KR20050047079A - 공용 기준 레그를 갖는 가변 저항기 센서 - Google Patents

공용 기준 레그를 갖는 가변 저항기 센서 Download PDF

Info

Publication number
KR20050047079A
KR20050047079A KR1020057001009A KR20057001009A KR20050047079A KR 20050047079 A KR20050047079 A KR 20050047079A KR 1020057001009 A KR1020057001009 A KR 1020057001009A KR 20057001009 A KR20057001009 A KR 20057001009A KR 20050047079 A KR20050047079 A KR 20050047079A
Authority
KR
South Korea
Prior art keywords
output
sensor
circuit
amplifier
voltage divider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020057001009A
Other languages
English (en)
Korean (ko)
Inventor
존 마이클 룰르
Original Assignee
셀레리티 그룹 아이엔씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 셀레리티 그룹 아이엔씨 filed Critical 셀레리티 그룹 아이엔씨
Publication of KR20050047079A publication Critical patent/KR20050047079A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
KR1020057001009A 2002-07-19 2003-07-16 공용 기준 레그를 갖는 가변 저항기 센서 Withdrawn KR20050047079A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US39713902P 2002-07-19 2002-07-19
US60/397,139 2002-07-19
US43620702P 2002-12-23 2002-12-23
US60/436,207 2002-12-23

Publications (1)

Publication Number Publication Date
KR20050047079A true KR20050047079A (ko) 2005-05-19

Family

ID=30772991

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057001009A Withdrawn KR20050047079A (ko) 2002-07-19 2003-07-16 공용 기준 레그를 갖는 가변 저항기 센서

Country Status (8)

Country Link
US (2) US6845659B2 (enExample)
EP (1) EP1523660A1 (enExample)
JP (1) JP2005534014A (enExample)
KR (1) KR20050047079A (enExample)
CN (1) CN100344941C (enExample)
AU (1) AU2003256591A1 (enExample)
TW (1) TWI222514B (enExample)
WO (1) WO2004010091A1 (enExample)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1187472B1 (en) * 2000-02-07 2019-04-03 Sony Corporation Image processor and image processing method and recorded medium
US7222029B2 (en) * 2004-07-08 2007-05-22 Celerity, Inc. Attitude insensitive flow device system and method
US7409871B2 (en) * 2006-03-16 2008-08-12 Celerity, Inc. Mass flow meter or controller with inclination sensor
US7535235B2 (en) * 2006-09-04 2009-05-19 Fluke Corporation Integrated digital thermal air flow sensor
US20090277871A1 (en) 2008-03-05 2009-11-12 Axcelis Technologies, Inc. Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process
US7748268B2 (en) * 2008-07-13 2010-07-06 Brooks Instrument, Llc Thermal flow meter
JP4274385B1 (ja) * 2008-07-28 2009-06-03 株式会社オーバル 流量計における温度計測回路
US7905139B2 (en) * 2008-08-25 2011-03-15 Brooks Instrument, Llc Mass flow controller with improved dynamic
KR101114317B1 (ko) * 2009-03-23 2012-02-14 에스케이이노베이션 주식회사 배터리 전압의 영향을 받지 않는 절연저항 측정회로
CN101976086A (zh) * 2010-10-29 2011-02-16 中国兵器工业集团第二一四研究所苏州研发中心 氧传感器加热控制方法及采用该方法的加热控制电路
US20120197446A1 (en) * 2010-12-01 2012-08-02 Glaudel Stephen P Advanced feed-forward valve-control for a mass flow controller
US9072479B2 (en) * 2011-05-06 2015-07-07 Welch Allyn, Inc. Variable control for handheld device
US9485518B2 (en) 2011-05-27 2016-11-01 Sun Patent Trust Decoding method and apparatus with candidate motion vectors
CN104105623B (zh) * 2011-12-08 2017-06-23 住友电气工业株式会社 通信装置、车载通信系统和检查方法
DE102011090015B4 (de) * 2011-12-28 2023-12-28 Endress+Hauser SE+Co. KG Vorrichtung zur Bestimmung und/oder Überwachung mindestens einer Prozessgröße
US9182436B1 (en) 2012-01-05 2015-11-10 Sandia Corporation Passive absolute age and temperature history sensor
JP6426475B2 (ja) * 2012-03-07 2018-11-21 イリノイ トゥール ワークス インコーポレイティド 熱モデルを用いてｒｏｄ測定における熱に起因する誤差を最小にすることによって質量流量制御器または質量流量計における実時間補正のための減衰速度測定の精度を改善するためのシステムおよび方法
US9777862B2 (en) 2013-01-08 2017-10-03 Illinois Tool Works Inc. Force actuated control valve
EP2972127B1 (en) 2013-03-12 2019-12-18 Illinois Tool Works Inc. Turning vane
EP2972630B1 (en) 2013-03-12 2019-01-16 Illinois Tool Works Inc. Mass flow controller with near field communication and/or usb interface
JP6680669B2 (ja) * 2013-03-14 2020-04-15 イリノイ トゥール ワークス インコーポレイティド 質量流量制御器のバルブペデスタルを自動的に自己調整するシステム及び方法
US9291543B1 (en) 2014-06-23 2016-03-22 Sandia Corporation PC board mount corrosion sensitive sensor
JP6659692B2 (ja) 2014-12-04 2020-03-04 イリノイ トゥール ワークス インコーポレイティド ワイヤレス流量制限器
US10151772B2 (en) * 2015-01-23 2018-12-11 Embry-Riddle Aeronautical Univeristy, Inc. Hot wire anemometer
US20180120864A1 (en) 2015-05-07 2018-05-03 Illinois Tool Works Inc. Nonlinear control of mass flow controller devices using sliding mode
JP2019505922A (ja) 2016-01-22 2019-02-28 イリノイ トゥール ワークス インコーポレイティド 質量流量制御器上に記憶されるデータ値を動的に構成するシステム及び方法
ITUA20164320A1 (it) * 2016-06-13 2017-12-13 St Microelectronics Srl Ponte sensore con resistori commutati, sistema e procedimento corrispondenti
US10317482B2 (en) * 2016-11-19 2019-06-11 Nxp B.V. Resistive sensor frontend system having a resistive sensor circuit with an offset voltage source
US10927920B2 (en) 2017-10-04 2021-02-23 Illinois Tool Works, Inc Passive damping system for mass flow controller
CN107796456B (zh) * 2017-10-16 2020-02-18 东南大学 一种基于双检测模式的宽量程流量传感器及测量方法
US10345188B2 (en) * 2017-12-13 2019-07-09 Detec Systems Llc Scanning platform for locating breaches in roofing and waterproofing membranes with conductive surface
US11675374B2 (en) 2018-10-26 2023-06-13 Illinois Tool Works Inc. Mass flow controller with advanced zero trending diagnostics
US12379238B2 (en) 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
CN109444226B (zh) * 2018-11-10 2021-03-26 郑州迪邦科技有限公司 一种热导式sf6纯度检测仪调理电路
US12259739B2 (en) 2019-04-30 2025-03-25 Illinois Tool Works Inc. Advanced pressure based mass flow controllers and diagnostics
CN115452080B (zh) * 2022-08-08 2024-06-11 重庆川仪自动化股份有限公司 热式气体质量流量计信号线性化电路及方法

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4242741A (en) * 1979-01-19 1980-12-30 Shell Oil Company Floating shunt seismic amplifier
JPS5998217A (ja) 1982-11-26 1984-06-06 Fujikin:Kk 流量制御装置
US4672997A (en) 1984-10-29 1987-06-16 Btu Engineering Corporation Modular, self-diagnostic mass-flow controller and system
US4686450A (en) * 1986-04-04 1987-08-11 General Signal Corporation Fluid flow sensor
JPH0676897B2 (ja) 1986-05-27 1994-09-28 株式会社エステツク 熱式流量計
JP2631481B2 (ja) 1987-12-08 1997-07-16 株式会社 リンテック 質量流量計とその計測方法
US4843881A (en) * 1987-12-24 1989-07-04 Aalborg Instruments & Controls Fluid flow sensor system
JPH03156509A (ja) 1989-11-14 1991-07-04 Stec Kk マスフローコントローラ
WO1991019959A1 (en) 1990-06-14 1991-12-26 Unit Instruments, Inc. Thermal mass flow sensor
JP2791828B2 (ja) 1990-08-11 1998-08-27 株式会社エステック 熱式質量流量計
US5062446A (en) 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
DE4219551C2 (de) * 1991-06-13 1996-04-18 Mks Japan Inc Massenströmungssensor
US5141021A (en) 1991-09-06 1992-08-25 Stec Inc. Mass flow meter and mass flow controller
JP2692770B2 (ja) 1992-09-30 1997-12-17 シーケーディ株式会社 マスフローコントローラ流量検定システム
US6044701A (en) 1992-10-16 2000-04-04 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
US5441076A (en) 1992-12-11 1995-08-15 Tokyo Electron Limited Processing apparatus using gas
JPH0784650A (ja) 1993-07-23 1995-03-31 Hitachi Metals Ltd マスフローコントローラ、その運転方法及び電磁弁
US5461913A (en) 1994-06-23 1995-10-31 Mks Instruments, Inc. Differential current thermal mass flow transducer
US5660207A (en) 1994-12-29 1997-08-26 Tylan General, Inc. Flow controller, parts of flow controller, and related method
JP3229168B2 (ja) 1995-06-14 2001-11-12 日本エム・ケー・エス株式会社 流量検出装置
US5684245A (en) 1995-11-17 1997-11-04 Mks Instruments, Inc. Apparatus for mass flow measurement of a gas
US5693880A (en) 1996-06-14 1997-12-02 Mks Instruments, Inc. Heater with tapered heater density function for use with mass flowmeter
US5944048A (en) 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow
US5911238A (en) 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5865205A (en) 1997-04-17 1999-02-02 Applied Materials, Inc. Dynamic gas flow controller
JPH11183221A (ja) * 1997-12-19 1999-07-09 Hitachi Ltd 発熱抵抗体式空気流量測定装置
JP3831524B2 (ja) 1998-06-26 2006-10-11 株式会社堀場製作所 赤外線ガス分析計用流量検出素子とその製造方法
US6119710A (en) 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6595049B1 (en) 1999-06-18 2003-07-22 Mks Instruments, Inc. Thermal mass flow sensor with improved sensitivity and response time
US6449571B1 (en) 1999-07-09 2002-09-10 Mykrolis Corporation System and method for sensor response linearization
US6343617B1 (en) 1999-07-09 2002-02-05 Millipore Corporation System and method of operation of a digital mass flow controller
US6575027B1 (en) 1999-07-09 2003-06-10 Mykrolis Corporation Mass flow sensor interface circuit
US6404612B1 (en) 1999-07-10 2002-06-11 Mykrolis Corporation Method for system for driving a solenoid
US6445980B1 (en) 1999-07-10 2002-09-03 Mykrolis Corporation System and method for a variable gain proportional-integral (PI) controller
US6389364B1 (en) 1999-07-10 2002-05-14 Mykrolis Corporation System and method for a digital mass flow controller
KR100808727B1 (ko) 2000-02-14 2008-02-29 셀레리티 인크. 저항 평형 방법 및 그 장치
US6446504B1 (en) 2000-03-30 2002-09-10 Mks Instruments, Inc. Constant temperature gradient differential thermal mass flow sensor

Also Published As

Publication number Publication date
JP2005534014A (ja) 2005-11-10
US20040100289A1 (en) 2004-05-27
WO2004010091A1 (en) 2004-01-29
AU2003256591A1 (en) 2004-02-09
TW200406576A (en) 2004-05-01
US20050092077A1 (en) 2005-05-05
CN1675522A (zh) 2005-09-28
TWI222514B (en) 2004-10-21
US7082824B2 (en) 2006-08-01
US6845659B2 (en) 2005-01-25
CN100344941C (zh) 2007-10-24
EP1523660A1 (en) 2005-04-20

Similar Documents

Publication Publication Date Title
KR20050047079A (ko) 공용 기준 레그를 갖는 가변 저항기 센서
JP2005534014A5 (enExample)
US5461913A (en) Differential current thermal mass flow transducer
US5753815A (en) Thermo-sensitive flow sensor for measuring flow velocity and flow rate of a gas
KR920009696B1 (ko) 공기유량검출회로
US8909486B2 (en) Flow measuring device
KR100197032B1 (ko) 펄스출력형 열선식 공기유량계
US20060096305A1 (en) Fluid flowmeter and engine control system using the same
JP4515828B2 (ja) 発熱抵抗体式空気流量計
US20200304085A1 (en) Fully differential operational amplifier common mode current sensing feedback
US6386030B1 (en) Balanced bridge temperature regulator for an air-mass flow meter
JP3555013B2 (ja) 感熱式流量計
US7249516B2 (en) Method of operating a resistive heat-loss pressure sensor
JPS6122908B2 (enExample)
RU1812448C (ru) Устройство дл преобразовани температуры
JP2003315129A (ja) 熱式流量計測装置
US7360445B2 (en) Flow sensor
JPH1114415A (ja) 空気流量測定装置
EP1771711B1 (en) Method of operating a resistive heat-loss pressure sensor
SU1352215A1 (ru) Тепловой расходомер
JPH01245119A (ja) 熱線式流量測定装置
KR20020080137A (ko) 유량 계측용 센서 및 이를 이용한 질량유량제어장치 및 방법
JPS6013446B2 (ja) 気体流量測定装置
JPH10267718A (ja) 空気流量測定装置
JPH0143885B2 (enExample)

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20050119

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid