KR20060086794A - 글라스 기판 등의 반송시스템 - Google Patents
글라스 기판 등의 반송시스템 Download PDFInfo
- Publication number
- KR20060086794A KR20060086794A KR1020050039833A KR20050039833A KR20060086794A KR 20060086794 A KR20060086794 A KR 20060086794A KR 1020050039833 A KR1020050039833 A KR 1020050039833A KR 20050039833 A KR20050039833 A KR 20050039833A KR 20060086794 A KR20060086794 A KR 20060086794A
- Authority
- KR
- South Korea
- Prior art keywords
- conveyor
- exchanger
- receiving
- cassette
- work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 75
- 239000011521 glass Substances 0.000 title claims abstract description 31
- 238000004519 manufacturing process Methods 0.000 claims abstract description 37
- 238000003860 storage Methods 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims description 21
- 238000007789 sealing Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 description 16
- 230000003028 elevating effect Effects 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 9
- 238000011084 recovery Methods 0.000 description 8
- 238000005192 partition Methods 0.000 description 7
- 230000003749 cleanliness Effects 0.000 description 6
- 238000005401 electroluminescence Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 240000006394 Sorghum bicolor Species 0.000 description 1
- 235000011684 Sorghum saccharatum Nutrition 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/34—Devices for discharging articles or materials from conveyor
- B65G47/46—Devices for discharging articles or materials from conveyor and distributing, e.g. automatically, to desired points
- B65G47/48—Devices for discharging articles or materials from conveyor and distributing, e.g. automatically, to desired points according to bodily destination marks on either articles or load-carriers
- B65G47/49—Devices for discharging articles or materials from conveyor and distributing, e.g. automatically, to desired points according to bodily destination marks on either articles or load-carriers without bodily contact between article or load carrier and automatic control device, e.g. the destination marks being electrically or electronically detected
- B65G47/496—Devices for discharging articles or materials from conveyor and distributing, e.g. automatically, to desired points according to bodily destination marks on either articles or load-carriers without bodily contact between article or load carrier and automatic control device, e.g. the destination marks being electrically or electronically detected by use of magnetic responsive means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/68—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices adapted to receive articles arriving in one layer from one conveyor lane and to transfer them in individual layers to more than one conveyor lane or to one broader conveyor lane, or vice versa, e.g. combining the flows of articles conveyed by more than one conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Intermediate Stations On Conveyors (AREA)
- Warehouses Or Storage Devices (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2005-00018093 | 2005-01-26 | ||
JP2005018093A JP2006206218A (ja) | 2005-01-26 | 2005-01-26 | ガラス基板等の搬送システム |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20060086794A true KR20060086794A (ko) | 2006-08-01 |
Family
ID=36843760
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050039833A Withdrawn KR20060086794A (ko) | 2005-01-26 | 2005-05-12 | 글라스 기판 등의 반송시스템 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2006206218A (enrdf_load_stackoverflow) |
KR (1) | KR20060086794A (enrdf_load_stackoverflow) |
CN (1) | CN1810607A (enrdf_load_stackoverflow) |
TW (1) | TW200626458A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101891063A (zh) * | 2010-07-14 | 2010-11-24 | 深圳市华星光电技术有限公司 | 产线分流输送架构及其横移输送带平台 |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4586790B2 (ja) * | 2006-10-11 | 2010-11-24 | 株式会社ダイフク | 板状体処理設備 |
JP4765986B2 (ja) * | 2007-03-23 | 2011-09-07 | 村田機械株式会社 | 搬送システム |
KR20090049169A (ko) * | 2007-11-13 | 2009-05-18 | 세메스 주식회사 | 구동 자력 부재와, 이를 이용한 기판 이송 유닛 및 기판처리 장치 |
CN102107781B (zh) * | 2009-12-23 | 2013-06-19 | 株式会社太星技研 | 平板玻璃移送装置 |
JP5077718B2 (ja) * | 2010-04-12 | 2012-11-21 | 株式会社ダイフク | 搬送装置 |
CN102320472B (zh) * | 2011-06-03 | 2013-07-10 | 深圳市华星光电技术有限公司 | 基板传送系统及传送方法 |
CN103010747B (zh) * | 2011-09-21 | 2016-04-20 | 瑞世达科技(厦门)有限公司 | 传送整合装置及其传送方法 |
CN103010698B (zh) * | 2012-12-24 | 2016-10-05 | 云南云铝涌鑫铝业有限公司 | 用于铝电解厂的气垫带式输送系统和具有其的铝电解厂 |
CN105668143B (zh) * | 2016-03-23 | 2017-08-25 | 北京轩宇智能科技有限公司 | 一种密封操作系统及其磁耦合式密封输料装置 |
CN106044243B (zh) * | 2016-07-08 | 2019-06-04 | 佛山格尼斯磁悬浮技术有限公司 | 面板立式输送装置 |
CN106241648A (zh) * | 2016-08-31 | 2016-12-21 | 苏州朗坤自动化设备有限公司 | 一种用于缔合设备的升降机构 |
CN108502543B (zh) * | 2017-02-28 | 2020-01-24 | 上海微电子装备(集团)股份有限公司 | 一种基板传输装置及方法 |
CN109230533B (zh) * | 2018-09-03 | 2024-03-19 | 郑州福耀玻璃有限公司 | 一种汽车玻璃不间断烘弯线 |
CN111216203A (zh) * | 2018-11-27 | 2020-06-02 | 临沂金座木业机械制造有限公司 | 一种多层板自动装卸生产线 |
CN111573189A (zh) * | 2019-07-19 | 2020-08-25 | 维嘉数控科技(苏州)有限公司 | Pcb板输送系统 |
CN111571313A (zh) * | 2019-07-19 | 2020-08-25 | 维嘉数控科技(苏州)有限公司 | Pcb板中转装置及pcb板输送系统 |
CN110482220A (zh) * | 2019-07-26 | 2019-11-22 | 蚌埠凯盛工程技术有限公司 | 一种玻璃基板存储工艺、装置及应用 |
CN115259017B (zh) * | 2021-04-29 | 2023-12-19 | 法博智能移动股份有限公司 | 载物架及含该载物架的移动式顶升输送机 |
CN115447931A (zh) * | 2022-03-28 | 2022-12-09 | 苏州维嘉科技股份有限公司 | 自动加工生产线 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60153308A (ja) * | 1984-01-21 | 1985-08-12 | Fujitsu Ltd | プリント板給排装置 |
JPH03106724A (ja) * | 1989-09-20 | 1991-05-07 | Fujitsu Ltd | クリーンルーム用コンベアシステム |
JP2003040446A (ja) * | 2001-07-31 | 2003-02-13 | Sumitomo Precision Prod Co Ltd | 基板処理装置 |
KR100711317B1 (ko) * | 2002-07-22 | 2007-05-10 | 다이니폰 인사츠 가부시키가이샤 | 제조라인 시스템 및 그 시스템에서 쓰이는 자동창고 |
JP4120009B2 (ja) * | 2003-03-13 | 2008-07-16 | 株式会社エフ・イー・シー | 磁着筒付回転軸を用いた搬送装置 |
-
2005
- 2005-01-26 JP JP2005018093A patent/JP2006206218A/ja active Pending
- 2005-05-12 KR KR1020050039833A patent/KR20060086794A/ko not_active Withdrawn
- 2005-05-16 CN CNA2005100702950A patent/CN1810607A/zh active Pending
- 2005-05-31 TW TW094117828A patent/TW200626458A/zh not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101891063A (zh) * | 2010-07-14 | 2010-11-24 | 深圳市华星光电技术有限公司 | 产线分流输送架构及其横移输送带平台 |
CN101891063B (zh) * | 2010-07-14 | 2011-08-31 | 深圳市华星光电技术有限公司 | 产线分流输送架构及其横移输送带平台 |
Also Published As
Publication number | Publication date |
---|---|
CN1810607A (zh) | 2006-08-02 |
TW200626458A (en) | 2006-08-01 |
TWI295269B (enrdf_load_stackoverflow) | 2008-04-01 |
JP2006206218A (ja) | 2006-08-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR20060086794A (ko) | 글라스 기판 등의 반송시스템 | |
KR100555620B1 (ko) | 기판 운반시스템 및 운반방법 | |
JP4436689B2 (ja) | ガラス基板の搬送システム | |
KR101716524B1 (ko) | 기판 컨테이너 보관 시스템 | |
JP2004284772A (ja) | 基板搬送システム | |
US20100080672A1 (en) | Direct loading to and from a conveyor system | |
TWI430932B (zh) | The workpiece is moved into the system and the handling device | |
JP4615015B2 (ja) | コンテナ搬送システム | |
KR20120050931A (ko) | 기판 컨테이너 보관 시스템과 연결하기 위한 일체형 시스템 | |
US20050158152A1 (en) | Container conveying system | |
JP2010070328A (ja) | 被搬送物仕分け装置及び被搬送物仕分け方法 | |
US7806648B2 (en) | Transportation system and transportation method | |
CN106315210A (zh) | 一种片盒存取设备及方法 | |
JP2006111421A (ja) | 階間搬送装置 | |
JP5365303B2 (ja) | 走行車システム | |
KR20060102557A (ko) | 기판 반입출 장치, 기판 반송 방법 및 그 장치 | |
KR20050006445A (ko) | 평판디스플레이 제조라인의 카세트 이송장치 | |
CN114476487A (zh) | 一种平铺式升降回流精准定位输送装置 | |
JP2007134734A (ja) | 液晶基板の搬送装置 | |
JPH0415714Y2 (enrdf_load_stackoverflow) | ||
KR100596335B1 (ko) | 평판표시소자 제조장치 | |
JP2005145713A (ja) | 基板の搬送装置 | |
JP3322605B2 (ja) | トレー積重型ワークストッカ | |
HK1096362A (en) | Conveying system for glass substrates or the like | |
CN115458456A (zh) | 一种托篮转换装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20050512 |
|
PG1501 | Laying open of application | ||
PC1203 | Withdrawal of no request for examination | ||
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |