KR20040034611A - 기판 지지대 - Google Patents

기판 지지대 Download PDF

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Publication number
KR20040034611A
KR20040034611A KR10-2003-7015893A KR20037015893A KR20040034611A KR 20040034611 A KR20040034611 A KR 20040034611A KR 20037015893 A KR20037015893 A KR 20037015893A KR 20040034611 A KR20040034611 A KR 20040034611A
Authority
KR
South Korea
Prior art keywords
ball
support
substrate
disposed
support member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR10-2003-7015893A
Other languages
English (en)
Korean (ko)
Inventor
존 엠. 화이트
아키히로 호소카와
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20040034611A publication Critical patent/KR20040034611A/ko
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7614—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H10P72/127—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterised by the substrate support

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR10-2003-7015893A 2001-10-17 2002-09-24 기판 지지대 Ceased KR20040034611A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/982,406 2001-10-17
US09/982,406 US20030072639A1 (en) 2001-10-17 2001-10-17 Substrate support
PCT/US2002/030268 WO2003034473A2 (en) 2001-10-17 2002-09-24 Substrate support

Publications (1)

Publication Number Publication Date
KR20040034611A true KR20040034611A (ko) 2004-04-28

Family

ID=25529137

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-7015893A Ceased KR20040034611A (ko) 2001-10-17 2002-09-24 기판 지지대

Country Status (7)

Country Link
US (1) US20030072639A1 (https=)
EP (1) EP1436829A2 (https=)
JP (1) JP2005507162A (https=)
KR (1) KR20040034611A (https=)
CN (1) CN1572014A (https=)
TW (1) TW561575B (https=)
WO (1) WO2003034473A2 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100860143B1 (ko) * 2005-09-05 2008-09-24 도쿄엘렉트론가부시키가이샤 기판 위치 맞춤 장치 및 기판 수용 유닛
KR20170015671A (ko) * 2015-07-30 2017-02-09 엘지디스플레이 주식회사 서포터 핀 및 이를 포함하는 열처리장치
KR200491813Y1 (ko) * 2019-11-18 2020-06-09 주식회사 엘에스텍 포스비 위치 보정 장치

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