JP4312304B2 - CSP substrate splitting device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a CSP substrate dividing apparatus for dividing a CSP substrate into individual pellets.
[0002]
[Prior art]
A CSP (Chip Size Package) substrate 100 as shown in FIG. 9 is formed by sealing a plurality of semiconductor chips with a resin such as glass epoxy and integrally packaging them, and cutting lines 101 and 102 provided vertically and horizontally. By cutting along, it is divided into individual CSPs that are pellets. Each CSP is transferred to a transport tray and shipped as it is, or transported to an assembly line for electrical appliances.
[0003]
When the CSP substrate 100 is cut, as in the case of a normal semiconductor wafer as shown in FIG. 10, the CSP substrate 100 is placed on the holding table of the dividing device while being held by the frame F via the holding tape T. However, in this case, it is necessary to attach and detach and hold the holding tape T, and there is a problem in terms of productivity and economy. Therefore, instead of the holding tape T and the frame F, cutting in advance as shown in FIG. In many cases, a reusable jig 104 having a blade relief groove 103 formed thereon is used to perform cutting by placing the CSP substrate 100 on the jig 104.
[0004]
However, since the size and thickness of the CSP substrate and the size of each pellet are various, when using a jig, a plurality of types of jigs with relief grooves corresponding to the types of the CSP substrate are required. It becomes. Therefore, in such a case, a plurality of types of jigs are stored in advance in a jig rack provided in the dividing device, a jig corresponding to the CSP substrate to be divided is selected, and the selected jig is selected. A CSP substrate is placed on the substrate and cutting is performed.
[0005]
[Problems to be solved by the invention]
However, if a jig of a type different from the jig to be stored is erroneously stored at the location specified by the address, the CSP board is mounted on a jig that does not correspond to the CSP board to be divided. Therefore, the position of the cutting line formed on the CSP substrate corresponding to the size of the pellet and the clearance groove formed on the jig do not match. Therefore, when cutting is performed in this state, there arises a problem that the cutting blade is cut into a portion where the relief groove is not formed, the jig is damaged, the cutting blade is damaged, and the CSP substrate is also damaged.
[0006]
As described above, when various CSP substrates are divided into individual pellets by one dividing apparatus, there is a problem in that an appropriate jig corresponding to the CSP substrate can be selected and used. ing.
[0007]
[Means for Solving the Problems]
As specific means for solving the above problems, the present invention includes a jig for supporting a CSP substrate, a jig rack for storing two or more kinds of jigs corresponding to the type of the CSP board, and the jig rack. An appropriate jig is carried out, a jig carry-in / out table for positioning the carried-out jig in a region where the CSP board is placed, and a CSP board mounted on the jig on the jig carry-in / out table Each of the jigs has an identification mark for identifying the jig corresponding to the type of the CSP board corresponding to each of the jigs. The CSP board includes a judging means for judging whether or not the jig is a jig corresponding to the CSP board to be divided based on the identification mark when the jig is unloaded from the jig rack. Provide splitting device .
[0008]
In the CSP substrate dividing apparatus, the determination means includes first storage means for storing information input by the operator regarding the CSP substrate to be divided, and information on the correspondence relationship between the CSP substrate and the corresponding jig. Information stored in the second storage means that is input and stored in advance, the third storage means that stores information on the jig detected based on the identification mark, the first storage means, and the second storage means Information input means for inputting the information, and the information stored in the first storage means and the information stored in the third storage means have a correspondence stored in the second storage means Whether or not the jig to be carried out from the jig rack is a jig corresponding to the CSP substrate to be divided, and the second storage means stores the jig. Healing The rack address is stored, and based on the information about the CSP substrate stored in the first storage means and the jig rack address stored in the second storage means, the jig carry-in / out table is Move to the address, detect the identification mark of the jig stored in the address, store the information about the jig in the third storage means, and try to divide the jig to be taken out from the jig rack If the jig corresponds to the CSP board to be carried out, the jig is unloaded and the jig to be unloaded from the jig rack is not the jig corresponding to the CSP board to be divided. The identification mark is configured by the presence / absence of a hole, the jig carry-in / out table is provided with an optical sensor for detecting the presence / absence of the hole, the identification mark is a bar code, Equipment carry-in / out table That the bar code reader for reading the bar code is disposed in, and additional requirements.
