JP7354069B2 - Cutting device and method for manufacturing cut products - Google Patents

Description

The present invention relates to a cutting device and a method for manufacturing cut products.

JP-A-2014-192271 (Patent Document 1) discloses a cutting device that performs cutting on a workpiece. This cutting device includes a blade detection means for detecting a cutting edge. The blade detection means includes a light emitting section and a light receiving section. The blade detection means detects that the cutting blade is present at a predetermined height position in response to the cutting blade blocking light emitted by the light emitting section. Based on this detection result, the amount of wear on the cutting blade is detected. In this cutting device, a blade detection means is provided on a movable table that holds a chuck table (see Patent Document 1).

Japanese Patent Application Publication No. 2014-192271

In the cutting device disclosed in Patent Document 1, the presence of the cutting edge at a predetermined height can be detected only near the chuck table. That is, the locations where it is possible to detect that the cutting blade exists at a predetermined height are limited.

The present invention has been made to solve such problems, and its purpose is to ensure that at least a portion of the spindle portion exists at a predetermined height regardless of the horizontal position of the spindle portion. The object of the present invention is to provide a detectable cutting device or the like.

A cutting device according to an aspect of the present invention includes a spindle section, a moving section, and a detector. The spindle section includes a blade that cuts the workpiece. The moving section is configured to hold the spindle section and move the spindle section in the horizontal direction. The detector includes a light emitting section and a light receiving section that receives the light beam emitted by the light emitting section, and is attached to the moving section. The detector is configured to detect that at least a portion of the spindle portion blocks the light beam.

A method for manufacturing a cut product according to another aspect of the present invention manufactures a cut product by cutting a workpiece using the cutting device described above.

According to the present invention, it is possible to provide a cutting device and the like that can detect that at least a portion of the spindle portion is at a predetermined height regardless of the position of the spindle portion in the horizontal direction.

FIG. 2 is a diagram schematically showing a plane of a part of the cutting device. FIG. 2 is a diagram schematically showing a front view of a part of the cutting device. FIG. 3 is a diagram for explaining a procedure for detecting a control coordinate origin using a CCS block. FIG. 3 is a diagram showing the relationship between a spindle section and a detector. FIG. 3 is a diagram for explaining an example of an optical configuration of a detector. It is a figure which shows typically the plane of a part of cutting device which is a comparison object. FIG. 6 is a diagram for explaining a process of moving a reference dog to a predetermined height. It is a flowchart which shows the manufacturing procedure of a cut product in a cutting device. It is a figure which shows an example of a cutting device when a work holding unit moves in the arrow XY direction. FIG. 7 is a diagram for explaining an example in which a control coordinate origin is detected by bringing a reference dog into contact with a CCS block. FIG. 7 is a diagram for explaining another example of the optical system.

Embodiments of the present invention will be described in detail below with reference to the drawings. In addition, the same reference numerals are attached to the same or corresponding parts in the drawings, and the description thereof will not be repeated.

[1. Configuration of cutting device]
FIG. 1 is a diagram schematically showing a plan view of a part of a cutting device 10 according to the present embodiment. FIG. 2 is a diagram schematically showing a front view of a part of the cutting device 10. As shown in FIG. Note that in each figure, the directions indicated by the arrows XYZ are common.

The cutting device 10 is configured to separate the work W1 into a plurality of cut products by cutting the work W1 (full cut). Further, the cutting device 10 is configured to form a groove in the workpiece W1 by removing a part of the workpiece W1 (half cut). That is, the concept of the term "cutting" included in the name of the cutting device 10 (cutting device) includes separating the object to be cut into a plurality of parts and removing a part of the object to be cut. The workpiece W1 is, for example, a package substrate. In a package substrate, a substrate or a lead frame on which a semiconductor chip is mounted is sealed with resin. That is, the workpiece W1 is a resin-molded substrate. In the following description, the surface of the workpiece W1 on the sealing side is also referred to as the "package surface", and the surface on the substrate or lead frame side is also referred to as the "substrate surface".

