CN104835753B - The position sensing apparatus of cutting tool - Google Patents
The position sensing apparatus of cutting tool Download PDFInfo
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- CN104835753B CN104835753B CN201410047713.3A CN201410047713A CN104835753B CN 104835753 B CN104835753 B CN 104835753B CN 201410047713 A CN201410047713 A CN 201410047713A CN 104835753 B CN104835753 B CN 104835753B
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- convex body
- cutting tool
- position sensing
- sensing apparatus
- air supply
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Abstract
The present invention provides a kind of position sensing apparatus of cutting tool, it is that convex setting tool has the first convex body and the second convex body of air supply mouth respectively in two sides of fixed seat one end, for installing the optical transmitting set and optical receiver of through-beam Series respectively, there is a recess between first convex body and the second convex body, position sensing operation is carried out so that cutting tool is moved into, the fixed seat can drive the cover lid for making to move horizontally provided with one by driving source, with the mobile outside covered in the first convex body and the second convex body；The cover is placed at relative recess location between first convex body and the second convex body and is provided with chock, and the chock is clogged in the recess space；When air supply mouth aeration cleaning optical transmitting set and optical receiver region, air blowing gas is outwards blown out with the kenel of positive air pressure in same direction, it not only can effectively reduce turbulent flow phenomenon and can avoid introducing the pollution air for being contaminated with cutting fluid and chip, and then ensure the cleanliness factor of optical transmitting set and optical receiver, it is accurate to perform cutting tool position sensing.
Description
Technical field
The present invention relates to a kind of cutting operation applied to semiconductor element, and it can ensure that optical transmitting set and optical receiver
Cleanliness factor, accurately to perform cutting tool position sensing, and further performs feed compensation, reaching ensures cutter via formula
Have in the position sensing apparatus of correct depth of cut position.
Background technology
Referring to Fig. 1, in general, delineating the latitude and longitude for having plural bar on wafer 10 anyhow, wafer 10 adheres to one and glued
In film layer 11, mucous layer 11 is fixed on a metal framework 12 again, and can move wafer 10 with framework 12.Referring to Fig. 2,
In cutting, wafer is transferred to the cutting that cutting machine carries out wafer, the cutting machine controls the depth of cut of cutting tool 13,
In the case of not cutting off mucous layer 11, wafer 10 is cut out into a plurality of chips anyhow according to the latitude and longitude of delineating, and continue with
Framework is moved to next operation post.Because cutting tool 13 can be because reducing diameter, if continuing to remain former using abrasion
First depth of cut, it will cause depth of cut not enough and can not cutting crystal wafer completely；In addition, the cutting tool that ought more renew,
If its external diameter of new cutting tool has larger error, if continuing to maintain original depth of cut, it will cause depth of cut
Too deep and cut-out is located at the mucous layer 11 of the lower section of wafer 10；That is, with the abrasion or renewal of cutting tool 13, it is necessary to grasp
The change of its diameter, and control the position adjustment for carrying out depth of cut to compensate with formula, it can accurately just carry out wafer cutting work
Industry.
