KR20140039245A - 제조 방법 및 제조 장치 - Google Patents

제조 방법 및 제조 장치 Download PDF

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Publication number
KR20140039245A
KR20140039245A KR1020137035168A KR20137035168A KR20140039245A KR 20140039245 A KR20140039245 A KR 20140039245A KR 1020137035168 A KR1020137035168 A KR 1020137035168A KR 20137035168 A KR20137035168 A KR 20137035168A KR 20140039245 A KR20140039245 A KR 20140039245A
Authority
KR
South Korea
Prior art keywords
substrate
scale
machine
metrology
processing portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020137035168A
Other languages
English (en)
Korean (ko)
Inventor
코리 윌리엄 마이클 페런
제프리 맥팔랜드
Original Assignee
레니쇼우 피엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 레니쇼우 피엘씨 filed Critical 레니쇼우 피엘씨
Publication of KR20140039245A publication Critical patent/KR20140039245A/ko
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • B23K26/0846—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt for moving elongated workpieces longitudinally, e.g. wire or strip material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/355—Texturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P25/00—Auxiliary treatment of workpieces, before or during machining operations, to facilitate the action of the tool or the attainment of a desired final condition of the work, e.g. relief of internal stress
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49764—Method of mechanical manufacture with testing or indicating
    • Y10T29/49771—Quantitative measuring or gauging

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
KR1020137035168A 2011-07-06 2012-07-05 제조 방법 및 제조 장치 Withdrawn KR20140039245A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP11250638.1 2011-07-06
EP11250638 2011-07-06
PCT/GB2012/000569 WO2013004992A1 (en) 2011-07-06 2012-07-05 Method of manufacture and apparatus therefor

Publications (1)

Publication Number Publication Date
KR20140039245A true KR20140039245A (ko) 2014-04-01

Family

ID=44511797

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137035168A Withdrawn KR20140039245A (ko) 2011-07-06 2012-07-05 제조 방법 및 제조 장치

Country Status (7)

Country Link
US (1) US20140123458A1 (enExample)
EP (1) EP2729427A1 (enExample)
JP (1) JP2014526140A (enExample)
KR (1) KR20140039245A (enExample)
CN (1) CN103619770A (enExample)
TW (1) TWI502672B (enExample)
WO (1) WO2013004992A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160071788A (ko) * 2014-12-12 2016-06-22 주식회사 이오테크닉스 레이저 가공 장치 및 그 구동 방법

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* Cited by examiner, † Cited by third party
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CN104112689A (zh) * 2013-04-18 2014-10-22 Ap系统股份有限公司 横梁和用于处理衬底的设备
US20150367415A1 (en) 2014-06-20 2015-12-24 Velo3D, Inc. Apparatuses, systems and methods for three-dimensional printing
US10065270B2 (en) 2015-11-06 2018-09-04 Velo3D, Inc. Three-dimensional printing in real time
WO2017100695A1 (en) 2015-12-10 2017-06-15 Velo3D, Inc. Skillful three-dimensional printing
WO2017143077A1 (en) 2016-02-18 2017-08-24 Velo3D, Inc. Accurate three-dimensional printing
US11691343B2 (en) 2016-06-29 2023-07-04 Velo3D, Inc. Three-dimensional printing and three-dimensional printers
EP3492244A1 (en) 2016-06-29 2019-06-05 VELO3D, Inc. Three-dimensional printing system and method for three-dimensional printing
US20180093418A1 (en) 2016-09-30 2018-04-05 Velo3D, Inc. Three-dimensional objects and their formation
US20180126462A1 (en) 2016-11-07 2018-05-10 Velo3D, Inc. Gas flow in three-dimensional printing
US10611092B2 (en) 2017-01-05 2020-04-07 Velo3D, Inc. Optics in three-dimensional printing
US10357829B2 (en) 2017-03-02 2019-07-23 Velo3D, Inc. Three-dimensional printing of three-dimensional objects
CN106938371A (zh) * 2017-03-16 2017-07-11 广东工业大学 一种高精度激光切割机及其横梁
US20180281237A1 (en) 2017-03-28 2018-10-04 Velo3D, Inc. Material manipulation in three-dimensional printing
US10272525B1 (en) 2017-12-27 2019-04-30 Velo3D, Inc. Three-dimensional printing systems and methods of their use
US10144176B1 (en) 2018-01-15 2018-12-04 Velo3D, Inc. Three-dimensional printing systems and methods of their use
CN110508948A (zh) * 2018-05-22 2019-11-29 佛山市嘉实和生物科技有限公司 一种多功能组合激光设备
CA3148849A1 (en) 2019-07-26 2021-02-04 Velo3D, Inc. Quality assurance in formation of three-dimensional objects
TWI866681B (zh) * 2023-12-08 2024-12-11 均華精密工業股份有限公司 同向式多軸作業設備

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GB8616240D0 (en) * 1986-07-03 1986-08-13 Renishaw Plc Opto-electronic scale reading apparatus
JPH0360437A (ja) * 1989-07-26 1991-03-15 Hitachi Ltd 切断マーク
US5279044A (en) 1991-03-12 1994-01-18 U.S. Philips Corporation Measuring device for determining an absolute position of a movable element and scale graduation element suitable for use in such a measuring device
JPH11281320A (ja) * 1998-03-30 1999-10-15 Jasco Corp 位置センス装置
GB0109057D0 (en) 2001-04-11 2001-05-30 Renishaw Plc Absolute postition measurement
IL159564A0 (en) 2001-06-28 2004-06-01 Entelos Inc Method and apparatus for computer modeling of an adaptive immune response
JP4320560B2 (ja) * 2003-05-14 2009-08-26 セイコーエプソン株式会社 液滴吐出装置
JP2005326550A (ja) * 2004-05-13 2005-11-24 Sanee Giken Kk 露光装置
GB0413710D0 (en) 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
US7375795B2 (en) * 2004-12-22 2008-05-20 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
JP2007012426A (ja) * 2005-06-30 2007-01-18 Optrex Corp 有機ｅｌ表示パネルとその製造方法および検査方法
DE112006002720B4 (de) * 2005-10-11 2014-11-20 Gsi Group Corp. Optische Messskala und laserbasierte Erstellungsmethode dafür
GB2438600B (en) * 2006-05-19 2008-07-09 Exitech Ltd Method for patterning thin films on moving substrates
TWI622084B (zh) * 2006-09-01 2018-04-21 Nikon Corp Mobile body driving method, moving body driving system, pattern forming method and device, exposure method and device, component manufacturing method, and correction method
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US8294878B2 (en) * 2009-06-19 2012-10-23 Nikon Corporation Exposure apparatus and device manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160071788A (ko) * 2014-12-12 2016-06-22 주식회사 이오테크닉스 레이저 가공 장치 및 그 구동 방법

Also Published As

Publication number Publication date
WO2013004992A1 (en) 2013-01-10
EP2729427A1 (en) 2014-05-14
TW201312685A (zh) 2013-03-16
US20140123458A1 (en) 2014-05-08
JP2014526140A (ja) 2014-10-02
CN103619770A (zh) 2014-03-05
TWI502672B (zh) 2015-10-01

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20131231

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid