JPH0415714Y2 - - Google Patents

Info

Publication number
JPH0415714Y2
JPH0415714Y2 JP1984057086U JP5708684U JPH0415714Y2 JP H0415714 Y2 JPH0415714 Y2 JP H0415714Y2 JP 1984057086 U JP1984057086 U JP 1984057086U JP 5708684 U JP5708684 U JP 5708684U JP H0415714 Y2 JPH0415714 Y2 JP H0415714Y2
Authority
JP
Japan
Prior art keywords
carrier
main body
transport
mounting table
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984057086U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60169841U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5708684U priority Critical patent/JPS60169841U/ja
Publication of JPS60169841U publication Critical patent/JPS60169841U/ja
Application granted granted Critical
Publication of JPH0415714Y2 publication Critical patent/JPH0415714Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Pile Receivers (AREA)
  • Conveyance By Endless Belt Conveyors (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP5708684U 1984-04-18 1984-04-18 半導体ウエハの自動供給収納装置 Granted JPS60169841U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5708684U JPS60169841U (ja) 1984-04-18 1984-04-18 半導体ウエハの自動供給収納装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5708684U JPS60169841U (ja) 1984-04-18 1984-04-18 半導体ウエハの自動供給収納装置

Publications (2)

Publication Number Publication Date
JPS60169841U JPS60169841U (ja) 1985-11-11
JPH0415714Y2 true JPH0415714Y2 (enrdf_load_stackoverflow) 1992-04-08

Family

ID=30581283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5708684U Granted JPS60169841U (ja) 1984-04-18 1984-04-18 半導体ウエハの自動供給収納装置

Country Status (1)

Country Link
JP (1) JPS60169841U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62235108A (ja) * 1986-04-06 1987-10-15 Shinkawa Ltd バツフア装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611731Y2 (enrdf_load_stackoverflow) * 1979-11-26 1986-01-21
JPS5895636U (ja) * 1981-12-22 1983-06-29 キヤノン株式会社 ウエハ等の搬出入装置

Also Published As

Publication number Publication date
JPS60169841U (ja) 1985-11-11

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