[0009]
In the CSP board | substrate division | segmentation apparatus comprised in this way, it is ensured by the identification mark formed in the jig | tool whether the jig | tool to carry out corresponds to the CSP board | substrate which is going to divide | segment. Since it can be recognized, even if an incorrect jig is stored at the location specified by the address of the jig rack, it is ensured that a jig that does not correspond to the CSP board to be divided is used. Can be avoided.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
As an example of an embodiment of the present invention, a CSP substrate dividing apparatus 10 shown in FIG. 1 will be described. The CSP substrate dividing apparatus 10 is an apparatus that cuts a CSP substrate into CSPs that are individual pellets and transfers them to a transport tray. A CSP substrate 11 to be divided is a cassette mounting that can be moved up and down. A plurality of cassettes 13 placed on the table 12 are accommodated.
[0011]
A plurality of jigs that support the CSP substrate 11 from below when the CSP substrate 11 is cut are accommodated in the jig rack 15. Here, since it is necessary to preliminarily form blade relief grooves corresponding to the size and thickness of the CSP substrate 11 and the size of the pellets after division, etc., the jig individually corresponds to the type of CSP substrate. Two or more types of jigs are accommodated in a predetermined address of the jig rack 15. In the example of FIG. 1, four types of jigs 14 a, 14 b, 14 c, and 14 d are accommodated in four pieces of the jig rack 15 at address 1, address 2, address 3, and address 4, respectively.
[0012]
The CSP board | substrate 11 is a board | substrate on a plane as shown, for example in FIG. 2, and becomes each CSP by cutting the cutting lines 16 and 17 shown with the broken line vertically and horizontally. Further, each jig, for example, the jig 14a shown in FIG. 2, is configured to hold the entire back surface of the CSP substrate 11 and to hold each CSP even after the division. Specifically, one first suction hole 20 and two second suction holes are provided for each region defined by escape grooves 18 and 19 provided in advance in the vertical and horizontal directions corresponding to the cutting lines 16 and 17 of the CSP substrate 11. And a suction hole 21.
[0013]
If the CSP substrate 22 shown in FIG. 3 has a large number of cutting lines 23 and 24 and the individual CSPs are divided into small parts, the jig needs to cope with this. In this case, For example, a large number of relief grooves 25 and 26 are formed corresponding to the cutting lines 23 and 24 as in the jig 14b shown in FIG. And since there are many escape grooves 25 and 26, the number of the divided areas also increases, and thereby the first suction holes 27 and the second suction holes 28 are also formed.
[0014]
The description will be continued with reference to the example of FIG. 2. On the side surface of the jig 14a, a suction source pipe 64 of the first transport unit 60, a suction source pipe 73 of the second transport unit 69, which will be described later, Three engaging holes 29, 30, and 31 are provided to engage with the suction source pipe 79 of the conveying means 74. Here, in FIG. 4, as shown in the internal structure of the jig 14 a shown in FIG. 2, the first suction hole 20 penetrates the front and back surfaces of the jig 14 a, and the second suction hole 21 is the jig 14 a. The three engagement holes 29, 30, 31 are communicated with each other through an air passage 32 formed in the interior.
[0015]
Further, an identification mark 33 indicating the product number of the jig is provided on the surface of each jig. The identification mark 33 makes it possible to identify the part number of the jig by, for example, the number of holes, and three holes 34 are formed as the identification marks 33 in the jig 14a of FIG. Further, two holes 34 are formed in the jig 14b shown in FIG. Note that the identification mark 33 may be configured by, for example, a barcode.
[0016]
Each jig accommodated in the jig rack 15 is placed on a jig carry-in / out table 36 by a jig carry-in / out means 35 shown in FIG. In the jig carry-in / out means 35, a table support portion 39 is slidably engaged with a pair of first guide rails 38 provided in a vertical direction on an upstanding wall portion 37, and two guide rails 38 are engaged. A table support portion 39 penetrating through the through portion 40 formed between is engaged with a ball screw (not shown) provided in the vertical direction on the rear side of the wall portion 37. Then, as the ball screw rotates by being driven by the motor 41 connected to the ball screw, the table support portion 39 is guided by the guide rail 38 and moves up and down.
