KR20200121279A - 붕소의 제거 방법, 및 순수 또는 초순수의 제조 방법 - Google Patents
붕소의 제거 방법, 및 순수 또는 초순수의 제조 방법 Download PDFInfo
- Publication number
- KR20200121279A KR20200121279A KR1020207011157A KR20207011157A KR20200121279A KR 20200121279 A KR20200121279 A KR 20200121279A KR 1020207011157 A KR1020207011157 A KR 1020207011157A KR 20207011157 A KR20207011157 A KR 20207011157A KR 20200121279 A KR20200121279 A KR 20200121279A
- Authority
- KR
- South Korea
- Prior art keywords
- boron
- water
- passing
- adsorption tower
- product
- Prior art date
Links
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title claims abstract description 272
- 229910052796 boron Inorganic materials 0.000 title claims abstract description 265
- 238000000034 method Methods 0.000 title claims description 36
- 229910021642 ultra pure water Inorganic materials 0.000 title claims description 16
- 239000012498 ultrapure water Substances 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 179
- 238000001179 sorption measurement Methods 0.000 claims abstract description 69
- 239000003463 adsorbent Substances 0.000 claims abstract description 26
- 239000011347 resin Substances 0.000 description 27
- 229920005989 resin Polymers 0.000 description 27
- 238000005342 ion exchange Methods 0.000 description 11
- 239000003957 anion exchange resin Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 230000008929 regeneration Effects 0.000 description 4
- 238000011069 regeneration method Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000001638 boron Chemical class 0.000 description 3
- 239000013522 chelant Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000002242 deionisation method Methods 0.000 description 3
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000010612 desalination reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000003456 ion exchange resin Substances 0.000 description 2
- 229920003303 ion-exchange polymer Polymers 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000010412 perfusion Effects 0.000 description 2
- CHRJZRDFSQHIFI-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;styrene Chemical class C=CC1=CC=CC=C1.C=CC1=CC=CC=C1C=C CHRJZRDFSQHIFI-UHFFFAOYSA-N 0.000 description 1
- MBBZMMPHUWSWHV-BDVNFPICSA-N N-methylglucamine Chemical group CNC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO MBBZMMPHUWSWHV-BDVNFPICSA-N 0.000 description 1
- KPSZQYZCNSCYGG-UHFFFAOYSA-N [B].[B] Chemical compound [B].[B] KPSZQYZCNSCYGG-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 235000013361 beverage Nutrition 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
- C02F1/285—Treatment of water, waste water, or sewage by sorption using synthetic organic sorbents
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/58—Treatment of water, waste water, or sewage by removing specified dissolved compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
- C02F2101/108—Boron compounds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
- Y02A20/131—Reverse-osmosis
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Water Treatment By Sorption (AREA)
- Removal Of Specific Substances (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018027933A JP7225544B2 (ja) | 2018-02-20 | 2018-02-20 | 純水又は超純水の製造方法 |
| JPJP-P-2018-027933 | 2018-02-20 | ||
| PCT/JP2018/033811 WO2019163174A1 (ja) | 2018-02-20 | 2018-09-12 | ホウ素の除去方法、及び純水又は超純水の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20200121279A true KR20200121279A (ko) | 2020-10-23 |
Family
ID=67687527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020207011157A KR20200121279A (ko) | 2018-02-20 | 2018-09-12 | 붕소의 제거 방법, 및 순수 또는 초순수의 제조 방법 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP7225544B2 (zh) |
| KR (1) | KR20200121279A (zh) |
| CN (1) | CN111225880A (zh) |
| TW (1) | TWI781227B (zh) |
| WO (1) | WO2019163174A1 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102498578B1 (ko) * | 2022-02-22 | 2023-02-13 | 삼성전자주식회사 | 초순수 제조 시스템의 관리 방법 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024171825A1 (ja) * | 2023-02-17 | 2024-08-22 | 栗田工業株式会社 | イオン交換樹脂塔及びホウ素除去方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0884986A (ja) | 1994-07-22 | 1996-04-02 | Japan Organo Co Ltd | 純水又は超純水の製造方法及び製造装置 |
| JPH09192661A (ja) | 1996-01-17 | 1997-07-29 | Japan Organo Co Ltd | 超純水製造装置 |
| JP2005177564A (ja) | 2003-12-17 | 2005-07-07 | Nomura Micro Sci Co Ltd | 超純水の製造方法及び装置 |
| JP2009240891A (ja) | 2008-03-31 | 2009-10-22 | Japan Organo Co Ltd | 超純水の製造方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54131340A (en) * | 1978-03-31 | 1979-10-12 | Mitsubishi Chem Ind Ltd | Water treatment device |
| JPS632619A (ja) * | 1986-06-18 | 1988-01-07 | Satake Eng Co Ltd | 放電加工装置 |
| JP3489650B2 (ja) * | 1997-03-13 | 2004-01-26 | オルガノ株式会社 | ホウ素含有廃水の処理方法 |
| JP2001017866A (ja) | 1999-07-07 | 2001-01-23 | Kurita Water Ind Ltd | ホウ素選択吸着樹脂の調整方法 |
| JP2001340851A (ja) | 2000-06-02 | 2001-12-11 | Nippon Denko Kk | ホウ素含有排水の処理方法及び処理装置 |
| JP3852926B2 (ja) | 2002-08-08 | 2006-12-06 | オルガノ株式会社 | ホウ素選択吸着能を有する有機多孔質体、これを用いたホウ素除去モジュールおよび超純水製造装置 |
| CA2452137A1 (en) | 2002-12-18 | 2004-06-18 | Rohm And Haas Company | Water treatment system with low waste volume |
| JP2004275948A (ja) | 2003-03-18 | 2004-10-07 | Sumitomo Chem Co Ltd | 硼素除去方法および硼素除去装置 |
| JP2004330012A (ja) * | 2003-05-01 | 2004-11-25 | Shin Nihon Salt Co Ltd | ホウ素吸着剤及びその製造方法 |
| KR100804360B1 (ko) * | 2003-12-15 | 2008-02-15 | 아사히 가세이 케미칼즈 가부시키가이샤 | 다공성 성형체 및 그의 제조 방법 |
| JP2011167606A (ja) | 2010-02-17 | 2011-09-01 | Nippon Rensui Co Ltd | キレート形成基含有吸着材料の製造方法 |
| JP5757130B2 (ja) | 2011-03-29 | 2015-07-29 | 栗田工業株式会社 | イオン交換装置の運転方法及びイオン交換システム |
| JP6097104B2 (ja) | 2013-03-14 | 2017-03-15 | オルガノ株式会社 | 重金属含有溶液の処理方法 |
| JP6211779B2 (ja) | 2013-03-27 | 2017-10-11 | 千代田化工建設株式会社 | ホウ素含有排水の処理方法 |
| JP6228471B2 (ja) | 2014-01-24 | 2017-11-08 | 三菱ケミカルアクア・ソリューションズ株式会社 | 被処理水の処理装置、純水の製造装置および被処理水の処理方法 |
| CN106629975A (zh) * | 2016-12-27 | 2017-05-10 | 南京慧城水处理设备有限公司 | 一种利用硼选择性螯合树脂去除淡化海水中微量硼的方法 |
-
2018
- 2018-02-20 JP JP2018027933A patent/JP7225544B2/ja active Active
- 2018-09-12 WO PCT/JP2018/033811 patent/WO2019163174A1/ja active Application Filing
- 2018-09-12 KR KR1020207011157A patent/KR20200121279A/ko not_active Application Discontinuation
- 2018-09-12 CN CN201880066892.1A patent/CN111225880A/zh active Pending
- 2018-09-21 TW TW107133323A patent/TWI781227B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0884986A (ja) | 1994-07-22 | 1996-04-02 | Japan Organo Co Ltd | 純水又は超純水の製造方法及び製造装置 |
| JPH09192661A (ja) | 1996-01-17 | 1997-07-29 | Japan Organo Co Ltd | 超純水製造装置 |
| JP2005177564A (ja) | 2003-12-17 | 2005-07-07 | Nomura Micro Sci Co Ltd | 超純水の製造方法及び装置 |
| JP2009240891A (ja) | 2008-03-31 | 2009-10-22 | Japan Organo Co Ltd | 超純水の製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102498578B1 (ko) * | 2022-02-22 | 2023-02-13 | 삼성전자주식회사 | 초순수 제조 시스템의 관리 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019163174A1 (ja) | 2019-08-29 |
| CN111225880A (zh) | 2020-06-02 |
| TW201934495A (zh) | 2019-09-01 |
| TWI781227B (zh) | 2022-10-21 |
| JP2019141775A (ja) | 2019-08-29 |
| JP7225544B2 (ja) | 2023-02-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| E601 | Decision to refuse application | ||
| J201 | Request for trial against refusal decision | ||
| J301 | Trial decision |
Free format text: TRIAL NUMBER: 2023101002636; TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20231205 Effective date: 20240823 |