KR20110008319A - 액체 내에 가스의 무기포 용액을 제조하기 위한 기화 시스템 및 방법 - Google Patents

액체 내에 가스의 무기포 용액을 제조하기 위한 기화 시스템 및 방법 Download PDF

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Publication number
KR20110008319A
KR20110008319A KR1020107027647A KR20107027647A KR20110008319A KR 20110008319 A KR20110008319 A KR 20110008319A KR 1020107027647 A KR1020107027647 A KR 1020107027647A KR 20107027647 A KR20107027647 A KR 20107027647A KR 20110008319 A KR20110008319 A KR 20110008319A
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KR
South Korea
Prior art keywords
gas
liquid
contactor
feed
flow rate
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Ceased
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KR1020107027647A
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English (en)
Korean (ko)
Inventor
야난 애니 시아
제이 칼 니어메이어
로사리오 몰리카
그레그 티 코너
Original Assignee
엔테그리스, 아이엔씨.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 엔테그리스, 아이엔씨. filed Critical 엔테그리스, 아이엔씨.
Publication of KR20110008319A publication Critical patent/KR20110008319A/ko
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/2319—Methods of introducing gases into liquid media
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/231—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/29—Mixing systems, i.e. flow charts or diagrams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/213—Measuring of the properties of the mixtures, e.g. temperature, density or colour
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/231—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
    • B01F23/23105—Arrangement or manipulation of the gas bubbling devices
    • B01F23/2312—Diffusers
    • B01F23/23124—Diffusers consisting of flexible porous or perforated material, e.g. fabric
    • B01F23/231244—Dissolving, hollow fiber membranes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Accessories For Mixers (AREA)
KR1020107027647A 2008-05-19 2009-05-18 액체 내에 가스의 무기포 용액을 제조하기 위한 기화 시스템 및 방법 Ceased KR20110008319A (ko)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US5422308P 2008-05-19 2008-05-19
US61/054,223 2008-05-19
US8253508P 2008-07-22 2008-07-22
US61/082,535 2008-07-22
US9523008P 2008-09-08 2008-09-08
US61/095,230 2008-09-08
US10150108P 2008-09-30 2008-09-30
US61/101,501 2008-09-30

Publications (1)

Publication Number Publication Date
KR20110008319A true KR20110008319A (ko) 2011-01-26

Family

ID=41340494

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107027647A Ceased KR20110008319A (ko) 2008-05-19 2009-05-18 액체 내에 가스의 무기포 용액을 제조하기 위한 기화 시스템 및 방법

Country Status (7)

Country Link
US (2) US8844909B2 (enExample)
JP (1) JP2011520609A (enExample)
KR (1) KR20110008319A (enExample)
CN (2) CN104722239A (enExample)
DE (1) DE112009001233T5 (enExample)
TW (1) TW201004707A (enExample)
WO (1) WO2009143056A1 (enExample)

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KR20200139630A (ko) * 2019-06-04 2020-12-14 가부시키가이샤 에바라 세이사꾸쇼 가스 용해액 공급 장치 및 가스 용해액 공급 방법

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CN102692926B (zh) * 2012-06-05 2014-10-22 哈尔滨工程大学 基于tms320c6713的船舶航向模糊pid融合控制器及控制方法
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WO2015175790A1 (en) * 2014-05-15 2015-11-19 Tokyo Electron Limited Method and apparatus for increased recirculation and filtration in a photoresist dispense system
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JP6761431B2 (ja) * 2016-01-06 2020-09-23 国立大学法人徳島大学 レーザ光を用いたガス分析装置及びガス分析方法
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WO2020210243A1 (en) 2019-04-08 2020-10-15 Mks Instruments, Inc. Systems and methods for generating a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content
CN110773012A (zh) * 2019-12-02 2020-02-11 杭州老板电器股份有限公司 微纳米气泡制备装置及其制备方法
JP2024546262A (ja) * 2021-12-14 2024-12-19 エムケーエス インストゥルメンツ，インコーポレイテッド 溶解アンモニアデリバリシステム及び使用方法
CN118893499B (zh) * 2024-09-12 2025-11-14 福建理工大学 一种基于pid控制气体辅助抛光系统的设计方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200139630A (ko) * 2019-06-04 2020-12-14 가부시키가이샤 에바라 세이사꾸쇼 가스 용해액 공급 장치 및 가스 용해액 공급 방법

Also Published As

Publication number Publication date
DE112009001233T5 (de) 2011-07-21
JP2011520609A (ja) 2011-07-21
US8844909B2 (en) 2014-09-30
CN102036742A (zh) 2011-04-27
US20140357734A1 (en) 2014-12-04
CN104722239A (zh) 2015-06-24
CN102036742B (zh) 2015-02-11
TW201004707A (en) 2010-02-01
WO2009143056A1 (en) 2009-11-26
US20110180148A1 (en) 2011-07-28

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