Fig. 3, Fig. 4 are referred to, it is the cutter detecting mechanism of No. 90106909 cutting machine of TaiWan, China patent application
Patent of invention case, it is the fixed detector body 20 on the appropriate location of body, one end of the detector body 20 to
Be provided with concave edge 21, and be equiped with two sides of the concave edge 21 optical transmitting set 22 and optical receiver 23 of through-beam Series respectively, separately in
The other end of the detector body 20 is then equiped with the air supply mouth 24 for corresponding respectively to optical transmitting set 22 and clear water supply mouth
25, and correspond respectively to the air supply mouth 26 and clear water supply mouth 27 of optical receiver 23.When cutting tool 28 weares and teares or more
When new, cutting tool 28 can be moved in the concave edge 21 of detector body 20, and the rotating shaft of cutting tool 28 is located at standard
The height of position, then through-beam Series optical transmitting set 22 transmitting light source, and by optical receiver 23 receive be not cut cutter 28 hide
The light source covered, if during the abrasion of cutting tool 28, the thang-kng amount that optical receiver 23 is received is larger, if during the renewal of cutting tool 28,
The thang-kng amount that optical receiver 23 is received is smaller, and the thang-kng amount received can be converted into magnitude of voltage by optical receiver 23, and be transmitted
To controller, and via the computing of controller, you can converse the variable quantity of the diameter of cutting tool 28, and further held by formula
The position feed compensation of row depth of cut, and ensure cutting tool 28 in correct depth of cut position.However, the detector sheet
Body 20 is fixedly arranged on the side body of cutting machine, because being only located at the side of cutting tool 28, therefore when wafer carries out cutting operation
When, it cuts that the cutting fluid that uses can often mix chip and splash adheres to the surface of optical transmitting set 22 and optical receiver 23,
And have influence on the luminous flux received by optical receiver 23 so that detecting mechanism perform cutting tool 28 position detecting when,
The variable quantity of the diameter of cutting tool 28 can not correctly be detected；Referring again to Fig. 3, in order to avoid optical transmitting set 22 and light-receiving
The surface contamination of device 23, therefore the air supply mouth 24 and clear water supply mouth 25 of optical transmitting set 22, and optical receiver 23 are set
Air supply mouth 26 and clear water supply mouth 27 so that wafer carry out cutting operation when, constantly with air and clear water sprinkling light
The surface of transmitter 22 and optical receiver 23, will attach the pollutant removing on optical transmitting set 22 and the surface of optical receiver 23, with
Optical transmitting set 22 and the surface of optical receiver 23 is set to be maintained in the state of cleaning.Only supplied in air supply mouth 24,26 and clear water
During the sprinkling for answering mouth 25,27, because concave edge 21 is an open space, therefore can be in optical transmitting set 22 and optical receiver
23 periphery forms turbulent flow, and the pollution air that cutting fluid and chip are contaminated with space is constantly introduced to the space of concave edge 21
It is interior, not only waste water resource, and the surface of optical transmitting set 22 and optical receiver 23 can not be made to be maintained at complete clean state, and
Detecting mechanism is influenceed for the position detecting result of cutting tool.
The content of the invention
In view of this, the present inventor satisfies the research and development for being engaged in relevant industries for many years with it and making experience, for current institute face
The problem of facing is furtherd investigate, and the research by long-term endeavour is ground with studying, eventually creates that a kind of not only can effectively to reduce turbulent flow existing
As and can avoid introducing the pollution air for being contaminated with cutting fluid and chip, and then ensure the cleaning of optical transmitting set and optical receiver
Degree, reaches the accurate position sensing for performing cutting tool, to be effectively improved the shortcoming of prior art, this is the design of the present invention
Objective.
To achieve the above object, the technical solution adopted by the present invention is：
A kind of position sensing apparatus of cutting tool, it is characterised in that it includes：
Fixed seat：Located at body；
Sensor seat：In fixed seat, the side of sensor seat is convexly equipped with the first convex body, and opposite side is convexly equipped with second
Convex body, has a recess between first convex body and second convex body；
Optical transmitting set：On the first convex body of sensor seat, to launch light source；
Optical receiver：On the second convex body of sensor seat, and be relatively arranged on optical transmitting set to position, to feel
The luminous flux that light-metering source passes through recess；
First air supply mouth：On sensor seat, the first air supply mouth connection air supplies, and towards light
Emitter region is blown；
Second air supply mouth：On sensor seat, the second air supply mouth connection air supplies, and towards light
Receiver region is blown；
Cover lid：In fixed seat, the cover is covered is provided with chock at the recess location of relative sensor seat, and the cover lid can
Moved horizontally by driving source driving, to cover the outside of the first convex body and the second convex body in sensor seat, and fill out chock
Fill in in the locational space of the recess of sensor seat.
The position sensing apparatus of described cutting tool, wherein, one end of the fixed seat is provided with Vertical board support, and at this always
The upper end of upright grillage is provided with a bearing, and lock sets sensor seat above the bearing.
The position sensing apparatus of described cutting tool, wherein, the first air supply mouth is located at the first of sensor seat
On convex body.
The position sensing apparatus of described cutting tool, wherein, the second air supply mouth is located at the second of sensor seat
On convex body.
The position sensing apparatus of described cutting tool, wherein, the driving source of the cover lid is cylinder pressure.
The position sensing apparatus of described cutting tool, wherein, the expansion link of the cylinder pressure connects a connecting plate, the connecting plate
Cover lid is reconnected, and drives connecting plate and cover lid to move horizontally by cylinder pressure.
The position sensing apparatus of described cutting tool, wherein, the fixed seat is provided with least a slide rail group, the connecting plate
It is locked in the slide rail group, and connecting plate and cover lid is moved horizontally along slide rail group.
The position sensing apparatus of described cutting tool, wherein, the sliding track lock of the slide rail group is in fixed seat, the connection
Plate is locked on the slide of the slide rail group.
Compared with prior art, the invention has the advantages that：
The present invention provides a kind of position sensing apparatus of cutting tool, and it is provided with a fixed seat for being locked on body, at this
Fixed seat is that convex setting tool has the first convex body and the second convex body of air supply mouth respectively for two sides at one end, for filling respectively
If the optical transmitting set and optical receiver of through-beam Series, and there is a recess between the first convex body and the second convex body, for cutting tool
Move into and carry out position sensing operation, separately the cover lid for making to move horizontally can be driven by driving source provided with one in the fixed seat, and can
When cutting tool carries out cutting operation, the mobile outside covered in the first convex body and the second convex body, and then can reduce and be contaminated with
The pollution air splash of cutting fluid and chip ensures optical transmitting set and light-receiving to the surface of optical transmitting set and optical receiver
The cleanliness factor of device.
The present invention provides a kind of position sensing apparatus of cutting tool, wherein, the cover is placed on relative first convex body and second
Chock is provided with recess location between convex body, when the movement covers the outside in the first convex body and the second convex body, the chock is filled out
Fill in in the space of the recess location, when the surface region of air supply mouth aeration cleaning optical transmitting set and optical receiver, by
Clogged in chock in the space of recess location, therefore air blowing gas is outwards blown out with the kenel of positive air pressure in same direction, no
It only can effectively reduce turbulent flow phenomenon and can avoid introducing the pollution air for being contaminated with cutting fluid and chip, and then ensure optical transmitting set
And the cleanliness factor of optical receiver, reach the accurate benefit for performing cutting tool position sensing.
Brief description of the drawings
Fig. 1 is the schematic diagram (one) of existing wafer cutting；
Fig. 2 is the schematic diagram (two) of existing wafer cutting；
Fig. 3 is that the framework of the cutter detecting mechanism Patent Case of No. 90106909 cutting machine of TaiWan, China patent application shows
It is intended to；
Fig. 4 is that the detecting of the cutter detecting mechanism Patent Case of No. 90106909 cutting machine of TaiWan, China patent application is shown
It is intended to；
Fig. 5 is the decomposing schematic representation of the present invention；
Fig. 6 is the part combination schematic appearance of the present invention；
Fig. 7 is the partial cutaway schematic view of sensor seat of the present invention；
Fig. 8 is schematic appearance when present invention cover lid is closed；
Fig. 9 is partial cutaway schematic view when present invention cover lid is closed；
Figure 10 is schematic appearance when present invention cover lid is opened；
Figure 11 is the schematic diagram of cutting tool position sensing when present invention cover lid is opened.
Description of reference numerals：
Existing part：10- wafers；11- mucous layers；12- frameworks；13- cutting tools；20- detector bodies；21- concave edges；
22- optical transmitting sets；23- optical receivers；24- air supply mouths；25- clear water supplies mouth；26- air supply mouths；27- clear water is supplied
Mouth；28- cutting tools；
Part of the present invention：30- fixed seats；31- sensors seat；The convex bodys of 311- first；The convex bodys of 312- second；313- recesses；
The upright grillages of 32-；33- bearings；34- optical transmitting sets；35- the first air supply mouths；36- optical receivers；The air supplies of 37- second
Mouth；38- cover lids；381- chocks；39- cylinder pressures；391- expansion links；40- connecting plates；41- slide rail groups；411- slide rails；412- slides；
42- protection caps；43- cutting tools.
Embodiment
To make your juror further understand the present invention, hereby lift preferred embodiment and coordinate schema, be described in detail
As after：
Refer to shown in Fig. 5, Fig. 6, Fig. 7, the position sensing apparatus of cutting tool of the present invention, it is locked on body provided with one
The fixed seat 30 of side wall, the fixed seat 30 is that lock, provided with sensor seat 31, is in the fixed seat 30 in the present embodiment at one end
One end lock be provided with a bearing 33 provided with Vertical board support 32 always, and in the upper end lock of the upright grillage 32, and in the bearing 33
Fang Suoshe sensors seat 31；Upward projection the first convex body 311 and the second convex body 312 are distinguished in the side of upper end two of sensor seat 31,
For installing the optical transmitting set and optical receiver of through-beam Series respectively, and have one to supply between the first convex body 311 and the second convex body 312
Cutting tool, which is moved into, carries out the recess 313 that position senses operation, and in the present embodiment, first convex body 311 is the convex of knuckle shape
Block, and be equiped with first convex body 311 optical transmitting set 34, one on sensor seat 31, and towards the optical transmitting set 34
The first air supply mouth 35 that region is blown, the first air supply mouth 35 is simultaneously connected to a cleaned air source of supply (schema is not
Show), and can be to the surface region aeration cleaning of optical transmitting set 34, in the present embodiment, the first air supply mouth 35 was located at should
On first convex body 311, another second convex body 312 is also the projection of knuckle shape, and be relatively arranged on the first convex body 311 to position
Put, be equiped with the optical receiver 36 for receiving optical transmitting set 34 light emitted source on second convex body 312, and the mode that can be compareed
Luminous flux of the light source by recess 313 is sensed, and is converted into transmitting after magnitude of voltage to controller, via the computing of controller, i.e.,
It can converse the variable quantity positioned at the internal cutting cutter of recess 313, it is another on sensor seat 31, and towards the optical receiver 36
The second air supply mouth 37 that region is blown, the second air supply mouth 37 is identical to be connected to a cleaned air source of supply (schema
Do not show), and can be to the surface region aeration cleaning of optical receiver 36, in the present embodiment, the second air supply mouth 37 is located at
On second convex body 312, separately the cover lid 38 for making to move horizontally can be driven by driving source provided with one in the fixed seat 30, with movement
The outside in the first convex body 311 and the second convex body 312 is covered, in the present embodiment, the driving source of the cover lid 38 is a cylinder pressure 39,
One end of the cylinder pressure 39 is on upright grillage 32, and the end of expansion link 391 of cylinder pressure 39 then connects a connecting plate 40, the connection
Plate 40 is locked again sets connect cover lid 38, and drives connecting plate 40 and cover lid 38 to move horizontally using cylinder pressure 39, in order that connection
What plate 40 and cover lid 38 can be stablized moves horizontally, and is separately locked in fixed seat 30 provided with an at least slide rail group 41, and make the company
Fishplate bar 40 is locked in the slide rail group 41, in the present embodiment, and the slide rail 411 of the slide rail group 41 is locked in fixed seat 30, and
The connecting plate 40 is then locked on the slide 412 of the slide rail group 41, and is connected with one in the rear end of the connecting plate 40 and can be covered cunning
The protection cap 42 of rail 411, and then cylinder pressure 39 is when start, the drive connecting plate 40 and cover lid 38 that can stablize are along slide rail group 41
Move horizontally；Wherein, the cover lid 38 is provided with one at the relative position of recess 313 between first convex body 311 and the second convex body 312
Chock 381, when the cover lid 38 moves horizontally the outside covered in the first convex body 311 and the second convex body 312, makes the chock 381
Clog in the locational space of the recess 313.
Refer to shown in Fig. 8, Fig. 9, because position sensing apparatus is located at the organism sidewall close to cutting tool so that wafer
When carrying out cutting operation, the cutting fluid that its cutting is used often can mix chip and splash adheres to position sensing apparatus, therefore
The present invention will make the start of cylinder pressure 39, and drive cover lid 38 to move horizontally, and cover in the first convex body 311 and the second convex body
312 outside, while and making chock 381 clog in the locational space of the recess 313, then respectively with the first air supply mouth
35 and the region of 37 aeration cleaning optical transmitting set of the second air supply mouth 34 and the region of optical receiver 36, because the chock 381 is clogged
In in the locational space of recess 313, thus the first air supply mouth 35 inflatable gas know from experience optical transmitting set 34 and chock 381 it
Between channel space in outwards blown out in same direction with the kenel of positive air pressure, and the second air supply mouth 37 air blowing gas
Channel space that can be between optical receiver 36 and chock 381 is outwards blown out with the kenel of positive air pressure in same direction, and it is not only
The turbulent flow phenomenon of the channel space between optical transmitting set 34 and optical receiver 36 and chock 381 can be effectively reduced to avoid being drawn by the week side of boss
Enter to be contaminated with the pollution air of cutting fluid and chip, and because chock 381 is clogged in recess 313, and form closing recess 313 rear end
Passage, can also be prevented effectively to be introduced by rear and be contaminated with the pollution air of cutting fluid and chip, and then ensure optical transmitting set 34
And the cleanliness factor of optical receiver 36.
Refer to shown in Figure 10, when cutting tool need to sense the position of its diameter again because wearing and tearing or updating, cutting
Cutter will stop operating and stop splash cutting fluid, and then the present invention will make the start of cylinder pressure 39, and drive cover lid 38 to make water
The flat outside for being moved out the first convex body 311 and the second convex body 312, while and making the position of the disengaging recess 313 of chock 381 empty
Between, the optical receiver 36 on the convex body 312 of optical transmitting set 34 and second on the first convex body 311 is exposed in open space.
Refer to shown in Figure 11, cutting tool 43 carry out position sensing operation when, its by cutting tool 43 be moved to the first convex body 311 and
In the locational space of recess 313 between second convex body 312, the then transmitting light source of optical transmitting set 34 of through-beam Series, and by optical receiver
36 receive the light source for not being cut the masking of cutter 43, and the thang-kng amount received can be converted into magnitude of voltage by the optical receiver 36, and
Transmit to controller, and via the computing of controller, you can the diametrical position of cutting tool 43 is conversed, and further by formula
The position feed compensation of depth of cut is performed, and ensures cutting tool 43 in correct depth of cut position, and then is reached accurately
Perform the benefit of the position of cutting tool 43 sensing.
Accordingly, the design of actually a deep tool practicality and progressive of the invention, so there are no identical product and publication is public
Open, so as to permit symbol application for a patent for invention important document, whence is filed an application in accordance with the law.
Claims (8)
1. a kind of position sensing apparatus of cutting tool, it is characterised in that it includes：
Fixed seat：Located at body；
Sensor seat：In fixed seat, the side of sensor seat is convexly equipped with the first convex body, and it is convex that opposite side is convexly equipped with second
Body, has a recess between first convex body and second convex body；
Optical transmitting set：On the first convex body of sensor seat, to launch light source；
Optical receiver：Located at sensor seat the second convex body on, and be relatively arranged on optical transmitting set to position, to sense light
The luminous flux that source passes through recess；
First air supply mouth：On sensor seat, the first air supply mouth connection air supplies, and launch towards light
Blow in device region；
Second air supply mouth：On sensor seat, the second air supply mouth connection air supplies, and towards light-receiving
Blow in device region；
Cover lid：In fixed seat, the cover is covered is provided with chock at the recess location of relative sensor seat, and the cover lid can be by driving
Dynamic source driving is moved horizontally, to cover the outside of the first convex body and the second convex body in sensor seat, and make chock clog in
In the locational space of the recess of sensor seat.
2. the position sensing apparatus of cutting tool according to claim 1, it is characterised in that one end of the fixed seat is provided with
Vertical board support, and be provided with a bearing in the upper end of the upright grillage always, lock sets sensor seat above the bearing.
3. the position sensing apparatus of cutting tool according to claim 1, it is characterised in that the first air supply mouth is set
In on the first convex body of sensor seat.
4. the position sensing apparatus of cutting tool according to claim 1, it is characterised in that the second air supply mouth is set
In on the second convex body of sensor seat.
5. the position sensing apparatus of cutting tool according to claim 1, it is characterised in that the driving source of the cover lid is pressure
Cylinder.
6. the position sensing apparatus of cutting tool according to claim 5, it is characterised in that the expansion link connection of the cylinder pressure
One connecting plate, the connecting plate reconnects cover lid, and drives connecting plate and cover lid to move horizontally by cylinder pressure.
7. the position sensing apparatus of cutting tool according to claim 6, it is characterised in that the fixed seat is provided with least
One slide rail group, the connecting plate is locked in the slide rail group, and connecting plate and cover lid is moved horizontally along slide rail group.
8. the position sensing apparatus of cutting tool according to claim 7, it is characterised in that the sliding track lock of the slide rail group is set
In in fixed seat, the connecting plate is locked on the slide of the slide rail group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410047713.3A CN104835753B (en) | 2014-02-11 | 2014-02-11 | The position sensing apparatus of cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410047713.3A CN104835753B (en) | 2014-02-11 | 2014-02-11 | The position sensing apparatus of cutting tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104835753A CN104835753A (en) | 2015-08-12 |
| CN104835753B true CN104835753B (en) | 2017-08-01 |
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| CN201410047713.3A Expired - Fee Related CN104835753B (en) | 2014-02-11 | 2014-02-11 | The position sensing apparatus of cutting tool |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018082030A (en) * | 2016-11-16 | 2018-05-24 | 株式会社ディスコ | jig |
| CN110103124B (en) * | 2019-03-28 | 2024-03-22 | 北京百慕合金有限责任公司 | Grinding wheel device, grinding wheel cutting equipment and cutting method |
| CN112606234A (en) * | 2020-12-28 | 2021-04-06 | 郑州光力瑞弘电子科技有限公司 | Scribing machine blade monitoring device and scribing machine |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102248449A (en) * | 2011-05-20 | 2011-11-23 | 袁远 | Visual numerical cutting tool detection instrument and manufacturing method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2967618B2 (en) * | 1991-08-21 | 1999-10-25 | 株式会社東京精密 | Blade position detector |
| GB0229459D0 (en) * | 2002-12-19 | 2003-01-22 | Renishaw Plc | Tool analysis device and method |
| JP4481667B2 (en) * | 2004-02-02 | 2010-06-16 | 株式会社ディスコ | Cutting method |
| JP5068621B2 (en) * | 2007-10-03 | 2012-11-07 | 株式会社ディスコ | Cutting equipment |
| DE102010011470B9 (en) * | 2010-03-09 | 2016-09-29 | Nagel Maschinen- Und Werkzeugfabrik Gmbh | Method and device for measuring-assisted fine machining of workpiece surfaces and measuring system |
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- 2014-02-11 CN CN201410047713.3A patent/CN104835753B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102248449A (en) * | 2011-05-20 | 2011-11-23 | 袁远 | Visual numerical cutting tool detection instrument and manufacturing method thereof |
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