JPH08288244A - Optical detecting means - Google Patents
Optical detecting meansInfo
- Publication number
- JPH08288244A JPH08288244A JP10914395A JP10914395A JPH08288244A JP H08288244 A JPH08288244 A JP H08288244A JP 10914395 A JP10914395 A JP 10914395A JP 10914395 A JP10914395 A JP 10914395A JP H08288244 A JPH08288244 A JP H08288244A
- Authority
- JP
- Japan
- Prior art keywords
- detecting means
- fluid
- optical detecting
- optical
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 29
- 239000012530 fluid Substances 0.000 claims abstract description 40
- 239000013307 optical fiber Substances 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000003595 mist Substances 0.000 abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000356 contaminant Substances 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000002173 cutting fluid Substances 0.000 description 10
- 238000011109 contamination Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 206010067482 No adverse event Diseases 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Dicing (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体ウェーハ等を切
削する切削装置の光学検出手段に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical detecting means of a cutting device for cutting a semiconductor wafer or the like.
【０００２】[0002]
【従来の技術】半導体ウェーハ等を切削するダイサーに
おいては、図８に示すように回転ブレード１のセットア
ップ時にその基準位置を検出したり、或は使用時での回
転ブレードの摩耗等を検出したりするため、回転ブレー
ド１の外周端部を検出する光学検出手段Ｓが、図１に示
す如く移動台Ｍ上の領域Ｒに配設されている。この光学
検出手段Ｓは、従来例えば図９に示すようにホルダＨの
上部に凹陥部Ｑが形成され、この凹陥部Ｑの内側面に発
光素子Ｌと受光素子Ｐとからなる検出部が対設され、ス
ピンドルユニットＵを降下させ回転ブレード１を凹陥部
Ｑ内に挿入して回転ブレード１の基準位置等を光学的に
検出出来るようにしてある。2. Description of the Related Art In a dicer for cutting a semiconductor wafer or the like, as shown in FIG. 8, the reference position of the rotary blade 1 is detected when it is set up, or the wear of the rotary blade during use is detected. Therefore, the optical detecting means S for detecting the outer peripheral end of the rotary blade 1 is arranged in the region R on the moving table M as shown in FIG. In the optical detecting means S, a concave portion Q is conventionally formed in the upper portion of a holder H as shown in FIG. 9, for example, and a detecting portion composed of a light emitting element L and a light receiving element P is provided opposite to the inner side surface of the concave portion Q. Then, the spindle unit U is lowered and the rotary blade 1 is inserted into the recess Q so that the reference position and the like of the rotary blade 1 can be optically detected.
【０００３】[0003]
【発明が解決しようとする課題】上記のような従来の光
学検出手段Ｓによると、半導体ウェーハ等の切削中に発
生するミスト及びコンタミ等が検出部に付着し、回転ブ
レード１の基準位置等を正確に検出出来ないことがあ
る。又、ブレードカバーＣに取り付けられた切削液供給
管Ｄが、検出時にホルダＨに接触することがあり、この
ため切削液供給管Ｄを標準より上に位置させねばならな
くなってチッピングや切れ味等に悪影響を及ぼす問題が
ある。本発明は、このような従来の問題を解決するため
になされ、検出部にコンタミが付着するのを未然に防止
し、又それと共に検出時に切削液供給管がホルダに接触
しないようにした、光学検出手段を提供することを課題
とする。According to the conventional optical detecting means S as described above, the mist, the contamination and the like generated during the cutting of the semiconductor wafer and the like adhere to the detecting portion and the reference position of the rotary blade 1 and the like are detected. It may not be detected accurately. Further, the cutting fluid supply pipe D attached to the blade cover C may come into contact with the holder H at the time of detection. Therefore, the cutting fluid supply pipe D must be positioned above the standard, which may cause chipping or sharpness. There is a problem that has an adverse effect. The present invention has been made to solve such a conventional problem, prevents contamination from adhering to the detection portion, and prevents the cutting fluid supply pipe from coming into contact with the holder during detection. An object is to provide detection means.
【０００４】[0004]
【課題を解決するための手段】前記課題を技術的に解決
するための手段として、本発明は、半導体ウェーハ等を
切削する切削装置の回転ブレードの外周端部を検出する
光学検出手段において、この光学検出手段は発光素子、
受光素子を含み、この発光素子、受光素子の検出端部は
対向して配設されていて、その端部から流体が噴出する
ように構成されている光学検出手段を要旨とする。更
に、検出端部から発光素子、受光素子に至る経路が光フ
ァイバーで形成されており、この光ファイバーには間隙
を形成してカバーが配設され、このカバーに形成された
検出端部孔から前記間隙に供給された流体が噴出するこ
と、検出端部はサイドビュータイプであること、を要旨
とするものである。As means for technically solving the above-mentioned problems, the present invention provides an optical detecting means for detecting an outer peripheral end portion of a rotary blade of a cutting device for cutting a semiconductor wafer or the like. The optical detection means is a light emitting element,
The gist is an optical detecting means including a light-receiving element, the light-emitting element and the light-receiving element having detection ends arranged to face each other, and a fluid ejected from the ends. Further, a path from the detection end portion to the light emitting element and the light receiving element is formed by an optical fiber, and a cover is arranged to form a gap in the optical fiber, and the gap is formed from the detection end portion hole formed in the cover. The gist of the present invention is that the fluid supplied to the nozzle is jetted out and the detection end is a side-view type.
【０００５】[0005]
【作 用】検出端部からエア等の流体を噴出させること
により、コンタミ等が検出部に付着するのを未然に防止
することが出来る。又検出端部をサイドビュータイプに
形成することで、検出時における切削液供給管のホルダ
への接触を避けることが出来る。[Operation] By ejecting a fluid such as air from the detection end, it is possible to prevent contamination and the like from adhering to the detection unit. Further, by forming the detection end portion in the side view type, it is possible to avoid contact of the cutting fluid supply pipe with the holder at the time of detection.
【０００６】[0006]
【実施例】以下、本発明の実施例を添付図面に基づいて
詳説する。図１は切削装置であるダイサーの一例を示す
もので、上下動するカセット載置領域ＡにカセットＢが
載置され、このカセットＢ内に収納されたウェーハＷ
（粘着テープＮを介してフレームＦに固定）が搬出入手
段Ｅにより待機領域Ｇに搬出され、旋回アームを有する
搬送手段ＩでチャックテーブルＴ上に搬送される。この
チャックテーブルＴに保持されたウェーハＷは、横移動
されてアライメント手段Ｊの真下に位置付けられ、アラ
イメントの後に切削領域Ｋに移動され回転ブレード１に
てダイシングされる。Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 shows an example of a dicer which is a cutting device. A cassette B is placed in a cassette placement area A that moves up and down, and a wafer W stored in this cassette B is shown.
(Fixed to the frame F via the adhesive tape N) is carried out to the standby area G by the carrying-in / carrying-out means E, and is carried onto the chuck table T by the carrying means I having a turning arm. The wafer W held on the chuck table T is laterally moved and positioned directly below the alignment means J, and after alignment, moved to the cutting region K and diced by the rotary blade 1.
【０００７】２は本発明に係る光学検出手段であり、前
記チャックテーブルＴを保持する移動台Ｍの領域Ｒに配
設され、前記回転ブレード１のセットアップ時の基準位
置の検出及び回転ブレード１の摩耗等を検出する。Reference numeral 2 denotes an optical detecting means according to the present invention, which is arranged in a region R of a moving table M holding the chuck table T, detects a reference position at the time of setting up the rotary blade 1, and detects the rotary blade 1. Detect wear etc.
【０００８】前記光学検出手段２は、図２に示すように
ホルダ本体３を有しこのホルダ本体３の上部には凹陥部
３ａが形成され、この凹陥部３ａを挟む両壁には図３の
ように取付孔３ｂが対設され、且つこれらの取付孔に上
部が開口すると共にホルダ本体の底部孔３ｄに下部が開
口するエア、Ｎ2 ガス、純水等の流体供給用孔３ｃがそ
れぞれ形成されている。The optical detecting means 2 has a holder main body 3 as shown in FIG. 2, and a concave portion 3a is formed in the upper portion of the holder main body 3, and both walls sandwiching the concave portion 3a are shown in FIG. Mounting holes 3b are provided oppositely to each other, and a fluid supply hole 3c for air, N 2 gas, pure water, etc., whose upper portion is opened in these mounting holes and whose lower portion is opened in a bottom hole 3d of the holder body, is formed. Has been done.
【０００９】４はエルボ状に曲管形成されたカバーであ
り、図４に示すように先端面に流体噴出用孔４ａがあけ
られ、側面の下部には流体流入用孔４ｂが形成されてい
る。このカバー４は、先端部が前記ホルダ本体３の取付
孔３ｂに嵌着固定され、前記凹陥部３ａに若干突出して
２つのカバー４の先端面が対向し、且つカバー４の流体
流入用孔４ｂが前記ホルダ本体３の流体供給用孔３ｃに
それぞれ合致するようにしてある。Reference numeral 4 is a cover formed in a curved elbow shape. As shown in FIG. 4, a fluid ejection hole 4a is formed in the tip end surface, and a fluid inflow hole 4b is formed in the lower portion of the side surface. . The tip of the cover 4 is fitted and fixed in the mounting hole 3b of the holder body 3, slightly protrudes into the recess 3a so that the tip surfaces of the two covers 4 face each other, and the fluid inflow hole 4b of the cover 4 is provided. Correspond to the fluid supply holes 3c of the holder body 3, respectively.
【００１０】前記カバー４の内部には、このカバーの内
径より細い光ファイバー５が保持部材６を介して挿着さ
れ、先端の検出部５ａは前記流体噴出用孔４ａに臨んで
おり、カバー４の先端部内には間隙７が形成されてい
る。従って、ホルダ本体３の底部孔３ｄから例えば圧縮
エアが送り込まれると、そのエアは前記流体供給用孔３
ｃから流入用孔４ｂを経て間隙７内に流入し、カバー４
の先端の流体噴出用孔４ａから外部に噴出される。An optical fiber 5 having a diameter smaller than the inner diameter of the cover 4 is inserted into the inside of the cover 4 via a holding member 6, and the detection portion 5a at the tip faces the fluid ejection hole 4a, and the cover 4 is covered. A gap 7 is formed in the tip portion. Therefore, for example, when compressed air is fed from the bottom hole 3d of the holder body 3, the air is supplied to the fluid supply hole 3d.
c into the gap 7 through the inflow hole 4b and the cover 4
Is ejected to the outside from the fluid ejection hole 4a at the tip of the.
【００１１】前記２つの光ファイバー５は、図示は省略
したが一方の端部を発光素子に、他方の端部を受光素子
にそれぞれ導くことにより光学検出部を構成することが
出来る。Although not shown, the two optical fibers 5 can constitute an optical detecting section by guiding one end to a light emitting element and the other end to a light receiving element.
【００１２】本発明に係る光学検出手段２は上記のよう
に構成され、前記回転ブレード１のセットアップ時にス
ピンドルユニットを降下させ回転ブレード１をホルダ本
体３の凹陥部３ａに挿入し、光ファイバー５の検出部５
ａによって回転ブレード１の基準位置を検出することが
出来る。常時前記カバー４の流体噴出用孔４ａから圧縮
エア（例えば０．１ＭＰａ）等の流体を噴出させれば、
ミスト及びコンタミの付着を未然に防止することが出
来、回転ブレード１の基準位置の検出を正確に行うこと
が出来る。回転ブレード１の検査（摩耗、欠け等）も、
これと同様に正確に行うことが出来る。The optical detecting means 2 according to the present invention is constructed as described above, and when the rotary blade 1 is set up, the spindle unit is lowered to insert the rotary blade 1 into the concave portion 3a of the holder body 3 to detect the optical fiber 5. Part 5
The reference position of the rotary blade 1 can be detected by a. If a fluid such as compressed air (for example, 0.1 MPa) is constantly ejected from the fluid ejection hole 4a of the cover 4,
Adhesion of mist and contamination can be prevented, and the reference position of the rotary blade 1 can be accurately detected. Inspection of the rotating blade 1 (wear, chipping, etc.)
It can be done exactly as well.
【００１３】図５は本発明に係る光学検出手段の他の実
施例を示すもので、サイドビュータイプに形成され、即
ち光ファイバーを挿着した直管型のカバー１４がホルダ
本体１３の上部から突出した状態で配設されている。FIG. 5 shows another embodiment of the optical detecting means according to the present invention, in which a side-view type, that is, a straight tube type cover 14 into which an optical fiber is inserted protrudes from the upper part of the holder body 13. It is arranged in a closed state.
【００１４】前記ホルダ本体１３は、底部から上部に貫
通する取付孔１３ａが対設されると共に、これらの取付
孔１３ａ間に位置させてＴ字型の流体供給用孔１３ｂが
形成され、その上部の両端は取付孔１３ａの中間部に開
口し、下端部はホルダ本体１３の底部に開口している。The holder body 13 has mounting holes 13a penetrating from the bottom to the upper part, and a T-shaped fluid supply hole 13b is formed between the mounting holes 13a. Both ends of are open to the middle of the mounting hole 13a, and the lower end is open to the bottom of the holder body 13.
【００１５】前記カバー１４は図６に示すように、上部
の側面に流体噴出用孔１４ａが形成されると共に、その
下方には流体流入用孔１４ｂが形成され、前記ホルダ本
体１３の取付孔１３ａにそれぞれ嵌着固定され、前記流
体噴出用孔１４ａはホルダ本体１３の上部から突出して
対向し、且つ流体流入用孔１４ｂは前記流体供給用孔１
３ｂにそれぞれ合致するようにしてある。As shown in FIG. 6, the cover 14 has a fluid ejection hole 14a formed on the upper side surface and a fluid inflow hole 14b formed below the fluid ejection hole 14a. Fluid ejecting holes 14a project from the upper part of the holder body 13 and face each other, and fluid inflow holes 14b are the fluid supplying holes 1 respectively.
3b, respectively.
【００１６】前記カバー１４の内部にはこのカバー１４
の内径より細い光ファイバー１５が保持部材１６を介し
て挿着され、その先端部にはプリズム等の光線屈折部材
１８が設けられ、側面には検出部１５ａが形成されてお
り、この検出部１５ａは前記流体噴出用孔１４ａに臨ま
せ、カバー１４の先端部内に間隙１７が形成されてい
る。従って、ホルダ本体１３の底部から流体供給用孔１
３ｂに圧縮エア等が送り込まれると、前記流体流入用孔
１４ｂを経て間隙１７内に流入し、カバー４の流体噴出
用孔１４ａから外部に噴出される。Inside the cover 14, the cover 14
An optical fiber 15 having a diameter smaller than the inner diameter is inserted through a holding member 16, a light refracting member 18 such as a prism is provided at the tip end thereof, and a detecting portion 15a is formed on the side surface thereof. A gap 17 is formed in the tip of the cover 14 so as to face the fluid ejection hole 14a. Therefore, from the bottom of the holder body 13 to the fluid supply hole 1
When compressed air or the like is sent to 3b, it flows into the gap 17 through the fluid inflow hole 14b and is ejected to the outside from the fluid ejection hole 14a of the cover 4.
【００１７】前記２つの光ファイバー１５は、前記と同
様に一方を発光素子に、他方を受光素子に導くことによ
って光学検出部を構成することが出来、前記光線屈折部
材１８によって光線の向きが９０度変えられる。尚、カ
バー１４は図７に示すようにホルダ本体１３の上部に形
成した屋根状の傾斜面部１３ｃから斜めに突出させるよ
うにしても良い。Similar to the above, one of the two optical fibers 15 is guided to the light emitting element and the other is guided to the light receiving element to form an optical detecting section, and the light refracting member 18 makes the direction of the light beam 90 degrees. be changed. The cover 14 may be obliquely projected from a roof-shaped inclined surface portion 13c formed on the upper portion of the holder body 13 as shown in FIG.
【００１８】このように形成されたサイドビュータイプ
の光学検出手段においては、前記回転ブレード１のセッ
トアップ時にカバー１４の間に回転ブレード１を挿入
し、光ファイバー１５の光線によって回転ブレード１の
基準位置を検出することが出来る。常時前記カバー１４
の流体噴出用孔１４ａから圧縮エア等が噴出されるの
で、コンタミの付着を未然に防止すると共にコンタミを
排除することが出来、光ファイバー１５による基準位置
の検出を正確に行うことが出来る。これと同様に、切削
時での回転ブレード１の検査（摩耗、欠け等）も正確に
行うことが出来る。In the side-view type optical detecting means thus formed, the rotary blade 1 is inserted between the covers 14 when the rotary blade 1 is set up, and the reference position of the rotary blade 1 is determined by the light beam of the optical fiber 15. Can be detected. Always the cover 14
Since compressed air or the like is ejected from the fluid ejection hole 14a, contamination can be prevented in advance and contamination can be eliminated, and the optical fiber 15 can accurately detect the reference position. Similarly, the inspection (wear, chipping, etc.) of the rotary blade 1 at the time of cutting can be accurately performed.
【００１９】特に、この場合は回転ブレード１と切削液
供給管Ｄとの間に、カバー１４（光ファイバー１５に関
連して比較的小径に形成されている）が位置するので回
転ブレード１の降下に伴って切削液供給管Ｄがホルダ本
体１３に接触することはなく、このため切削液供給管Ｄ
を標準位置にセットすることが出来、チッピングや切れ
味等に悪影響を及ぼすことはない。Particularly, in this case, since the cover 14 (formed in a relatively small diameter in relation to the optical fiber 15) is located between the rotary blade 1 and the cutting fluid supply pipe D, the rotary blade 1 is lowered. Accordingly, the cutting fluid supply pipe D does not come into contact with the holder body 13, and therefore the cutting fluid supply pipe D
Can be set to the standard position and does not adversely affect chipping and sharpness.
【００２０】尚、流体として純水等の液体を用い、流体
噴出用孔４ａ、１４ａから常時噴出させる場合は、検出
部のコンタミ等の付着を略完全に防止することが出来
る。しかし、ブレードを検出する際には、光が屈折して
正確な検出が出来なくなるので液体の噴出を止め、エア
等のガスの噴出に切り替えて検出部の液体を排除する必
要がある。又、前記実施例では光ファイバーを用いて検
出部を形成したが、光ファイバーを介さないで検出端部
に発光素子、受光素子をそれぞれ配設して実施すること
も可能である。但し、光ファイバーを使用する場合に比
べ大径となる欠点がある。When a liquid such as pure water is used as the fluid and is constantly ejected from the fluid ejection holes 4a and 14a, it is possible to substantially completely prevent the contamination of the detection portion and the like. However, when the blade is detected, it is necessary to stop the ejection of the liquid and switch to the ejection of gas such as air to eliminate the liquid in the detection unit, because the light refracts and accurate detection cannot be performed. Further, in the above-mentioned embodiment, the detecting portion is formed by using the optical fiber, but it is also possible to arrange the light emitting element and the light receiving element at the detecting end portion without interposing the optical fiber. However, there is a drawback that the diameter is larger than that when an optical fiber is used.
【００２１】[0021]
【発明の効果】以上説明したように、本発明によれば、
切削装置における回転ブレードのセットアップ時の基準
位置の検出又は検査に際して、検出端部から流体が噴出
していることにより検出部にコンタミが付着するのを未
然に防止することが出来る。従って、回転ブレードのセ
ットアップ又は摩耗や欠け等の検査を正確に行うことが
出来、更に検出端部をサイドビュータイプにすることで
切削液供給管のホルダ本体への接触を避け、チッピング
や切れ味に悪影響を及ぼさない等の優れた効果を奏す
る。As described above, according to the present invention,
When detecting or inspecting the reference position at the time of setting up the rotary blade in the cutting device, it is possible to prevent contamination from adhering to the detection portion due to the fluid jetting from the detection end portion. Therefore, it is possible to accurately set up the rotating blade or inspect for wear or chipping, and to avoid contact of the cutting fluid supply pipe with the holder body by making the detection end side view type, and to prevent chipping and sharpness. It has excellent effects such as no adverse effects.
【図１】 本発明に係る光学検出手段を配設したダイサ
ーの一例を示す斜視図である。FIG. 1 is a perspective view showing an example of a dicer provided with an optical detection means according to the present invention.
【図２】 光学検出手段と、回転ブレード及び切削液供
給管との位置関係を示す説明図である。FIG. 2 is an explanatory diagram showing a positional relationship between an optical detecting means, a rotary blade and a cutting fluid supply pipe.
【図３】 同、概略断面図である。FIG. 3 is a schematic sectional view of the same.
【図４】 光学検出手段の要部の断面図である。FIG. 4 is a cross-sectional view of a main part of an optical detection unit.
【図５】 光学検出手段の他の実施例を示す説明図であ
る。FIG. 5 is an explanatory view showing another embodiment of the optical detecting means.
【図６】 (イ) はその光学検出手段の要部の断面図、
(ロ) は側面図である。FIG. 6A is a cross-sectional view of the main part of the optical detecting means,
(B) is a side view.
【図７】 検出部を上部から斜めに突出させた例を示す
斜視図である。FIG. 7 is a perspective view showing an example in which a detection unit is obliquely projected from the upper portion.
【図８】 従来例を示す要部の斜視図である。FIG. 8 is a perspective view of a main part showing a conventional example.
【図９】 従来の光学検出手段と、回転ブレード及び切
削液供給管との位置関係を示す説明図である。FIG. 9 is an explanatory view showing a positional relationship between a conventional optical detecting means, a rotary blade and a cutting fluid supply pipe.
１…回転ブレード ２…光学検出手段 ３…ホルダ
本体 ３ａ…凹陥部 ３ｂ…取付孔 ３ｃ…流体供給用孔 ３ｄ…底部孔
４…カバー ４ａ…流体噴出用孔 ４ｂ…流体
流入用孔 ５…光ファイバー ５ａ…検出部 ６…保持部材 ７…間隔 １３…ホルダ本体 １３ａ…取付孔 １３ｂ…流体
供給用孔 １４…カバー １４ａ…流体噴出用孔
１４ｂ…流体流入用孔 １５…光ファイバー １
５ａ…検出部 １６…保持部材 １７…間隔 １
８…光線屈折部材DESCRIPTION OF SYMBOLS 1 ... Rotating blade 2 ... Optical detection means 3 ... Holder main body 3a ... Recessed part 3b ... Mounting hole 3c ... Fluid supply hole 3d ... Bottom hole 4 ... Cover 4a ... Fluid ejection hole 4b ... Fluid inflow hole 5 ... Optical fiber 5a Detecting unit 6 Holding member 7 Interval 13 Holder body 13a Mounting hole 13b Fluid supply hole 14 Cover 14a Fluid ejection hole
14b ... Fluid inflow hole 15 ... Optical fiber 1
5a ... Detection unit 16 ... Holding member 17 ... Spacing 1
8 ... Ray refraction member
Claims (3)
回転ブレードの外周端部を検出する光学検出手段におい
て、この光学検出手段は発光素子、受光素子を含み、こ
の発光素子、受光素子の検出端部は対向して配設されて
いて、その端部から流体が噴出するように構成されてい
ることを特徴とする光学検出手段。1. An optical detecting means for detecting an outer peripheral end portion of a rotary blade of a cutting device for cutting a semiconductor wafer or the like, wherein the optical detecting means includes a light emitting element and a light receiving element. The optical detecting means is characterized in that the portions are arranged so as to face each other, and the fluid is ejected from the end portion.
経路が光ファイバーで形成されており、この光ファイバ
ーには間隙を形成してカバーが配設され、このカバーに
形成された検出端部孔から前記間隙に供給された流体が
噴出する、請求項１記載の光学検出手段。2. A path from the detection end to the light emitting element and the light receiving element is formed by an optical fiber, and a cover is arranged with a gap formed in the optical fiber, and the detection end hole formed in the cover. The optical detecting means according to claim 1, wherein the fluid supplied from the nozzle to the gap is ejected.
請求項１乃至２記載の光学検出手段。3. The detection end portion is a side view type,
The optical detecting means according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10914395A JPH08288244A (en) | 1995-04-11 | 1995-04-11 | Optical detecting means |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10914395A JPH08288244A (en) | 1995-04-11 | 1995-04-11 | Optical detecting means |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08288244A true JPH08288244A (en) | 1996-11-01 |
Family
ID=14502700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10914395A Pending JPH08288244A (en) | 1995-04-11 | 1995-04-11 | Optical detecting means |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08288244A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001298001A (en) * | 2000-04-12 | 2001-10-26 | Disco Abrasive Syst Ltd | Cutting blade detecting mechanism for cutting device |
| JP2001298002A (en) * | 2000-04-14 | 2001-10-26 | Disco Abrasive Syst Ltd | Cutting device |
| WO2003061907A1 (en) * | 2002-01-18 | 2003-07-31 | Disco Corporation | Cutting device |
| JP2006294641A (en) * | 2005-04-05 | 2006-10-26 | Apic Yamada Corp | Dicing device |
| JP2007042855A (en) * | 2005-08-03 | 2007-02-15 | Disco Abrasive Syst Ltd | Cutter with blade detection means |
| JP2014054681A (en) * | 2012-09-11 | 2014-03-27 | Tdk Corp | Processing machine, and grinding wheel outer peripheral edge detection method |
| JP2014079833A (en) * | 2012-10-16 | 2014-05-08 | Disco Abrasive Syst Ltd | Cutting device |
| TWI548500B (en) * | 2014-02-10 | 2016-09-11 | The cutting knife position sensing means | |
| CN107813225A (en) * | 2016-09-13 | 2018-03-20 | 株式会社迪思科 | Topping machanism |
| CN109501015A (en) * | 2017-09-14 | 2019-03-22 | 株式会社迪思科 | Cutting apparatus |
| CN114102718A (en) * | 2020-08-26 | 2022-03-01 | Ｔｏｗａ株式会社 | Cutting device and method for manufacturing cut product |
-
1995
- 1995-04-11 JP JP10914395A patent/JPH08288244A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001298001A (en) * | 2000-04-12 | 2001-10-26 | Disco Abrasive Syst Ltd | Cutting blade detecting mechanism for cutting device |
| JP4590058B2 (en) * | 2000-04-12 | 2010-12-01 | 株式会社ディスコ | Cutting blade detection mechanism of cutting equipment |
| JP4590060B2 (en) * | 2000-04-14 | 2010-12-01 | 株式会社ディスコ | Cutting equipment |
| JP2001298002A (en) * | 2000-04-14 | 2001-10-26 | Disco Abrasive Syst Ltd | Cutting device |
| WO2003061907A1 (en) * | 2002-01-18 | 2003-07-31 | Disco Corporation | Cutting device |
| JP2006294641A (en) * | 2005-04-05 | 2006-10-26 | Apic Yamada Corp | Dicing device |
| JP2007042855A (en) * | 2005-08-03 | 2007-02-15 | Disco Abrasive Syst Ltd | Cutter with blade detection means |
| JP2014054681A (en) * | 2012-09-11 | 2014-03-27 | Tdk Corp | Processing machine, and grinding wheel outer peripheral edge detection method |
| JP2014079833A (en) * | 2012-10-16 | 2014-05-08 | Disco Abrasive Syst Ltd | Cutting device |
| TWI548500B (en) * | 2014-02-10 | 2016-09-11 | The cutting knife position sensing means | |
| CN107813225A (en) * | 2016-09-13 | 2018-03-20 | 株式会社迪思科 | Topping machanism |
| CN109501015A (en) * | 2017-09-14 | 2019-03-22 | 株式会社迪思科 | Cutting apparatus |
| JP2019054081A (en) * | 2017-09-14 | 2019-04-04 | 株式会社ディスコ | Cutting device |
| CN114102718A (en) * | 2020-08-26 | 2022-03-01 | Ｔｏｗａ株式会社 | Cutting device and method for manufacturing cut product |
| CN114102718B (en) * | 2020-08-26 | 2024-01-30 | Ｔｏｗａ株式会社 | Cutting device and method for manufacturing cut product |
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