[0017]
In addition, a pair of second guide rails 42 are disposed in the Y-axis direction on the upper surface of the table support portion 39, and the jig carry-in / out table 36 is slidably engaged therewith. The jig carry-in / out table 36 is guided by the second guide rail 42 by the drive of the drive source 36a engaged with the rail 39a provided on the side of the table support portion 39 and can move within a required range in the Y-axis direction. It has become. Further, on the upper surface of the jig carry-in / out table 36, for example, four light sensors 43 each including a light-emitting element and a light-receiving element which are detection means 46 for detecting the identification mark 33 are arranged side by side. The optical sensor 43 is provided to determine whether or not the jig to be carried out corresponds to the CSP substrate.
[0018]
For example, when the jig 14a accommodated in the jig rack 15 is carried out using the jig carry-in / out means 35, the table support portion 39 moves up and down and is positioned at the corresponding address, and the jig to be carried out. It moves to a position slightly lower than the position where 14a is accommodated. Then, as shown in FIG. 5 (B), the jig carry-in / out table 36 moves in the + Y direction, enters under the jig 14a to be carried out in the jig rack 15, and is a CSP board to be divided. Judge whether the jig is compatible with.
[0019]
This determination is performed by the determination means 44 having a configuration as shown in FIG. 6, for example. The determination unit 44 includes a keyboard, a CPU, a memory, and the like provided in the CSP board dividing apparatus 10. When shown based on functions, the determination unit 44 includes a control unit 45, a detection unit 46, and a first storage unit 47 as shown in FIG. , Second storage means 48, third storage means 49, and information input means 50.
[0020]
The control unit 45 performs input of information from the information input unit 50, storage and reading of information in each storage unit, comparison and determination of contents stored in each storage unit, and the like.
[0021]
In the example shown in FIG. 5, the detection means 46 is an optical sensor 43 disposed on the jig carry-in / out table 36, and the identification mark 33 provided on the jig is a hole as shown in FIGS. Is constituted by a bar code reader when the identification mark 33 is a bar code.
[0022]
In the first storage means 47, as shown in FIG. 7A, the product number of the CSP board 11 to be divided is inputted and stored by the operator from the information input means 50. The product number of the CSP substrate 11 is a different identification number depending on the size, thickness, pellet size, etc. of the CSP substrate, and is represented by, for example, a three-digit number. In the example of FIG. 7A, only the product number 001 is input by the operator and stored in the first storage means 47. That is, in this case, the CSP board having the product number 001 is the target of division.
[0023]
As shown in FIG. 7B, the second storage means 48 has the CSP board part number, the part number of the jig and the number of holes corresponding thereto, and the address of the jig rack in which the jig is accommodated. A correspondence table composed of pellet sizes is stored in advance. For example, the product number of the jig corresponding to the CSP substrate of the product number 002 is B, and the jig is accommodated at addresses 2-1, 2-2, 2-3, 2-4 of the jig rack 15. Further, the pellet size of the CSP substrate of product number 002 is 5 mm square, and information such as division by 6 vertical and horizontal 14 pellets by division is also stored.
[0024]
As shown in FIG. 7C, in the third storage means 49, the identification mark 33 of the jig actually being carried out to the jig carry-in / out table 36 is detected by the detection means 46, and the detected jig is detected. The product number is stored.
[0025]
The information input means 50 inputs information to be stored in the first storage means 47 and the second storage means 48. For example, the keyboard 51 provided on the front side of the CSP substrate dividing apparatus 10 shown in FIG. It is.
[0026]
In the determination means 44 configured as described above, the operator inputs the product number 001 of the CSP board 11 to be divided using the information input means 50 and stores it in the first storage means 47 before starting the division. .
[0027]
And based on the information about the CSP substrate stored in the first storage means and the address of the jig rack stored in the second storage means, the jig carry-in / out table 36 moves to that address, As shown in FIG. 5B, when the jig carry-in / out table 36 enters under the jig 14a (part number A) to be carried out in the jig rack 15, the part number of the jig 14a is changed. It is detected by the detection means 46 and stored in the third storage means 49.
[0028]
Specifically, as shown in FIG. 5A, when the detection means 46 is an optical sensor 43, light is emitted from the optical sensor 43 to the hole 34 formed in the jig. When the light is irradiated, the reflected light of the light passing through the hole 34 becomes weak, whereas the light irradiated to the portion where the hole is not formed is reflected on the back surface of the jig 14a, so that the reflected light becomes strong. In this way, it is determined how many holes 34 are formed based on the reflected light detected by the optical sensor 43.
[0029]
For example, as shown in FIGS. 2 and 3, three holes 34 are formed in the jig 14a of the product number A, and two holes 34 are formed in the jig 14b of the product number B. Although not shown, if one hole is formed in the jig c of the product number C and no hole is formed in the jig 14d of the product number D, the jig that is directly above the jig carry-in / out table 36. Is the jig 14a of the product number A, since the jig of the product number A has three holes, the detection means 46 is composed of four optical sensors 43 as shown in FIG. In the case of the reflection light, three of the reflected lights are weak and one is strong. In this way, it is possible to determine how many holes are formed in the jig 14a based on the intensity of the reflected light. That is, in this case, it can be seen that the jig 14a immediately above the jig carry-in / out table 36 is a jig of part number A. This detection result is stored in the third storage means 49.
[0030]
Thus, when the product number of the jig 14a immediately above the jig carry-in / out table 36 is detected and stored in the third storage means 49, the contents stored in the first storage means 47 and the contents stored in the first storage means 47 are controlled. It is determined whether or not the content stored in the third storage means 49 has a correspondence stored in advance in the second storage means 48.
[0031]
In the case of the example shown in FIG. 7, the part number of the CSP substrate stored in the first storage unit 47 is 001, and the part number of the jig stored in the third storage unit 49 is A. Therefore, it is determined that the jig 14a immediately above the jig carry-in / out table 36 is a jig corresponding to the CSP substrate 001.
[0032]
As described above, the content stored in the first storage unit 47 and the content stored in the third storage unit 49 have the correspondence stored in the second storage unit 48. In this case, the table support portion 39 is slightly raised, and the jig 14a is placed on the jig carry-in / out table 36 as shown in FIG. When the jig 14a having the product number A is placed on the jig carry-in / out table 36 in this way, the jig carry-in / out table 36 moves in the -Y direction, so that the jig 14a remains on the jig rack 15 while being placed. By retracting and then raising the table support portion 39, the jig carry-in / out table 36 is positioned at the top as shown in FIG. 5D, and the jig carry-in / out table 36 on which the jig 14a is placed. Appears at the top of the CSP substrate dividing apparatus 10.
[0033]
On the other hand, when the content stored in the first storage unit 47 and the content stored in the third storage unit 49 do not have the correspondence stored in the second storage unit 48. It is determined that the jig does not correspond to the CSP substrate 11. In this case, the operator stops the unloading and informs the operator by displaying the fact on the monitor 52 shown in FIG.
[0034]
Thus, by determining whether the jig to be carried out by the determination means 44 is a jig corresponding to the CSP substrate 11, for example, it is stored in the second storage means 48 at a predetermined address of the jig rack 15. If the wrong jig that does not have the corresponding relationship is stored, the wrong jig will not be carried out and used, so the pellet size and the escape groove of the jig do not match. The problem of damaging the jig or the cutting blade or damaging the CSP substrate itself does not occur.
[0035]
When the jig 14a corresponding to the CSP board 11 to be divided is set on the jig carry-in / out table 36, the unsplit CSP board 11 accommodated in the cassette 12 can be moved in the X-axis direction. It is pushed out by the CSP substrate carrying means 53 and placed in the temporary placement area 54.
[0036]
A belt 54a that circulates in the X-axis direction is provided in the temporary placement region 54, and the CSP substrate 11 pushed out from the cassette 12 is placed on the belt 54a, and slides in the −X direction on the upper surface of the belt 54a. It is positioned at a fixed position in the temporary placement area 54. The CSP substrate 11 is placed on the jig 14 a on the jig carry-in / out table 36 by the CSP substrate placing means 55.
[0037]
Here, the CSP substrate mounting means 55 is movable up and down with respect to the third guide rail 56 disposed in the Y-axis direction, the drive portion 57 slidably engaged with the third guide rail 56, and the drive portion 57. The vertical movement part 58 is provided with a suction part 59 below the vertical movement part 58. The vertical movement part 58 descends and the CSP substrate 11 placed in the temporary placement area 54 is attached to the suction part 59. The vertical movement part 58 moves upward and moves in the -Y direction and is positioned immediately above the jig 14a on which the jig carry-in / out table 36 is placed. Is released, the CSP substrate 11 is placed on the jig 14a as shown in FIG.
