KR102644561B1 - Cutting devices and manufacturing methods of cutting products - Google Patents

Abstract

Provided is a cutting device capable of determining the height position of at least a portion of the spindle portion, regardless of the horizontal position of the spindle portion.
The cutting device has a spindle part, a moving part, and a detector. The spindle unit includes a blade that cuts the work. The moving part is configured to hold the spindle part and move the spindle part in the horizontal direction. The detector includes a light emitting unit and a light receiving unit that receives the light emitted by the light emitting unit, and is installed in the moving unit. The detector is configured to detect that at least a portion of the spindle portion blocks the light beam.

Description

CUTTING DEVICES AND MANUFACTURING METHODS OF CUTTING PRODUCTS}

The present invention relates to a cutting device and a method of manufacturing a cut product.

Japanese Patent Application Laid-Open No. 2014-192271 (Patent Document 1) discloses a cutting device that performs cutting processing on a workpiece. This cutting device includes blade detection means for detecting the cutting degree. The blade detection means includes a light emitting unit and a light receiving unit. The blade detection means detects that the cutting edge is at a predetermined height position as the cutting edge blocks the light emitted by the light emitting unit. Based on this detection result, the wear amount of the cutting edge is detected. In this cutting device, blade detection means is provided on a moving table that holds and supports the chuck table (see Patent Document 1).

Japanese Patent Publication No. 2014-192271

In the cutting device disclosed in Patent Document 1, detection of the cutting edge being at a predetermined height is possible only in the vicinity of the chuck table. In other words, the places where it can be detected that the cutting edge exists at a predetermined height are limited.

The present invention was made to solve this problem, and its purpose is to provide a cutting device, etc. that can detect that at least a portion of the spindle portion is at a predetermined height, regardless of the position of the spindle portion in the horizontal direction.

A cutting device according to a certain aspect of the present invention includes a spindle portion, a moving portion, and a detector. The spindle unit includes a blade that cuts the work. The moving part is configured to hold the spindle part and move the spindle part in the horizontal direction. The detector includes a light emitting unit and a light receiving unit that receives the light emitted by the light emitting unit, and is installed in the moving unit. The detector is configured to detect that at least a portion of the spindle portion blocks the light beam.

In the method of manufacturing a cut product according to another aspect of the present invention, a cut product is manufactured by cutting a workpiece using the above-mentioned cutting device.

According to the present invention, it is possible to provide a cutting device, etc. capable of detecting that at least a portion of the spindle portion is at a predetermined height, regardless of the position of the spindle portion in the horizontal direction.

1 is a diagram schematically showing a plan view of a part of a cutting device.
Fig. 2 is a diagram schematically showing the front of a part of the cutting device.
Figure 3 is a diagram for explaining the detection procedure of the control coordinate origin using a CCS block.
Figure 4 is a diagram showing the relationship between the spindle unit and the detector.
Figure 5 is a diagram for explaining an example of the optical configuration of the detector.
Fig. 6 is a diagram schematically showing the plane of a part of the cutting device that is the object of comparison.
Figure 7 is a diagram for explaining the process of moving the reference dog to a predetermined height.
Fig. 8 is a flowchart showing the manufacturing procedure of the cut product in the cutting device.
Fig. 9 is a diagram showing an example of a cutting device when the work holding unit moves in the arrow XY direction.
Figure 10 is a diagram for explaining an example of detecting the control coordinate origin by contacting the reference dog with the CCS block.
Figure 11 is a diagram for explaining another example of an optical system.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same or significant parts in the drawings are given the same reference numerals and their descriptions are not repeated.

[One. Configuration of cutting device]

FIG. 1 is a diagram schematically showing a partial plane of the cutting device 10 according to the present embodiment. FIG. 2 is a diagram schematically showing a partial front view of the cutting device 10. Additionally, in each drawing, the directions indicated by arrows XYZ are common.

The cutting device 10 is configured to separate the work W1 into a plurality of cut products by cutting the work W1 (full cut). Additionally, the cutting device 10 is configured to form a groove in the work W1 by removing a part of the work W1 (half cut). That is, the concept of the term “cutting” included in the name (cutting device) of the cutting device 10 includes dividing the cutting object into plural pieces and removing a part of the cutting object. The work W1 is, for example, a package substrate. In a package substrate, a substrate or lead frame on which a semiconductor chip is mounted is sealed with resin. That is, the work W1 is a resin molded substrate. In the following description, the surface on the sealing side of the work W1 is referred to as the “package surface,” and the surface on the substrate or lead frame side is also referred to as the “substrate surface.”

Examples of package substrates include BGA (Ball Grid Array) package substrate, LGA (Land Grid Array) package substrate, CSP (Chip Size Package) package substrate, LED (Light Emitting Diode) package substrate, and QFN (Quad Flat No-leaded) package. A substrate may be included.

As shown in FIGS. 1 and 2, the cutting device 10 includes a cutting unit 100, a work holding unit 200, a contact cutter set (CCS) block 300, and a detector 400. And, it includes a control unit 500.

The cutting unit 100 is configured to cut the work W1 and includes a spindle portion 110, sliders 103 and 104, a support body 105, and a guide 106. In addition, the cutting device 10 has a twin spindle configuration including two sets of the spindle unit 110 and the sliders 103 and 104, but only one set of the spindle unit 110 and the sliders 103 and 104. It may be a single spindle configuration including:

The guide 106 is a metal rod-shaped member and extends in the arrow Y direction. The support body 105 is a metal rod-shaped member and is configured to move in the arrow Y direction along the guide 106. A guide G1 extending in the long side direction (arrow X direction) is formed on the support body 105. The support body 105 is an example of a moving part in the present invention.

The slider 104 is a metal, rectangular plate-shaped member, and is installed on the support body 105 in a state that can move in the direction of arrow X along the guide G1. A guide G2 extending in the long side direction (arrow Z direction) is formed on the slider 104. The slider 103 is a metal, rectangular plate-shaped member, and is installed on the slider 104 in a state that can be moved in the height direction (arrow Z direction) along the guide G2.

The spindle unit 110 includes a spindle unit main body 102, a blade 101 installed on the spindle unit main body 102, and a reference dog 107 installed on the spindle unit main body 102. The blade 101 rotates at high speed to cut the work W1 and separate the work W1 into a plurality of cut products (semiconductor packages). The reference dog 107 is a protrusion protruding downward from the spindle main body 102 and is used to detect the wear state and cut state of the blade 101. The reference dog 107, unlike the blade 101, is hardly worn. The reference dog 107 is used to specify a reference height position, for example, when detecting the wear state and cut state of the blade 101. The reference dog 107 will be explained in detail later.

The spindle unit main body 102 is installed on the slider 103. The spindle portion 110 is configured to move to a desired position within the cutting device 10 in accordance with the horizontal or vertical movement of the sliders 103 and 104 and the support body 105.

The work holding unit 200 is configured to hold the work W1 and includes a cutting table 201 and a rubber 202 disposed on the cutting table 201. In this embodiment, a cutting device 10 having a twin cut table configuration having two work holding units 200 is illustrated. Additionally, the number of work holding units 200 is not limited to two, and may be one or three or more.

The rubber 202 is a plate-shaped member made of rubber, and a plurality of holes are formed in the rubber 202. A work W1 is disposed on the rubber 202. The cutting table 201 holds the work W1 placed on the rubber 202 by adsorbing the work W1 from the package surface side below. The cutting table 201 is rotatable in the θ direction. The work W1 is cut by the spindle unit 110 from the substrate surface side while being held by the work holding unit 200. In addition, the work holding unit 200 does not necessarily include the rubber 202, and instead of the rubber 202, it includes another member for adsorbing the work W1 disposed above from the lower package surface side. You can do it.

The CCS block 300 is used to detect the control coordinate origin in controlling the height position of the spindle unit 110. The control coordinate origin is a control reference position in the height direction of the spindle unit 110 and includes, for example, the electrical origin.

FIG. 3 is a diagram for explaining the detection procedure of the control coordinate origin using the CCS block 300. In the cutting device 10, the height H1 of the CCS block 300 is stored in advance. As shown in FIG. 3, in the cutting device 10, the control coordinate origin in the height direction of the spindle portion 110 is detected by bringing the blade 101 into contact with the CCS block 300.

Additionally, detection of the control coordinate origin using the CCS block 300 places a relatively large load on the blade 101 in order to physically contact the blade 101 with the CCS block 300. Therefore, in the cutting device 10, detection of the control coordinate origin using the CCS block 300 is performed at a limited timing, such as after the blade 101 is replaced.

Referring again to FIGS. 1 and 2, the detector 400 detects, for example, at least a portion of the spindle unit 110 (e.g., the blade 101 and the reference dog 107) at a predetermined height position. It is used for detection of the wear state and cut state of the blade 101 (diameter of the blade 101), and detection of the control coordinate origin in controlling the height position of the spindle portion 110.

The detector 400 includes a light emitting unit 401 and a light receiving unit 402. The light emitting unit 401 is configured to emit light rays toward the light receiving unit 402 . The light receiving unit 402 is configured to receive light emitted by the light emitting unit 401. Each of the light emitting unit 401 and the light receiving unit 402 is installed on the support body 105. That is, the light emitting unit 401 and the light receiving unit 402 move in the horizontal direction together with the support body 105.

The light emitting unit 401 is installed near one end of the support body 105 in the long side direction, and the light receiving unit 402 is installed near the other end of the support body 105 in the long side direction. For example, if the support 105 is divided into three areas at equal intervals along the long side, the light emitting unit 401 is installed in the area of one end, and the light receiving unit 402 is installed in the area of the other end. do.

FIG. 4 is a diagram showing the relationship between the spindle unit 110 and the detector 400. In the cutting device 10, the respective height positions of the light emitting unit 401 and the light receiving unit 402 are stored in advance. Additionally, the respective height positions of the light emitting unit 401 and the light receiving unit 402 are the same. As shown in FIG. 4, in the cutting device 10, the control unit 500 (FIG. 1), for example, moves the blade 101 between the light emitting unit 401 and the light receiving unit 402 in the arrow X direction. In the state existing in, the blade 101 is moved downward. The control unit 500 detects that the blade 101 is at a predetermined height position by detecting that the light ray is blocked by the blade 101. Additionally, the control unit 500 detects the origin of the control coordinate in the height direction of the spindle unit 110 by detecting that the light beam is blocked by the blade 101.

Additionally, since detection of the control coordinate origin using the detector 400 does not cause the blade 101 to contact an object such as the CCS block 300, a large load is not applied to the blade 101. Therefore, in the cutting device 10, detection of the control coordinate origin using the detector 400 is performed, for example, each time cutting of one workpiece W1 is completed. That is, detection of the control coordinate origin using the detector 400 is performed more frequently than detection of the control coordinate origin using the CCS block 300. Additionally, detection of the control coordinate origin does not necessarily need to be performed by both methods, and may be performed by only one method.

Additionally, as described above, the detector 400 is also used to detect the wear state and cut state (diameter of the blade 101) of the blade 101. Methods for detecting the wear state and cut state of the blade 101 will be described in detail later.

FIG. 5 is a diagram for explaining an example of the optical configuration of the detector 400. As shown in FIG. 5, the light emitting unit 401 includes a light emitting element 601 and an optical system 610. The light receiving unit 402 includes a light receiving element 609 and an optical system 612. The light-emitting element 601 is made of, for example, a fiber on the light-emitting side of a fiber sensor, and the light-receiving element 609 is made of, for example, a fiber on the light-receiving side of a fiber sensor. The light emitting element 601 emits light in a direction substantially parallel to the direction in which the rotation axis of the blade 101 extends, and the light receiving element 609 emits light in a direction substantially parallel to the direction in which the rotation axis of the blade 101 extends. Receives the arriving light rays. The control unit 500 is notified of the detection state of light by the light receiving element 609. Additionally, detector 400 does not necessarily need to be realized by a fiber sensor. The detector 400 may be realized by, for example, an LED and a light receiving element that receives light emitted by the LED.

The optical system 610 includes a pinhole 602, an aperture 603, a lens 604, and a wedge mirror 605. In the optical system 610, a pinhole 602, an aperture 603, a lens 604, and a wedge mirror 605 are arranged in order from the light emitting element 601 side. The pinhole 602 is configured to set the spot diameter of light emitted from the light emitting element 601 to a predetermined diameter. The lens 604 is composed of a biconvex lens with a unit conjugate ratio design. The aperture 603 is disposed at the focal position of the lens 604. As a result, the transmitted light becomes parallel light. In other words, the optical system 610 can be said to be a telecentric optical system. The wedge mirror 605 is configured to bend the light ray emitted by the light emitting element 601 at a predetermined angle (for example, 10°). As a result, the angle formed by the direction in which the light beam emitted by the light emitting unit 401 extends and the direction in which the rotation axis of the blade 101 extends becomes a predetermined angle greater than 0° (for example, 10°). .

The optical system 612 includes a wedge mirror 606, a lens 607, and an aperture 608. In the optical system 612, an aperture 608, a lens 607, and a wedge mirror 606 are arranged in order from the light receiving element 609 side. The wedge mirror 606 is configured to bend the light beam emitted by the light emitting unit 401 at a predetermined angle (for example, 10°). The direction in which the light beam bent by the wedge mirror 606 travels is substantially parallel to the direction in which the rotation axis of the blade 101 extends. The lens 607 is composed of a biconvex lens with a unit conjugate ratio design. The aperture 608 is disposed at the focal position of the lens 607. In other words, the optical system 612 can be said to be a telecentric optical system.

When the light ray emitted by the light emitting unit 401 is blocked by the blade 101, the ray does not enter the light receiving element 609. In the cutting device 10, as light is no longer detected by the light receiving element 609, it is detected that the blade 101 is at a predetermined height position. In addition, the optical configuration of the detector 400 shown in FIG. 5 is only an example, and the detector 400 may be realized with other configurations.

Referring again to FIGS. 1 and 2, the control unit 500 includes a CPU (Central Processing Unit), RAM (Random Access Memory), and ROM (Read Only Memory), and controls each component according to information processing. It is structured to do this. The control unit 500 is configured to control the cutting unit 100, the work holding unit 200, and the detector 400, for example.

As described above, in the cutting device 10, the detector 400 is installed on the support body 105. Next, the reason why the detector 400 is installed on the support body 105 in the cutting device 10 will be explained.

[2. [Why the detector is installed on the support (moving part)]

FIG. 6 is a diagram schematically showing a partial plane of the cutting device 10X as a comparison object. As shown in Fig. 6, the cutting device 10X includes a detector 400X instead of the detector 400 described above. The detector 400X is not installed on the support 105X and is independent from the support 105X.

The cutting device 10X includes two detectors 400X. Each detector 400X is arranged near the work holding unit 200. Each detector 400X includes a light emitting unit and a light receiving unit, and is configured to detect blocking of light by the blade 101. One detector 400X is used to detect that a part of the spindle part 110 on one side is at a predetermined height position, and the other detector 400X is used to detect that a part of the spindle part 110 on the other side is at a predetermined height position. It is used for detection of objects present at height positions.

In this case, for example, detection of the presence of a portion of the spindle portion 110 at a predetermined height position is possible only at the location where the detector 400X is placed. That is, in order to perform such detection, it is necessary to move the blade 101 to the location of the detector 400X. When the blade 101 is located at the location of the detector 400X, other operations by, for example, the work holding unit 200 are restricted. For example, the transfer operation and rotation movement of the work W1 are limited. As a result, the productivity of the cut product decreases.

Additionally, as described above, each detector 400X is located near the work holding unit 200. Therefore, when cutting the work W1, cutting water (processing fluid) easily enters the detector 400X.

In the cutting device 10 according to this embodiment, the detector 400 is installed on the support body 105, and the detector 400 moves together with the support body 105. Therefore, according to the cutting device 10, it is possible to detect that at least a portion of the spindle portion 110 is at a predetermined height position, regardless of the position of the spindle portion 110 in the horizontal direction. In addition, according to the cutting device 10, the control coordinate origin is detected in the height direction of the spindle portion 110, regardless of the position of the spindle portion 110 in the horizontal direction, and the wear of the blade 101 is detected. Detection of state and cut state can be performed.

By performing various detection operations on the spindle unit 110 in a location that does not interfere with other operations of the work holding unit 200, etc., the work holding unit 200, etc. performs other operations during each detection. can be done. As a result, the productivity of the cut product does not decrease. Additionally, because the detector 400 moves together with the support 105, when the spindle portion 110 moves, the detector 400 does not block the movement of the spindle portion 110, and the detector 400 does not block the movement of the spindle portion 110. doesn't work Additionally, since the detector 400 moves together with the support body 105, the spindle unit 110 does not need to move close to the detector 400 for various types of detection. As a result, the amount of movement of the spindle unit 110 can be reduced. Additionally, since each of the light emitting portion 401 and the light receiving portion 402 is located near the end of the support body 105, there is a low possibility that cutting water enters the detector 400 when the workpiece W1 is cut. For the above reasons, the detector 400 is installed on the support 105.

[3. [Method for determining blade wear and cutting conditions]

The diameter of the blade 101 is detected based on the difference in relative positions of the blade 101 and the reference dog 107 in the height direction. Additionally, the control unit 500 determines that the blade 101 is in a worn state or notched state when the diameter of the blade 101 is shorter than a predetermined value.

Figure 7 is a diagram for explaining the process of moving the reference dog 107 to a predetermined height. As shown in FIG. 7, the control unit 500 (FIG. 1) operates with the reference dog 107 present between the light emitting unit 401 and the light receiving unit 402 in the arrow X direction. ) moves downward. The control unit 500 detects that the reference dog 107 exists at a predetermined height position by detecting that the light ray is blocked by the reference dog 107. The control unit 500 stores control coordinates in the Z-axis direction. In addition, when detecting that the reference dog 107 is at a predetermined height position, the blade 101 is separated from the spindle main body 102, but the blade 101 is not necessarily separated from the spindle main body 102. There is no need to be

Referring again to FIG. 4, after the control coordinates in the Z-axis direction at the time when it is detected that the reference dog 107 exists at a predetermined height position are stored, the blade 101 is installed in the spindle unit main body 102. is installed. The control unit 500 (FIG. 1) moves the blade 101 downward, for example, with the blade 101 existing between the light emitting unit 401 and the light receiving unit 402 in the arrow X direction. The control unit 500 detects that the blade 101 is at a predetermined height position by detecting that the light ray is blocked by the blade 101. Additionally, the detection accuracy of the blade 101 can be further improved by moving the blade 101 downward from the position that is the focus of both the light emitting unit 401 and the light receiving unit 402. The control unit 500 stores control coordinates in the Z-axis direction. The control unit 500 provides control coordinates in the Z-axis direction when the reference dog 107 is present at a predetermined height position and in the Z-axis direction when the blade 101 is present at a predetermined height position. The diameter of the blade 101 is calculated based on the difference in the control coordinates. Additionally, in the cutting device 10, the relationship between the difference in control coordinates and the diameter of the blade 101 is stored in advance.

Additionally, when the calculated diameter of the blade 101 is shorter than the predetermined value, the control unit 500 determines that the blade 101 is in a worn state or a notched state. By the above method, detection of the diameter of the blade 101 and determination of the wear state and notch state of the blade 101 are made.

[4. movement]

FIG. 8 is a flowchart showing the manufacturing procedure of the cut product in the cutting device 10. The process shown in this flowchart is performed when cutting the work W1 after the blade 101 has been replaced.

Referring to FIG. 8, the control unit 500 controls the spindle unit 110 to bring the blade 101 into contact with the CCS block 300 in order to detect the control coordinate origin in the height direction of the spindle unit 110. Control (step S100). The control unit 500 controls the height position of the spindle unit 110 so that the reference dog 107 blocks the light ray emitted by the light emitting unit 401 (step S110). Then, control coordinates in the Z-axis direction when the reference dog 107 exists at a predetermined height position are stored. In addition, in the cutting device 10, the positional relationship between the upper surface of the CCS block 300 and the upper surface of the cutting table 201 in FIG. 2 is stored in advance.

The control unit 500 controls the height position of the spindle unit 110 so that the blade 101 blocks the light ray emitted by the light emitting unit 401 (step S120). Then, control coordinates in the Z-axis direction when the blade 101 is present at a predetermined height position are stored.

The control unit 500 calculates the diameter of the blade 101 based on the difference between the control coordinates stored in step S110 and the control coordinates stored in step S120. Additionally, in the cutting device 10, the relationship between the difference between the control coordinates stored in step S110 and the control coordinates stored in step S120 and the diameter of the blade 101 is stored in advance. Additionally, the control unit 500 determines whether the blade 101 is in a worn state or a cut state based on whether the diameter of the blade 101 is shorter than a predetermined value (step S130). For example, if the blade 101 is worn or notched, a warning is displayed on a screen (not shown).

The control unit 500 controls the spindle unit 110 to adjust the height position of the spindle unit 110 based on the detected diameter of the blade 101 (step S140). The control unit 500 controls the spindle unit 110 to cut the work W1 while adjusting the height position of the spindle unit 110 (step S150).

[5. characteristic]

As described above, in the cutting device 10, the detector 400 is installed on the support body 105. Therefore, according to the cutting device 10, it is possible to detect that at least a portion of the spindle portion 110 is at a predetermined height position, regardless of the position of the spindle portion 110 in the horizontal direction. In addition, according to the cutting device 10, the control coordinate origin is detected in the height direction of the spindle portion 110, regardless of the position of the spindle portion 110 in the horizontal direction, and the wear of the blade 101 is detected. Detection of state and cut state can be performed. By performing various detection operations on the spindle unit 110 in a location that does not interfere with other operations of the work holding unit 200, etc., the work holding unit 200, etc. performs other operations during each detection. can be done. As a result, the productivity of the cut product does not decrease. Additionally, because the detector 400 moves together with the support 105, when the spindle portion 110 moves, the detector 400 does not block the movement of the spindle portion 110, and the detector 400 does not block the movement of the spindle portion 110. doesn't work Additionally, since the detector 400 moves together with the support body 105, the spindle unit 110 does not need to move close to the detector 400 for various types of detection. As a result, the amount of movement of the spindle unit 110 can be reduced.

Additionally, in the cutting device 10, the angle formed by the direction in which the light beam emitted by the light emitting unit 401 travels and the direction in which the rotation axis of the blade 101 extends is greater than 0°. That is, the direction of travel of the light emitted by the light emitting unit 401 is inclined with respect to the direction in which the rotation axis of the blade 101 extends. As a result, there is no need to arrange the light emitting unit 401 and the light receiving unit 402 outside the end of the support 105 in the there is.

[6. Other embodiments]

The idea of the above embodiment is not limited to the embodiment described above. Hereinafter, an example of another embodiment to which the spirit of the above embodiment can be applied will be described.

In the above embodiment, the angle formed by the direction in which the light ray emitted from the light emitting unit 401 extends and the direction in which the rotation axis of the blade 101 extends was greater than 0°. However, the angle formed by the direction in which the light beam emitted from the light emitting unit 401 travels and the direction in which the rotation axis of the blade 101 extends does not necessarily have to be greater than 0°. For example, the angle formed by the direction in which the light beam emitted by the light emitting unit 401 travels and the direction in which the rotation axis of the blade 101 extends may be 0°.

Additionally, in the above embodiment, the spindle portion 110 moves in the arrow XY direction. However, the spindle unit 110 does not necessarily have to move in the arrow XY direction. For example, instead of the spindle unit 110 moving in the arrow XY direction, the work holding unit 200 moves in the arrow You may return it to .

FIG. 9 is a diagram showing an example of a cutting device when the work holding unit 200 moves in the arrow XY direction. In the cutting device 10A shown above in FIG. 9, the cutting table 201A moves in the arrow XY direction, and in the cutting device 10B shown below in FIG. 9, the cutting table 201B moves in the arrow XY direction. Go to In the cutting device 10A, the direction of travel of the light emitted by the light emitting unit 401A is inclined with respect to the direction in which the rotation axis of the blade 101A extends.

On the other hand, in the cutting device 10B, a detector 400B is provided next to the cutting table 201B. By arranging the detector 400B next to the cutting table 201B, the movement range of the spindle portion 110B in the arrow X direction becomes wider than that of the cutting device 10A. That is, the cutting device 10B is larger than the cutting device 10A. In this way, even when the work holding unit 200 moves in the direction of the arrows The size can be miniaturized.

Additionally, in the above embodiment, by using the CCS block 300, the control coordinate origin in the height direction of the spindle unit 110 was detected. However, the control coordinate origin in the height direction of the spindle unit 110 does not necessarily need to be detected by using the CCS block 300. The control coordinate origin in the height direction of the spindle portion 110 may be detected, for example, by using a touch sensor that detects contact with the blade 101. In either example, detection is performed based on the conduction state of the auxiliary member. Additionally, the part that contacts the CCS block 300 or the touch sensor, etc. when detecting the control coordinate origin does not necessarily have to be the blade 101. For example, the reference dog 107 of the spindle unit 110 may contact the CCS block 300 or a touch sensor.

FIG. 10 is a diagram for explaining an example of detecting the control coordinate origin by bringing the reference dog 107 into contact with the CCS block 300. As shown in Fig. 10, in the cutting device 10C, the control coordinate origin in the height direction of the spindle portion 110 is detected by bringing the reference dog 107 into contact with the CCS block 300.

In addition, in the above embodiment, in step S130 of FIG. 8, the diameter of the blade 101 was calculated based on the difference between the control coordinates stored in step S110 and the control coordinates stored in step S120. However, for calculating the diameter of the blade 101, the control coordinates in step S110 do not necessarily need to be used. For example, the diameter of the blade 101 may be calculated based on the difference between the control coordinate origin stored in step S100 and the control coordinate stored in step S120. In this case, the relationship between the difference between the control coordinate origin stored in step S100 and the control coordinate stored in step S120 and the diameter of the blade 101 is stored in advance in the cutting device 10. Additionally, in this case, the spindle unit 110 does not need to include the reference dog 107.

Additionally, as described above, the configuration of each optical system included in the detector 400 is not limited to the optical systems 610 and 612.

Figure 11 is a diagram for explaining another example of an optical system. As shown in FIG. 11, the detector 400D includes a light emitting portion 401D and a light receiving portion 402D. The light emitting unit 401D includes a light emitting element 601 and an optical system 610D. The light receiving portion 402D includes a light receiving element 609 and an optical system 612D. The light emitted by the light-emitting element 601 reaches the light-receiving element 609 through the optical systems 610D and 612D. The control unit 500 is notified of the detection state of light by the light receiving element 609.

The optical system 610D includes lenses 604D and 650D and a wedge mirror 605. In the optical system 610D, a lens 650D, a lens 604D, and a wedge mirror 605D are arranged in order from the light emitting element 601 side. Lens 650D is composed of a monoconvex lens with an infinite conjugate ratio design. In the lens 650D, a convex portion is formed on the lens 604D side. The focal length of the lens 650D is, for example, 10 mm. The light emitting element 601 is disposed at the focal position of the lens 650D. The light emitted by the light emitting element 601 passes through the lens 650D and becomes substantially parallel to the rotation axis of the blade 101.

The lens 604D is composed of a monoconvex lens with an infinite conjugate ratio design. In the lens 604D, a convex portion is formed on the lens 650D side. The focal length of the lens 604D is, for example, 400 mm. Light passing through the lens 604D is slightly refracted. The wedge mirror 605D is configured to bend the light ray that has passed through the lens 604D at a predetermined angle (for example, 10°).

The optical system 612D includes a wedge mirror 606D and lenses 607D and 651D. In the optical system 612D, a lens 651D, a lens 607D, and a wedge mirror 606D are arranged in order from the light receiving element 609 side. The wedge mirror 606D is configured to bend the light beam emitted by the light emitting unit 401D at a predetermined angle (for example, 10°). The lens 607D is composed of a monoconvex lens with an infinite conjugate ratio design. In the lens 607D, a convex portion is formed on the lens 651D side. The focal length of the lens 607D is, for example, 400 mm. The light passing through the lens 607D is slightly refracted and becomes approximately parallel to the rotation axis of the blade 101.

The lens 651D is composed of a monoconvex lens with an infinite conjugate ratio design. In the lens 651D, a convex portion is formed on the lens 607D side. The focal length of the lens 651D is, for example, 10 mm. The light receiving element 609 is disposed at the focal position of the lens 651D. The light passing through the lens 651D is detected with high precision by the light receiving element 609.

The light emitted by the light emitting unit 401D is focused between the light emitting unit 401D and the light receiving unit 402D. For example, at this focusing position, if the light emitted by the light emitting portion 401D is blocked by the blade 101, the light does not enter the light receiving element 609. As light is no longer detected by the light receiving element 609, it is detected that the blade 101 is at a predetermined height position. The converging diameter at the focusing position is, for example, 0.3 mm.

In this optical system, the light passing through the lens 650D is substantially parallel to the rotation axis of the blade 101. Additionally, the light passing through the lens 607D becomes approximately parallel to the rotation axis of the blade 101. Therefore, no optical problem occurs even if the distance between the lens 604D and the lens 650D and the distance between the lens 607D and the lens 651D are shortened. Therefore, by shortening these distances, the size of the detector 400D can be reduced.

Above, embodiments of the present invention have been described by way of example. That is, for illustrative purposes, the detailed description and attached drawings have been disclosed. Therefore, among the components described in the detailed description and attached drawings, components that are not essential for solving the problem may be included. Therefore, just because these non-essential components are described in the detailed description and the attached drawings, it does not mean that the non-essential components should be immediately recognized as essential.

In addition, the above embodiment is merely an example of the present invention in all respects. Various improvements and changes can be made to the above embodiment within the scope of the present invention. That is, in implementing the present invention, specific configurations can be appropriately adopted depending on the embodiment.

10: cutting device
100: cutting unit
101: blade
102: Spindle main body
103, 104: Slider
105: Support body (example of moving part)
106: Guide
107: Reference dog
110: Spindle part
200: Work holding support unit
201: cutting table
202: Rubber
300: CCS block
400, 400D: detector
401, 401D: light emitting unit
402, 402D: light receiving unit
500: Control unit
601: light emitting element,
602: pin hole
603, 608: Aperture
604, 607, 604D, 607D, 650D, 651D: Lens
605, 606, 605D, 606D: Wedge mirror
609: Light receiving element
610, 612, 610D, 612D: Optics
G1, G2: Guide
W1: Walk

Claims (6)

A spindle unit including a blade for cutting the work,
a moving unit configured to hold and support the spindle unit and move the spindle unit in a horizontal direction;
A detector including a light emitting unit and a light receiving unit that receives the light emitted by the light emitting unit, and installed on the moving unit;
Equipped with a rod-shaped guide,
The moving part is a support body that moves along the guide,
The spindle part moves along the moving part,
The detector is configured to detect that at least a portion of the spindle portion blocks the light beam,
Each of the light emitting unit and the light receiving unit is installed on one side and the other of the moving unit,
The height positions of the light emitting unit and the light receiving unit are the same,
A cutting device wherein the angle formed by the direction in which the light beam emitted by the light emitting unit travels and the direction in which the rotation axis of the blade extends is greater than 0°. The cutting device according to claim 1, further comprising a control unit configured to detect the diameter of the blade based on a detection result by the detector. The cutting device according to claim 2, wherein the control unit is configured to make a determination regarding a wear state or a cut state of the blade based on a detection result by the detector. The cutting device according to claim 1, wherein the work is a resin molded substrate. A method for manufacturing a cut product, wherein the cut product is manufactured by cutting the workpiece using the cutting device according to any one of claims 1 to 4. delete

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