CN100344941C - 具有公共参考臂的可变电阻传感器 - Google Patents

具有公共参考臂的可变电阻传感器 Download PDF

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Publication number
CN100344941C
CN100344941C CNB03819614XA CN03819614A CN100344941C CN 100344941 C CN100344941 C CN 100344941C CN B03819614X A CNB03819614X A CN B03819614XA CN 03819614 A CN03819614 A CN 03819614A CN 100344941 C CN100344941 C CN 100344941C
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CN
China
Prior art keywords
output
amplifier
sensor
voltage divider
circuit
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Expired - Fee Related
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CNB03819614XA
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English (en)
Chinese (zh)
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CN1675522A (zh
Inventor
约翰·迈克·卢尔
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Entegris Inc
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Entegris Inc
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Publication of CN1675522A publication Critical patent/CN1675522A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CNB03819614XA 2002-07-19 2003-07-16 具有公共参考臂的可变电阻传感器 Expired - Fee Related CN100344941C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US39713902P 2002-07-19 2002-07-19
US60/397,139 2002-07-19
US43620702P 2002-12-23 2002-12-23
US60/436,207 2002-12-23

Publications (2)

Publication Number Publication Date
CN1675522A CN1675522A (zh) 2005-09-28
CN100344941C true CN100344941C (zh) 2007-10-24

Family

ID=30772991

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB03819614XA Expired - Fee Related CN100344941C (zh) 2002-07-19 2003-07-16 具有公共参考臂的可变电阻传感器

Country Status (8)

Country Link
US (2) US6845659B2 (enExample)
EP (1) EP1523660A1 (enExample)
JP (1) JP2005534014A (enExample)
KR (1) KR20050047079A (enExample)
CN (1) CN100344941C (enExample)
AU (1) AU2003256591A1 (enExample)
TW (1) TWI222514B (enExample)
WO (1) WO2004010091A1 (enExample)

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US9072479B2 (en) * 2011-05-06 2015-07-07 Welch Allyn, Inc. Variable control for handheld device
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CN104105623B (zh) * 2011-12-08 2017-06-23 住友电气工业株式会社 通信装置、车载通信系统和检查方法
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JP2019505922A (ja) 2016-01-22 2019-02-28 イリノイ トゥール ワークス インコーポレイティド 質量流量制御器上に記憶されるデータ値を動的に構成するシステム及び方法
ITUA20164320A1 (it) * 2016-06-13 2017-12-13 St Microelectronics Srl Ponte sensore con resistori commutati, sistema e procedimento corrispondenti
US10317482B2 (en) * 2016-11-19 2019-06-11 Nxp B.V. Resistive sensor frontend system having a resistive sensor circuit with an offset voltage source
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CN107796456B (zh) * 2017-10-16 2020-02-18 东南大学 一种基于双检测模式的宽量程流量传感器及测量方法
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CN109444226B (zh) * 2018-11-10 2021-03-26 郑州迪邦科技有限公司 一种热导式sf6纯度检测仪调理电路
US12259739B2 (en) 2019-04-30 2025-03-25 Illinois Tool Works Inc. Advanced pressure based mass flow controllers and diagnostics
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Also Published As

Publication number Publication date
JP2005534014A (ja) 2005-11-10
KR20050047079A (ko) 2005-05-19
US20040100289A1 (en) 2004-05-27
WO2004010091A1 (en) 2004-01-29
AU2003256591A1 (en) 2004-02-09
TW200406576A (en) 2004-05-01
US20050092077A1 (en) 2005-05-05
CN1675522A (zh) 2005-09-28
TWI222514B (en) 2004-10-21
US7082824B2 (en) 2006-08-01
US6845659B2 (en) 2005-01-25
EP1523660A1 (en) 2005-04-20

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Effective date: 20070601

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Applicant before: Celerity Group Inc.

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