Examples of package substrates include BGA (Ball Grid Array) package substrate, LGA (Land Grid Array) package substrate, CSP (Chip Size Package) package substrate, LED (Light Emitting Diode) package substrate, and QFN (Quad Flat No-leaded) package substrate. ) package substrates.

As shown in FIGS. 1 and 2, the cutting device 10 includes a cutting unit 100, a work holding unit 200, a CCS (Contact Cutter Set) block 300, a detector 400, and a control section 500. .

The cutting unit 100 is configured to cut the workpiece W1, and includes a spindle portion 110, sliders 103, 104, a support 105, and a guide 106. Note that the cutting device 10 has a twin spindle configuration including two sets of the spindle portion 110 and sliders 103, 104, but may have a single spindle structure including only one set of the spindle portion 110 and sliders 103, 104. It's okay.

The guide 106 is a metal rod-shaped member and extends in the direction of arrow Y. The support body 105 is a metal rod-shaped member, and is configured to move in the direction of arrow Y along a guide 106. A guide G1 extending in the longitudinal direction (arrow X direction) is formed on the support body 105. The support body 105 is an example of a moving part in the present invention.

The slider 104 is a rectangular plate-shaped member made of metal, and is attached to the support body 105 so as to be movable in the direction of arrow X along the guide G1. A guide G2 extending in the longitudinal direction (arrow Z direction) is formed on the slider 104. The slider 103 is a rectangular plate-like member made of metal, and is attached to the slider 104 so as to be movable in the height direction (arrow Z direction) along the guide G2.

The spindle section 110 includes a spindle section main body 102, a blade 101 attached to the spindle section main body 102, and a reference dog 107 attached to the spindle section main body 102. The blade 101 cuts the workpiece W1 by rotating at high speed, and separates the workpiece W1 into a plurality of cut products (semiconductor packages). The reference dog 107 is a protrusion projecting downward from the spindle main body 102, and is used to detect wear and chipping of the blade 101. The reference dog 107, unlike the blade 101, hardly wears out. The reference dog 107 is used, for example, to specify a reference height position when detecting a worn state or a chipped state of the blade 101. The reference dog 107 will be explained in detail later.

The spindle body 102 is attached to a slider 103. The spindle portion 110 is configured to move to a desired position within the cutting device 10 in accordance with horizontal or vertical movement of the sliders 103, 104 and the support 105.

The workpiece holding unit 200 is configured to hold the workpiece W1, and includes a cutting table 201 and a rubber 202 placed on the cutting table 201. In this embodiment, a cutting device 10 having a twin cut table configuration having two work holding units 200 is illustrated. Note that the number of work holding units 200 is not limited to two, and may be one or three or more.

The rubber 202 is a plate-like member made of rubber, and a plurality of holes are formed in the rubber 202. A workpiece W1 is placed on the rubber 202. The cutting table 201 holds the workpiece W1 placed on the rubber 202 by suctioning the workpiece W1 from the lower package surface side. The cutting table 201 is rotatable in the θ direction. The workpiece W1 is cut by the spindle section 110 from the substrate surface side while being held by the workpiece holding unit 200. Note that the work holding unit 200 does not necessarily need to include the rubber 202, and instead of the rubber 202, it may include another member that sucks the work W1 placed above from the package surface side below.

The CCS block 300 is used to detect the origin of control coordinates in controlling the height position of the spindle section 110. The control coordinate origin is a control reference position in the height direction of the spindle portion 110, and includes, for example, the electrical origin.

FIG. 3 is a diagram for explaining a procedure for detecting the control coordinate origin using the CCS block 300. In the cutting device 10, the height H1 of the CCS block 300 is stored in advance. As shown in FIG. 3, in the cutting device 10, the control coordinate origin in the height direction of the spindle portion 110 is detected by bringing the blade 101 into contact with the CCS block 300.

Note that detection of the control coordinate origin using the CCS block 300 places a relatively large load on the blade 101 because the blade 101 is brought into physical contact with the CCS block 300 . Therefore, in the cutting device 10, the control coordinate origin is detected using the CCS block 300 at a limited timing, such as after the blade 101 is replaced.

Referring again to FIGS. 1 and 2, the detector 400 detects, for example, that at least a portion of the spindle portion 110 (for example, the blade 101, the reference dog 107) is present at a predetermined height position; It is used to detect the wear state and chipping state (diameter of the blade 101), and to detect the control coordinate origin in controlling the height position of the spindle section 110.

Detector 400 includes a light emitting section 401 and a light receiving section 402. The light emitting section 401 is configured to emit a light beam toward the light receiving section 402. The light receiving section 402 is configured to receive the light beam emitted by the light emitting section 401. Each of the light emitting section 401 and the light receiving section 402 is attached to the support body 105. That is, the light emitting section 401 and the light receiving section 402 move in the horizontal direction together with the support body 105.

The light emitting section 401 is attached near one end of the support 105 in the longitudinal direction, and the light receiving section 402 is attached near the other end of the support 105 in the longitudinal direction. For example, if the support body 105 is divided into three regions equally spaced in the longitudinal direction, the light emitting section 401 is attached to one end region, and the light receiving section 402 is attached to the other end region.

FIG. 4 is a diagram showing the relationship between the spindle section 110 and the detector 400. In the cutting device 10, the height positions of the light emitting section 401 and the light receiving section 402 are stored in advance. Note that the height positions of the light emitting section 401 and the light receiving section 402 are the same. As shown in FIG. 4, in the cutting device 10, the control section 500 (FIG. 1) controls the blade 101 in a state where the blade 101 is present between the light emitting section 401 and the light receiving section 402 in the direction of the arrow X, for example. Move it downward. The control unit 500 detects that the blade 101 is present at a predetermined height position by detecting that the light beam is blocked by the blade 101. Further, the control unit 500 detects the control coordinate origin in the height direction of the spindle unit 110 by detecting that the light beam is blocked by the blade 101.

Note that detecting the control coordinate origin using the detector 400 does not put a large load on the blade 101 because the blade 101 is not brought into contact with an object such as the CCS block 300 . Therefore, in the cutting device 10, the control coordinate origin is detected using the detector 400, for example, every time cutting of one workpiece W1 is completed. That is, detection of the control coordinate origin using the detector 400 is performed more frequently than detection of the control coordinate origin using the CCS block 300. Note that the control coordinate origin need not necessarily be detected by both methods, and may be performed by only one of the methods.

Further, as described above, the detector 400 is also used to detect the wear state and chipped state (diameter of the blade 101) of the blade 101. A method for detecting the worn state and chipped state of the blade 101 will be described in detail later.

FIG. 5 is a diagram for explaining an example of the optical configuration of the detector 400. As shown in FIG. 5, the light emitting section 401 includes a light emitting element 601 and an optical system 610. The light receiving section 402 includes a light receiving element 609 and an optical system 612. The light emitting element 601 is constituted by, for example, a light emitting side fiber of a fiber sensor, and the light receiving element 609 is constituted by, for example, a light receiving side fiber of a fiber sensor. The light emitting element 601 emits light rays in a direction substantially parallel to the direction in which the rotation axis of the blade 101 extends, and the light receiving element 609 receives light rays arriving from a direction substantially parallel to the direction in which the rotation axis of the blade 101 extends. The state of light detection by the light receiving element 609 is notified to the control unit 500. Note that the detector 400 does not necessarily need to be realized by a fiber sensor. Detector 400 may be realized by, for example, an LED and a light receiving element that receives light emitted by the LED.

Optical system 610 includes a pinhole 602, an aperture 603, a lens 604, and a wedge mirror 605. In the optical system 610, a pinhole 602, an aperture 603, a lens 604, and a wedge mirror 605 are arranged in order from the light emitting element 601 side. The pinhole 602 is configured to make the spot diameter of the light emitted from the light emitting element 601 a predetermined diameter. Lens 604 is comprised of a biconvex lens with a unit conjugate ratio design. The aperture 603 is placed at the focal point of the lens 604. As a result, the projected light becomes parallel light. In other words, the optical system 610 can be said to be a telecentric optical system. Wedge mirror 605 is configured to bend the light beam emitted by light emitting element 601 by a predetermined angle (for example, 10°). As a result, the angle formed by the traveling direction of the light beam emitted by the light emitting unit 401 and the direction in which the rotation axis of the blade 101 extends becomes a predetermined angle larger than 0° (for example, 10°).

Optical system 612 includes a wedge mirror 606, a lens 607, and an aperture 608. In the optical system 612, an aperture 608, a lens 607, and a wedge mirror 606 are arranged in order from the light receiving element 609 side. The wedge mirror 606 is configured to bend the light beam emitted by the light emitting unit 401 by a predetermined angle (for example, 10°). The traveling direction of the light beam bent by the wedge mirror 606 is approximately parallel to the direction in which the rotation axis of the blade 101 extends. Lens 607 is composed of a biconvex lens with a unit conjugate ratio design. The aperture 608 is placed at the focal point of the lens 607. In other words, the optical system 612 can be said to be a telecentric optical system.

When the light beam emitted by the light emitting unit 401 is blocked by the blade 101, the light beam no longer enters the light receiving element 609. In the cutting device 10, the presence of the blade 101 at a predetermined height position is detected as light is no longer detected by the light receiving element 609. Note that the optical configuration of the detector 400 shown in FIG. 5 is just an example, and the detector 400 may be realized with other configurations.

Referring again to FIGS. 1 and 2, the control unit 500 includes a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), etc., and controls each component according to information processing. It is configured to do the following. The control unit 500 is configured to control the cutting unit 100, the work holding unit 200, and the detector 400, for example.

As described above, in the cutting device 10, the detector 400 is attached to the support 105. Next, the reason why the detector 400 is attached to the support body 105 in the cutting device 10 will be explained.

[2. Reason why the detector is attached to the support (moving part)]
FIG. 6 is a diagram schematically showing a plane of a part of the cutting device 10X to be compared. As shown in FIG. 6, the cutting device 10X includes a detector 400X instead of the detector 400 described above. Detector 400X is not attached to support 105X and is independent from support 105X.

Cutting device 10X includes two detectors 400X. Each detector 400X is arranged near the work holding unit 200. Each detector 400X includes a light emitting section and a light receiving section, and is configured to detect interruption of light by the blade 101. One detector 400X is used to detect that a part of one spindle part 110 exists at a predetermined height position, and the other detector 400X is used to detect that a part of the other spindle part 110 exists at a predetermined height position. It is used to detect what happens.

In this case, for example, the presence of a portion of the spindle portion 110 at a predetermined height position can be detected only at the location where the detector 400X is placed. That is, in order to perform such detection, it is necessary to move the blade 101 to the location of the detector 400X. For example, other movements by the work holding unit 200 are restricted when the blade 101 is located at the location of the detector 400X. For example, the transfer operation, rotation operation, etc. of the workpiece W1 are restricted. As a result, the productivity of cut products decreases.

Further, as described above, each detector 400X is located near the workpiece holding unit 200. Therefore, when cutting the workpiece W1, cutting water (processing fluid) easily enters the detector 400X.

In the cutting device 10 according to this embodiment, the detector 400 is attached to the support 105 and moves together with the support 105. Therefore, according to the cutting device 10, it is possible to detect that at least a portion of the spindle section 110 exists at a predetermined height position, regardless of the position of the spindle section 110 in the horizontal direction. Further, according to the cutting device 10, the control coordinate origin in the height direction of the spindle part 110 and the wear state and chipped state of the blade 101 can be detected regardless of the position of the spindle part 110 in the horizontal direction. I can do it.

By performing various detection operations regarding the spindle section 110 in a place where the work holding unit 200 etc. do not interfere with other operations, the work holding unit 200 etc. can perform other operations at the time of each detection. As a result, the productivity of cut products does not decrease. Further, since the detector 400 moves together with the support body 105, when the spindle portion 110 moves, the detector 400 does not block the movement of the spindle portion 110, and the detector 400 does not become an obstacle. Furthermore, since the detector 400 moves together with the support 105, the spindle section 110 does not need to move near the detector 400 for various detections. As a result, the amount of movement of the spindle section 110 can be reduced. Further, since each of the light emitting section 401 and the light receiving section 402 is located near the end of the support body 105, there is a low possibility that cutting water will enter the detector 400 when cutting the workpiece W1. For the above reasons, the detector 400 is attached to the support 105.

[3. Judgment method for blade wear and chipping]
The diameter of the blade 101 is detected based on the difference in the relative positions of the blade 101 and the reference dog 107 in the height direction. Furthermore, when the diameter of the blade 101 is shorter than a predetermined value, the control unit 500 determines that the blade 101 is in a worn state or a chipped state.

FIG. 7 is a diagram for explaining the process of moving the reference dog 107 to a predetermined height. As shown in FIG. 7, the control section 500 (FIG. 1) moves the reference dog 107 downward while the reference dog 107 is present between the light emitting section 401 and the light receiving section 402 in the arrow X direction. The control unit 500 detects that the reference dog 107 is present at a predetermined height position by detecting that the light beam is blocked by the reference dog 107. The control unit 500 stores control coordinates in the Z-axis direction. Note that when detecting that the reference dog 107 exists at a predetermined height position, the blade 101 is removed from the spindle body 102, but the blade 101 does not necessarily need to be removed from the spindle body 102. do not have.

Referring again to FIG. 4, after the control coordinates in the Z-axis direction at the time when it is detected that the reference dog 107 exists at a predetermined height position are stored, the blade 101 is attached to the spindle body 102. . For example, the control unit 500 (FIG. 1) moves the blade 101 downward while the blade 101 is present between the light emitting unit 401 and the light receiving unit 402 in the arrow X direction. The control unit 500 detects that the blade 101 is present at a predetermined height position by detecting that the light beam is blocked by the blade 101. Note that the detection accuracy of the blade 101 can be further improved by moving the blade 101 downward at a position that is the focal point of both the light emitting section 401 and the light receiving section 402. The control unit 500 stores control coordinates in the Z-axis direction. The control unit 500 determines the difference between the control coordinate in the Z-axis direction when the reference dog 107 is present at a predetermined height position and the control coordinate in the Z-axis direction when the blade 101 is present at a predetermined height position. Based on this, the diameter of the blade 101 is calculated. Note that in the cutting device 10, the relationship between the difference in control coordinates and the diameter of the blade 101 is stored in advance.

Furthermore, when the calculated diameter of the blade 101 is shorter than a predetermined value, the control unit 500 determines that the blade 101 is in a worn state or a chipped state. By the above method, the diameter of the blade 101 is detected, and the wear state and chipped state of the blade 101 are determined.

[4. motion]
FIG. 8 is a flowchart showing the procedure for manufacturing cut products in the cutting device 10. The process shown in this flowchart is executed when cutting the workpiece W1 after the blade 101 has been replaced.

Referring to FIG. 8, control unit 500 controls spindle unit 110 to bring blade 101 into contact with CCS block 300 in order to detect the control coordinate origin in the height direction of spindle unit 110 (step S100). . The control unit 500 controls the height position of the spindle unit 110 so that the reference dog 107 blocks the light beam emitted by the light emitting unit 401 (step S110). Then, control coordinates in the Z-axis direction when the reference dog 107 exists at a predetermined height position are stored. In the cutting device 10, the positional relationship between the top surface of the CCS block 300 and the top surface of the cutting table 201 in FIG. 2 is stored in advance.

The control unit 500 controls the height position of the spindle unit 110 so that the blade 101 blocks the light beam emitted by the light emitting unit 401 (step S120). Then, control coordinates in the Z-axis direction when the blade 101 exists at a predetermined height position are stored.

Control unit 500 calculates the diameter of blade 101 based on the difference between the control coordinates stored in step S110 and the control coordinates stored in step S120. Note that in the cutting device 10, the relationship between the difference between the control coordinates stored in step S110 and the control coordinates stored in step S120 and the diameter of the blade 101 is stored in advance. Furthermore, the control unit 500 determines whether the blade 101 is worn or chipped based on whether the diameter of the blade 101 is shorter than a predetermined value (step S130). For example, if the blade 101 is worn or chipped, an alert is displayed on a screen (not shown).

The control unit 500 controls the spindle unit 110 to adjust the height position of the spindle unit 110 based on the detected diameter of the blade 101 (step S140). The control unit 500 controls the spindle unit 110 to cut the workpiece W1 while adjusting the height position of the spindle unit 110 (step S150).

[5. Features]
As described above, in the cutting device 10, the detector 400 is attached to the support 105. Therefore, according to the cutting device 10, it is possible to detect that at least a portion of the spindle section 110 exists at a predetermined height position, regardless of the position of the spindle section 110 in the horizontal direction. Further, according to the cutting device 10, the control coordinate origin in the height direction of the spindle part 110 and the wear state and chipped state of the blade 101 can be detected regardless of the position of the spindle part 110 in the horizontal direction. Can be done. By performing various detection operations related to the spindle section 110 in a place where the work holding unit 200 etc. do not interfere with other operations, the work holding unit 200 etc. can perform other operations at the time of each detection. As a result, the productivity of cut products does not decrease. Moreover, since the detector 400 moves together with the support 105, when the spindle part 110 moves, the detector 400 does not block the movement of the spindle part 110, and the detector 400 does not get in the way. Further, since the detector 400 moves together with the support 105, the spindle section 110 does not need to move near the detector 400 for various detections. As a result, the amount of movement of the spindle section 110 can be reduced.

Further, in the cutting device 10, the angle formed by the traveling direction of the light beam emitted by the light emitting part 401 and the direction in which the rotation axis of the blade 101 extends is larger than 0°. That is, the traveling direction of the light beam emitted by the light emitting section 401 is oblique to the direction in which the rotation axis of the blade 101 extends. Thereby, there is no need to arrange the light emitting section 401 and the light receiving section 402 outside the end of the support body 105 in the X-axis direction (FIG. 1), so it is possible to suppress the cutting device 10 from increasing in size.

[6. Other embodiments]
The idea of the above embodiments is not limited to the embodiments described above. Hereinafter, an example of another embodiment to which the idea of the above embodiment can be applied will be described.

In the embodiment described above, the angle formed by the traveling direction of the light beam emitted by the light emitting section 401 and the direction in which the rotation axis of the blade 101 extends was larger than 0°. However, the angle formed by the traveling direction of the light beam emitted by the light emitting part 401 and the direction in which the rotation axis of the blade 101 extends does not necessarily have to be larger than 0°. For example, the angle formed by the traveling direction of the light beam emitted by the light emitting unit 401 and the direction in which the rotation axis of the blade 101 extends may be 0°.

Further, in the above embodiment, the spindle portion 110 is moved in the directions of the arrows X and Y. However, the spindle section 110 does not necessarily have to move in the XY directions of the arrows. For example, instead of the spindle section 110 not moving in the XY directions, the work holding unit 200 may move in the XY directions to transport the work W1 to the cutting position below the spindle section 110.

FIG. 9 is a diagram illustrating an example of a cutting device when the work holding unit 200 moves in the XY directions of the arrows. In the cutting device 10A shown in the upper part of FIG. 9, the cutting table 201A moves in the arrow XY direction, and in the cutting device 10B shown in the lower part of FIG. 9, the cutting table 201B moves in the arrow XY direction. In the cutting device 10A, the traveling direction of the light beam emitted by the light emitting section 401A is oblique to the direction in which the rotation axis of the blade 101A extends.

On the other hand, in the cutting device 10B, a detector 400B is provided next to the cutting table 201B. By disposing the detector 400B next to the cutting table 201B, the movement range of the spindle portion 110B in the arrow X direction becomes wider than that of the cutting device 10A. That is, the cutting device 10B is larger than the cutting device 10A. In this way, even when the workpiece holding unit 200 moves in the XY directions, by making the traveling direction of the light beam emitted by the light emitting section 401A oblique to the direction in which the rotation axis of the blade 101A extends, the apparatus can be moved. The size can be reduced.

Furthermore, in the embodiment described above, the control coordinate origin in the height direction of the spindle section 110 is detected by using the CCS block 300. However, the control coordinate origin in the height direction of the spindle section 110 does not necessarily need to be detected by using the CCS block 300. The origin of the control coordinates in the height direction of the spindle portion 110 may be detected by using, for example, a touch sensor that detects contact with the blade 101. In either example, detection is performed based on the conduction state of the auxiliary member. Further, the part that comes into contact with the CCS block 300 or the touch sensor when detecting the control coordinate origin does not necessarily have to be the blade 101. For example, the reference dog 107 of the spindle section 110 may contact the CCS block 300, a touch sensor, or the like.

FIG. 10 is a diagram for explaining an example in which the control coordinate origin is detected by bringing the reference dog 107 into contact with the CCS block 300. As shown in FIG. 10, in the cutting device 10C, the control coordinate origin in the height direction of the spindle portion 110 is detected by bringing the reference dog 107 into contact with the CCS block 300.

Further, in the above embodiment, in step S130 of FIG. 8, the diameter of the blade 101 is calculated based on the difference between the control coordinates stored in step S110 and the control coordinates stored in step S120. However, the control coordinates in step S110 do not necessarily have to be used to calculate the diameter of the blade 101. For example, the diameter of the blade 101 may be calculated based on the difference between the origin of the control coordinates stored in step S100 and the control coordinates stored in step S120. In this case, the relationship between the difference between the origin of the control coordinates stored in step S100 and the control coordinates stored in step S120 and the diameter of the blade 101 is stored in advance in the cutting device 10. Furthermore, in this case, the spindle portion 110 does not need to include the reference dog 107.

Further, as described above, the configuration of each optical system included in the detector 400 is not limited to the optical systems 610 and 612.

FIG. 11 is a diagram for explaining another example of the optical system. As shown in FIG. 11, the detector 400D includes a light emitting section 401D and a light receiving section 402D. The light emitting section 401D includes a light emitting element 601 and an optical system 610D. The light receiving section 402D includes a light receiving element 609 and an optical system 612D. Light emitted by the light emitting element 601 reaches the light receiving element 609 via optical systems 610D and 612D. The state of light detection by the light receiving element 609 is notified to the control unit 500.

Optical system 610D includes lenses 604D and 650D, and a wedge mirror 605. In the optical system 610D, a lens 650D, a lens 604D, and a wedge mirror 605D are arranged in order from the light emitting element 601 side. Lens 650D is composed of a single-convex lens with an infinite conjugate ratio design. In the lens 650D, a convex portion is formed on the lens 604D side. The focal length of the lens 650D is, for example, 10 mm. The light emitting element 601 is placed at the focal point of the lens 650D. The light emitted by the light emitting element 601 becomes substantially parallel to the rotation axis of the blade 101 by passing through the lens 650D.

Lens 604D is composed of a single-convex lens with an infinite conjugate ratio design. In the lens 604D, a convex portion is formed on the lens 650D side. The focal length of the lens 604D is, for example, 400 mm. The light transmitted through the lens 604D is slightly refracted. Wedge mirror 605D is configured to bend the light beam transmitted through lens 604D by a predetermined angle (for example, 10°).

Optical system 612D includes a wedge mirror 606D and lenses 607D and 651D. In the optical system 612D, a lens 651D, a lens 607D, and a wedge mirror 606D are arranged in order from the light receiving element 609 side. The wedge mirror 606D is configured to bend the light beam emitted by the light emitting section 401D by a predetermined angle (for example, 10 degrees). The lens 607D is composed of a single convex lens with an infinite conjugate ratio design. In the lens 607D, a convex portion is formed on the lens 651D side. The focal length of the lens 607D is, for example, 400 mm. The light transmitted through the lens 607D is slightly refracted and becomes substantially parallel to the rotation axis of the blade 101.

The lens 651D is composed of a single convex lens with an infinite conjugate ratio design. In the lens 651D, a convex portion is formed on the lens 607D side. The focal length of the lens 651D is, for example, 10 mm. The light receiving element 609 is placed at the focal point of the lens 651D. The light transmitted through the lens 651D is detected with high precision by the light receiving element 609.

The light beam emitted by the light emitting section 401D is focused between the light emitting section 401D and the light receiving section 402D. For example, at this focused position, if the light beam emitted by the light emitting section 401D is blocked by the blade 101, the light beam will no longer enter the light receiving element 609. When light is no longer detected by the light receiving element 609, it is detected that the blade 101 is present at a predetermined height position. The condensed light diameter at the focused position is, for example, 0.3 mm.

In such an optical system, the light transmitted through the lens 650D is approximately parallel to the rotation axis of the blade 101. Further, the light transmitted through the lens 607D becomes approximately parallel to the rotation axis of the blade 101. Therefore, no optical problem occurs even if the distance between the lens 604D and the lens 650D and the distance between the lens 607D and the lens 651D are shortened. Therefore, by shortening these distances, the size of the detector 400D can be reduced.

The embodiments of the present invention have been exemplarily described above. That is, the detailed description and accompanying drawings have been disclosed for purposes of illustration. Therefore, some of the components described in the detailed description and the attached drawings may not be essential for solving the problem. Therefore, just because non-essential components are described in the detailed description and accompanying drawings, such non-essential components should not be immediately identified as essential.

Furthermore, the above embodiments are merely illustrative of the present invention in all respects. Various improvements and changes can be made to the above embodiments within the scope of the present invention. That is, in implementing the present invention, specific configurations can be adopted as appropriate depending on the embodiment.

Reference Signs List 10 cutting device, 100 cutting unit, 101 blade, 102 spindle body, 103, 104 slider, 105 support (an example of moving part), 106 guide, 107 reference dog, 110 spindle, 200 work holding unit, 201 cutting table , 202 rubber, 300 CCS block, 400, 400D detector, 401, 401D light emitting section, 402, 402D light receiving section, 500 control section, 601 light emitting element, 602 pinhole, 603, 608 aperture, 604, 607, 604D, 607D , 650D, 651D lens, 605, 606, 605D, 606D wedge mirror, 609 light receiving element, 610, 612, 610D, 612D optical system, G1, G2 guide, W1 work.

Claims (5)

a spindle section including a blade for cutting the workpiece;
a moving section configured to hold the spindle section and move the spindle section in a horizontal direction;
comprising a light emitting part and a light receiving part that receives the light beam emitted by the light emitting part, and a detector attached to the moving part,
the detector is configured to detect that at least a portion of the spindle portion interrupts the light beam ;
The cutting device , wherein the angle formed by the traveling direction of the light beam emitted by the light emitting part and the direction in which the rotating shaft of the blade extends is larger than 0° . The cutting device according to claim 1 , further comprising a control section configured to detect a diameter of the blade based on a detection result by the detector. The cutting device according to claim 1 or 2 , wherein the control unit is configured to make a determination regarding a worn state or a chipped state of the blade based on a detection result by the detector. The cutting device according to any one of claims 1 to 3, wherein the workpiece is a resin-molded substrate. A method for manufacturing a cut product, the method comprising manufacturing a cut product by cutting the workpiece using the cutting device according to any one of claims 1 to 4.