JP2014054681A - Processing machine, and grinding wheel outer peripheral edge detection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing machine and a grinding wheel outer peripheral edge detection method capable of surely preventing a stain from sticking to a light projection surface and a light receiving surface of an optical sensor used for detecting an outer peripheral edge of a rotary grinding wheel, more than usual.SOLUTION: A shutter 26 is closed, and injection of water from a water injection port 20 is started. Processing such as cutting and grinding by a rotary grinding wheel 7 is executed in a state of submerging a light projection surface 28 of a light emission part 17 and a light receiving surface 29 of a light receiving part 18. When the processing is finished, dressing of the rotary grinding wheel 7 is executed. When the processing and the dressing are finished, a shutter 26 is opened, and the injection of the water from the water injection port 20 is stopped. When the light projection surface 28 of the light emission part 17 and the light receiving surface 29 of the light receiving part 18 are exposed from underwater, air is jetted toward the light projection surface 28 and the light receiving surface 29 from an air jetting port 25. Afterwards, the rotary grinding wheel 7 is lowered in a container 16 (between the light projection surface 28 and the light receiving surface 29), and a tip position of the rotary grinding wheel 7 is optically detected.

Description

  The present invention relates to a processing machine that performs processing using a rotating grindstone, and a method for detecting an outer peripheral edge of a grindstone that detects an outer peripheral edge of the rotating grindstone with an optical sensor.

  In a water-soluble grinding fluid wet cutting machine (processing machine) using a rotating wheel such as a diamond wheel, the rotating wheel is worn by cutting or dressing. Note that dressing is a sharpening operation of a rotating grindstone, and is performed between processing. In order to set the height when processing such as cutting, it is necessary to detect the wear amount of the rotating grindstone. When performing non-contact detection of the amount of wear on the rotating wheel, use a transmissive phototube to move the rotating wheel up and down, convert the amount of light blocked by the rotating wheel to voltage, etc., and extract it as an electrical signal. A method for detecting the tip position (outer peripheral edge) of the grindstone is conceivable. However, dirt on the light emitting surface and the light receiving surface of the phototube changes the amount of light transmitted therethrough, making it difficult to accurately specify the amount of light blocked by the rotating grindstone. That is, there is a problem that it is impossible to accurately detect the tip position of the rotating grindstone. Therefore, it is conceivable to add a function such as air purge or water washing that blows away dirt on the light projecting surface and light receiving surface of the phototube.

  In Patent Document 1 below, in order to prevent the light emitting surface and the light receiving surface of the detecting means for detecting the state of the cutting blade from being soiled by processing waste, a jet port for supplying fluid to the light emitting surface and the light receiving surface is provided in the blade cover. Provided.

  Japanese Patent Application Laid-Open No. 2004-259542 discloses that a cutting device including a blade detection unit that detects a state of an annular blade brushes that cutting water scatters to a light emitter and a light receiver of the blade detection unit together with cutting waste due to high-speed rotation of the annular blade. It is blocked by a partition member.

  Patent Document 3 below discloses details of the configuration and operation of a workpiece processing apparatus (processing machine) that processes a workpiece using the rotating grindstone, although it is not related to the detection of the wear amount of the rotating grindstone.

JP 2011-110631 A JP 2011-167800 A Japanese Patent No. 4780356 (proposed by the present applicant)

  If dirt that has become mist due to cutting waste or grinding fluid mixed with the cutting fluid adheres to the light projecting surface and the light receiving surface, the soil may not be removed even after washing with water as in Patent Document 1. Moreover, even if a brush-like partition member is provided as in Patent Document 2, it is difficult to prevent adhesion of mist-like dirt.

  The present invention has been made in view of such a situation, and its purpose is to ensure that dirt adheres to the light projecting surface and the light receiving surface of the optical sensor used for detecting the outer periphery of the rotating grindstone as compared with the prior art. An object of the present invention is to provide a processing machine and a method for detecting the outer periphery of a grindstone that can be prevented.

  One embodiment of the present invention is a processing machine. The processing machine includes a container, a liquid injecting unit for injecting a liquid into the container, a liquid discharging unit for discharging the liquid from the container, an optical sensor having a light projecting surface and a light receiving surface in the container, Gas ejecting means for ejecting gas toward the light projecting surface and the light receiving surface, and a rotating grindstone that is relatively movable to a position that blocks the light of the optical sensor, and based on the detection result of the optical sensor, The outer periphery of the rotating grindstone is detected.

  The light projecting surface and the light receiving surface can be immersed in the liquid in the container, and the gas is ejected onto the light projecting surface and the light receiving surface exposed from the liquid. It may be possible to remove droplets adhering to the light projecting surface and the light receiving surface.

  A slider that moves in a processing direction with a workpiece to be processed by the rotary grindstone may be provided, and the container may be provided on the slider.

  The container may be present in a range of scattering of cutting fluid or grinding fluid.

  You may provide the shutter which can open and close the upper opening of the said container.

  Another aspect of the present invention is a method for detecting the outer periphery of a grindstone. In this method, a liquid is poured into a container in which the light projecting surface and the light receiving surface of an optical sensor are placed, and the light projecting surface and the light receiving surface are immersed in the liquid. Thereafter, the liquid is discharged from the container and the light projecting surface and the light receiving surface are exposed from the liquid, and a gas is ejected toward the light projecting surface and the light receiving surface. The rotating grindstone is relatively moved so as to block the light from the sensor, and the outer peripheral edge of the rotating grindstone is detected based on the detection result of the optical sensor.

  The processing or the dressing may be performed while continuing the liquid injection and replacing the liquid in the container.

  When performing the processing or dressing, the upper opening of the container may be closed with a shutter, and the shutter may be opened when detection by the optical sensor is performed.

  The said container may be provided in the slider which moves to a process direction with the workpiece | work used as the process target of the said rotating grindstone.

  It should be noted that any combination of the above-described constituent elements, or a conversion of the expression of the present invention between systems or the like is also effective as an aspect of the present invention.

  ADVANTAGE OF THE INVENTION According to this invention, it can prevent reliably that a dirt adheres to the light projection surface and light-receiving surface of the optical sensor used for the outer periphery detection of a rotating grindstone compared with the past.

1 is a schematic plan view of a processing machine 1 according to an embodiment of the present invention. The schematic front view of the processing machine 1. FIG. The top view of the container 16 shown in FIG. AA sectional drawing of FIG. BB sectional drawing of FIG. Explanatory drawing of operation | movement of the front-end | tip position detection of the rotating grindstone 7 in embodiment. The flowchart.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or equivalent component, member, process, etc. which are shown by each drawing, and the overlapping description is abbreviate | omitted suitably. In addition, the embodiments do not limit the invention but are exemplifications, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention.

  FIG. 1 is a schematic plan view of a processing machine 1 according to an embodiment of the present invention. FIG. 2 is a schematic front view of the processing machine 1. In these figures, XYZ directions, which are three directions orthogonal to each other, are defined.

  First, the overall configuration of the processing machine 1 will be briefly described. The X-axis slide guide 2 is fixed to a device base (not shown). An X slider 3 is supported on the X axis slide guide 2 so as to be slidable in the X direction. The θ-axis part 4 moves in the X direction together with the X slider 3 and is driven by a motor (not shown) so as to be rotatable around a rotation axis parallel to the Z direction. The θ table 5 is supported by the θ shaft portion 4 and rotates integrally with the θ shaft portion 4. A workpiece 6 to be machined is placed on the θ table 5. Therefore, the workpiece 6 can move in the X direction and can rotate about the Z direction. Although the workpiece | work 6 is not specifically limited, For example, it is the silicon wafer and board | substrate which formed many elements collectively.

  A support leg 14 is erected and fixed to the X slider 3, a support base 15 is fixed to the upper end portion of the support leg 14, and a metal or resin container 16 is fixed on the support base 15. For this reason, the container 16 moves in the X direction together with the X slider 3. A light emitting unit 17 and a light receiving unit 18 constituting an optical sensor are arranged in the container 16. Details in the container 16 will be described later with reference to FIGS.

  The Y-axis slide guide 12 is fixed to a device base (not shown). The Y slider 11 is supported by the Y axis slide guide 12 and is slidable in the Y direction. The Z slider 10 is supported by the Y slider 11 and can slide in the Z direction. The spindle shaft 9 is a rotation shaft parallel to the Y direction, moves in the Z direction together with the Z slider 10, and is rotationally driven by a motor (not shown). The rotating grindstone 7 is attached to the spindle shaft 9 by a flange 8 and rotates as the spindle shaft 9 rotates. For this reason, the rotating grindstone 7 is movable in the Y direction and the Z direction. The cutting fluid supply nozzle 30 is movable in the Y direction and the Z direction integrally with the rotating grindstone 7, and supplies the cutting fluid (or grinding fluid) to the rotating grindstone 7 and the workpiece 6 during processing. The processing chamber 27 is fixed to a device base (not shown) and surrounds the periphery of the rotating grindstone 7 to prevent scattering of processing waste and cutting fluid to the periphery. The control unit 19 includes a processor, a memory, a program, and other elements necessary for operation control of the entire processing machine 1 and various calculations. The camera 13 is for alignment of the workpiece 6 and is fixed to the Y slider 11, for example.

  Since the processing machine 1 may be the same as Patent Document 3 proposed by the applicant except for the configuration related to the tip position detection of the rotating grindstone 7, further detailed description is omitted.

  FIG. 3 is a plan view of the container 16 shown in FIG. 4 is a cross-sectional view taken along line AA in FIG. 5 is a cross-sectional view taken along the line BB in FIG. In the example of these drawings, the container 16 has a rectangular parallelepiped shape with an upper surface opened. The light emitting side holder 23 and the light receiving side holder 24 are fixed to the bottom surface of the container 16, and the light emitting side holder 23 and the light receiving side holder 24 support the light emitting part 17 and the light receiving part 18 of the optical sensor, respectively. The light surface 28 and the light receiving surface 29 of the light receiving unit 18 face each other. The light emitting unit 17 includes a light emitting element such as an LED (light emitting diode) or an LD (laser diode), and irradiates light from the light projecting surface 28 toward the light receiving surface 29 of the light receiving unit 18. The light receiving unit 18 receives light received through the light receiving surface 29 by a semiconductor light receiving element such as a phototransistor or a photodiode or a photoelectric tube and converts the light into an electric signal. The light emitting unit 17 and the light receiving unit 18 are provided with waterproof measures. An air ejection pipe 22 extends in an L shape from the bottom surface of the container 16, and an air ejection outlet 25 (a front end opening of the air ejection pipe 22) is on the side of an intermediate position between the light projecting surface 28 and the light receiving surface 29. Air can be ejected to the surface 28 and the light receiving surface 29. Air ejection from the air ejection port 25 is controlled, for example, by opening and closing a solenoid valve (opening / closing means) (not shown) by the control unit 19. A water inlet 20 and a water outlet 21 are opened at the bottom of the container 16. The water inlet 20 has a larger diameter than the water outlet 21. The opening position of the water inlet 20 is preferably an intermediate position between the light projecting surface 28 and the light receiving surface 29 in plan view. Water injection from the water injection port 20 is controlled by, for example, opening and closing a solenoid valve (not shown) by the control unit 19. As the water to be injected, a spindle coolant or the like can be used. It is not necessary to provide opening / closing means such as a solenoid valve on the water discharge port 21 side. The shutter 26 is made of metal or resin, and is provided so that the upper opening of the container 16 can be opened and closed. The opening and closing of the shutter 26 is controlled, for example, by driving an air cylinder (not shown) by the control unit 19. By closing the shutter 26, it is possible to prevent the cutting fluid from being directly applied to the light projecting surface 28 and the light receiving surface 29.

  FIG. 6 is an operation explanatory diagram of tip position detection (that is, wear amount detection) of the rotating grindstone 7 in the present embodiment, and FIG. 7 is a flowchart thereof. First, as shown in FIG. 6A, the control unit 19 closes the shutter 26 (S1), opens an unillustrated electromagnetic valve, and starts water injection from the water inlet 20 (S2). Either the closing of the shutter 26 or the start of water injection may be performed first or in parallel. Water injection from the water injection port 20 and water discharge from the water discharge port 21 are performed in parallel. However, since the amount of water injection per unit time is larger than the amount of water discharge, it is time in total. As shown in FIG. 6 (B), the water level in the container 16 rises and the light projecting surface 28 of the light emitting unit 17 and the light receiving surface 29 of the light receiving unit 18 are submerged (immersed in water). ) In this state, cutting, cutting, grinding, polishing and the like are performed by the rotating grindstone 7 (S3). When the processing is completed, the rotary grindstone 7 is dressed (S4). Since processing and dressing operations are well known, description thereof is omitted here. Either processing or dressing may be omitted. Water injection is continued during processing and dressing, and the injection amount exceeding the discharge amount overflows from the gap between the container 16 and the shutter 26 and goes out. When the processing and dressing are completed, the control unit 19 opens the shutter 26 as shown in FIG. 6C (S5), closes the electromagnetic valve (not shown), and stops water injection from the water inlet 20 ( S6). Either the opening of the shutter 26 or the stop of water injection may be performed first or in parallel. When the water injection is stopped, the water discharge from the water discharge port 21 proceeds, and the light projecting surface 28 of the light emitting unit 17 and the light receiving surface 29 of the light receiving unit 18 are exposed from the water as shown in FIG. 6C. In this state, the control unit 19 opens a solenoid valve (not shown) and ejects air from the air ejection port 25 toward the light projecting surface 28 and the light receiving surface 29 (S7). As a result, water droplets (droplets) attached to the light projecting surface 28 and the light receiving surface 29 are removed. As shown in FIG. 6D, the container 16 is moved to a position directly below the rotating grindstone 7 as shown in FIG. 6D, and the rotating grindstone 7 is placed in the container 16 (throwing) as shown in FIG. The light from the light projecting surface 28 to the light receiving surface 29 is blocked by the rotating grindstone 7, and the tip position of the rotating grindstone 7 is optically detected. Since the tip position detection of the rotating grindstone by the optical sensor is well known, the description thereof is omitted here.

  According to the present embodiment, the following effects can be achieved.

(1) When machining with the rotating grindstone 7 or dressing the rotating grindstone 7, the light projecting surface 28 of the light emitting unit 17 and the light receiving surface 29 of the light receiving unit 18 are submerged, so that machining waste is mixed with the cutting fluid or the grinding fluid. Even if the mist-like dirt moves around the shutter 26 and enters the container 16, the mist-like dirt is mixed with water and thinned to prevent contamination of the light projecting surface 28 and the light receiving surface 29, and the rotating grindstone 7 position detection (diameter measurement) can be performed accurately.

(2) Since the water in the container 16 is continuously replaced by continuously injecting water into the container 16 during processing and dressing operation, the contamination concentration of the water in the container 16 increases due to mist-like dirt. Is suppressed. Here, since the water injection port 20 is in the vicinity of the light projecting surface 28 and the light receiving surface 29 and new water (uncontaminated water) is continuously fed into the light projecting surface 28 and the light receiving surface 29, Water in the vicinity of the surface 28 and the light receiving surface 29 is preferable because the contamination concentration hardly increases. Further, since dirt easily collects near the water surface in the container 16, the dirt accumulated near the water surface can be suitably discharged to the outside by continuing to inject water and causing the water to overflow from the container 16.

(3) Since the water droplets on the light projecting surface 28 and the light receiving surface 29 are removed and dried by air purge from the air outlet 25 before detecting the tip position of the rotating grindstone 7, accurate detection can be performed without the influence of water droplets. .

(4) The above-mentioned contamination countermeasures are simple in structure and low in cost as compared with the case of protection with a strict sealed open / close container.

(5) Since the anti-smudge measures are taken as described above, the light-emitting unit 17 and the light-receiving unit 18 constituting the optical sensor can be installed in the processing chamber 27 having a poor environment (which is easily contaminated). The container 16 containing the light emitting unit 17 and the light receiving unit 18 is fixed to the X slider 3. The fixed position is one side in the X direction of the X slider 3, and the tip position of the rotating grindstone 7 can be detected within the range of the normal cutting stroke. For this reason, it is not necessary to extend the stroke range beyond the cutting stroke in order to detect the tip position of the rotating grindstone 7, and it is not necessary to significantly change the device design, and the work surface (the upper surface of the θ table 5) on which the work 6 is placed. From the viewpoint of securing rigidity, downsizing, and cost reduction. In addition, the apparatus can be smaller and less expensive than the case where the container 16 containing the light emitting unit 17 and the light receiving unit 18 is installed outside the processing chamber 27.

  The present invention has been described above by taking the embodiment as an example. However, it is understood by those skilled in the art that various modifications can be made to each component and each processing process of the embodiment within the scope of the claims. By the way. Hereinafter, modifications will be described.

  The liquid injected into the container 16 is not limited to water, and the gas ejected from the air outlet 25 is not limited to air. The shutter 26 may be omitted. The water discharge port 21 may be provided with an electromagnetic valve, and the controller 19 may close the electromagnetic valve and stop drainage from the water discharge port 21 when water is injected.

1 Processing Machine, 2 X-Axis Slide Guide, 3 X Slider, 4 θ Axis, 5 θ Table, 6 Workpiece, 7 Rotary Wheel, 8 Flange, 9 Spindle Axis, 10 Z Slider, 11 Y Slider, 12 Y Axis Slide Guide , 13 Camera, 14 Support leg, 15 Support base, 16 Container, 17 Light emitting part, 18 Light receiving part, 19 Control part, 20 Water inlet, 21 Water outlet, 22 Air ejection pipe, 23 Light emitting side holder, 24 Light receiving side Holder, 25 Air outlet, 26 Shutter, 27 Processing chamber, 28 Light emitting surface, 29 Light receiving surface, 30 Cutting fluid supply nozzle

Claims (9)

  A container, liquid injection means for injecting liquid into the container, liquid discharge means for discharging liquid from the container, an optical sensor having a light projecting surface and a light receiving surface in the container, the light projecting surface, Gas jetting means for jetting gas toward the light receiving surface, and a rotating grindstone that is relatively movable to a position where the light of the optical sensor is blocked, and an outer peripheral edge of the rotating grindstone based on a detection result of the optical sensor Detecting the processing machine.   The light projecting surface and the light receiving surface can be immersed in the liquid in the container, and the gas is ejected onto the light projecting surface and the light receiving surface exposed from the liquid. The processing machine according to claim 1, wherein droplets adhering to the light projecting surface and the light receiving surface can be removed.   The processing machine according to claim 1, further comprising a slider that moves in a processing direction along with a workpiece to be processed by the rotary grindstone, wherein the container is provided on the slider.   The processing machine according to any one of claims 1 to 3, wherein the container is present within a scattering range of a cutting fluid or a grinding fluid.   The processing machine as described in any one of Claim 1 to 4 provided with the shutter which can open and close the upper opening of the said container.   A liquid is poured into a container in which the light projecting surface and the light receiving surface of the optical sensor are placed, and the light projecting surface and the light receiving surface are immersed in the liquid, and then processing with a rotating grindstone or dressing of the rotating grindstone is performed. The liquid is discharged from the container and the light projecting surface and the light receiving surface are exposed from the liquid, and a gas is ejected toward the light projecting surface and the light receiving surface to emit light from the light sensor. A method for detecting the outer periphery of a grindstone, wherein the outer peripheral edge of the rotating grindstone is detected based on a detection result of the optical sensor by relatively moving the rotating grindstone so as to block.   The grindstone outer periphery detection method according to claim 6, wherein the processing or the dressing is performed while continuously injecting liquid and replacing the liquid in the container.   The method for detecting the outer periphery of a grindstone according to claim 6 or 7, wherein when performing the processing or dressing, the upper opening of the container is closed with a shutter, and the shutter is opened when detection by the optical sensor is performed. .   The method for detecting an outer periphery of a grindstone according to any one of claims 6 to 8, wherein the container is provided on a slider that moves in a machining direction along with a workpiece to be machined by the rotating grindstone.

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