KR20140078702A - 조합된 두께 및 폭 진동 모드들을 갖는 압전 공진기 - Google Patents

조합된 두께 및 폭 진동 모드들을 갖는 압전 공진기 Download PDF

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Publication number
KR20140078702A
KR20140078702A KR1020147010866A KR20147010866A KR20140078702A KR 20140078702 A KR20140078702 A KR 20140078702A KR 1020147010866 A KR1020147010866 A KR 1020147010866A KR 20147010866 A KR20147010866 A KR 20147010866A KR 20140078702 A KR20140078702 A KR 20140078702A
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KR
South Korea
Prior art keywords
electrodes
piezoelectric resonator
piezoelectric
width
vibration
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KR1020147010866A
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English (en)
Korean (ko)
Inventor
쳉지에 주오
치 순 로
상훈 주
창한 윤
종해 김
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퀄컴 인코포레이티드
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Publication of KR20140078702A publication Critical patent/KR20140078702A/ko
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
KR1020147010866A 2011-09-23 2012-09-24 조합된 두께 및 폭 진동 모드들을 갖는 압전 공진기 Ceased KR20140078702A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/241,356 US8987976B2 (en) 2011-09-23 2011-09-23 Piezoelectric resonator having combined thickness and width vibrational modes
US13/241,356 2011-09-23
PCT/US2012/056962 WO2013044262A1 (en) 2011-09-23 2012-09-24 Piezoelectric resonator having combined thickness and width vibrational modes

Publications (1)

Publication Number Publication Date
KR20140078702A true KR20140078702A (ko) 2014-06-25

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ID=47046844

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147010866A Ceased KR20140078702A (ko) 2011-09-23 2012-09-24 조합된 두께 및 폭 진동 모드들을 갖는 압전 공진기

Country Status (10)

Country Link
US (1) US8987976B2 (https=)
EP (1) EP2759058A1 (https=)
JP (1) JP2014531833A (https=)
KR (1) KR20140078702A (https=)
CN (1) CN103828233A (https=)
AR (1) AR088013A1 (https=)
BR (1) BR112014006925A2 (https=)
IN (1) IN2014CN01544A (https=)
TW (1) TWI517572B (https=)
WO (1) WO2013044262A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
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KR20210055801A (ko) * 2017-12-13 2021-05-17 구글 엘엘씨 패턴화된 전극들을 포함한 분산 모드 라우드스피커 액추에이터

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US10476476B2 (en) * 2016-12-15 2019-11-12 Murata Manufacturing Co., Ltd. MEMS resonator with suppressed spurious modes
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CN111183434A (zh) 2017-10-05 2020-05-19 谷歌有限责任公司 成倒装几何结构的低占位面积谐振器
US10477321B2 (en) * 2018-03-05 2019-11-12 Google Llc Driving distributed mode loudspeaker actuator that includes patterned electrodes
US11381212B2 (en) * 2018-03-21 2022-07-05 Qorvo Us, Inc. Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same
WO2020133316A1 (zh) * 2018-12-29 2020-07-02 天津大学 一种拆分结构谐振器
KR102472120B1 (ko) * 2019-05-03 2022-11-28 메이 선 테크놀로지 씨오 엘티디 의사-압전 d33 진동 장치 및 이를 통합하는 디스플레이
US11545612B2 (en) 2019-05-03 2023-01-03 May Sun Technology Co., Ltd. Pseudo-piezoelectric D33 device and electronic device using the same
CN118371418B (zh) * 2024-04-24 2025-05-06 上海心弘生命科学有限公司 一种二维复合振动的超声换能器及其设计方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210055801A (ko) * 2017-12-13 2021-05-17 구글 엘엘씨 패턴화된 전극들을 포함한 분산 모드 라우드스피커 액추에이터

Also Published As

Publication number Publication date
JP2014531833A (ja) 2014-11-27
US8987976B2 (en) 2015-03-24
BR112014006925A2 (pt) 2017-04-04
TWI517572B (zh) 2016-01-11
TW201325082A (zh) 2013-06-16
EP2759058A1 (en) 2014-07-30
US20130076209A1 (en) 2013-03-28
WO2013044262A1 (en) 2013-03-28
AR088013A1 (es) 2014-04-30
CN103828233A (zh) 2014-05-28
IN2014CN01544A (https=) 2015-05-08

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