TWI548500B - The cutting knife position sensing means - Google Patents

Description

Cutting tool position sensing device

In particular, the present invention provides a cutting operation for a semiconductor component, which ensures the cleanliness of the light emitter and the light receiver, accurately performs cutting tool position sensing, and further performs feed compensation through a program to ensure cutting. The position sensing device of the tool at the correct cutting depth position.

Referring to FIG. 1 , in general, a plurality of latitude and longitude lines are horizontally arranged on the wafer 10 , and the wafer 10 is adhered to a mucous layer 11 , and the mucous layer 11 is further fixed on a metal frame 12 . The wafer 10 can be moved by the frame 12. Referring to FIG. 2, at the time of cutting, the wafer is transferred to a cutting machine for cutting the wafer. The cutting machine controls the cutting depth of the cutting tool 13, and the wafer is cut without cutting the mucous layer 11. 10 Cut a plurality of wafers horizontally according to the drawn latitude and longitude lines, and continue to move to the next work station with the frame. Since the cutting tool 13 will have a reduced diameter due to wear and tear, if the original cutting depth is maintained, the cutting depth will be insufficient to completely cut the wafer; in addition, when a new cutting tool is replaced, if a new cutting tool is used If there is a large error in the outer diameter, if the original cutting depth is maintained, the cutting depth will be too deep to cut the mucous layer 11 located under the wafer 10; that is, as the cutting tool 13 wears or is updated, It is necessary to grasp the change of the diameter, and to control the position adjustment of the cutting depth by the program control, in order to accurately perform the wafer cutting operation.

Please refer to Figures 3 and 4, which are the invention patents of the domestic patent application No. 90106909 "Cutter cutting mechanism for cutting machine", which is suitable for the body. A detector body 20 is fixedly disposed, and a concave edge 21 is disposed at one end of the detector body 20, and a contrast light emitter 22 and light receiving are respectively disposed on two sides of the concave edge 21 The other end of the detector body 20 is provided with an air supply nozzle 24 and a fresh water supply nozzle 25 respectively corresponding to the light emitter 22, and an air supply nozzle 26 corresponding to the light receiver 23, respectively. Clear water supply nozzle 27. When the cutting tool 28 is worn or renewed, the cutting tool 28 can be moved into the concave edge 21 of the detector body 20, and the axis of rotation of the cutting tool 28 is at the height of the standard position, and then the light emitter 22 of the control type is launched. The light source is received by the light receiver 23 and is not blocked by the cutting tool 28. If the cutting tool 28 wears, the light receiving device 23 receives a large amount of light. If the cutting tool 28 is updated, the light receiver 23 receives the light. The amount of light passing through is small, and the light receiver 23 converts the received amount of light into a voltage value, and transmits it to the controller, and through the operation of the controller, the amount of change in the diameter of the cutting tool 28 can be converted, and further The program performs positional feed compensation for the depth of cut while ensuring that the cutting tool 28 is in the correct cutting depth position. However, the detector body 20 is fixed on one side of the cutting machine body, and is only located on the side of the cutting tool 28. Therefore, when the wafer is cut, the cutting fluid used for cutting is often mixed with chips. The splatter is attached to the surface of the light emitter 22 and the light receiver 23, and affects the light flux received by the light receiver 23, so that the detecting mechanism cannot correctly detect when performing the position detection of the cutting tool 28. The amount of change in the diameter of the cutting tool 28 is removed; please refer to FIG. 3 again, in order to avoid surface contamination of the light emitter 22 and the light receiver 23, the air supply nozzle 24 and the water supply nozzle 25 of the light emitter 22, and the light are disposed. The air supply nozzle 26 and the fresh water supply nozzle 27 of the receiver 23, when the wafer is being cut, continuously spray the surface of the light emitter 22 and the light receiver 23 with air and clean water, and adhere to the light emitter 22 and The contaminants on the surface of the photoreceiver 23 are removed to keep the surfaces of the light emitters 22 and the photoreceiver 23 in a clean state. Only in the air supply nozzles 24, 26 and the fresh water supply nozzles 25, 27 During the spraying process, since the concave edge 21 is an open space, turbulence is formed around the light emitter 22 and the light receiver 23, and the polluted air mixed with the cutting fluid and the chip in the space is continuously introduced into the concave edge. In the space of 21, not only is the water resource was wasted, but the surface of the light emitter 22 and the light receiver 23 cannot be kept in a completely clean state, and the detection result of the detecting mechanism for the cutting tool is affected.

In view of this, the inventor has been engaged in research and development and production experience of related industries for many years, and has conducted in-depth research on the problems currently faced. After long-term efforts and trials, the inventors have finally developed a kind of phenomenon that can not only effectively reduce turbulence but also Avoid introducing polluted air mixed with cutting fluid and chips, thereby ensuring the cleanliness of the light emitter and the light receiver, and accurately performing position sensing of the cutting tool to effectively improve the disadvantages of the prior art, which is the design of the present invention. purpose.

A first object of the present invention is to provide a position sensing device for a cutting tool, which is provided with a fixing base that is locked to the body, and the first side of the fixing seat is respectively protruded upwardly with an air supply nozzle a convex body and a second convex body for respectively installing a contrast light emitter and a light receiver, and having a concave portion between the first convex body and the second convex body for moving the cutting tool into position sensing operation In addition, the cover is provided with a cover that can be driven to move horizontally by the driving source, and when the cutting tool performs the cutting operation, the moving cover covers the outer sides of the first convex body and the second convex body, thereby reducing the mixing. Contaminated air with cutting fluid and chips is sprayed onto the surface of the light emitter and the light receiver to ensure the cleanliness of the light emitter and the light receiver.

A second aspect of the present invention provides a position sensing device for a cutting tool, wherein the cover is provided with a plug at a position of a recess between the first convex body and the second convex body, and the moving cover is covered by the movable cover. When the outer side of the first convex body and the second convex body are filled, the plug block is filled in the space of the concave portion, and when the air supply nozzle blows and cleans the surface area of the light emitter and the light receiver, the plug is stuffed with The position of the recess is in the space, so the blow The gas-gas system is blown out in the same direction in the positive air pressure mode, which not only can effectively reduce the turbulence phenomenon, but also can avoid the introduction of contaminated air mixed with cutting fluid and chips, thereby ensuring the cleanliness of the light emitter and the light receiver. Achieve the benefits of accurate cutting tool position sensing.

Conventional part:

10‧‧‧ wafer

11‧‧‧mucial layer

12‧‧‧Frame

13‧‧‧Cutting tools

20‧‧‧Detector body

21‧‧‧ concave edge

22‧‧‧Light emitter

23‧‧‧Optical Receiver

24‧‧‧Air supply mouth

25‧‧‧Water supply nozzle

26‧‧‧Air supply mouth

27‧‧‧Water supply nozzle

28‧‧‧Cutting tools

Part of the invention:

30‧‧‧ Fixed seat

31‧‧‧Sensor holder

311‧‧‧ first convex

312‧‧‧second convex body

313‧‧‧ recess

32‧‧‧Upright plate rack

33‧‧‧ seat

34‧‧‧Light emitter

35‧‧‧First air supply nozzle

36‧‧‧Optical Receiver

37‧‧‧Second air supply nozzle

38‧‧‧ Cover

381‧‧‧ plug

39‧‧‧Cylinder

391‧‧‧ Telescopic rod

40‧‧‧Link board

41‧‧‧slide group

411‧‧‧rails

412‧‧‧Slide

42‧‧‧ protective cover

43‧‧‧Cutting tools

Figure 1: Schematic diagram of conventional wafer cutting (1).

Figure 2: Schematic diagram of conventional wafer cutting (2).

Figure 3: Schematic diagram of the application of the patent application No. 90106909 "Cutting cutter detection mechanism for cutting machine".

Figure 4: Schematic diagram of the application for the patent case of the cutting knife detection mechanism of the cutting machine No. 90106909.

Figure 5: An exploded schematic view of the invention.

Figure 6 is a schematic view showing the appearance of a part of the combination of the present invention.

Figure 7 is a partial cross-sectional view of the sensor holder of the present invention.

Figure 8 is a schematic view showing the appearance of the cover of the present invention when it is closed.

Figure 9 is a partial cross-sectional view showing the cover of the present invention when it is closed.

Fig. 10 is a schematic view showing the appearance of the cover of the present invention when it is opened.

Figure 11 is a schematic view showing the position sensing of the cutting tool when the cover of the present invention is opened.