[0038]
Thus, when the CSP substrate 11 is placed on the jig 14 a on the jig carry-in / out table 36, the CSP substrate 11 is transferred to the processing table 61 together with the jig 14 a by the first transfer means 60.
[0039]
The first transport means 60 includes a bridge portion 62 erected in the X-axis direction from above the jig carry-in / out table 36 to above the processing table 61, and is movable in the X-axis direction along the bridge portion 62. The holding portion 63 is arranged to be movable up and down in the axial direction. The holding portion 63 includes three suction source pipes 64 for holding a jig.
[0040]
The suction source pipe 64 is engaged with the engagement holes 29, 30, 31 formed on the side surface of the jig 14a shown in FIG. 2, and holds the jig 14a. The suction force supplied from the three engagement holes 29, 30, 31 is a second part of the AA cross section in FIG. 2 through the air passage 32 inside the jig 14 a shown in FIG. The suction hole 21 is also supplied, and the CSP substrate 11 is sucked and held by the jig 14a by this suction force. Accordingly, the suction source pipe 64 is engaged with the engagement holes 29, 30, and 31, and the holding part 63 moves in the −X direction in this state, so that the jig 14 a can be held with the CSP substrate 11 firmly held. Can be transported. When the jig 14a that sucks and holds the CSP substrate 11 is positioned immediately above the processing table 61 by being conveyed in this way, the holding portion 63 is lowered and the suction source pipes 64 that face each other slide in a direction away from each other. By releasing the engaged state with 29, 30, 31, the CSP substrate 11 is placed on the processing table 61 together with the jig 14 a. And the suction force supplied from the suction hole 65 provided in the center part of the processing table 61 is supplied to the first suction hole 20 penetrating the front and back surfaces of the jig 14a, and the jig 14a and the CSP substrate are supplied by this suction force. 11 is sucked and held.
[0041]
The CSP substrate 11 sucked and held by the processing table 61 together with the jig 14a is first positioned immediately below the alignment means 66 as the processing table 61 moves in the -X direction. Here, the cutting line shown in FIG. 16 is detected, and alignment with the blade 67 in the Y-axis direction is performed.
[0042]
Further, when the machining table 61 is further moved in the −X direction, the cutting line 16 is first cut by the action of the dividing means 68 having the cutting blade 67 attached to the tip of the spindle. Further, every time one cutting line 16 is cut, the dividing means 68 is indexed and fed in the Y-axis direction by an interval between adjacent cutting lines, and the cutting table 16 is sequentially moved along with the reciprocating movement in the X-axis direction. It will be cut.
[0043]
When all the cutting lines 16 in the same direction are cut, the processing table 61 is rotated 90 degrees, and the cutting line 17 orthogonal to the cutting line 16 is cut in the same manner as described above so that the CSP substrate 11 is divided into individual pellets. Is done.
[0044]
The CSP substrate 11 thus divided is conveyed to the cleaning table 70 by the second conveying means 69 together with the jig 14a. Here, the second transporting unit 69 includes an arm part 71 that is movable in the Y-axis direction and the X-axis direction, and a vertical movement part 72 that is disposed at the tip of the arm part 71 so as to be movable up and down. The vertical movement portion 72 includes three suction source pipes 73 that engage with the engagement holes 29, 30, and 31 of the jig 14 a in the same manner as the first transport unit 60. The divided CSP substrate 11 is conveyed together with the jig 14a in a state where the divided CSPs are engaged with the joint holes 29, 30, and 31 and are sucked and held by the jig 14a.
[0045]
The cleaning table 70 has substantially the same structure as the processing table 61 and has a suction hole and is configured to be spin-rotated. The CSP substrate 11 is placed together with the jig 14 a, and cleaning is performed as the cleaning table 70 rotates. The cutting waste is removed by jetting water and further dried by high-pressure air.
[0046]
The cleaned and dried CSP substrate 11 is transferred to the pellet pick-up table 75 by the third transfer means 74 together with the jig 14a. The third conveying means 74 includes a bridge portion 76 erected in the X-axis direction, an arm portion 77 arranged to be movable in the X-axis direction along the bridge portion 76 and movable up and down, The holding part 78 is arranged in the engagement holes 29, 30, 31 of the jig 14a in the same manner as the first conveying means 60 and the second conveying means 69. Three suction source pipes 79 are provided, and the divided CSP substrate 11 sucked and held by the jig 14a is conveyed in a state where the suction source pipes 79 are engaged with the engagement holes 29, 30, and 31. The
[0047]
When the holding part 78 that sucks and holds the CSP substrate 11 together with the jig 14a moves in the + X direction and is positioned immediately above the pellet pick-up table 75, the holding part 78 descends together with the arm part 77, and the suction source pipes 79 facing each other. The CSP substrate 11 is placed on the pellet pick-up table 75 together with the jig 14 a by releasing the engagement state with the engagement holes 29, 30, and 31 by sliding in the direction away from the center.
[0048]
In the vicinity of the pellet pickup table 75 in the + X direction, there is provided a pellet transfer area 80, which is an area on which a transport tray for storing individual pellets is placed, and the transfer means 81 is provided on the pellet pickup table 75. It extends from above to above the pellet transfer region 80.
[0049]
The transfer means 81 has two bridge portions 82 erected in the X-axis direction and two holding portions 83 that can move along the bridge portion 82 in the X-axis direction and move up and down in the Z-axis direction. . Each holding portion 83 includes an adsorption portion 84 that adsorbs CSP as individual pellets from the divided CSP substrate 11 placed on the pellet pickup table 75 together with the jig 14a.
[0050]
The pellet pick-up table 75 is movable and rotatable in the Y-axis direction, and when picking up the pellet, the pellet pick-up table 75 moves in the Y-axis direction and positions the CSP substrate 11 at an appropriate position.
[0051]
On the other hand, the pellet transfer area 80 is provided with a first transfer tray table 85 that is movable in the Y-axis direction, and an empty transfer tray 86 for storing pellets is placed thereon. . The first transport tray table 85 is also movable in the Z-axis direction, and can enter the lower portion of the first transport tray rack 87 through the inside of the apparatus.
[0052]
In the first transport tray rack 87, a plurality of empty transport trays 86 are stacked and stored, and are sequentially taken out from the bottom by the first transport tray table 85. Then, the extracted empty transport tray 86 is placed on the first transport tray table 85 and positioned in the pellet transfer area 80.
[0053]
When transferring the pellet, first, the pellet pickup table 75 is moved in the Y-axis direction, and the suction portion 84 is placed above the pellet to be picked up on the CSP substrate 11 placed on the pellet pickup table 75 together with the jig 14a. After the positioning and lowering of the holding part 83 to adsorb the pellets, the holding part 83 is raised.
[0054]
On the other hand, the transport tray 86 moves in the Y-axis direction as the first transport tray table 85 slides in the Y-axis direction, and is aligned with the suction portion 84 in the Y-axis direction. In this state, the holding unit 83 holding the pellets is moved in the + X direction to move to a position directly above a predetermined empty slot of the transport tray 86 placed on the first transport tray table 85, and the holding unit 83 is lowered. At the same time, by releasing the suction by the suction portion 84, the CSP which is a pellet is accommodated in a predetermined slot of the transport tray 86.
[0055]
By repeating such operations, pellets are accommodated in all slots of the transport tray 86. When there are two holding portions 83 as in the present embodiment, it is more efficient if they are operated in parallel and picked up.
[0056]
The jig 14a left on the pellet pick-up table 75 by picking up all the pellets is positioned in the jig placement area 88 as the pellet pick-up table 75 rotates 90 degrees and moves in the + Y direction. Then, the CSP substrate to be divided again is placed on the jig 14a by being conveyed to the jig carry-in / out table 36 by the fourth conveying means 89, and the above-described operation is repeated.
[0057]
On the other hand, when there is no CSP substrate to be divided, the jig carry-in / out means 35 accommodates it at the original address of the jig rack 15. In this way, since the jig can be used over and over again, there is no need to attach and detach and discard the used tape as in the prior art, which is excellent in economy and productivity.
[0058]
Although the flow of one jig has been described so far, in actuality, four jigs flow efficiently while timing.
[0059]
The transfer tray 90 filled with pellets by transfer is transferred to the second transfer tray table 92 by the transfer means 91. Here, the replacement means 91 includes a guide rail 91a, an arm portion 93 that can move in the X-axis direction along the guide rail 91a, and a clamping portion 94 that is arranged to be movable up and down at the tip of the arm portion 93. Configured, the clamping part 94 is lowered
The transport tray 90 containing pellets is sandwiched in the first transport tray table 85, the sandwiching portion 94 rises and moves in the + X direction, and the sandwiched transport tray 90 is directly above the second transport tray table 92. When positioned, the clamping unit 94 descends to release the clamping state, and is placed on the second transport tray table 92.
[0060]
The second transport tray table 92 can move in the Y-axis direction and the Z-axis direction, like the first transport tray table 85, and can enter the lower portion of the second transport tray rack 95 through the inside of the apparatus. Therefore, when the transport tray 90 filled with pellets is placed on the second transport tray table 92, the second transport tray table 92 enters the second transport tray rack 95 and fills with pellets. The transport tray 90 is stored in the second transport tray rack 95 from below.
[0061]
In the CSP substrate dividing apparatus 10 configured as described above, the operations from dividing the CSP substrate to storing the pellets in the transport tray can be performed efficiently with one apparatus. Productivity is greatly improved as compared with the conventional case where the transfer tray is separately accommodated. In addition, since the number of manpower required for operating the machine can be reduced, the economy is improved.
[0062]
Further, when transporting the CSP substrate and the jig supporting it in the CSP substrate transport apparatus 10, the suction source pipes 64, 73, and 79 are simply engaged with the jig, and the CSP substrate is sucked with a simple structure. Since the jig can be held and transported while being held, the CSP substrate is not dropped and damaged during the transportation, and safety can be improved.
[0063]
【The invention's effect】
As described above, in the CSP substrate dividing apparatus according to the present invention, whether or not the jig to be carried out corresponds to the CSP substrate to be divided by the identification mark formed on the jig. Therefore, even when an incorrect jig is stored at the location specified by the address of the jig rack, a jig that does not correspond to the CSP board to be divided is used. Can be avoided reliably. Therefore, the cutting blade does not cut into a portion where the relief groove is not formed, and the jig is not damaged, thereby preventing the cutting blade from being damaged. Furthermore, since the cutting blade is not damaged, the CSP substrate is not damaged.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an example of an embodiment of a CSP substrate dividing apparatus according to the present invention.
FIG. 2 is a perspective view showing a CSP substrate divided by the CSP substrate dividing apparatus and a first example of a jig that supports the CSP substrate.
FIG. 3 is a perspective view showing a CSP substrate divided by the CSP substrate dividing apparatus and a second example of a jig for supporting the CSP substrate.
4 is a cross-sectional view showing a part of the AA cross section of FIG. 2;
FIG. 5 is a perspective view showing, in a stepwise manner, how a jig is carried out from a jig rack using jig carrying-in / out means.
FIG. 6 is a block diagram illustrating a configuration of a determination unit that determines whether or not the jig corresponds to a CSP substrate to be divided.
FIG. 7 is an explanatory diagram illustrating an example of contents stored in a first storage unit, a second storage unit, and a third storage unit that constitute the determination unit.
FIG. 8 is a perspective view showing a state in which a CSP substrate is supported by a jig.
FIG. 9 is a perspective view showing an example of a CSP substrate.
FIG. 10 is a plan view showing a CSP substrate held on a frame via a holding tape.
FIG. 11 is a perspective view showing a jig and a CSP substrate that have been used when the CSP substrate is conventionally divided.
[Explanation of symbols]
10 ... CSP substrate dividing device 11 ... CSP substrate
12 ... Cassette loading table 13 ... Cassette
14a, 14b, 14c, 14d ... Jig
15 ... Jig rack 16, 17 ... Cutting line
18, 19 ... escape groove 20 ... first suction hole
21 ... Second suction hole 22 ... CSP substrate
23, 24 ... Cutting line 25, 26 ... Relief groove
27 ... first suction hole 28 ... second suction hole
29, 30, 31 ... engaging hole 32 ... air passage
33, 34 ... hole 35 ... jig loading / unloading means
36 ... Jig carry-in / out table 36a ... Drive source
37 ... Wall 38 ... First guide rail
39 ... Table support part 39a ... Rail
40 ... penetrating part 41 ... motor
42 ... Second guide rail 43 ... Optical sensor
44 ... judgment means 45 ... control means 46 ... detection means
47 ... first storage means 48 ... second storage means
49 ... Third storage means 50 ... Information input means
51 ... Keyboard 52 ... Monitor
53... CSP substrate unloading means 54.
54a ... Belt 55 ... CSP substrate mounting means
56 ... Third guide rail 57 ... Drive unit
58 ... Vertical movement part 59 ... Adsorption part 60 ... First conveying means
61 ... Processing table 62 ... Bridge part 63 ... Holding part
64 ... Suction source pipe 65 ... Suction hole
66 ... Alignment means 67 ... Cutting blade
68 ... Dividing means 69 ... Second conveying means
70 ... Cleaning table 71 ... Arm part 72 ... Vertical movement part
73 ... Suction source pipe 74 ... Third conveying means
75 ... Pellet pickup table 76 ... Hashibe
77 ... Arm part 78 ... Holding part 79 ... Suction source pipe
80 ... Pellet transfer area 81 ... Transfer means
82 ... Bridge part 83 ... Holding part 84 ... Suction part
85 ... First transport tray table
86 ... Empty transport tray 87 ... First transport tray rack
88 ... Jig placement area 89 ... Fourth transport means
90 ... Transport tray 91 ... Reloading means
91a ... Guide rail
92 ... Second transport tray table 93 ... Arm
94: clamping unit 95 ... second transport tray rack
100 ... CSP substrate 101, 102 ... Cutting line
103 ... Escape groove 104 ... Jig

Claims (6)

A jig for supporting the CSP substrate;
A jig rack for storing two or more kinds of jigs corresponding to the types of CSP substrates;
An appropriate jig is unloaded from the jig rack, and the unloaded jig is placed in a region where the CSP substrate is placed;
CSP substrate placement means for placing the CSP substrate on a jig;
A CSP substrate dividing apparatus comprising at least a dividing means having a cutting blade for dividing a CSP substrate into pellets,
In each jig, an identification mark for identifying the jig is formed corresponding to the type of the corresponding CSP substrate,
A CSP substrate dividing apparatus including a judging means for judging whether the jig is a jig corresponding to a CSP substrate to be divided based on the identification mark when the jig is unloaded from the jig rack. . In judging means,
First storage means for storing information input by an operator regarding the CSP board to be divided;
Second storage means in which information relating to the correspondence relationship between the CSP substrate and the jig corresponding thereto is previously input and stored;
Third storage means for storing information about the jig detected based on the identification mark;
An information input means for inputting information to be stored in the first storage means and the second storage means;
Based on whether or not the information stored in the first storage means and the information stored in the third storage means have the correspondence stored in the second storage means. The CSP board | substrate division | segmentation apparatus of Claim 1 which judges whether the jig | tool which is going to carry out from a fixture rack is a jig | tool corresponding to the CSP board | substrate which is going to divide | segment. The second storage means stores the address of the jig rack in which the jig is stored,
Based on the information related to the CSP substrate stored in the first storage means and the jig rack address stored in the second storage means, the jig carry-in / out table moves to the address, and The CSP board | substrate division | segmentation apparatus of Claim 2 which detects the identification mark of the stored jig | tool, and memorize | stores the information regarding this jig | tool in this 3rd memory | storage means. If the jig to be unloaded from the jig rack is a jig corresponding to the CSP substrate to be divided, unload the jig,
The CSP board | substrate division | segmentation apparatus of Claim 1 thru | or 3 which alert | reports to that effect when the jig | tool which is going to carry out from a jig | tool rack is not a jig | tool corresponding to the CSP board | substrate which is going to divide | segment. 5. The CSP substrate dividing apparatus according to claim 1, wherein the identification mark is configured by the presence or absence of a hole, and the jig carry-in / out table is provided with an optical sensor for detecting the presence or absence of the hole. 5. The CSP substrate dividing apparatus according to claim 1, wherein the identification mark is a barcode, and a barcode reader for reading the barcode is disposed on the jig carry-in / out table.

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