KR102008532B1 - Machining apparatus - Google Patents

Abstract

This invention provides the processing apparatus which can recognize the outer periphery of the wafer held by the holding means, and can reliably obtain the center of the wafer held by the holding means.
The processing apparatus of the present invention includes a processing means for holding a circular wafer, a processing means for processing a wafer held by the holding means, and a processing for relatively conveying the holding means and the processing means in the processing feed direction. A processing apparatus provided with a conveying means, the holding means comprising a table having a suction holding part for holding and holding a wafer and an outer circumferential part for the suction holding part, and a rotation driving mechanism for rotating the table, Imaging means for imaging the outer peripheral portion, light emitting means disposed opposite the imaging means with a table interposed therebetween, and an outer circumference of the wafer formed in the outer peripheral portion of the table and transmitted through the light emitted by the light emitting means and held in the suction holding portion. At least three of the projection means projected onto the means and the outer periphery of the wafer held on the table picked up by the imaging means. And on the basis of the pyogap control means for calculating the position of the center of the wafer held on the table.

Description

Processing equipment {MACHINING APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing apparatus such as a cutting device for cutting a workpiece, such as a semiconductor wafer, and a laser processing apparatus for performing a laser processing on a workpiece.

In the semiconductor device manufacturing process, a plurality of regions are partitioned by a division scheduled line called streets arranged in a lattice pattern on the surface of a substantially disk-shaped semiconductor wafer, and devices such as IC and LSI are formed in the divided regions. . Subsequently, the semiconductor wafer is cut along the street to divide the region where the circuit is formed to manufacture individual devices. In addition, optical device wafers in which gallium nitride compound semiconductors and the like are laminated on the surface of a sapphire substrate are also cut along the street to be divided into optical devices such as individual light emitting diodes and laser diodes, and are widely used in electrical equipment.

The division of wafers such as semiconductor wafers and optical device wafers is performed by processing devices such as cutting devices and laser processing devices. Processing apparatuses, such as a cutting apparatus and a laser processing apparatus, relatively process and convey a holding means which hold | maintains a wafer, the processing means which processes a wafer hold | maintained by the said holding means, and a holding means and a processing means in a process feed direction. It is provided with the process feed means to.

In the above processing apparatus, in order to reliably process a wafer in a predetermined processing region, it is necessary to recognize the starting point and the end point of the processing region. In order to recognize the starting point and end point of the processing region, a method of recognizing the outer circumference of the wafer held by the holding means and obtaining the center of the wafer held by the holding means has been proposed (see Patent Document 1, for example).

Patent Document 1: Japanese Patent Application Laid-Open No. 2011-54715

Thus, when the protective film is coated on the surface of the wafer or when special processing is performed on the surface of the wafer, the outer circumference of the wafer may not be reliably recognized due to diffuse reflection or absorption of light.

This invention is made | formed in view of the said fact, The main technical subject is providing the processing apparatus which can recognize the outer periphery of the wafer hold | maintained by the holding means, and can obtain the center of the wafer held by the holding means reliably.

MEANS TO SOLVE THE PROBLEM In order to solve the said main technical subject, According to this invention, the holding means which hold | holds a circular wafer, the processing means which processes a wafer hold | maintained by the said holding means, the said holding means, and the said processing means In the processing apparatus provided with the process feed means which carries out process feed relatively to a process feed direction,

The holding means includes a table having a suction holding unit for sucking and holding the wafer, an outer circumferential portion for the suction holding unit, and a rotation drive mechanism for rotating the table,

Imaging means for imaging the outer peripheral portion of the wafer held on the table;

Light emitting means disposed opposite the imaging means with the table interposed therebetween;

Projection means formed on the outer periphery of the table and transmitting the light emitted by the light emitting means to project the outer periphery of the wafer held on the suction holding part to the imaging means;

And a processing means for calculating a center position of the wafer held on the table based on at least three coordinate values of the outer circumference of the wafer held on the table picked up by the imaging means. Is provided.

The said projection means consists of three or more through-holes formed in the outer peripheral part of a table. In addition, a projection member made of a material having transparency is embedded in the through hole.

