sensor mechanism 13 shown in FIG. 1 will be described with reference to FIG. In the sensor mechanism 13, the light emitting means 18 includes a light emitting element 22, an optical fiber bundle 23, a condenser lens 24, a prism 25, and a transmission window 26. The light receiving means 19 includes a light receiving element 27, an optical fiber bundle 28, a condenser lens 29, a prism 30, and a light receiving window 31. For example, a light emitting diode (LED) or a laser diode (LD) is used as the light emitting element 22. As the light receiving element 27, a photodiode (PD) or the like is used. The optical fiber bundles 23 and 28 are configured by bundling a plurality of plastic optical fibers having a diameter of about 0.2 mm to 0.3 mm.

  As shown in FIG. 5, the light emitting means 18 has a light emitting element 22, and the light receiving means 19 has a light receiving element 27. A slit SL <b> 1 is preferably provided between the light emitting means 18 and the rotary blade 10. A slit SL2 is preferably provided between the light receiving means 19 and the rotary blade 10. The slit SL1 is provided between the light emitting means 18 and the rotary blade 10 and in the immediate vicinity of the transmission window 26. The slit SL <b> 2 is provided between the light receiving unit 19 and the rotary blade 10 and in the immediate vicinity of the light receiving window 31. The slit SL1 may be attached to the main body of the light emitting means 18. The slit SL2 may be attached to the main body of the light receiving means 19. Either one of the slit SL1 and the slit SL2 may be provided.

  The slit SL1 and the slit SL2 each have an elongated gap extending along the Z direction. The width of these gaps (dimension in the Y direction) is determined to an optimum value. For example, the width of these gaps is preferably 0.5 mm to 1.2 mm. When the width of the gap is too large, the resolution for detecting breakage of the rotary blade 10 is lowered. When the width of the gap is too small, the amount of received light is reduced, so that it is likely to be adversely affected by noise when detecting the breakage of the rotary blade 10.

As shown in FIG. 5, in the light emitting means 18, the light emitted from the light emitting element 22 is converted into parallel light by a condenser lens (collimator lens) 24 via an optical fiber bundle 23. The light converted into parallel light travels toward the prism 25 and is reflected by the prism 25 by 90 degrees to become irradiation light 20 traveling in the −X direction. The irradiation light 20 sequentially passes through the transmission window 26 of the light emitting means 18 and the gap between the slits SL1. A part of the irradiation light 20 is blocked by the rotary blade 10. The remaining part of the irradiation light 20 that is not blocked by the rotary blade 10 sequentially passes through the gap of the slit SL2 and the light receiving window 31 of the light receiving means 19 as incident light 21. In the light receiving means 19, the incident light 21 is reflected 90 degrees by the prism 30 and proceeds in the + Z direction. The reflected incident light 21 is collected by a condenser lens 29. The condensed light reaches the light receiving element 27 via the optical fiber bundle 28.

  The light received by the light receiving element 27 is photoelectrically converted, and a received light signal corresponding to the amount of received light is sent to the control unit 32 as an electrical signal. The light reception signal sent to the control unit 32 is appropriately amplified and AD-converted, and is used for detection of breakage of the rotary blade 10 and detection of wear. The received light signal is amplified and displayed on the monitor unit 33. The control unit 32 has a function of performing setting, control, and the like of operation of the manufacturing apparatus, cutting conditions, and the like in addition to a function of detecting breakage and wear of the rotary blade 10.

  The light emitting element 22 and the light receiving element 27 may be provided inside the control unit 32. In this case, using the long optical fiber bundle 23, the light emitted from the light emitting element 22 inside the control unit 32 is guided to the light emitting means 18 and irradiated as the irradiation light 20. Using the long optical fiber bundle 28, the incident light 21 received in the light receiving means 19 is guided to the light receiving element 27 inside the control unit 32.

  In the sensor mechanism 13, the transmission window 26 provided in the light emitting means 18 and the light receiving window 31 provided in the light receiving window 31 are provided as circular windows at positions facing each other. Therefore, the irradiation light 20 irradiated from the light emitting means 18 has a circular irradiation range S. When at least one of the slit SL1 and the slit SL2 is provided, the incident light 21 received by the light receiving means 19 has an elongated shape extending along the Z direction. The position of the optical axis AX of the sensor mechanism 13 is adjusted by raising and lowering the sensor mechanism 13 to raise and lower the transmission window 26 and the light receiving window 31. The amount of irradiation light irradiated toward the rotary blade 10 can be adjusted by the position of the optical axis AX and the size of the transmission window 26. The amount of the irradiation light 20 not blocked by the rotary blade 10, that is, the amount of incident light 21 received by the light receiving means 19 can be adjusted by the position of the optical axis AX and the position of the light receiving window 31. Therefore, both wear and breakage of the rotary blade 10 can be detected by adjusting the height position of the optical axis AX of the sensor mechanism 13.

  According to the present embodiment, the following effects can be obtained. First, since both the wear and breakage of the rotary blade 10 can be detected by using one sensor mechanism 13, the configuration of the manufacturing apparatus can be simplified. Therefore, the cost of the manufacturing apparatus can be suppressed.

  Second, the position of the optical axis AX of the sensor mechanism 13 is substantially raised and lowered using the Z-axis drive mechanism 4 for lowering the rotary blade 10. Thereby, there is no need to provide a dedicated drive mechanism for raising and lowering the position of the optical axis AX of the sensor mechanism 13. Therefore, the cost of the manufacturing apparatus can be suppressed.

  Thirdly, breakage is detected while the rotary blade 10 cuts the sealed substrate 11, and wear is detected when the rotary blade 10 is not cut. Thereby, it is possible to detect both breakage and wear of the rotary blade 10 in a normal production state using the rotary blade detection mechanism 12 without adding a process. Therefore, it can prevent that the productivity of a manufacturing apparatus falls.

Fourth, the light emitting means 18 and the light receiving means 19 are provided such that the light emitting means 18 and the light receiving means 19 of the sensor mechanism 13 sandwich the uppermost end of the rotary blade 10. Thereby, when the sealed substrate 11 is being cut, it is possible to prevent droplets or the like due to cutting water or cooling water from adhering to the sensor mechanism 13. The sensor mechanism 13 is not easily affected by droplets or the like. Therefore, the sensor mechanism 13 can stably and accurately detect both breakage and wear of the rotary blade 10.

  Fifth, the amount of wear of the rotary blade 10 is detected and calculated during the period when the rotary blade 10 does not cut the sealed substrate 11. By lowering the spindle body 7 by a length equal to the calculated wear amount, the lowermost end of the rotary blade 10 is lowered to a predetermined cutting depth of the sealed substrate 11. In a state where the lowermost end of the rotary blade 10 is located at a predetermined cutting depth, the rotary blade 10 cuts the sealed substrate 11. Therefore, the cutting quality of the sealed substrate 11 can always be stabilized in a constant state.

Sixth, when the amount of wear of the rotary blade 10 is detected during the period when the rotary blade 10 is not cutting the sealed substrate 11, the light receiving means 19 receives 50% of the irradiation light 20. As a result, the wear of the rotary blade 10 is detected at the center of the range where the change in the amount of received light is proportional to the change in the photocurrent. In other words, the wear of the rotary blade 10 is detected at the center of the range where the relationship between the change in the photocurrent generated by the light receiving means and the position of the optical axis is linear based on the amount of received light. Therefore, the sensor mechanism 13 can detect the wear of the rotary blade 10 stably and accurately.

When it is assumed that the rotary blade 10 having a plurality of different diameters is used, the rotary blade detection mechanism 12 is provided with a shaft hole in which the rotary shaft 15 is provided and a pin hole in which, for example, a pin-shaped stopper 16 is provided. A plurality of combinations may be provided. A bearing may be provided in the shaft hole. When a plurality of rotary blades 10 having different diameters are used, a combination of a shaft hole and a pin hole corresponding to the diameter of the rotary blade 10 to be used is selected. The rotary shaft 15 is inserted and fixed in the selected shaft hole, and the pin-shaped stopper 16 is inserted into the selected pin hole. Therefore, it is possible to detect both breakage and wear of the rotary blade 10 by using one sensor mechanism 13 for the rotary blade 10 having a plurality of different diameters. In order to correspond to the rotary blade 10 having a plurality of different diameters, the sensor mechanism 13 may be attached to a mechanism using a screw. In this case, the sensor mechanism 13 with respect to the rotation member 14 in the state shown in FIG. 1 is to be able to move in the Z direction, to fix the sensor mechanism 13 with respect to the rotation member 14. For example, the sensor mechanism 13 can be moved up and down by attaching the sensor mechanism 13 to a feed screw, a micrometer head or the like and rotating the screw.

  The manufacturing apparatus according to the present embodiment will be described with reference to FIG. As shown in FIG. 6, the manufacturing apparatus 34 is an apparatus that divides an object to be cut into a plurality of products. The manufacturing apparatus 34 includes a substrate supply unit A, a substrate cutting unit B, and an inspection unit C as components. Each component (each unit A to C) is detachable and replaceable with respect to other components.

  The substrate supply unit A is provided with a substrate supply mechanism 35. The sealed substrate 11 corresponding to the object to be cut is unloaded from the substrate supply mechanism 35 and transferred to the substrate cutting unit B by a transfer mechanism (not shown). The substrate supply unit A is provided with a control unit 32 that performs operations and controls of the manufacturing apparatus 34, the cutting mechanism 1, the rotary blade detection mechanism 12, the sensor mechanism 13, and the like.

  The manufacturing apparatus 34 shown in FIG. 6 is a single-cut table type manufacturing apparatus. Accordingly, the substrate cutting unit B is provided with one cutting table 36. The cutting table 36 can be moved in the Y direction in the figure by the moving mechanism 37, and can be rotated in the θ direction by the rotating mechanism 38. On the cutting table 36, the sealed substrate 11 is placed and sucked.

  The substrate cutting unit B is provided with a cutting mechanism 1 (see FIGS. 1 and 2) having a spindle body 7. The manufacturing apparatus 34 is a manufacturing apparatus having a single spindle configuration including one spindle body 7. The spindle body 7 can move independently in the X direction and the Z direction. A rotary blade 10 is attached to the spindle body 7. The sealed substrate 11 is cut by relatively moving the cutting table 37 and the spindle body 7. The rotary blade 10 cuts the sealed substrate 11 by rotating in a plane including the Y direction and the Z direction.

  A rotary blade detection mechanism 12 (see FIGS. 1 to 2) having a sensor mechanism 13 is provided in the cutting mechanism 1. As a result, in a state where the lower end of the rotary blade 10 is positioned at a predetermined cutting position when the sealed substrate 11 is cut, breakage of the rotary blade 10 is detected. In a state where the optical axis AX is located at a predetermined standby position when the sealed substrate 11 is not cut, the wear of the rotary blade 10 is detected.

  The inspection unit C is provided with an inspection table 39. On the inspection table 39, an assembly made up of a plurality of products P obtained by cutting the sealed substrate 11 into pieces, that is, a cut substrate 40 is placed. The plurality of products P are inspected by a camera for inspection (not shown) and sorted into non-defective products and defective products. The non-defective product is stored in the tray 41.

  In the present embodiment, the manufacturing apparatus 34 having a single-spin table configuration and a single spindle configuration has been described. The cutting mechanism 1 of the present invention can also be applied to a single-cut table type manufacturing apparatus having a twin-spindle configuration or a twin-cut table type manufacturing apparatus having a twin-spindle configuration.

  In each Example, the case where the sealed board | substrate 11 which contains a chip-shaped element as a to-be-cut | disconnected object was shown was shown. However, the present invention is not limited to this, and the present invention can be applied to a case where the next object to be cut is cut into individual pieces as objects other than the sealed substrate 11. First, a semiconductor wafer made of silicon, a compound semiconductor, and a functional element such as a circuit element or MEMS (Micro Electro Mechanical Systems) is singulated. Second, products such as chip resistors, chip capacitors, chip-type sensors, surface acoustic wave devices, etc., by separating individual ceramic substrates on which functional elements such as resistors, capacitors, sensors, surface acoustic wave devices, etc. are built Is the case of manufacturing. In these two cases, a semiconductor wafer, a ceramic substrate, or the like corresponds to a plate-like member in which functional elements corresponding to a plurality of regions are formed. Thirdly, it is a case where the resin molded product which is a plate-like member is singulated and optical components such as a lens, an optical module and a light guide plate are manufactured. In this case, a lens, an optical module, a light guide plate, or the like corresponds to the functional element. Fourth, it is a case where a general molded product is manufactured by dividing a resin molded product into individual pieces. In this case, the molded product corresponds to the functional element. The contents described so far can be applied to various cases including the above four cases.

  The present invention is not limited to the above-described embodiments, and can be arbitrarily combined, modified, or selected and adopted as necessary within the scope not departing from the gist of the present invention. It is.

DESCRIPTION OF SYMBOLS 1 Cutting mechanism 2 Fixing plate 3 Guide rail for Z-axis 4 Drive mechanism for Z-axis (second moving mechanism)
DESCRIPTION OF SYMBOLS 5 Ball screw 6 Elevating member 7 Spindle main-body part 8 Spindle 9 Rotating shaft 10 Rotating blade 10a New rotating blade 10b Worn rotating blade 11 Sealed substrate (to-be-cut object)
12 Rotating blade detection mechanism 13 Sensor mechanism 14 Rotating member 15 Rotating shaft 16 Stopper (stop member)
DESCRIPTION OF SYMBOLS 17 Push-down member 18 Light emission means 19 Light reception means 20 Irradiation light 21 Incident light 22 Light emission element 23, 28 Optical fiber bundle 24, 29 Condensing lens 25, 30 Prism 26 Transmission window 27 Light reception element 31 Light reception window 32 Control part 33 Monitor part 34 Manufacturing equipment 35 Substrate supply mechanism 36 Cutting table (table)
37 Movement mechanism (first movement mechanism)
38 Rotating mechanism 39 Inspection table 40 Cut substrate 41 Tray A Substrate supply unit AX Optical axis B Substrate cutting unit C Inspection unit D Effective diameter P Product S Irradiation range SL1, SL2 Slit

Claims (9)

By moving the workpiece placed on the table relative to the rotary blade of the cutting mechanism in the biaxial direction of the three-dimensional orthogonal coordinate system and including the vertical direction, the workpiece A manufacturing apparatus for manufacturing a plurality of products by cutting
A rotation mechanism fixed to one side with respect to the rotation axis, a sensor mechanism including a light emitting means and a light receiving means provided in the cutting mechanism and arranged to sandwich the outer peripheral portion of the rotary blade;
The rotary member is fixed to the cutting mechanism, and the rotary member is pushed downward relative to the rotary shaft by pushing the other side of the rotary member opposite to the one side relative to the rotary shaft. A push-down member that rotates and moves the sensor mechanism away from the center of the rotary blade;
A stop that is fixed to the cutting mechanism and stops the rotating member so as to regulate the position of the sensor mechanism in a state where the pressing member does not press down the other side due to the lowering of the cutting mechanism relative to the table. With members,
The light emission that is not blocked by the rotary blade at a predetermined cutting position in a state in which the workpiece is cut, the push-down member does not push down the other side, and the stop member stops the rotary member The light received from the means is received by the light receiving means to obtain a first received light amount,
The light receiving means receives light emitted from the light emitting means that is not blocked by the rotary blade at a predetermined standby position in a state in which the workpiece is not cut and the push-down member pushes down the other side. To obtain the second received light amount,
Adjusting the position of the optical axis between the light emitting means and the light receiving means so that the first received light quantity is smaller than the second received light quantity;
Detecting the breakage of the rotary blade based on the change in the first received light amount;
A manufacturing apparatus for detecting wear of the rotary blade based on a change in the second received light amount. The manufacturing apparatus according to claim 1,
The stop member comes into contact with the one side of the rotating member and stops the rotating member so as to regulate the position of the sensor mechanism when the cutting mechanism descends relative to the table. manufacturing device. In the manufacturing apparatus according to claim 1 or 2 ,
The manufacturing apparatus, wherein the light emitting means and the light receiving means are provided on an upper portion of the rotary blade. In the manufacturing apparatus of any one of Claims 1-3,
In a state where the optical axis is located at the predetermined standby position, the relationship between the change in the photocurrent generated by the light receiving means based on the first received light amount and the second received light amount and the position of the optical axis is linear. The optical axis is located in a central part of a range having a property or a predetermined part where the amount of received light increases from the central part. In the manufacturing apparatus of any one of Claims 1-4 ,
Based on the wear amount calculated by detecting a change in the second receiving light amount, said by relatively lowering the cutting mechanism, the lower end of the rotary blade to said predetermined cutting position with respect to the table A manufacturing apparatus characterized by being lowered. In the manufacturing apparatus of any one of Claims 1-5 ,
Manufacturing apparatus characterized in that it comprises a slit provided in at least one of between and between said light receiving means and said rotary blade of said light emitting means and the rotary blade. In the manufacturing apparatus according to item 1 to any one of claims 1 to 6,
The manufacturing apparatus according to claim 1, wherein the object to be cut is a sealed substrate. In the manufacturing apparatus according to any one of claims 1-7,
The manufacturing apparatus according to claim 1, wherein the object to be cut is a plate-like member or a resin molded product in which functional elements are formed in a plurality of regions respectively corresponding to the plurality of products. A manufacturing method for manufacturing a plurality of products by cutting the workpiece using the manufacturing apparatus according to claim 1.

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