CN103828233A - 具有组合式厚度和宽度振动模式的压电谐振器 - Google Patents

具有组合式厚度和宽度振动模式的压电谐振器 Download PDF

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Publication number
CN103828233A
CN103828233A CN201280046484.2A CN201280046484A CN103828233A CN 103828233 A CN103828233 A CN 103828233A CN 201280046484 A CN201280046484 A CN 201280046484A CN 103828233 A CN103828233 A CN 103828233A
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CN
China
Prior art keywords
electrodes
piezoelectric
piezoelectric resonator
width
vibration
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Pending
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CN201280046484.2A
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English (en)
Chinese (zh)
Inventor
C·左
C·S·罗
S·朱
C·尹
J·金
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Qualcomm Inc
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Qualcomm Inc
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Publication of CN103828233A publication Critical patent/CN103828233A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201280046484.2A 2011-09-23 2012-09-24 具有组合式厚度和宽度振动模式的压电谐振器 Pending CN103828233A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/241,356 US8987976B2 (en) 2011-09-23 2011-09-23 Piezoelectric resonator having combined thickness and width vibrational modes
US13/241,356 2011-09-23
PCT/US2012/056962 WO2013044262A1 (en) 2011-09-23 2012-09-24 Piezoelectric resonator having combined thickness and width vibrational modes

Publications (1)

Publication Number Publication Date
CN103828233A true CN103828233A (zh) 2014-05-28

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Application Number Title Priority Date Filing Date
CN201280046484.2A Pending CN103828233A (zh) 2011-09-23 2012-09-24 具有组合式厚度和宽度振动模式的压电谐振器

Country Status (10)

Country Link
US (1) US8987976B2 (https=)
EP (1) EP2759058A1 (https=)
JP (1) JP2014531833A (https=)
KR (1) KR20140078702A (https=)
CN (1) CN103828233A (https=)
AR (1) AR088013A1 (https=)
BR (1) BR112014006925A2 (https=)
IN (1) IN2014CN01544A (https=)
TW (1) TWI517572B (https=)
WO (1) WO2013044262A1 (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110024285A (zh) * 2016-12-15 2019-07-16 株式会社村田制作所 具有抑制的寄生模式的mems谐振器
CN111183434A (zh) * 2017-10-05 2020-05-19 谷歌有限责任公司 成倒装几何结构的低占位面积谐振器
WO2020133316A1 (zh) * 2018-12-29 2020-07-02 天津大学 一种拆分结构谐振器
CN111727610A (zh) * 2018-03-05 2020-09-29 谷歌有限责任公司 驱动包括图案化电极的分布模式扬声器致动器
CN118371418A (zh) * 2024-04-24 2024-07-23 上海心弘生命科学有限公司 一种二维复合振动的超声换能器及其设计方法

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US20130120082A1 (en) * 2011-11-10 2013-05-16 Qualcomm Incorporated Two-port resonators electrically coupled in parallel
US9917571B2 (en) * 2014-06-13 2018-03-13 Georgia Tech Research Corporation Resonant gyroscopes and methods of making and using the same
WO2016114237A1 (ja) * 2015-01-16 2016-07-21 株式会社村田製作所 共振子
KR102434704B1 (ko) 2017-08-04 2022-08-22 삼성전자주식회사 전방향 음향 센서
US10356523B2 (en) * 2017-12-13 2019-07-16 Nvf Tech Ltd Distributed mode loudspeaker actuator including patterned electrodes
US11381212B2 (en) * 2018-03-21 2022-07-05 Qorvo Us, Inc. Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same
KR102472120B1 (ko) * 2019-05-03 2022-11-28 메이 선 테크놀로지 씨오 엘티디 의사-압전 d33 진동 장치 및 이를 통합하는 디스플레이
US11545612B2 (en) 2019-05-03 2023-01-03 May Sun Technology Co., Ltd. Pseudo-piezoelectric D33 device and electronic device using the same

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US4101795A (en) * 1976-10-25 1978-07-18 Matsushita Electric Industrial Company Ultrasonic probe
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CN101123423A (zh) * 2006-08-09 2008-02-13 爱普生拓优科梦株式会社 At切割水晶振动片及其制造方法
JP2008179525A (ja) * 2006-12-25 2008-08-07 Kyocera Corp 圧電磁器および圧電素子

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110024285A (zh) * 2016-12-15 2019-07-16 株式会社村田制作所 具有抑制的寄生模式的mems谐振器
CN110024285B (zh) * 2016-12-15 2023-04-18 株式会社村田制作所 具有抑制的寄生模式的mems谐振器
CN111183434A (zh) * 2017-10-05 2020-05-19 谷歌有限责任公司 成倒装几何结构的低占位面积谐振器
US12120966B2 (en) 2017-10-05 2024-10-15 Google Llc Low footprint resonator in flip chip geometry
CN111727610A (zh) * 2018-03-05 2020-09-29 谷歌有限责任公司 驱动包括图案化电极的分布模式扬声器致动器
CN111727610B (zh) * 2018-03-05 2021-08-06 谷歌有限责任公司 驱动包括图案化电极的分布模式扬声器致动器
WO2020133316A1 (zh) * 2018-12-29 2020-07-02 天津大学 一种拆分结构谐振器
CN118371418A (zh) * 2024-04-24 2024-07-23 上海心弘生命科学有限公司 一种二维复合振动的超声换能器及其设计方法
CN118371418B (zh) * 2024-04-24 2025-05-06 上海心弘生命科学有限公司 一种二维复合振动的超声换能器及其设计方法

Also Published As

Publication number Publication date
JP2014531833A (ja) 2014-11-27
US8987976B2 (en) 2015-03-24
BR112014006925A2 (pt) 2017-04-04
TWI517572B (zh) 2016-01-11
TW201325082A (zh) 2013-06-16
EP2759058A1 (en) 2014-07-30
US20130076209A1 (en) 2013-03-28
KR20140078702A (ko) 2014-06-25
WO2013044262A1 (en) 2013-03-28
AR088013A1 (es) 2014-04-30
IN2014CN01544A (https=) 2015-05-08

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