KR20140128975A - 그래핀 그리드를 갖는 전자적 디바이스 - Google Patents

그래핀 그리드를 갖는 전자적 디바이스 Download PDF

Info

Publication number
KR20140128975A
KR20140128975A KR1020147021314A KR20147021314A KR20140128975A KR 20140128975 A KR20140128975 A KR 20140128975A KR 1020147021314 A KR1020147021314 A KR 1020147021314A KR 20147021314 A KR20147021314 A KR 20147021314A KR 20140128975 A KR20140128975 A KR 20140128975A
Authority
KR
South Korea
Prior art keywords
grid
electrode
anode
cathode
graphene
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020147021314A
Other languages
English (en)
Korean (ko)
Inventor
로데릭 에이. 하이드
조딘 티. 카레
나단 피. 미르볼드
토니 에스. 판
제이알. 로웰 엘. 우드
Original Assignee
엘화 엘엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/374,545 external-priority patent/US8575842B2/en
Priority claimed from US13/545,504 external-priority patent/US9018861B2/en
Priority claimed from US13/587,762 external-priority patent/US8692226B2/en
Priority claimed from US13/612,129 external-priority patent/US9646798B2/en
Priority claimed from US13/666,759 external-priority patent/US8946992B2/en
Application filed by 엘화 엘엘씨 filed Critical 엘화 엘엘씨
Publication of KR20140128975A publication Critical patent/KR20140128975A/ko
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/46Control electrodes, e.g. grid; Auxiliary electrodes
    • H01J1/48Control electrodes, e.g. grid; Auxiliary electrodes characterised by the material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J19/00Details of vacuum tubes of the types covered by group H01J21/00
    • H01J19/28Non-electron-emitting electrodes; Screens
    • H01J19/38Control electrodes, e.g. grid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J21/00Vacuum tubes
    • H01J21/02Tubes with a single discharge path
    • H01J21/06Tubes with a single discharge path having electrostatic control means only
    • H01J21/10Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode
    • H01J21/105Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode with microengineered cathode and control electrodes, e.g. Spindt-type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/021Electron guns using a field emission, photo emission, or secondary emission electron source
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/021Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J45/00Discharge tubes functioning as thermionic generators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Cold Cathode And The Manufacture (AREA)
  • Hybrid Cells (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Thin Film Transistor (AREA)
  • Ignition Installations For Internal Combustion Engines (AREA)
KR1020147021314A 2011-12-29 2012-12-27 그래핀 그리드를 갖는 전자적 디바이스 Withdrawn KR20140128975A (ko)

Applications Claiming Priority (15)

Application Number Priority Date Filing Date Title
US201161631270P 2011-12-29 2011-12-29
US61/631,270 2011-12-29
US13/374,545 US8575842B2 (en) 2011-12-29 2011-12-30 Field emission device
US13/374,545 2011-12-30
US201261638986P 2012-04-26 2012-04-26
US61/638,986 2012-04-26
US13/545,504 2012-07-10
US13/545,504 US9018861B2 (en) 2011-12-29 2012-07-10 Performance optimization of a field emission device
US13/587,762 2012-08-16
US13/587,762 US8692226B2 (en) 2011-12-29 2012-08-16 Materials and configurations of a field emission device
US13/612,129 US9646798B2 (en) 2011-12-29 2012-09-12 Electronic device graphene grid
US13/612,129 2012-09-12
US13/666,759 2012-11-01
US13/666,759 US8946992B2 (en) 2011-12-29 2012-11-01 Anode with suppressor grid
PCT/US2012/071833 WO2013101937A1 (en) 2011-12-29 2012-12-27 Electronic device graphene grid

Publications (1)

Publication Number Publication Date
KR20140128975A true KR20140128975A (ko) 2014-11-06

Family

ID=48698613

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020147021314A Withdrawn KR20140128975A (ko) 2011-12-29 2012-12-27 그래핀 그리드를 갖는 전자적 디바이스
KR1020147021370A Expired - Fee Related KR101988069B1 (ko) 2011-12-29 2012-12-27 억제기 그리드를 갖는 애노드
KR1020147021047A Expired - Fee Related KR101988068B1 (ko) 2011-12-29 2012-12-27 전계 방출 디바이스

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020147021370A Expired - Fee Related KR101988069B1 (ko) 2011-12-29 2012-12-27 억제기 그리드를 갖는 애노드
KR1020147021047A Expired - Fee Related KR101988068B1 (ko) 2011-12-29 2012-12-27 전계 방출 디바이스

Country Status (6)

Country Link
EP (3) EP2798673B1 (enExample)
JP (1) JP6278897B2 (enExample)
KR (3) KR20140128975A (enExample)
CN (5) CN104137254B (enExample)
IN (1) IN2014DN05630A (enExample)
WO (5) WO2013101948A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101655033B1 (ko) * 2015-06-03 2016-09-06 신라대학교 산학협력단 그래핀을 이용한 진공도 측정 센서 및 진공게이지
US9666401B2 (en) 2014-11-21 2017-05-30 Electronics And Telecommunications Research Institute Field-emission device with improved beams-convergence
KR20210043090A (ko) * 2019-10-11 2021-04-21 성균관대학교산학협력단 2 차원 구조체 및 이의 제조 방법

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9646798B2 (en) 2011-12-29 2017-05-09 Elwha Llc Electronic device graphene grid
US9349562B2 (en) 2011-12-29 2016-05-24 Elwha Llc Field emission device with AC output
US9659735B2 (en) 2012-09-12 2017-05-23 Elwha Llc Applications of graphene grids in vacuum electronics
US9659734B2 (en) 2012-09-12 2017-05-23 Elwha Llc Electronic device multi-layer graphene grid
CN103943441B (zh) * 2014-05-10 2016-05-04 福州大学 一种场致发射激发气体放电显示装置及其驱动方法
US9991081B2 (en) 2014-05-13 2018-06-05 Samsung Electronics Co., Ltd. Electron emitting device using graphene and method for manufacturing same
WO2015175765A1 (en) * 2014-05-15 2015-11-19 Elwha Llc Applications of graphene grids in vacuum electronics
US11605770B2 (en) * 2017-04-10 2023-03-14 Face International Corporation Autonomous electrical power sources
US10109781B1 (en) * 2017-04-10 2018-10-23 Face International Corporation Methods for fabrication, manufacture and production of an autonomous electrical power source
CN105931931A (zh) * 2016-05-12 2016-09-07 东南大学 一种尖锥阵列场致发射三极结构及其制作方法
CN108231560B (zh) * 2016-12-09 2022-02-15 全球能源互联网研究院 一种控制电极制备方法及mosfet功率器件
CN111725326A (zh) * 2019-03-18 2020-09-29 中国科学院物理研究所 一种基于二维材料的非易失存储器及其操作方法
CN112399868B (zh) * 2019-06-20 2024-06-14 上海联影医疗科技股份有限公司 放射治疗的系统和方法
CN112242276B (zh) * 2019-07-16 2022-03-22 清华大学 场发射中和器
CN112242279B (zh) * 2019-07-16 2022-03-18 清华大学 碳纳米管场发射体及其制备方法
CN112242277B (zh) * 2019-07-16 2022-03-18 清华大学 场发射中和器
EP4468320A1 (en) * 2023-05-23 2024-11-27 Airbus Operations GmbH Device for transformation of thermal into electrical energy

Family Cites Families (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1045273A (fr) * 1951-11-19 1953-11-25 Radiologie Cie Gle Dispositif de production de rayonnement x, autorégulateur
US3254244A (en) * 1961-06-27 1966-05-31 Westinghouse Electric Corp Thermionic power conversion triode
US4427886A (en) * 1982-08-02 1984-01-24 Wisconsin Alumni Research Foundation Low voltage field emission electron gun
GB2318208B (en) * 1990-07-13 1998-09-02 Marconi Gec Ltd Electronic switching devices
JP3235172B2 (ja) * 1991-05-13 2001-12-04 セイコーエプソン株式会社 電界電子放出装置
US5272411A (en) * 1992-01-28 1993-12-21 Itt Corporation Coaxial triode apparatus
KR970005769B1 (ko) * 1992-08-27 1997-04-19 가부시끼가이샤 도시바 자계 계침형 전자총
JPH06104289A (ja) * 1992-09-18 1994-04-15 Hitachi Ltd 半導体装置およびそれを用いた増幅回路
US5578901A (en) * 1994-02-14 1996-11-26 E. I. Du Pont De Nemours And Company Diamond fiber field emitters
EP0696042B1 (en) * 1994-08-01 1999-12-01 Motorola, Inc. Field emission device arc-suppressor
TW413828B (en) * 1995-07-07 2000-12-01 Nippon Electric Co Electron gun provided with a field emission cold cathode and an improved gate structure
JP3556331B2 (ja) * 1995-07-17 2004-08-18 株式会社日立製作所 電子源の作製法
US5982095A (en) * 1995-09-19 1999-11-09 Lucent Technologies Inc. Plasma displays having electrodes of low-electron affinity materials
US5834781A (en) * 1996-02-14 1998-11-10 Hitachi, Ltd. Electron source and electron beam-emitting apparatus equipped with same
JP3598173B2 (ja) * 1996-04-24 2004-12-08 浜松ホトニクス株式会社 電子増倍器及び光電子増倍管
US5780954A (en) * 1997-01-22 1998-07-14 Davis; Edwin D. Thermionic electric converters
JP3428931B2 (ja) * 1998-09-09 2003-07-22 キヤノン株式会社 フラットパネルディスプレイの解体処理方法
US6060840A (en) * 1999-02-19 2000-05-09 Motorola, Inc. Method and control circuit for controlling an emission current in a field emission display
US6205790B1 (en) * 1999-05-28 2001-03-27 Lucent Technologies Inc. Efficient thermoelectric controller
CA2312140A1 (en) * 1999-06-25 2000-12-25 Matthias Ramm Charge separation type heterojunction structure and manufacturing method therefor
US6538367B1 (en) * 1999-07-15 2003-03-25 Agere Systems Inc. Field emitting device comprising field-concentrating nanoconductor assembly and method for making the same
US20020036452A1 (en) * 1999-12-21 2002-03-28 Masakazu Muroyama Electron emission device, cold cathode field emission device and method for the production thereof, and cold cathode field emission display and method for the production thereof
DE19963571A1 (de) * 1999-12-29 2001-07-12 Pfannenberg Otto Gmbh Kühlvorrichtung
AU3706401A (en) * 2000-02-16 2001-08-27 Fullerene Internat Corp Diamond/carbon nanotube structures for efficient electron field emission
US6590320B1 (en) * 2000-02-23 2003-07-08 Copytale, Inc. Thin-film planar edge-emitter field emission flat panel display
EP1409762A4 (en) * 2000-05-23 2007-02-28 Univ Virginia METHOD AND DEVICE FOR PLASMA-BASED DEPOSITION IN A VACUUM
US6404089B1 (en) * 2000-07-21 2002-06-11 Mark R. Tomion Electrodynamic field generator
TWM309746U (en) * 2000-10-19 2007-04-11 Matsushita Electric Industrial Co Ltd Driving apparatus for a field emission device, field emission device, electron source, light source, image display apparatus, electron gun, electron beam apparatus, cathode ray tube, and discharge tube
EP1274111B1 (en) * 2001-07-06 2005-09-07 ICT, Integrated Circuit Testing GmbH Electron emission device
US6946596B2 (en) * 2002-09-13 2005-09-20 Kucherov Yan R Tunneling-effect energy converters
GB0309383D0 (en) * 2003-04-25 2003-06-04 Cxr Ltd X-ray tube electron sources
US7079370B2 (en) * 2003-04-28 2006-07-18 Air Products And Chemicals, Inc. Apparatus and method for removal of surface oxides via fluxless technique electron attachment and remote ion generation
US20050016575A1 (en) * 2003-06-13 2005-01-27 Nalin Kumar Field emission based thermoelectric device
US6906432B2 (en) * 2003-07-02 2005-06-14 Mes International, Inc. Electrical power generation system and method
KR100523840B1 (ko) * 2003-08-27 2005-10-27 한국전자통신연구원 전계 방출 소자
JP2005116736A (ja) * 2003-10-07 2005-04-28 Matsushita Electric Ind Co Ltd 熱電変換素子およびその製造方法、並びにそれを用いた冷却装置
US7547907B2 (en) * 2004-12-29 2009-06-16 Intel Corporation Non-blocking switch having carbon nanostructures and Mach-Zehnder interferometer
US7608974B2 (en) * 2005-06-20 2009-10-27 Chien-Min Sung Diamond-like carbon devices and methods for the use and manufacture thereof
EP1760761B1 (en) * 2005-09-05 2017-10-18 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam emitting device and method for operating a charged particle beam emitting device
US20080017237A1 (en) * 2006-07-19 2008-01-24 James William Bray Heat transfer and power generation device
WO2008038684A1 (fr) * 2006-09-27 2008-04-03 Denki Kagaku Kogyo Kabushiki Kaisha Source d'électrons
US7898042B2 (en) * 2006-11-07 2011-03-01 Cbrite Inc. Two-terminal switching devices and their methods of fabrication
US7741764B1 (en) * 2007-01-09 2010-06-22 Chien-Min Sung DLC emitter devices and associated methods
WO2008120341A1 (ja) * 2007-03-29 2008-10-09 Advantest Corporation 電子銃及び電子ビーム露光装置
WO2009005908A2 (en) * 2007-05-22 2009-01-08 Nantero, Inc. Triodes using nanofabric articles and methods of making the same
FI20075767A0 (fi) * 2007-10-30 2007-10-30 Canatu Oy Pinnoite ja sähkölaitteita jotka käsittävät tätä
US8018053B2 (en) * 2008-01-31 2011-09-13 Northrop Grumman Systems Corporation Heat transfer device
JP2009187684A (ja) * 2008-02-02 2009-08-20 Stanley Electric Co Ltd 電界放射型電子源の電子流制御方法
US8471444B2 (en) * 2008-09-15 2013-06-25 Photonis Netherlands B.V. Ion barrier membrane for use in a vacuum tube using electron multiplying, an electron multiplying structure for use in a vacuum tube using electron multiplying as well as a vacuum tube using electron multiplying provided with such an electron multiplying structure
JP5802128B2 (ja) * 2008-10-09 2015-10-28 カリフォルニア インスティテュート オブ テクノロジー 四次元イメージング超高速電子顕微鏡
MX2012002417A (es) * 2009-08-27 2012-06-19 Landa Labs 2012 Ltd Metodo y dispositivo para generar electricidad y metodo para su fabricacion.
WO2011046838A2 (en) * 2009-10-15 2011-04-21 Baker Hughes Incorporated Polycrystalline compacts including nanoparticulate inclusions, cutting elements and earth-boring tools including such compacts, and methods of forming such compacts
WO2011094204A2 (en) * 2010-01-26 2011-08-04 Wisconsin Alumni Research Foundation Methods of fabricating large-area, semiconducting nanoperforated graphene materials
US8354323B2 (en) * 2010-02-02 2013-01-15 Searete Llc Doped graphene electronic materials
EP2534667A2 (en) * 2010-02-10 2012-12-19 Mochii, Inc. (d/b/a Voxa) Aberration-correcting dark-field electron microscopy
CN102194633B (zh) * 2010-03-17 2013-08-28 清华大学 透射电镜微栅
CN102339699B (zh) * 2011-09-30 2014-03-12 东南大学 基于石墨烯的场发射三极结构
US9865789B2 (en) * 2012-07-30 2018-01-09 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E. V. Device and method for thermoelectronic energy conversion

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9666401B2 (en) 2014-11-21 2017-05-30 Electronics And Telecommunications Research Institute Field-emission device with improved beams-convergence
KR101655033B1 (ko) * 2015-06-03 2016-09-06 신라대학교 산학협력단 그래핀을 이용한 진공도 측정 센서 및 진공게이지
KR20210043090A (ko) * 2019-10-11 2021-04-21 성균관대학교산학협력단 2 차원 구조체 및 이의 제조 방법

Also Published As

Publication number Publication date
EP2797837A1 (en) 2014-11-05
WO2013101951A1 (en) 2013-07-04
CN104769698B (zh) 2017-03-08
EP2801102A1 (en) 2014-11-12
WO2013101941A1 (en) 2013-07-04
KR20140110981A (ko) 2014-09-17
EP2798673A4 (en) 2015-11-18
CN104024147A (zh) 2014-09-03
WO2013101948A1 (en) 2013-07-04
CN104137254B (zh) 2017-06-06
WO2013101937A1 (en) 2013-07-04
EP2798673B1 (en) 2019-01-16
CN104160467A (zh) 2014-11-19
JP6278897B2 (ja) 2018-02-14
CN104160467B (zh) 2017-03-08
WO2013101944A3 (en) 2015-06-11
IN2014DN05630A (enExample) 2015-04-03
KR101988069B1 (ko) 2019-06-11
KR20140116181A (ko) 2014-10-01
KR101988068B1 (ko) 2019-06-11
EP2801102A4 (en) 2015-08-12
CN104137254A (zh) 2014-11-05
CN104137218B (zh) 2017-03-08
EP2797837A4 (en) 2015-08-26
JP2015510655A (ja) 2015-04-09
WO2013101944A2 (en) 2013-07-04
EP2801102B1 (en) 2018-05-30
CN104137218A (zh) 2014-11-05
EP2798673A1 (en) 2014-11-05
CN104769698A (zh) 2015-07-08

Similar Documents

Publication Publication Date Title
US9646798B2 (en) Electronic device graphene grid
WO2013101937A1 (en) Electronic device graphene grid
Yamaguchi et al. Field emission from atomically thin edges of reduced graphene oxide
US9659734B2 (en) Electronic device multi-layer graphene grid
TWI733920B (zh) 電子束微影系統
US10056219B2 (en) Applications of graphene grids in vacuum electronics
US20080238285A1 (en) Carbon nanotube field emitter and method for fabricating the same
Ghosh et al. Transparent and flexible field electron emitters based on the conical nanocarbon structures
Sanborn et al. A thin film triode type carbon nanotube field emission cathode
JP2020537288A (ja) シリコン電子エミッタデザイン
Hsu et al. Nanodiamond vacuum field emission device with gate modulated triode characteristics
Zheng et al. Nitrogen-doped few-layer graphene grown vertically on a Cu substrate via C60/nitrogen microwave plasma and its field emission properties
WO2015175765A1 (en) Applications of graphene grids in vacuum electronics
Wu et al. Fabrication and field emission properties of triode-type carbon nanotube emitter arrays
Schmidt et al. Controlled fabrication of electrically contacted carbon nanoscrolls
CN105428185B (zh) 一种准集成栅控碳纳米管/纳米线场发射阴极的制作方法
CN104756221B (zh) 纳米颗粒材料(ngm)材料、用于制造所述材料的方法和装置及包括所述材料的电部件
Koohsorkhi et al. Investigation of carbon nanotube-based field-emission triode devices on silicon substrates
Svetlichnyi et al. Modelling of the influence of a pointed field emission cathode design from the silicon carbide with graphene film on the electric field strength
KR20140006659A (ko) 탄소나노튜브 구조체, 이의 제조방법 및 이를 이용한 전계방출장치
von Windheim Design and Characterization of Carbon Nanomaterial-Based Electrodes for Use in Harsh Environments
US10577246B1 (en) Single walled carbon nanotube triode and methods of using same
WO2025183765A2 (en) Remote-contact catalysis for high-purity semiconducting carbon nanotube array
Karaulac et al. Field emission from silicon tips embedded in a dielectric matrix
Cheng et al. Nanomanipulation measurement and PIC simulation of field-emission properties from a single crystallized silicon nano-emitter

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20140729

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid