JPS6378055A - Micropattern detector - Google Patents
Micropattern detectorInfo
- Publication number
- JPS6378055A JPS6378055A JP22084586A JP22084586A JPS6378055A JP S6378055 A JPS6378055 A JP S6378055A JP 22084586 A JP22084586 A JP 22084586A JP 22084586 A JP22084586 A JP 22084586A JP S6378055 A JPS6378055 A JP S6378055A
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- piezo element
- hole
- lens
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims description 15
- 230000008878 coupling Effects 0.000 abstract description 5
- 238000010168 coupling process Methods 0.000 abstract description 5
- 238000005859 coupling reaction Methods 0.000 abstract description 5
- 230000002093 peripheral effect Effects 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
本発明は、微小パターンを対物レンズを介して高倍率で
検知する微小パターン検知装置において、透光孔を設け
たピエゾ素子に、光軸が上記透光孔を通るように上記対
物レンズを取付けたことにより、対物レンズの高精度な
微調整を可能にしたものである。[Detailed Description of the Invention] [Summary] The present invention provides a micropattern detection device that detects micropatterns at high magnification through an objective lens, in which a piezo element provided with a light-transmitting hole has an optical axis aligned with the light-transmitting hole. By attaching the objective lens so as to pass through the hole, it is possible to finely adjust the objective lens with high precision.
本発明は、例えばＩＣの配線パターン等の微小パターン
を光学的に高倍率で検知する微小パターン検知装置、特
にはその検知光学系における対物レンズの焦点調整手段
の改良に関する。The present invention relates to a micropattern detection device that optically detects a micropattern such as an IC wiring pattern at high magnification, and particularly to an improvement in the focus adjustment means of an objective lens in the detection optical system.
近年、ＩＣ等の高密度化に伴い、使用される配線パター
ンもミクロン単位まで微細化してきており、それを高精
度で検知するための装置の必要性が年々高まっている。In recent years, as the density of ICs and the like has increased, the wiring patterns used have also become finer down to the micron level, and the need for devices that can detect them with high precision is increasing year by year.
従来の微小パターン検知装置は、レーザ等から出力され
た光ビームを高倍率の対物レンズを介して被検知対象上
に照射し、その反射光を上記対物レンズを介してＣＣＤ
センサ等で検知して、これを信号処理することにより、
上記被検査対象上の微細パターンを検知し得るようにな
っている。A conventional micropattern detection device irradiates a light beam output from a laser or the like onto an object to be detected through a high-magnification objective lens, and transmits the reflected light to a CCD via the objective lens.
By detecting it with a sensor etc. and processing it as a signal,
The fine pattern on the object to be inspected can be detected.
更に、上記微細パターン上に焦点を合わせるために、上
記対物レンズの微調整機構が設けられている。このよう
な微調整機構としては、外部から伸長した腕状の部材の
一端で対物レンズを支持するとともに、上記部材の他端
をピエゾ素子を介して固定し、このピエゾ素子を対物レ
ンズの光軸方向に駆動することにより、上記腕状の部材
を介して対物レンズの位置をＨ２Ｎ整するようにしたも
のがある。Further, a fine adjustment mechanism for the objective lens is provided in order to focus on the fine pattern. In such a fine adjustment mechanism, the objective lens is supported by one end of an arm-shaped member extending from the outside, and the other end of said member is fixed via a piezo element, and this piezo element is aligned with the optical axis of the objective lens. There is one in which the position of the objective lens is adjusted to H2N via the arm-shaped member by driving in the direction.
上記従来の対物レンズ微調整機構では、ピエゾ素子の動
きが必らず腕状の部材を介して対物レンズに伝達される
ため、上記部材自体の傾きや長さ等の微小な変化までも
が対物レンズに伝達される。In the conventional objective lens fine adjustment mechanism described above, the movement of the piezo element is necessarily transmitted to the objective lens via the arm-shaped member, so even minute changes such as the inclination and length of the member itself are reflected in the objective lens. transmitted to the lens.
そのため、対物レンズの動きをピエゾ素子の動きに完全
に一致させることができず、高Ｊ′ｎ度な微調整が困難
であるという問題点があった。Therefore, there is a problem in that the movement of the objective lens cannot be perfectly matched with the movement of the piezo element, making it difficult to make fine adjustments with a high J'n degree.
本発明は、上記問題点に迄み、対物レンズの高精度な微
調整を可能にする微小パターン検知装置を提供すること
を目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to overcome the above-mentioned problems and provide a micropattern detection device that enables highly accurate fine adjustment of an objective lens.
本発明は、可動方向に沿って透光孔を設けたピエゾ素子
に対して、対物レンズをその光軸が上記透光孔を通過す
るように固定し、上記ピエゾ素子の駆動により対物レン
ズの微調整を行う対物レンズ微調整手段を設けたことを
特徴とする。In the present invention, an objective lens is fixed to a piezo element having a light transmission hole along a movable direction so that its optical axis passes through the light transmission hole, and the objective lens is moved by driving the piezo element. The present invention is characterized in that an objective lens fine adjustment means for performing adjustment is provided.
上記のように対物レンズの光軸がピエゾ素子の透光孔を
通るように両者を互いに固定すれば、上記光軸とピエゾ
素子の可動方向とは常に一致し、しかも両者の移動量も
一致する。従って、このような状態で上記ピエゾ素子を
駆動すれば、その動きに完全に一致した、対物レンズの
高精度な微調整が可能となる。If they are fixed to each other so that the optical axis of the objective lens passes through the transparent hole of the piezo element as described above, the optical axis and the moving direction of the piezo element will always match, and the amount of movement of both will also match. . Therefore, by driving the piezo element in such a state, it is possible to finely adjust the objective lens with high accuracy, completely matching the movement of the piezo element.
以下、本発明の実施例について、図面を参照しながら説
明する。Embodiments of the present invention will be described below with reference to the drawings.
第１図は、本発明の一実施例を示す概略構成図である。FIG. 1 is a schematic configuration diagram showing an embodiment of the present invention.
本実施例は、レーザ１、ミラー２、ビームスプリッタ３
および対物レンズ４からなる照明系と、対物レンズ４、
ビームスプリッタ３およびＣＣＤセンサ５からなる検知
系と、信号処理系としてのＣＰＵ６と、モニタ用の出カ
ニニット７とを備えている。更に、上記対物レンズ４の
Ｈｍｍ平手段して、透光孔８ａを設けたピエゾ素子８を
有しており、このピエゾ素子８に対物レンズ４が固定さ
れている。In this embodiment, a laser 1, a mirror 2, a beam splitter 3
and an illumination system consisting of an objective lens 4, an objective lens 4,
It includes a detection system consisting of a beam splitter 3 and a CCD sensor 5, a CPU 6 as a signal processing system, and an output unit 7 for monitoring. Furthermore, the Hmm flatness of the objective lens 4 includes a piezo element 8 provided with a transparent hole 8a, and the objective lens 4 is fixed to this piezo element 8.
上記ピエゾ素子８および対物レンズ４の構成を、具体的
に第２図（ａｌ、（ｔｌ）に示す。同図（ａｌは拡大斜
視図であり、同図（ｂｌは一部断面を有する拡大正面図
である。The configuration of the piezo element 8 and the objective lens 4 is specifically shown in FIG. 2 (al, tl). It is a diagram.
同図（ａ）に示されるように、ピエゾ素子８は、ピエゾ
本体である外周部８ｂと、金属等でできた中央の可動部
８Ｃとから構成されており、更に、上記可動部８ｃの中
心部に可動方向（軸方向）に沿って上記透光孔８ａが設
けられている。この透光孔８ａは、対物レンズ４に対す
る入射、出射ビーム径以上の径を持ち、単に中空であっ
てもよく、また何らかの透明物質で充たされていてもよ
い。As shown in FIG. 8A, the piezo element 8 is composed of an outer peripheral portion 8b which is a piezo main body, and a central movable portion 8C made of metal or the like. The transparent hole 8a is provided along the movable direction (axial direction). The light-transmitting hole 8a has a diameter larger than the diameter of the incident and output beams with respect to the objective lens 4, and may be simply hollow, or may be filled with some kind of transparent material.
このような構成からなるピエゾ素子８の下端に、結合部
材９を介して対物レンズ４が固定されており、透光孔８
ａの中心線と対物レンズ４の光軸とが一致するようにし
である。上記結合部材９は、環状の部材であって、第２
図（ｂｌに明らかなように、その内側に雌ねじ部９ａ、
９ｂを有し、これらがそれぞれピエゾ素子８の可動部８
ｃの下端部と対物レンズ４の上端部とに形成された雄ね
じ部８ｄ、４ａに螺合することにより、上記可動部８ｃ
と対物レンズ４とを互いに固定させている。このような
構成では、対物レンズ４に対する入射ビームＬ８および
出射ビームＬ０は、ピエゾ素子８によって妨げられるこ
となく、その透光孔８ａをそのまま通過する。なお、ピ
エゾ素子８の外周部８ｂは、外部から伸長した支持部１
０によって安定して支持されている。The objective lens 4 is fixed to the lower end of the piezo element 8 having such a configuration via a coupling member 9, and the light transmitting hole 8
The center line of a is made to coincide with the optical axis of the objective lens 4. The coupling member 9 is an annular member, and the second
As shown in the figure (bl), there is a female threaded part 9a on the inside.
9b, and these are the movable parts 8 of the piezo element 8, respectively.
The movable part 8c is screwed into the male screw parts 8d and 4a formed at the lower end of the objective lens 4 and the upper end of the objective lens 4.
and objective lens 4 are fixed to each other. In such a configuration, the incident beam L8 and the outgoing beam L0 to the objective lens 4 are not obstructed by the piezo element 8 and pass through the transparent hole 8a thereof as they are. Note that the outer peripheral portion 8b of the piezo element 8 is connected to the support portion 1 extending from the outside.
It is stably supported by 0.
上述したように、ピエゾ素子８に対して、その中心にあ
る透光孔８ａ内に対物レンズ４の光軸（すなわち、照明
系および検知系の光軸）を合わせるように対物レンズ４
を固定したので、上記光軸とピエゾ素子８の可動方向と
は常に一致し、しかも移動量も一致する。従って、この
ような状態でピエゾ素子８を駆動することにより、その
微小な動きに完全に一致した、対物レンズ４の高精度な
微調整（例えば、１００人単位の微調整）が可能になる
。なお、ピエゾ素子８の駆動は、第１図に示したＣＰＵ
６からのフォーカス信号Ｓに基づいて行われる。As described above, the objective lens 4 is aligned with the piezo element 8 so that the optical axis of the objective lens 4 (that is, the optical axis of the illumination system and the detection system) is aligned with the transparent hole 8a located at the center of the piezo element 8.
Since it is fixed, the optical axis and the movable direction of the piezo element 8 always match, and the amount of movement also matches. Therefore, by driving the piezo element 8 in such a state, it is possible to perform highly accurate fine adjustment of the objective lens 4 (for example, fine adjustment in units of 100 people) that perfectly matches the minute movements. The piezo element 8 is driven by the CPU shown in FIG.
This is performed based on the focus signal S from 6.
以上のような微調整手段を備えた本実施例で微小パター
ン検知を行うには、第１図において、まずレーザ１から
出力されたレーザ光を、ミラー２、ビームスプリッタ３
および透光孔８ａを介して、対物レンズ４によって微小
パターンＰ上に照射する。次に、その反射光を、再度対
物レンズ４、透光孔８ａおよびビームスプリッタ３を介
してＣＣＤセンサ５で検知する。この検知信号をＣＰＵ
６に取り込み、出カニニット７でパターンの検知画像を
モニタする。それとともに、上記検知信号に基づく上述
したフォーカス信号Ｓでピエゾ素子８を駆動することに
より、対物レンズ４の微小な焦点調整をフィードバンク
をかけて行う。なお、対物レンズ４を粗調整するには、
第２図（ｂ）に示した支持部１０を、不図示のステップ
モータ等により対物レンズ４の光軸方向に移動させるよ
うにすればよく、これも上記フォーカス信号Ｓでフィー
ドバンクをかけて行えばよい。In order to detect a minute pattern in this embodiment equipped with the above-mentioned fine adjustment means, in FIG.
Then, the light is irradiated onto the micro pattern P by the objective lens 4 through the transparent hole 8a. Next, the reflected light is detected again by the CCD sensor 5 via the objective lens 4, the transparent hole 8a, and the beam splitter 3. This detection signal is sent to the CPU
6, and monitor the detected pattern image with the output unit 7. At the same time, by driving the piezo element 8 with the focus signal S described above based on the detection signal, fine focus adjustment of the objective lens 4 is performed by applying a feedbank. In addition, to roughly adjust the objective lens 4,
The support part 10 shown in FIG. 2(b) may be moved in the optical axis direction of the objective lens 4 by a step motor (not shown), etc., and this is also performed by applying a feedbank using the focus signal S. That's fine.
なお、上記実施例では対物レンズ４をピエゾ素子８に固
定するための手段として結合部材９を用いたが、両者が
互いに固定されるのであればどのような手段であっても
よく、例えば両者を接着材等で直接固定してもよい。In the above embodiment, the coupling member 9 was used as a means for fixing the objective lens 4 to the piezo element 8, but any means may be used as long as the two are fixed to each other. It may also be directly fixed with an adhesive or the like.
また、上述した対物レンズ４の微調整および粗調整は、
検知信号系からのフィードバックループによってオート
フォーカスをかけることにより行うこともできる。Further, the fine adjustment and coarse adjustment of the objective lens 4 described above are as follows.
This can also be done by applying autofocus using a feedback loop from the detection signal system.
本発明によれば、対物レンズの高精度な微調整が可能と
なり、よって微細なパターンに対しても正確な焦点合わ
せを行うことができ、精度の良い微小パターン検知が実
現できる。According to the present invention, it is possible to finely adjust the objective lens with high precision, and therefore, accurate focusing can be performed even on a minute pattern, and accurate detection of a minute pattern can be realized.
第１図は本発明の一実施例を示す概略構成図、第２図（
ａ）、（ｂ）はそれぞれ同実施例の主要部を示す拡大斜
視図、一部断面拡大正面図である。
４・・・対物レンズ、
８・・・ピエゾ素子、
８ａ・・・透光孔、
９・・・結合部材。Figure 1 is a schematic configuration diagram showing an embodiment of the present invention, Figure 2 (
a) and (b) are an enlarged perspective view and a partially sectional enlarged front view showing the main parts of the same embodiment, respectively. 4...Objective lens, 8...Piezo element, 8a...Transparent hole, 9...Coupling member.
Claims (1)
微小パターン検知装置において、 可動方向に沿って透光孔（８ａ）を設けたピエゾ素子（
８）に対して前記対物レンズをその光軸が前記透光孔を
通過するように固定し、前記ピエゾ素子の駆動により前
記対物レンズの微調整を行う対物レンズ微調整手段を設
けたことを特徴とする微小パターン検知装置。 ２）前記透光孔は前記ピエゾ素子の中心部に設けられて
いることを特徴とする特許請求の範囲第１項記載の微小
パターン検知装置。 ３）前記透光孔は前記対物レンズに対する入射ビーム径
および出射ビーム径以上の径を有することを特徴とする
特許請求の範囲第１項または第２項記載の微小パターン
検知装置。[Claims] 1) In a micropattern detection device that detects micropatterns through an objective lens (4), a piezo element (
In contrast to 8), the objective lens is fixed such that its optical axis passes through the transparent hole, and an objective lens fine adjustment means is provided for finely adjusting the objective lens by driving the piezo element. Micro pattern detection device. 2) The micro pattern detection device according to claim 1, wherein the light transmitting hole is provided in the center of the piezo element. 3) The micro pattern detection device according to claim 1 or 2, wherein the light-transmitting hole has a diameter larger than the diameter of the incident beam and the diameter of the output beam with respect to the objective lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22084586A JPS6378055A (en) | 1986-09-20 | 1986-09-20 | Micropattern detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22084586A JPS6378055A (en) | 1986-09-20 | 1986-09-20 | Micropattern detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6378055A true JPS6378055A (en) | 1988-04-08 |
Family
ID=16757443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22084586A Pending JPS6378055A (en) | 1986-09-20 | 1986-09-20 | Micropattern detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6378055A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014060224A (en) * | 2012-09-14 | 2014-04-03 | Disco Abrasive Syst Ltd | Processing device |
-
1986
- 1986-09-20 JP JP22084586A patent/JPS6378055A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014060224A (en) * | 2012-09-14 | 2014-04-03 | Disco Abrasive Syst Ltd | Processing device |
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