KR20150007305A - 테스트를 하기 위한 마이크로 전자 기판들의 대향하는 표면들에 결합가능한 트랜슬레이터들, 및 관련 시스템들과 방법들 - Google Patents
테스트를 하기 위한 마이크로 전자 기판들의 대향하는 표면들에 결합가능한 트랜슬레이터들, 및 관련 시스템들과 방법들 Download PDFInfo
- Publication number
- KR20150007305A KR20150007305A KR1020147031469A KR20147031469A KR20150007305A KR 20150007305 A KR20150007305 A KR 20150007305A KR 1020147031469 A KR1020147031469 A KR 1020147031469A KR 20147031469 A KR20147031469 A KR 20147031469A KR 20150007305 A KR20150007305 A KR 20150007305A
- Authority
- KR
- South Korea
- Prior art keywords
- translator
- microelectronic substrate
- substrate
- signal
- accessing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0416—Connectors, terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261621954P | 2012-04-09 | 2012-04-09 | |
| US61/621,954 | 2012-04-09 | ||
| US13/840,937 | 2013-03-15 | ||
| US13/840,937 US8779789B2 (en) | 2012-04-09 | 2013-03-15 | Translators coupleable to opposing surfaces of microelectronic substrates for testing, and associated systems and methods |
| PCT/US2013/035286 WO2013154909A1 (en) | 2012-04-09 | 2013-04-04 | Translators coupleable to opposing surfaces of microelectronic substrates for testing, and associated systems and methods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20150007305A true KR20150007305A (ko) | 2015-01-20 |
Family
ID=49291807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020147031469A Ceased KR20150007305A (ko) | 2012-04-09 | 2013-04-04 | 테스트를 하기 위한 마이크로 전자 기판들의 대향하는 표면들에 결합가능한 트랜슬레이터들, 및 관련 시스템들과 방법들 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US8779789B2 (https=) |
| EP (1) | EP2837023A4 (https=) |
| JP (1) | JP6058119B2 (https=) |
| KR (1) | KR20150007305A (https=) |
| CN (1) | CN104350588B (https=) |
| SG (1) | SG11201406383RA (https=) |
| TW (1) | TWI551869B (https=) |
| WO (1) | WO2013154909A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8779789B2 (en) * | 2012-04-09 | 2014-07-15 | Advanced Inquiry Systems, Inc. | Translators coupleable to opposing surfaces of microelectronic substrates for testing, and associated systems and methods |
| FR3032038B1 (fr) | 2015-01-27 | 2018-07-27 | Soitec | Procede, dispositif et systeme de mesure d'une caracteristique electrique d'un substrat |
| CN106154596A (zh) * | 2015-04-08 | 2016-11-23 | 上海纪显电子科技有限公司 | 光电显示装置、检测装置及其方法 |
| US9794009B1 (en) * | 2016-06-30 | 2017-10-17 | Litepoint Corporation | Method for testing a radio frequency (RF) data packet signal transceiver for proper implicit beamforming operation |
| US11791326B2 (en) * | 2021-05-10 | 2023-10-17 | International Business Machines Corporation | Memory and logic chip stack with a translator chip |
Family Cites Families (44)
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| US4628991A (en) | 1984-11-26 | 1986-12-16 | Trilogy Computer Development Partners, Ltd. | Wafer scale integrated circuit testing chuck |
| US6728113B1 (en) | 1993-06-24 | 2004-04-27 | Polychip, Inc. | Method and apparatus for non-conductively interconnecting integrated circuits |
| US5592730A (en) | 1994-07-29 | 1997-01-14 | Hewlett-Packard Company | Method for fabricating a Z-axis conductive backing layer for acoustic transducers using etched leadframes |
| US5567654A (en) | 1994-09-28 | 1996-10-22 | International Business Machines Corporation | Method and workpiece for connecting a thin layer to a monolithic electronic module's surface and associated module packaging |
| US6798224B1 (en) | 1997-02-11 | 2004-09-28 | Micron Technology, Inc. | Method for testing semiconductor wafers |
| US6121065A (en) | 1997-09-26 | 2000-09-19 | Institute Of Microelectronics | Wafer scale burn-in testing |
| US6100709A (en) | 1998-05-29 | 2000-08-08 | Intel Corporation | Silicon wafer testing rig and a method for testing a silicon wafer wherein the silicon wafer is bent into a dome shape |
| US7349223B2 (en) * | 2000-05-23 | 2008-03-25 | Nanonexus, Inc. | Enhanced compliant probe card systems having improved planarity |
| US6452113B2 (en) | 1999-07-15 | 2002-09-17 | Incep Technologies, Inc. | Apparatus for providing power to a microprocessor with integrated thermal and EMI management |
| US7952373B2 (en) * | 2000-05-23 | 2011-05-31 | Verigy (Singapore) Pte. Ltd. | Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies |
| US6884653B2 (en) | 2001-03-21 | 2005-04-26 | Micron Technology, Inc. | Folded interposer |
| US6680213B2 (en) * | 2001-04-02 | 2004-01-20 | Micron Technology, Inc. | Method and system for fabricating contacts on semiconductor components |
| US6429513B1 (en) | 2001-05-25 | 2002-08-06 | Amkor Technology, Inc. | Active heat sink for cooling a semiconductor chip |
| US6737879B2 (en) | 2001-06-21 | 2004-05-18 | Morgan Labs, Llc | Method and apparatus for wafer scale testing |
| US6841991B2 (en) * | 2002-08-29 | 2005-01-11 | Micron Technology, Inc. | Planarity diagnostic system, E.G., for microelectronic component test systems |
| US7071420B2 (en) | 2002-12-18 | 2006-07-04 | Micron Technology, Inc. | Methods and apparatus for a flexible circuit interposer |
| US6897666B2 (en) | 2002-12-31 | 2005-05-24 | Intel Corporation | Embedded voltage regulator and active transient control device in probe head for improved power delivery and method |
| US6853205B1 (en) | 2003-07-17 | 2005-02-08 | Chipmos Technologies (Bermuda) Ltd. | Probe card assembly |
| JP2006010682A (ja) * | 2004-05-28 | 2006-01-12 | Jsr Corp | 回路基板の検査装置および回路基板の検査方法 |
| US7148715B2 (en) * | 2004-06-02 | 2006-12-12 | Micron Technology, Inc. | Systems and methods for testing microelectronic imagers and microfeature devices |
| US7489147B2 (en) * | 2004-07-15 | 2009-02-10 | Jsr Corporation | Inspection equipment of circuit board and inspection method of circuit board |
| JP4598779B2 (ja) * | 2004-11-16 | 2010-12-15 | 富士通セミコンダクター株式会社 | コンタクタ及びコンタクタを用いた試験方法 |
| US7671449B2 (en) | 2005-05-04 | 2010-03-02 | Sun Microsystems, Inc. | Structures and methods for an application of a flexible bridge |
| US7649245B2 (en) | 2005-05-04 | 2010-01-19 | Sun Microsystems, Inc. | Structures and methods for a flexible bridge that enables high-bandwidth communication |
| CN101248363B (zh) * | 2005-08-23 | 2012-01-18 | 日本电气株式会社 | 半导体器件、半导体芯片、芯片间互连测试方法以及芯片间互连切换方法 |
| CN101346813A (zh) * | 2005-12-22 | 2009-01-14 | Jsr株式会社 | 晶片检查用电路基板装置、探针卡和晶片检查装置 |
| US7821283B2 (en) * | 2005-12-22 | 2010-10-26 | Jsr Corporation | Circuit board apparatus for wafer inspection, probe card, and wafer inspection apparatus |
| US7572132B2 (en) | 2006-07-18 | 2009-08-11 | Advanced Inquiry Systems, Inc. | Methods and apparatus for flexible extension of electrical conductors beyond the edges of a substrate |
| JP5005321B2 (ja) * | 2006-11-08 | 2012-08-22 | パナソニック株式会社 | 半導体装置 |
| US20080309349A1 (en) | 2007-06-15 | 2008-12-18 | Computer Access Technology Corporation | Flexible interposer system |
| US7791174B2 (en) * | 2008-03-07 | 2010-09-07 | Advanced Inquiry Systems, Inc. | Wafer translator having a silicon core isolated from signal paths by a ground plane |
| KR101214036B1 (ko) * | 2008-10-28 | 2012-12-20 | 가부시키가이샤 어드밴티스트 | 시험 장치 및 회로 모듈 |
| KR101046382B1 (ko) * | 2008-12-30 | 2011-07-05 | 주식회사 하이닉스반도체 | 웨이퍼의 반도체 칩 테스트 장치 |
| US8988090B2 (en) * | 2009-04-21 | 2015-03-24 | Johnstech International Corporation | Electrically conductive kelvin contacts for microcircuit tester |
| US7977956B2 (en) * | 2009-04-28 | 2011-07-12 | Formfactor, Inc. | Method and apparatus for probe card alignment in a test system |
| US8344749B2 (en) * | 2010-06-07 | 2013-01-01 | Texas Instruments Incorporated | Through carrier dual side loop-back testing of TSV die after die attach to substrate |
| US8471577B2 (en) * | 2010-06-11 | 2013-06-25 | Texas Instruments Incorporated | Lateral coupling enabled topside only dual-side testing of TSV die attached to package substrate |
| US8648615B2 (en) * | 2010-06-28 | 2014-02-11 | Xilinx, Inc. | Testing die-to-die bonding and rework |
| CN103229066A (zh) * | 2010-09-28 | 2013-07-31 | 高级查询系统公司 | 晶片测试系统以及相关的使用和制造方法 |
| US8363418B2 (en) | 2011-04-18 | 2013-01-29 | Morgan/Weiss Technologies Inc. | Above motherboard interposer with peripheral circuits |
| US8952711B2 (en) * | 2011-10-20 | 2015-02-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods for probing semiconductor wafers |
| US8952713B1 (en) * | 2012-02-08 | 2015-02-10 | Altera Corporation | Method and apparatus for die testing |
| US9391447B2 (en) * | 2012-03-06 | 2016-07-12 | Intel Corporation | Interposer to regulate current for wafer test tooling |
| US8779789B2 (en) * | 2012-04-09 | 2014-07-15 | Advanced Inquiry Systems, Inc. | Translators coupleable to opposing surfaces of microelectronic substrates for testing, and associated systems and methods |
-
2013
- 2013-03-15 US US13/840,937 patent/US8779789B2/en active Active
- 2013-04-04 EP EP13776186.2A patent/EP2837023A4/en not_active Withdrawn
- 2013-04-04 KR KR1020147031469A patent/KR20150007305A/ko not_active Ceased
- 2013-04-04 CN CN201380030314.XA patent/CN104350588B/zh active Active
- 2013-04-04 JP JP2015505804A patent/JP6058119B2/ja active Active
- 2013-04-04 WO PCT/US2013/035286 patent/WO2013154909A1/en not_active Ceased
- 2013-04-04 SG SG11201406383RA patent/SG11201406383RA/en unknown
- 2013-04-08 TW TW102112402A patent/TWI551869B/zh active
-
2014
- 2014-06-19 US US14/309,672 patent/US9222965B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2837023A1 (en) | 2015-02-18 |
| WO2013154909A1 (en) | 2013-10-17 |
| US9222965B2 (en) | 2015-12-29 |
| TW201350880A (zh) | 2013-12-16 |
| SG11201406383RA (en) | 2014-11-27 |
| US8779789B2 (en) | 2014-07-15 |
| EP2837023A4 (en) | 2016-01-13 |
| CN104350588B (zh) | 2017-04-05 |
| US20150015299A1 (en) | 2015-01-15 |
| JP2015514226A (ja) | 2015-05-18 |
| JP6058119B2 (ja) | 2017-01-11 |
| CN104350588A (zh) | 2015-02-11 |
| US20130265071A1 (en) | 2013-10-10 |
| TWI551869B (zh) | 2016-10-01 |
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| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
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St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
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| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-3-3-R10-R18-oth-X000 |
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| A201 | Request for examination | ||
| A302 | Request for accelerated examination | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
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| P13-X000 | Application amended |
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St.27 status event code: A-1-2-D10-D17-exm-PA0302 St.27 status event code: A-1-2-D10-D16-exm-PA0302 |
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| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
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St.27 status event code: U-3-3-T10-T11-oth-X000 |
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St.27 status event code: N-2-6-B10-B15-exm-PE0601 |
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| P22-X000 | Classification modified |
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