In the processing apparatus according to the present invention, a holding means for holding a circular wafer includes a table having a suction holding part for holding and holding a wafer, an outer peripheral part serving the suction holding part, and a rotation drive mechanism for rotating the table. And imaging means for imaging the outer periphery of the wafer held on the table, the light emitting means disposed opposite the imaging means with the table interposed therebetween, and formed on the outer periphery of the table to transmit and hold the light emitted by the light emitting means. Calculate the center position of the wafer held on the table based on the coordinate values of at least three of the projection means for projecting the outer circumference of the wafer held in the negative portion to the imaging means and the outer circumference of the wafer held on the table picked up by the imaging means. Since a control means is provided, the protective film is coated on the surface of the wafer and is particularly suitable for the surface of the wafer. Even in the case where water processing is performed, the center of the wafer can be reliably determined by recognizing the outer circumference of the wafer held on the table.

1 is a perspective view of a laser processing apparatus as a processing apparatus constructed in accordance with the present invention.
FIG. 2 is a perspective view of a holding means equipped in the laser processing apparatus shown in FIG. 1. FIG.
3 is an exploded perspective view showing the constituent members of the holding means shown in FIG. 2.
FIG. 4 is a sectional view of a table constituting the holding means shown in FIG. 2.
FIG. 5 is a block diagram of a control means equipped in the laser processing apparatus shown in FIG. 1.
6 is a perspective view of a semiconductor wafer as a wafer.
FIG. 7 is a perspective view showing a state in which the semiconductor wafer shown in FIG. 6 is adhered to a dicing tape attached to an annular frame.
FIG. 8 is an explanatory diagram showing a method of obtaining a center position of a semiconductor wafer held by a table constituting the holding means shown in FIG. 2.

EMBODIMENT OF THE INVENTION Hereinafter, preferred embodiment of the processing apparatus which concerns on this invention is described in detail with reference to an accompanying drawing.

1 shows a perspective view of a laser processing apparatus as a processing apparatus constructed in accordance with the present invention. The laser processing apparatus shown in FIG. 1 is disposed on the stationary base 2 and the stationary base 2 so as to be movable in a machining feed direction (X-axis direction) indicated by an arrow X to hold the workpiece. A laser beam irradiation unit support mechanism 5 disposed on the workpiece holding mechanism 3 and the stop base 2 so as to be movable in an indexing feed direction (Y-axis direction) indicated by an arrow Y orthogonal to the X-axis direction; The laser beam irradiation unit support mechanism 5 is provided with the laser beam irradiation unit 6 which is arrange | positioned so that a movement to the condensing point position adjustment direction (Z-axis direction) shown by the arrow Z is possible.

The workpiece holding mechanism 3 includes a pair of guide rails 31 and 31 arranged in parallel along the processing feed means moved in the processing feed direction (X-axis direction) on the stationary base 2, and the guide. A first sliding block 32 disposed movably in the X-axis direction on the rails 31 and 31, and a second sliding block movably disposed in the Y-axis direction on the first sliding block 32 ( 33, the cover table 35 supported by the cylindrical member 34 on the said 2nd sliding block 33, and the holding means 4 which hold | maintains a to-be-processed object.

The first sliding block 32 has a pair of guide grooves 321 and 321 fitted to the pair of guide rails 31 and 31 on its lower surface, and is parallel to the upper surface thereof in the Y-axis direction. The pair of guide rails 322 and 322 formed are provided. The first sliding block 32 configured as described above moves in the X-axis direction along the pair of guide rails 31 and 31 by fitting the guide grooves 321 and 321 to the pair of guide rails 31 and 31. It is possible. The workpiece holding mechanism 3 in the illustrated embodiment includes a workpiece conveying means 37 for moving the first sliding block 32 along the pair of guide rails 31, 31 in the X-axis direction. Doing. The processing conveying means 37 includes a male screw rod 371 arranged in parallel between the pair of guide rails 31 and 31, and a pulse motor 372 for rotationally driving the male screw rod 371. It includes a drive source. One end of the male screw rod 371 is rotatably supported by a bearing block 373 fixed to the stationary base 2, and the other end thereof is electrically connected to the output shaft of the pulse motor 372. On the other hand, the male screw rod 371 is screwed into a through female screw hole formed in a female screw block (not shown) provided to protrude from the lower surface of the central portion of the first sliding block 32. Therefore, by driving the external thread rod 371 forward and reverse rotation by the pulse motor 372, the first sliding block 32 is moved in the X-axis direction along the guide rails 31, 31.

