KR20050089154A - 유체 제어 장치 - Google Patents
유체 제어 장치 Download PDFInfo
- Publication number
- KR20050089154A KR20050089154A KR1020057009992A KR20057009992A KR20050089154A KR 20050089154 A KR20050089154 A KR 20050089154A KR 1020057009992 A KR1020057009992 A KR 1020057009992A KR 20057009992 A KR20057009992 A KR 20057009992A KR 20050089154 A KR20050089154 A KR 20050089154A
- Authority
- KR
- South Korea
- Prior art keywords
- passage
- block
- line
- lines
- fluid control
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K13/00—Other constructional types of cut-off apparatus; Arrangements for cutting-off
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Abstract
Description
Claims (1)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002351025A JP2004183771A (ja) | 2002-12-03 | 2002-12-03 | 流体制御装置 |
JPJP-P-2002-00351025 | 2002-12-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050089154A true KR20050089154A (ko) | 2005-09-07 |
KR101001238B1 KR101001238B1 (ko) | 2010-12-17 |
Family
ID=32463129
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020057009992A KR101001238B1 (ko) | 2002-12-03 | 2003-10-31 | 유체 제어 장치 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7152629B2 (ko) |
EP (1) | EP1568926A4 (ko) |
JP (1) | JP2004183771A (ko) |
KR (1) | KR101001238B1 (ko) |
CN (1) | CN100439779C (ko) |
TW (1) | TWI313888B (ko) |
WO (1) | WO2004051124A1 (ko) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101198815B (zh) * | 2005-08-10 | 2010-05-12 | 株式会社富士金 | 流体控制装置 |
US7575616B2 (en) * | 2006-02-10 | 2009-08-18 | Entegris, Inc. | Low-profile surface mount filter |
JP5096696B2 (ja) * | 2006-03-02 | 2012-12-12 | サーパス工業株式会社 | 流体機器ユニット構造 |
US8196480B1 (en) * | 2006-04-03 | 2012-06-12 | A+ Manufacturing, Llc | Modular sample conditioning system |
CN101438091B (zh) * | 2006-06-02 | 2012-05-23 | 喜开理株式会社 | 气体供给单元和气体供给系统 |
JP2007327542A (ja) * | 2006-06-07 | 2007-12-20 | Surpass Kogyo Kk | 流体機器ユニット構造 |
WO2008024683A1 (en) * | 2006-08-25 | 2008-02-28 | Pall Corporation | Fluid assemblies comprising a purification element |
US7806143B2 (en) * | 2007-06-11 | 2010-10-05 | Lam Research Corporation | Flexible manifold for integrated gas system gas panels |
US20090114295A1 (en) * | 2007-11-06 | 2009-05-07 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
JP4944049B2 (ja) * | 2008-01-31 | 2012-05-30 | シーケーディ株式会社 | 薬液供給装置 |
US20100282993A1 (en) * | 2009-05-11 | 2010-11-11 | Timothy Robert Kerrigan | Continuous Flow Bypass Manifold |
US9233347B2 (en) * | 2010-02-22 | 2016-01-12 | Fujikin Incorporated | Mixed gas supply device |
US10107407B2 (en) * | 2010-09-28 | 2018-10-23 | Parker-Hannifin Corporation | Modular valve manifold system |
JP5785813B2 (ja) * | 2011-08-10 | 2015-09-30 | 株式会社フジキン | 流体制御装置 |
US9188990B2 (en) * | 2011-10-05 | 2015-11-17 | Horiba Stec, Co., Ltd. | Fluid mechanism, support member constituting fluid mechanism and fluid control system |
JP5868219B2 (ja) * | 2012-02-29 | 2016-02-24 | 株式会社フジキン | 流体制御装置 |
JP6012247B2 (ja) * | 2012-04-27 | 2016-10-25 | 株式会社フジキン | 流体制御装置 |
JP6147113B2 (ja) * | 2013-06-27 | 2017-06-14 | 株式会社フジキン | 流体制御装置用継手および流体制御装置 |
JP6175300B2 (ja) * | 2013-07-17 | 2017-08-02 | 株式会社フジキン | 流体制御装置用継手部材および流体制御装置 |
JP6216389B2 (ja) * | 2013-10-31 | 2017-10-18 | 株式会社フジキン | 圧力式流量制御装置 |
JP6186275B2 (ja) * | 2013-12-27 | 2017-08-23 | 株式会社フジキン | 流体制御装置 |
KR20160120336A (ko) * | 2014-07-29 | 2016-10-17 | 토쿠시마 대학 | 인라인형 농도 계측 장치 |
JP1528532S (ko) * | 2014-09-30 | 2015-07-13 | ||
US9639094B2 (en) * | 2014-11-12 | 2017-05-02 | Michael D. Palmer | Electronic pneumatic pressure controller |
WO2016114266A1 (ja) * | 2015-01-16 | 2016-07-21 | 株式会社キッツエスシーティー | ブロック弁と原料容器用ブロック弁 |
JP1539278S (ko) * | 2015-03-31 | 2015-11-30 | ||
US11357966B2 (en) | 2015-04-23 | 2022-06-14 | B. Braun Medical Inc. | Compounding device, system, kit, software, and method |
JP6681630B2 (ja) * | 2016-06-21 | 2020-04-15 | 株式会社フジキン | 流体制御装置 |
JP2018084255A (ja) * | 2016-11-21 | 2018-05-31 | 東京エレクトロン株式会社 | 流体制御装置 |
US20200284367A1 (en) * | 2017-03-28 | 2020-09-10 | Fujikin Incorporated | Joint block and fluid control system using same |
US20200248310A1 (en) * | 2017-08-31 | 2020-08-06 | Fujikin Incorporated | Joint block and manufacturing method thereof |
WO2019087838A1 (ja) * | 2017-10-31 | 2019-05-09 | 株式会社フジキン | バルブ装置 |
JP7372664B2 (ja) | 2019-09-30 | 2023-11-01 | 株式会社フジキン | 継手ブロックアセンブリおよび流体制御装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100232112B1 (ko) * | 1996-01-05 | 1999-12-01 | 아마노 시게루 | 가스공급유닛 |
JP3997337B2 (ja) * | 1996-11-20 | 2007-10-24 | 忠弘 大見 | 流体制御装置 |
JP3997338B2 (ja) * | 1997-02-14 | 2007-10-24 | 忠弘 大見 | 流体制御装置 |
US6152175A (en) * | 1997-06-06 | 2000-11-28 | Ckd Corporation | Process gas supply unit |
US6068016A (en) * | 1997-09-25 | 2000-05-30 | Applied Materials, Inc | Modular fluid flow system with integrated pump-purge |
JP4378553B2 (ja) * | 1997-10-13 | 2009-12-09 | 忠弘 大見 | 流体制御装置 |
JP4110304B2 (ja) * | 1998-06-30 | 2008-07-02 | 株式会社フジキン | 流体制御装置および流体制御装置組立て方法 |
JP3921565B2 (ja) * | 1998-07-10 | 2007-05-30 | 株式会社フジキン | 流体制御装置 |
JP2000145979A (ja) * | 1998-11-16 | 2000-05-26 | Fujikin Inc | 下段部材の固定装置およびこれを備えた流体制御装置 |
US6298881B1 (en) | 1999-03-16 | 2001-10-09 | Shigemoto & Annett Ii, Inc. | Modular fluid handling assembly and modular fluid handling units with double containment |
AU6620600A (en) * | 1999-09-01 | 2001-03-26 | Silicon Valley Group, Inc. | Layered block fluid delivery system |
JP4238453B2 (ja) * | 2000-03-10 | 2009-03-18 | 株式会社東芝 | 流体制御装置 |
EP1132669B1 (en) * | 2000-03-10 | 2004-10-13 | Tokyo Electron Limited | Fluid control apparatus |
JP3482601B2 (ja) * | 2000-06-30 | 2003-12-22 | 東京エレクトロン株式会社 | 流体制御装置 |
JP2002089798A (ja) * | 2000-09-11 | 2002-03-27 | Ulvac Japan Ltd | 流体制御装置およびこれを用いたガス処理装置 |
JP2002349797A (ja) * | 2001-05-23 | 2002-12-04 | Fujikin Inc | 流体制御装置 |
US6953048B2 (en) * | 2001-09-07 | 2005-10-11 | Circle Seal Controls, Inc. | Modular surface-mount fluid-flow system |
US6874538B2 (en) * | 2003-03-26 | 2005-04-05 | Kevin S. Bennett | Fluid delivery system |
US7004199B1 (en) * | 2004-08-04 | 2006-02-28 | Fujikin Incorporated | Fluid control apparatus |
-
2002
- 2002-12-03 JP JP2002351025A patent/JP2004183771A/ja active Pending
-
2003
- 2003-10-31 KR KR1020057009992A patent/KR101001238B1/ko active IP Right Grant
- 2003-10-31 CN CNB2003801012294A patent/CN100439779C/zh not_active Expired - Fee Related
- 2003-10-31 EP EP03770066A patent/EP1568926A4/en not_active Withdrawn
- 2003-10-31 WO PCT/JP2003/013976 patent/WO2004051124A1/ja active Application Filing
- 2003-10-31 US US10/537,093 patent/US7152629B2/en not_active Expired - Lifetime
- 2003-12-01 TW TW92133631A patent/TWI313888B/zh active
Also Published As
Publication number | Publication date |
---|---|
US7152629B2 (en) | 2006-12-26 |
EP1568926A4 (en) | 2007-03-28 |
TW200416796A (en) | 2004-09-01 |
TWI313888B (en) | 2009-08-21 |
JP2004183771A (ja) | 2004-07-02 |
CN1703596A (zh) | 2005-11-30 |
CN100439779C (zh) | 2008-12-03 |
EP1568926A1 (en) | 2005-08-31 |
KR101001238B1 (ko) | 2010-12-17 |
WO2004051124A1 (ja) | 2004-06-17 |
US20060048830A1 (en) | 2006-03-09 |
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