KR20070121070A - 기판 노광 방법 - Google Patents

기판 노광 방법 Download PDF

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Publication number
KR20070121070A
KR20070121070A KR1020060055653A KR20060055653A KR20070121070A KR 20070121070 A KR20070121070 A KR 20070121070A KR 1020060055653 A KR1020060055653 A KR 1020060055653A KR 20060055653 A KR20060055653 A KR 20060055653A KR 20070121070 A KR20070121070 A KR 20070121070A
Authority
KR
South Korea
Prior art keywords
mask
substrate
exposure
stage
region
Prior art date
Application number
KR1020060055653A
Other languages
English (en)
Korean (ko)
Inventor
민현규
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR1020060055653A priority Critical patent/KR20070121070A/ko
Priority to JP2007155846A priority patent/JP2008003587A/ja
Publication of KR20070121070A publication Critical patent/KR20070121070A/ko

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020060055653A 2006-06-21 2006-06-21 기판 노광 방법 KR20070121070A (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020060055653A KR20070121070A (ko) 2006-06-21 2006-06-21 기판 노광 방법
JP2007155846A JP2008003587A (ja) 2006-06-21 2007-06-13 基板露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060055653A KR20070121070A (ko) 2006-06-21 2006-06-21 기판 노광 방법

Publications (1)

Publication Number Publication Date
KR20070121070A true KR20070121070A (ko) 2007-12-27

Family

ID=39007962

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060055653A KR20070121070A (ko) 2006-06-21 2006-06-21 기판 노광 방법

Country Status (2)

Country Link
JP (1) JP2008003587A (ja)
KR (1) KR20070121070A (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4144059B2 (ja) * 1998-01-27 2008-09-03 株式会社ニコン 走査型露光装置
JP2001291663A (ja) * 2000-01-31 2001-10-19 Nikon Corp 露光方法及び装置、ステージモジュール、露光装置の製造方法、並びにデバイス製造方法
JP2002099097A (ja) * 2000-09-25 2002-04-05 Nikon Corp 走査露光方法および走査型露光装置
JP3387907B2 (ja) * 2000-11-06 2003-03-17 株式会社日立製作所 半導体装置の製造方法
JP4405241B2 (ja) * 2002-11-19 2010-01-27 株式会社 液晶先端技術開発センター 液晶ディスプレイ用ガラス基板の露光方法および露光装置ならびに処理装置
JP2004172470A (ja) * 2002-11-21 2004-06-17 Nikon Corp ブラインド駆動方法と照明領域規制装置および走査型露光方法並びに走査型露光装置
JP2006318954A (ja) * 2005-05-10 2006-11-24 Nikon Corp 露光装置及び露光方法

Also Published As

Publication number Publication date
JP2008003587A (ja) 2008-01-10

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
N231 Notification of change of applicant
E601 Decision to refuse application