TWI222514B - Variable resistance sensor with common reference leg - Google Patents
Variable resistance sensor with common reference leg Download PDFInfo
- Publication number
- TWI222514B TWI222514B TW092119635A TW92119635A TWI222514B TW I222514 B TWI222514 B TW I222514B TW 092119635 A TW092119635 A TW 092119635A TW 92119635 A TW92119635 A TW 92119635A TW I222514 B TWI222514 B TW I222514B
- Authority
- TW
- Taiwan
- Prior art keywords
- circuit
- output
- signal
- sensor
- resistor
- Prior art date
Links
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US39713902P | 2002-07-19 | 2002-07-19 | |
| US43620702P | 2002-12-23 | 2002-12-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200406576A TW200406576A (en) | 2004-05-01 |
| TWI222514B true TWI222514B (en) | 2004-10-21 |
Family
ID=30772991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092119635A TWI222514B (en) | 2002-07-19 | 2003-07-18 | Variable resistance sensor with common reference leg |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US6845659B2 (enExample) |
| EP (1) | EP1523660A1 (enExample) |
| JP (1) | JP2005534014A (enExample) |
| KR (1) | KR20050047079A (enExample) |
| CN (1) | CN100344941C (enExample) |
| AU (1) | AU2003256591A1 (enExample) |
| TW (1) | TWI222514B (enExample) |
| WO (1) | WO2004010091A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI382163B (zh) * | 2008-07-28 | 2013-01-11 | Oval Corp | Flowmeter temperature measurement circuit |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
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| EP1187472B1 (en) * | 2000-02-07 | 2019-04-03 | Sony Corporation | Image processor and image processing method and recorded medium |
| US7222029B2 (en) * | 2004-07-08 | 2007-05-22 | Celerity, Inc. | Attitude insensitive flow device system and method |
| US7409871B2 (en) * | 2006-03-16 | 2008-08-12 | Celerity, Inc. | Mass flow meter or controller with inclination sensor |
| US7535235B2 (en) * | 2006-09-04 | 2009-05-19 | Fluke Corporation | Integrated digital thermal air flow sensor |
| US20090277871A1 (en) | 2008-03-05 | 2009-11-12 | Axcelis Technologies, Inc. | Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process |
| US7748268B2 (en) * | 2008-07-13 | 2010-07-06 | Brooks Instrument, Llc | Thermal flow meter |
| US7905139B2 (en) * | 2008-08-25 | 2011-03-15 | Brooks Instrument, Llc | Mass flow controller with improved dynamic |
| KR101114317B1 (ko) * | 2009-03-23 | 2012-02-14 | 에스케이이노베이션 주식회사 | 배터리 전압의 영향을 받지 않는 절연저항 측정회로 |
| CN101976086A (zh) * | 2010-10-29 | 2011-02-16 | 中国兵器工业集团第二一四研究所苏州研发中心 | 氧传感器加热控制方法及采用该方法的加热控制电路 |
| US20120197446A1 (en) * | 2010-12-01 | 2012-08-02 | Glaudel Stephen P | Advanced feed-forward valve-control for a mass flow controller |
| US9072479B2 (en) * | 2011-05-06 | 2015-07-07 | Welch Allyn, Inc. | Variable control for handheld device |
| US9485518B2 (en) | 2011-05-27 | 2016-11-01 | Sun Patent Trust | Decoding method and apparatus with candidate motion vectors |
| CN104105623B (zh) * | 2011-12-08 | 2017-06-23 | 住友电气工业株式会社 | 通信装置、车载通信系统和检查方法 |
| DE102011090015B4 (de) * | 2011-12-28 | 2023-12-28 | Endress+Hauser SE+Co. KG | Vorrichtung zur Bestimmung und/oder Überwachung mindestens einer Prozessgröße |
| US9182436B1 (en) | 2012-01-05 | 2015-11-10 | Sandia Corporation | Passive absolute age and temperature history sensor |
| JP6426475B2 (ja) * | 2012-03-07 | 2018-11-21 | イリノイ トゥール ワークス インコーポレイティド | 熱モデルを用いてｒｏｄ測定における熱に起因する誤差を最小にすることによって質量流量制御器または質量流量計における実時間補正のための減衰速度測定の精度を改善するためのシステムおよび方法 |
| US9777862B2 (en) | 2013-01-08 | 2017-10-03 | Illinois Tool Works Inc. | Force actuated control valve |
| EP2972127B1 (en) | 2013-03-12 | 2019-12-18 | Illinois Tool Works Inc. | Turning vane |
| EP2972630B1 (en) | 2013-03-12 | 2019-01-16 | Illinois Tool Works Inc. | Mass flow controller with near field communication and/or usb interface |
| JP6680669B2 (ja) * | 2013-03-14 | 2020-04-15 | イリノイ トゥール ワークス インコーポレイティド | 質量流量制御器のバルブペデスタルを自動的に自己調整するシステム及び方法 |
| US9291543B1 (en) | 2014-06-23 | 2016-03-22 | Sandia Corporation | PC board mount corrosion sensitive sensor |
| JP6659692B2 (ja) | 2014-12-04 | 2020-03-04 | イリノイ トゥール ワークス インコーポレイティド | ワイヤレス流量制限器 |
| US10151772B2 (en) * | 2015-01-23 | 2018-12-11 | Embry-Riddle Aeronautical Univeristy, Inc. | Hot wire anemometer |
| US20180120864A1 (en) | 2015-05-07 | 2018-05-03 | Illinois Tool Works Inc. | Nonlinear control of mass flow controller devices using sliding mode |
| JP2019505922A (ja) | 2016-01-22 | 2019-02-28 | イリノイ トゥール ワークス インコーポレイティド | 質量流量制御器上に記憶されるデータ値を動的に構成するシステム及び方法 |
| ITUA20164320A1 (it) * | 2016-06-13 | 2017-12-13 | St Microelectronics Srl | Ponte sensore con resistori commutati, sistema e procedimento corrispondenti |
| US10317482B2 (en) * | 2016-11-19 | 2019-06-11 | Nxp B.V. | Resistive sensor frontend system having a resistive sensor circuit with an offset voltage source |
| US10927920B2 (en) | 2017-10-04 | 2021-02-23 | Illinois Tool Works, Inc | Passive damping system for mass flow controller |
| CN107796456B (zh) * | 2017-10-16 | 2020-02-18 | 东南大学 | 一种基于双检测模式的宽量程流量传感器及测量方法 |
| US10345188B2 (en) * | 2017-12-13 | 2019-07-09 | Detec Systems Llc | Scanning platform for locating breaches in roofing and waterproofing membranes with conductive surface |
| US11675374B2 (en) | 2018-10-26 | 2023-06-13 | Illinois Tool Works Inc. | Mass flow controller with advanced zero trending diagnostics |
| US12379238B2 (en) | 2018-10-26 | 2025-08-05 | Illinois Tool Works Inc. | Mass flow controller with advanced back streaming diagnostics |
| CN109444226B (zh) * | 2018-11-10 | 2021-03-26 | 郑州迪邦科技有限公司 | 一种热导式sf6纯度检测仪调理电路 |
| US12259739B2 (en) | 2019-04-30 | 2025-03-25 | Illinois Tool Works Inc. | Advanced pressure based mass flow controllers and diagnostics |
| CN115452080B (zh) * | 2022-08-08 | 2024-06-11 | 重庆川仪自动化股份有限公司 | 热式气体质量流量计信号线性化电路及方法 |
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| US4242741A (en) * | 1979-01-19 | 1980-12-30 | Shell Oil Company | Floating shunt seismic amplifier |
| JPS5998217A (ja) | 1982-11-26 | 1984-06-06 | Fujikin:Kk | 流量制御装置 |
| US4672997A (en) | 1984-10-29 | 1987-06-16 | Btu Engineering Corporation | Modular, self-diagnostic mass-flow controller and system |
| US4686450A (en) * | 1986-04-04 | 1987-08-11 | General Signal Corporation | Fluid flow sensor |
| JPH0676897B2 (ja) | 1986-05-27 | 1994-09-28 | 株式会社エステツク | 熱式流量計 |
| JP2631481B2 (ja) | 1987-12-08 | 1997-07-16 | 株式会社 リンテック | 質量流量計とその計測方法 |
| US4843881A (en) * | 1987-12-24 | 1989-07-04 | Aalborg Instruments & Controls | Fluid flow sensor system |
| JPH03156509A (ja) | 1989-11-14 | 1991-07-04 | Stec Kk | マスフローコントローラ |
| WO1991019959A1 (en) | 1990-06-14 | 1991-12-26 | Unit Instruments, Inc. | Thermal mass flow sensor |
| JP2791828B2 (ja) | 1990-08-11 | 1998-08-27 | 株式会社エステック | 熱式質量流量計 |
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| US5141021A (en) | 1991-09-06 | 1992-08-25 | Stec Inc. | Mass flow meter and mass flow controller |
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-
2003
- 2003-07-16 US US10/622,004 patent/US6845659B2/en not_active Expired - Lifetime
- 2003-07-16 EP EP03765648A patent/EP1523660A1/en not_active Withdrawn
- 2003-07-16 JP JP2004523492A patent/JP2005534014A/ja active Pending
- 2003-07-16 KR KR1020057001009A patent/KR20050047079A/ko not_active Withdrawn
- 2003-07-16 WO PCT/US2003/022337 patent/WO2004010091A1/en not_active Ceased
- 2003-07-16 CN CNB03819614XA patent/CN100344941C/zh not_active Expired - Fee Related
- 2003-07-16 AU AU2003256591A patent/AU2003256591A1/en not_active Abandoned
- 2003-07-18 TW TW092119635A patent/TWI222514B/zh not_active IP Right Cessation
-
2004
- 2004-10-29 US US10/978,156 patent/US7082824B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI382163B (zh) * | 2008-07-28 | 2013-01-11 | Oval Corp | Flowmeter temperature measurement circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005534014A (ja) | 2005-11-10 |
| KR20050047079A (ko) | 2005-05-19 |
| US20040100289A1 (en) | 2004-05-27 |
| WO2004010091A1 (en) | 2004-01-29 |
| AU2003256591A1 (en) | 2004-02-09 |
| TW200406576A (en) | 2004-05-01 |
| US20050092077A1 (en) | 2005-05-05 |
| CN1675522A (zh) | 2005-09-28 |
| US7082824B2 (en) | 2006-08-01 |
| US6845659B2 (en) | 2005-01-25 |
| CN100344941C (zh) | 2007-10-24 |
| EP1523660A1 (en) | 2005-04-20 |
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