In order to make the present invention further understand the present invention, the preferred embodiment and the drawings are described in detail as follows: Please refer to Figures 5, 6, and 7 to show the position sensing device of the cutting tool of the present invention. The fixing base 30 is fixed to the side wall of the body, and the fixing base 30 is locked with a sensor seat 31 at one end. In this embodiment, an end plate is locked at one end of the fixing base 30. The frame 32 is locked to the upper end of the upright plate frame 32 There is a socket 33, and the sensor base 31 is locked above the socket 33; the first protrusion 311 and the second protrusion 312 are respectively protruded upward on the two sides of the upper end of the sensor holder 31 for separately mounting A light emitter and a light receiver are provided, and a recess 313 is provided between the first protrusion 311 and the second protrusion 312 for moving the cutting tool into the position sensing operation. In this embodiment, the first The convex body 311 is a bent-shaped convex block, and the first convex body 311 is provided with a light emitter 34, and is disposed on the sensor seat 31 and blows toward the light emitter 34 region. An air supply nozzle 35, the first air supply nozzle 35 is connected to a clean air supply source (not shown), and the surface area of the light emitter 34 can be blown and cleaned. In this embodiment, the first An air supply nozzle 35 is disposed on the first protrusion 311, and the second protrusion 312 is also an angled protrusion and is oppositely disposed at an opposite position of the first protrusion 311. The second protrusion The 312 is provided with a light receiver 36 for receiving the light source emitted by the light emitter 34, and the light flux of the light source passing through the recess 313 can be sensed in a comparative manner. And converted into a voltage value and then transmitted to the controller, through the operation of the controller, the amount of change of the cutting tool located in the concave portion 313 can be converted, and the other is disposed on the sensor seat 31 and facing the light receiver 36 region. The second air supply nozzle 37 is blown, and the second air supply nozzle 37 is similarly connected to a clean air supply source (not shown), and the surface area of the light receiver 36 can be blown and cleaned, in this embodiment. The second air supply nozzle 37 is disposed on the second protrusion 312, and the cover 30 is provided with a cover 38 that can be driven to move horizontally by the driving source to move the cover over the first protrusion. 311 and the outer side of the second protrusion 312. In this embodiment, the driving source of the cover 38 is a pressure cylinder 39. One end of the pressure cylinder 39 is disposed on the upright frame 32, and the pressure cylinder 39 The end portion of the telescopic rod 391 is connected to a connecting plate 40. The connecting plate 40 is further locked with the connecting cover 38. The pressing plate 39 can be used to drive the connecting plate 40 and the cover 38 to move horizontally, so that the connecting plate 40 and the cover are provided. 38 can be stably moved horizontally, and at least one slide rail group 41 is locked on the fixing base 30, and the connection is made The lock rails 411 of the slide rail group 41 are locked on the fixed seat 30, and the web 40 is locked to the slide rail group 41. A protective cover 42 covering the slide rail 411 is coupled to the rear end of the connecting plate 40. When the pressure cylinder 39 is actuated, the connecting plate 40 and the cover 38 can be stably driven along the sliding rail. The cover 41 is horizontally moved; wherein the cover 38 is provided with a plug 381 at a position opposite to the recess 313 between the first protrusion 311 and the second protrusion 312, and the cover 38 is horizontally moved to cover the first cover. When the convex body 311 and the second convex body 312 are outside, the plug block 381 is filled in the position space of the concave portion 313.

Please refer to Figures 8 and 9. Since the position sensing device is located close to the side wall of the cutting tool, the cutting fluid used for cutting is often mixed with chips and splashed to the position. The sensing device, therefore, the present invention will actuate the pressure cylinder 39 to drive the cover 38 to move horizontally, and cover the outer sides of the first convex body 311 and the second convex body 312, and at the same time, the plug block 381 is stuffed with In the position space of the recess 313, the clean air emitter 34 region and the light receiver 36 region are respectively blown by the first air supply nozzle 35 and the second air supply nozzle 37, since the plug block 381 is stuffed in the recess 313. In the position space, therefore, the blowing gas of the first air supply nozzle 35 is blown out in the same direction in the same direction as the positive air pressure in the passage space between the light emitter 34 and the plug 381, and the second air supply nozzle The blowing gas of 37 is blown outward in the same direction in the channel space between the light receiver 36 and the plug block 381, which not only effectively reduces the light emitter 34 and the light receiver 36 and the plug block. Turbulence in the channel space of 381 It is avoided that the polluted air mixed with the cutting fluid and the chips is introduced from the circumferential side, and the plug block 381 is stuffed in the recess 313 to form a passage for closing the rear end of the recess 313, and the polluted air mixed with the cutting fluid and the chip is also prevented from being introduced from the rear. Further, the cleanliness of the light emitter 34 and the light receiver 36 is ensured.

Referring to Figure 10, when the cutting tool needs to re-sensing its diameter due to wear or renewal, the cutting tool will stop rotating and stop spraying the cutting fluid, and then the present invention will cause the pressure cylinder 39 to actuate. The driving cover 38 is horizontally moved and separated from the outer sides of the first convex body 311 and the second convex body 312, and the plug block 381 is separated from the position of the concave portion 313, so that the light emitter 34 on the first convex body 311 and The light receiver 36 on the second protrusion 312 is exposed to the open space. Referring to FIG. 11 , when the cutting tool 43 performs the position sensing operation, the cutting tool 43 is moved to the position of the concave portion 313 between the first convex body 311 and the second convex body 312, and then the contrast light is used. The transmitter 34 emits a light source and receives a light source that is not blocked by the cutting tool 43 by the light receiver 36. The light receiver 36 converts the received amount of light into a voltage value and transmits it to the controller via the controller. By calculating, the diameter position of the cutting tool 43 can be converted, and the position feed compensation of the cutting depth is further performed by the program, and the cutting tool 43 is ensured at the correct cutting depth position, thereby achieving the effect of accurately performing the position sensing of the cutting tool 43. .

Accordingly, the present invention is a practical and progressive design, but it has not been disclosed that the same products and publications are disclosed, thereby permitting the invention patent application requirements, and applying in accordance with the law.

311‧‧‧ first convex

312‧‧‧second convex body

313‧‧‧ recess

34‧‧‧Light emitter

35‧‧‧First air supply nozzle

36‧‧‧Optical Receiver

37‧‧‧Second air supply nozzle

38‧‧‧ Cover

381‧‧‧ plug

Claims (8)

A position sensing device for a cutting tool includes: a fixing base: is disposed on the body; the sensor seat is disposed on the fixing base, and the first convex body is respectively protruded on two sides of the sensing seat And a second protrusion, and a recess between the first protrusion and the second protrusion; the light emitter is disposed on the first protrusion of the sensor seat to emit the light source; the light receiver: The first air supply nozzle is disposed on the sensor seat, and is disposed on the second protrusion of the sensor seat and disposed opposite to the light emitter to sense the light flux of the light source through the recess; the first air supply nozzle is disposed on the sensor seat. The first air supply nozzle is connected to the air supply source and blows toward the light emitter region; the second air supply nozzle is disposed on the sensor seat, the second air supply nozzle is connected to the air supply source, and is received toward the light. The cover is provided on the fixed seat, and the cover is provided with a plug at a position opposite to the recess of the sensor seat, and the cover is driven by the driving source to be horizontally moved to cover a first protrusion of the sensor holder and an outer side of the second protrusion, and the plug is stuffed in the sensor The spatial position of the concave portion. The position sensing device of the cutting tool according to claim 1, wherein one end of the fixing base is provided with a vertical vertical frame, and a seat is arranged at an upper end of the vertical plate. Then the sensor holder is locked. The position sensing device of the cutting tool according to the first aspect of the invention, wherein the first air supply nozzle is disposed on the first protrusion of the sensor seat. The position sensing device of the cutting tool according to the first aspect of the invention, wherein the second air supply nozzle is disposed on the second protrusion of the sensor seat. The position sensing device of the cutting tool according to the first aspect of the invention, wherein the driving source of the cover is a pressure cylinder. The position sensing device of the cutting tool according to the fifth aspect of the invention, wherein the telescopic rod of the pressure cylinder is coupled to a connecting plate, and the connecting plate is coupled to the cover, and the connecting plate and the cover are driven by the pressure cylinder. Move horizontally. The position sensing device of the cutting tool according to the sixth aspect of the invention, wherein the fixing seat is provided with at least one sliding rail group, and the connecting plate is locked on the sliding rail group to make the connecting plate The cover can be moved horizontally along the set of slides. The position sensing device of the cutting tool according to the seventh aspect of the invention, wherein the sliding rail of the sliding rail group is locked on the fixing seat, and the connecting plate is locked to the sliding seat of the sliding rail group. on.