JPS60169841U - 半導体ウエハの自動供給収納装置 - Google Patents

半導体ウエハの自動供給収納装置

Info

Publication number
JPS60169841U
JPS60169841U JP5708684U JP5708684U JPS60169841U JP S60169841 U JPS60169841 U JP S60169841U JP 5708684 U JP5708684 U JP 5708684U JP 5708684 U JP5708684 U JP 5708684U JP S60169841 U JPS60169841 U JP S60169841U
Authority
JP
Japan
Prior art keywords
carrier
semiconductor wafer
main body
mounting table
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5708684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0415714Y2 (enrdf_load_stackoverflow
Inventor
綾部　時宏
梅谷　正昭
Original Assignee
株式会社プラズマシステム
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社プラズマシステム filed Critical 株式会社プラズマシステム
Priority to JP5708684U priority Critical patent/JPS60169841U/ja
Publication of JPS60169841U publication Critical patent/JPS60169841U/ja
Application granted granted Critical
Publication of JPH0415714Y2 publication Critical patent/JPH0415714Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Pile Receivers (AREA)
  • Conveyance By Endless Belt Conveyors (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP5708684U 1984-04-18 1984-04-18 半導体ウエハの自動供給収納装置 Granted JPS60169841U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5708684U JPS60169841U (ja) 1984-04-18 1984-04-18 半導体ウエハの自動供給収納装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5708684U JPS60169841U (ja) 1984-04-18 1984-04-18 半導体ウエハの自動供給収納装置

Publications (2)

Publication Number Publication Date
JPS60169841U true JPS60169841U (ja) 1985-11-11
JPH0415714Y2 JPH0415714Y2 (enrdf_load_stackoverflow) 1992-04-08

Family

ID=30581283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5708684U Granted JPS60169841U (ja) 1984-04-18 1984-04-18 半導体ウエハの自動供給収納装置

Country Status (1)

Country Link
JP (1) JPS60169841U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62235108A (ja) * 1986-04-06 1987-10-15 Shinkawa Ltd バツフア装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681535U (enrdf_load_stackoverflow) * 1979-11-26 1981-07-01
JPS5895636U (ja) * 1981-12-22 1983-06-29 キヤノン株式会社 ウエハ等の搬出入装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681535U (enrdf_load_stackoverflow) * 1979-11-26 1981-07-01
JPS5895636U (ja) * 1981-12-22 1983-06-29 キヤノン株式会社 ウエハ等の搬出入装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62235108A (ja) * 1986-04-06 1987-10-15 Shinkawa Ltd バツフア装置

Also Published As

Publication number Publication date
JPH0415714Y2 (enrdf_load_stackoverflow) 1992-04-08

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