The laser processing apparatus in the illustrated embodiment is provided with an X-axis direction position detecting means 374 for detecting the processing feed amount of the holding means 4, that is, the X-axis direction position. The X-axis direction position detecting means 374 includes the linear scale 374a disposed along the guide rail 31 and the linear scale 374a together with the first sliding block 32 and disposed on the first sliding block 32. It consists of a read head 374b moving along. In the illustrated embodiment, the read head 374b of the X-axis direction position detecting means 374 sends a pulse signal of one pulse every 1 μm to a control means described later. And the control means mentioned later detects the process feed amount of the holding means 4, ie, the position of an X-axis direction by counting the input pulse signal. On the other hand, in the case where the pulse motor 372 is used as the drive source of the processing conveying means 37, the driving means of the control means described later, which outputs the driving signal to the pulse motor 372, is counted, so that the holding means 4 The machining feed amount, that is, the position in the X-axis direction may be detected.

The second sliding block 33 is provided with a pair of guide grooves 331 and 331 fitted to a pair of guide rails 322 and 322 provided on an upper surface of the first sliding block 32 on a lower surface thereof. By fitting the guide grooves 331 and 331 to the pair of guide rails 322 and 322, the guide grooves 331 and 331 are configured to be movable in the Y-axis direction. The workpiece holding mechanism 3 in the illustrated embodiment moves the second sliding block 33 along the pair of guide rails 322 and 322 provided in the first sliding block 32 in the Y-axis direction. And a first indexing transfer means 38 for the purpose. The first indexing conveying means 38 includes a male screw rod 381 disposed in parallel between the pair of guide rails 322 and 322, and a pulse motor 382 for rotationally driving the male screw rod 381. It includes a drive source such as. One end of the male thread rod 381 is rotatably supported by a bearing block 383 fixed to an upper surface of the first sliding block 32, and the other end thereof is electrically connected to an output shaft of the pulse motor 382. It is. On the other hand, the male screw rod 381 is screwed into a through female screw hole formed in a female screw block (not shown) provided to protrude from the lower surface of the center portion of the second sliding block 33. Therefore, by driving the external thread rod 381 forward and reverse rotation by the pulse motor 382, the second sliding block 33 is moved in the Y-axis direction along the guide rails 322, 322.

The laser processing apparatus in the illustrated embodiment includes a Y-axis direction position detecting means 384 for detecting the indexing feed amount of the second sliding block 33, that is, the Y-axis direction position. This Y-axis direction position detecting means 384 includes a linear scale 384a disposed along the guide rail 322 and the second sliding block 33 and the linear scale 3 together with the second sliding block 33. And a read head 384b moving along 384a. In the illustrated embodiment, the read head 384b of the Y-axis direction position detecting means 384 sends a pulse signal of one pulse every 1 μm to a control means described later. And the control means mentioned later detects the index feed amount of the holding means 4, ie, the position of a Y-axis direction, by counting the input pulse signal. On the other hand, when the pulse motor 382 is used as the drive source of the first indexing transfer means 38, the holding means 4 is counted by counting the drive pulses of the control means described later, which outputs a drive signal to the pulse motor 382. Indexing feed amount, i.e., the position in the Y-axis direction, may be detected.

Next, the holding means 4 which holds the said to-be-processed object is demonstrated with reference to FIGS.

As shown in FIG. 3, the holding means 4 includes a table 41 for holding a circular wafer, which is a workpiece, a rotation shaft 42 connected to a lower surface of the table 41, and the rotation shaft 42. The support housing 43 which rotatably supports is provided. As shown in FIG. 4, the table 41 is formed in disk shape by metal materials, such as stainless steel, and the circular fitting recessed part 411 is formed in the upper surface, and this fitting recessed part 411 An annular arrangement shelf 412 is provided at the bottom outer periphery. Then, the suction chuck 413 as the suction holding part formed by the porous member made of porous ceramics having a myriad suction holes in the fitting recess 411 is fitted. The table 41 comprised in this way has the suction holding | maintenance part which consists of a suction chuck 413, and the outer peripheral part 410 which defines the suction holding | maintenance part which consists of said suction chuck 413. As shown in FIG. Moreover, the table 41 is provided with the communication path 421 which opens to the said fitting recess 411, and opens to the rotating shaft 42, This communication path 421 communicates with the suction means which is not shown in figure. . The rotation shaft 42 is rotatably supported by the support housing 43, and is rotated by the rotation drive mechanism 44 disposed in the support housing 43 as shown in FIG. 3. On the other hand, four clamps 45 are attached to the lower surface of the table 41 by appropriate fixing means, as shown in FIGS. 2 and 3.

In the outer peripheral portion 410 of the table 41 constituting the holding means 4 described above, a plurality of projection means penetrating in the vertical direction at the boundary with the suction chuck 413 as the suction holding portion (in the illustrated embodiment) In this case, seven through holes 410a are formed. This through hole 410a is provided with the space | interval of 45 degree mutually except one place. In the through hole 410a, a projection member 46 made of a material having transparency such as glass is embedded. In the support housing 43 which comprises the holding means 4, the light emitting means 47 which consists of LED etc. is arrange | positioned in the downward position through which the through-hole 410a as said projection means passes, as shown in FIG. .

Returning to FIG. 1 and continuing description, the said laser beam irradiation unit support mechanism 5 is a pair of guide rails 51 and 51 arrange | positioned in parallel along the Y-axis direction on the stationary base 2, and the said The movable support base 52 is arrange | positioned so that the movement to the direction shown by the arrow Y on the guide rails 51 and 51 is possible. This movable support base 52 consists of the movable support part 521 arrange | positioned so that the movement is possible on the guide rails 51 and 51, and the mounting part 522 attached to the said movable support part 521. As shown in FIG. The mounting portion 522 has a pair of guide rails 523 and 523 extending in the Z-axis direction on one side thereof in parallel. The laser beam irradiation unit support mechanism 5 in the illustrated embodiment is the second indexing conveying means 53 for moving the movable support base 52 along the pair of guide rails 51, 51 in the Y-axis direction. ). The second indexing conveying means 53 includes a male screw rod 531 disposed in parallel between the pair of guide rails 51 and 51 and a pulse motor 532 for rotationally driving the male screw rod 531. It includes a drive source such as. One end of the male threaded rod 531 is rotatably supported by a bearing block (not shown) fixed to the stationary base 2, and the other end thereof is electrically connected to the output shaft of the pulse motor 532. On the other hand, the male screw rod 531 is screwed into the female screw hole formed in the female screw block (not shown) which protrudes from the lower surface of the center part of the movable support part 521 which comprises the movable support base 52. As shown in FIG. For this reason, the movable support base 52 is moved to the Y-axis direction along the guide rails 51 and 51 by driving the male screw rod 531 forward and reverse rotation by the pulse motor 532.

The laser beam irradiation unit 6 in the illustrated embodiment includes a unit holder 61 and laser beam irradiation means 62 attached to the unit holder 61. The unit holder 61 is provided with a pair of guide grooves 611 and 611 which are slidably fitted to the pair of guide rails 523 and 523 provided in the mounting portion 522. This guide groove 611 is provided. 611 is fitted to the guide rails 523 and 523 so as to be movable in the Z-axis direction.

The laser beam irradiation unit 6 in the illustrated embodiment includes condensing point position adjusting means 63 for moving the unit holder 61 along the pair of guide rails 523 and 523 in the Z-axis direction. Doing. The light collecting point position adjusting means 63 includes a male screw rod (not shown) disposed between the pair of guide rails 523 and 523, and a driving source such as a pulse motor 632 for rotationally driving the male screw rod. And forward and reverse rotation of the external thread rod (not shown) by the pulse motor 632 to move the unit holder 61 and the laser beam irradiation means 62 along the guide rails 523 and 523 in the Z-axis direction. Move it. On the other hand, in the illustrated embodiment, the laser beam irradiation means 62 is moved upward by driving the pulse motor 632 forward rotation, and the laser beam irradiation means 62 is moved downward by driving the pulse motor 632 reverse rotation. It is supposed to move to.

The laser beam irradiation means 62 includes a cylindrical casing 621 arranged substantially horizontally. In the casing 621, a pulsed laser beam oscillator comprising a pulsed laser beam oscillator composed of a YAG laser oscillator or a YVO 4 laser oscillator (not shown) or a repetition frequency setting means is disposed. At the distal end of the casing 621, a condenser 624 for condensing the pulsed laser beams oscillated from the pulsed laser beam oscillation means is mounted.

The imaging means 7 which detects the process area | region which should perform laser processing by the laser beam irradiation means 62 is arrange | positioned at the front-end | tip part of the casing 621 which comprises the said laser beam irradiation means 62. As shown in FIG. This imaging means 7 consists of optical means, such as a microscope and a CCD camera, and sends the image signal picked up to the control means mentioned later.

The laser processing apparatus in the illustrated embodiment is provided with the control means 8 shown in FIG. 5. The control means 8 is comprised by the computer, the central processing unit (CPU) 81 which performs arithmetic processing according to a control program, the read-only memory (ROM) 82 which stores a control program, etc., and a calculation result. And a random access memory (RAM) 83 capable of storing, reading and writing, etc., a counter 84, an input interface 85, and an output interface 86 for storing and the like. The detection signal from the said X-axis direction position detection means 374, the Y-axis direction position detection means 384, the imaging means 7, etc. is input to the input interface 85 of the control means 8. And from the output interface 86 of the control means 8, the control signal to the said pulse motor 372, the pulse motor 382, the pulse motor 532, the rotation drive mechanism 44, the light emitting means 47, etc. Outputs

The laser processing apparatus in the illustrated embodiment is configured as described above, and a method for obtaining the center position of the wafer as the workpiece held on the table 41 of the holding means 4 will be described below.

6 shows a perspective view of a semiconductor wafer 10 as a wafer as a workpiece. In the semiconductor wafer 10 shown in Fig. 6, a plurality of regions are partitioned by a plurality of streets 101 made of silicon wafers and arranged in a lattice shape on the surface 10a, and ICs, LSIs, and the like are divided in the partitioned regions. Device 102 is formed. The semiconductor wafer 10 thus formed is formed on the surface of the dicing tape T having its outer circumference mounted thereon so as to cover the inner opening of the annular frame F as shown in Figs. 7A and 7B. The back surface 10b is stuck (wafer supporting step).

If the above-mentioned wafer support process was performed, the dicing tape T side of the semiconductor wafer 10 is arrange | positioned on the table 41 of the laser processing apparatus shown in FIG. Then, by operating the suction means (not shown), the semiconductor wafer 10 is sucked and held on the table 41 of the holding means 4 with the dicing tape T therebetween (wafer holding step). Therefore, in the semiconductor wafer 10 held by the table 41 of the holding means 4, the surface 10a becomes an upper side. On the other hand, the annular frame F on which the dicing tape T is mounted is fixed by the clamp 45 arranged in the holding means 4.

If the wafer holding step is performed as described above, the processing transfer means 37 is operated to move the holding means 4 directly under the image pickup means 7, and the table as shown in FIG. The point A of the semiconductor wafer 10 held at 41 is positioned directly above the light emitting means 47. The coordinate value of the center of rotation P of the table 41 thus positioned is set to (x0, y0), and the coordinate value of the center Pa of the semiconductor wafer 10 held by the table 41 is ( x0 ', y0'), and the distance between the rotation center P of the table 41 and the center Pa of the semiconductor wafer 10 is (r), and the angle formed between the X axis and (r) is When (θ) is set, (x0 ') is obtained by the following equation (1), and (y0') is obtained by the following equation (2).

The light emitting means 47 is turned on in the state shown in FIG. 8A to project the A point portion of the semiconductor wafer 10 through the projection member 46, and the image projected by the imaging means 7 is projected. Take a picture. The imaging means 7 then sends the captured image signal to the control means 8. The control means 8 obtains the coordinate values (x1, y1) of the point A of the semiconductor wafer 10 based on the image signal sent from the imaging means 7, and stores it in the random access memory (RAM) 83. .

Next, the table 41 is rotated 90 degrees in the direction indicated by the arrow from the state shown in FIG. 8A, and the point B portion of the semiconductor wafer 10 emits light as shown in FIG. 8B. Position directly above the means 47. Next, the light emitting means 47 is turned on to project the B point portion of the semiconductor wafer 10 through the projection member 46, thereby imaging the image projected by the imaging means 7. The imaging means 7 then sends the captured image signal to the control means 8. The control means 8 obtains the coordinate values (x2, y2) of the point B of the semiconductor wafer 10 based on the image signal sent from the imaging means 7, and stores it in the random access memory (RAM) 83. .

Next, the table 41 is rotated 90 degrees in the direction indicated by the arrow from the state shown in FIG. 8B, and the C point portion of the semiconductor wafer 10 emits light as shown in FIG. 8C. Position directly above the means 47. Next, the light emitting means 47 is turned on to project the C point portion of the semiconductor wafer 10 through the projection member 46, and image the projected image by the imaging means 7. The imaging means 7 then sends the captured image signal to the control means 8. The control means 8 obtains the coordinate values (x3, y3) of the C point of the semiconductor wafer 10 based on the image signal sent from the imaging means 7, and stores it in the random access memory (RAM) 83. .

Equations 1 and 2 below from the coordinate values (x1, y1) of the point A, the coordinate values (x2, y2) of the point B and the coordinate values (x3, y3) of the point C 4 is established.

From the equations (1), (2), (3) and (4), the center Pa of the semiconductor wafer 10 held in the table 41 is obtained by (x0 ', y0'), and the following equation (5) By this, the radius R of the semiconductor wafer 10 can be obtained.

As described above, in the laser processing apparatus in the illustrated embodiment, the imaging means 7 and the table 41 for imaging the outer peripheral portion of the semiconductor wafer 10 held by the table 41 of the holding means 4. The light emitting means 47 disposed opposite the imaging means 7 and the semiconductor 41 formed on the outer periphery of the table 41 and transmitted through the light emitted by the light emitting means 47 are held on the table 41. The table 41 which has the projection member 46 which projects the outer periphery of the wafer 10 to the imaging means 7, and the control means 8, and the control means 8 imaged by the imaging means 7. On the basis of the coordinate values (x1, y1) of the point A, the coordinate values (x2, y2) of the B point and the coordinate values (x3, y3) of the C point on the outer periphery of the semiconductor wafer 10 held in the table ( Since the center position of the semiconductor wafer 10 held by 41 is calculated, the protective film is coated on the surface of the semiconductor wafer 10 or when the semiconductor wafer 10 is formed. Even when special processing is performed on the surface, the center of the semiconductor wafer 10 can be reliably determined by recognizing the outer circumference of the semiconductor wafer 10 held on the table 41.

By obtaining the center of the semiconductor wafer 10 held on the table 41 as described above, when performing laser processing, the X-axis direction position detecting means 374 and the Y-axis direction position detecting means 384 Laser processing can be reliably performed to the area | region which should perform the preset process in the semiconductor wafer 10 hold | maintained on the table 41 based on a signal.

As mentioned above, although the example which applied this invention to the laser processing apparatus was shown, this invention can be applied to other processing apparatuses, such as a cutting apparatus which cuts the wafer hold | maintained by the holding means along the street.

2: stop base 3: workpiece holding mechanism
37: processing feed means 38: first indexing feed means
4: holding means 41: table
42: rotating shaft 413: adsorption chuck
44: rotation drive mechanism 46: projection member
5: laser beam irradiation unit support mechanism 53: second indexing conveying means
6: laser beam irradiation unit 62: laser beam irradiation means
624: condenser 63: condensing point position adjusting means
7: imaging means 8: control means
10: semiconductor wafer F: annular frame
T: dicing tape

Claims (3)

A holding means for holding a circular wafer, a processing means for processing a wafer held by the holding means, and a processing conveying means for relatively conveying and processing the holding means and the processing means in the processing conveying direction. In the processing apparatus to
The holding means includes a circular suction chuck for sucking and holding a wafer formed by a porous member, a circular engagement recess is formed on the upper surface, and an annular placement shelf is formed at the outer peripheral surface of the bottom of the engagement recess. A table having an outer periphery disposed on the engaging concave portion and engaging with the engaging chuck, and a rotation drive mechanism for rotating the table,
Imaging means for imaging the outer peripheral portion of the wafer held on the table;
Light emitting means disposed opposite the imaging means with the table interposed therebetween;
Projection means formed on the outer periphery of the table to transmit the light emitted by the light emitting means to project the outer periphery of the wafer held on the suction chuck to the imaging means; and
The center of the wafer held on the table based on the coordinate values of at least three of the outer peripheries of the wafer held on the table picked up by the imaging means via the projection means while operating the rotation drive mechanism to rotate the table. Control means for calculating position
And
And said projection means comprises three or more through holes formed in an outer circumferential portion of said table and a boundary portion between said suction chuck. The processing apparatus according to claim 1, wherein a projection member made of a material having transparency is embedded in the through hole. delete

Images