KR20090127041A - 기판 검사 장치 - Google Patents

기판 검사 장치 Download PDF

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Publication number
KR20090127041A
KR20090127041A KR1020090017455A KR20090017455A KR20090127041A KR 20090127041 A KR20090127041 A KR 20090127041A KR 1020090017455 A KR1020090017455 A KR 1020090017455A KR 20090017455 A KR20090017455 A KR 20090017455A KR 20090127041 A KR20090127041 A KR 20090127041A
Authority
KR
South Korea
Prior art keywords
lens
line sensor
led
ccd line
board
Prior art date
Application number
KR1020090017455A
Other languages
English (en)
Korean (ko)
Inventor
야스오 미즈타
Original Assignee
다이니폰 스크린 세이조우 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이니폰 스크린 세이조우 가부시키가이샤 filed Critical 다이니폰 스크린 세이조우 가부시키가이샤
Publication of KR20090127041A publication Critical patent/KR20090127041A/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/16—Inspection; Monitoring; Aligning
    • H05K2203/162—Testing a finished product, e.g. heat cycle testing of solder joints

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Led Device Packages (AREA)
KR1020090017455A 2008-06-05 2009-03-02 기판 검사 장치 KR20090127041A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2008-147557 2008-06-05
JP2008147557A JP5395369B2 (ja) 2008-06-05 2008-06-05 基板検査装置

Publications (1)

Publication Number Publication Date
KR20090127041A true KR20090127041A (ko) 2009-12-09

Family

ID=41542366

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090017455A KR20090127041A (ko) 2008-06-05 2009-03-02 기판 검사 장치

Country Status (3)

Country Link
JP (1) JP5395369B2 (ja)
KR (1) KR20090127041A (ja)
TW (1) TW200951422A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101182822B1 (ko) * 2011-03-29 2012-09-13 삼성전자주식회사 발광소자 검사장치 및 방법
TWI596318B (zh) * 2016-01-13 2017-08-21 德律科技股份有限公司 光學測量系統以及光學成像系統

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62103545A (ja) * 1985-10-30 1987-05-14 Nissan Motor Co Ltd 鮮映性測定方法
JP2562299Y2 (ja) * 1992-06-05 1998-02-10 大日本スクリーン製造株式会社 画像読取装置用の照明装置
JPH09236410A (ja) * 1996-02-29 1997-09-09 Idec Izumi Corp 被検査対象検出装置
JP3570815B2 (ja) * 1996-04-26 2004-09-29 松下電器産業株式会社 部品実装機用画像撮像装置
JPH11237850A (ja) * 1998-02-23 1999-08-31 Nokeg & G Opt Electronics Kk Ｌｅｄ表示装置
JP2000153601A (ja) * 1998-11-19 2000-06-06 Toshiba Mach Co Ltd 印刷物監視装置
JP3634985B2 (ja) * 1999-08-26 2005-03-30 住友大阪セメント株式会社 光学的表面検査機構及び光学的表面検査装置
JP2001242090A (ja) * 2000-02-28 2001-09-07 Nkk Corp 表面検査装置
JP3686329B2 (ja) * 2000-08-22 2005-08-24 シーシーエス株式会社 表面検査用照明装置及び表面検査装置
JP3769670B2 (ja) * 2002-02-18 2006-04-26 日本電気株式会社 多層配線構造
JP4222764B2 (ja) * 2002-02-18 2009-02-12 シーシーエス株式会社 検査用照明装置
JP3927878B2 (ja) * 2002-04-16 2007-06-13 シーシーエス株式会社 検査等に用いる照明装置
JP2004101311A (ja) * 2002-09-09 2004-04-02 Matsushita Electric Ind Co Ltd ラインセンサカメラ用の照明装置および照明方法
JP2005337957A (ja) * 2004-05-28 2005-12-08 Dainippon Screen Mfg Co Ltd 基板検査装置
JP2006275836A (ja) * 2005-03-30 2006-10-12 Dainippon Screen Mfg Co Ltd 基板検査装置
TW200702656A (en) * 2005-05-25 2007-01-16 Olympus Corp Surface defect inspection apparatus
JP2008096430A (ja) * 2006-09-13 2008-04-24 Hitachi High-Technologies Corp 欠陥検査方法およびその装置

Also Published As

Publication number Publication date
JP5395369B2 (ja) 2014-01-22
JP2009294061A (ja) 2009-12-17
TW200951422A (en) 2009-12-16

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application
J201 Request for trial against refusal decision
J301 Trial decision

Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20111024

Effective date: 20130318