KR20010051723A - 프리코트막의 형성방법, 성막장치의 아이들링 방법,재치대 구조, 성막장치 및 성막방법 - Google Patents
프리코트막의 형성방법, 성막장치의 아이들링 방법,재치대 구조, 성막장치 및 성막방법 Download PDFInfo
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- KR20010051723A KR20010051723A KR1020000067914A KR20000067914A KR20010051723A KR 20010051723 A KR20010051723 A KR 20010051723A KR 1020000067914 A KR1020000067914 A KR 1020000067914A KR 20000067914 A KR20000067914 A KR 20000067914A KR 20010051723 A KR20010051723 A KR 20010051723A
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- 238000000034 method Methods 0.000 title claims abstract description 86
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 67
- 230000008569 process Effects 0.000 claims abstract description 43
- 238000000151 deposition Methods 0.000 claims abstract description 29
- 230000000087 stabilizing effect Effects 0.000 claims abstract description 16
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 3
- 239000007789 gas Substances 0.000 claims description 157
- 238000012545 processing Methods 0.000 claims description 76
- 230000006641 stabilisation Effects 0.000 claims description 40
- 238000011105 stabilization Methods 0.000 claims description 40
- 230000015572 biosynthetic process Effects 0.000 claims description 33
- 230000008021 deposition Effects 0.000 claims description 18
- 230000001590 oxidative effect Effects 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- 230000008018 melting Effects 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 6
- 150000002736 metal compounds Chemical class 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000006722 reduction reaction Methods 0.000 claims description 2
- 229910000069 nitrogen hydride Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 255
- 235000012431 wafers Nutrition 0.000 description 38
- 239000004065 semiconductor Substances 0.000 description 21
- 230000008859 change Effects 0.000 description 20
- 238000000137 annealing Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910010282 TiON Inorganic materials 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 230000003750 conditioning effect Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- -1 tungsten nitride Chemical class 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4411—Cooling of the reaction chamber walls
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
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- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (16)
- 피처리체를 재치하기 위한 재치대를 내부에 가지는 성막장치의 프리코트막 형성방법으로서:상기 성막장치내로 처리가스를 공급하고, 상기 재치대의 표면에 프리코트 TiN 막을 증착하는 증착공정; 및상기 프리코트막을 상기 증착공정에서의 온도보다 높은 온도로 유지함으로써 상기 재치대상의 상기 프리코트막을 환원 및 안정화하는 안정화 공정을 포함하여 구성되는 것을 특징으로 하는 프리코트막의 형성방법.
- 제 1 항에 있어서, 상기 안정화 공정에서의 상기 환원반응은 NH3(암모니아)를 함유하는 가스내에 상기 프리코트막을 노출함으로써 수행되는 것을 특징으로 하는 프리코트막의 형성방법.
- 제 1 항에 있어서, 상기 안정화 공정에서의 상기 재치대의 상기 온도는 피처리체에 대하여 상기 성막공정이 상기 성막장치내에서 수행될 때의 상기 처리온도와 대략 동일한 것을 특징으로 하는 프리코트막의 형성방법.
- 제 1 항에 있어서, 상기 성막장치내에서, Ti 막 또는 Ti 함유막이 상기 피처리체에 증착되는 것을 특징으로 하는 프리코트막의 형성방법.
- 피처리체를 재치하기 위한 재치대를 내부에 가지는 성막장치의 프리코트막 형성방법으로서:상기 성막장치내로 처리가스를 공급하고, 상기 재치대의 표면에 프리코트 TiN 막을 증착하는 증착공정; 및상기 프리코트막을 상기 증착공정에서의 온도보다 높은 온도로 유지함으로써 상기 재치대상의 상기 프리코트막을 산화 및 안정화하는 안정화 공정을 포함하여 구성되는 것을 특징으로 하는 프리코트막의 형성방법.
- 제 5 항에 있어서, 상기 안정화 공정에서의 상기 산화반응은 O2(산소)함유가스 또는 H2O (수분)함유 가스내에 상기 프리코트막을 노출함으로써 수행되는 것을 특징으로 하는 프리코트막의 형성방법.
- 제 5 항에 있어서, 상기 안정화 공정에서의 상기 재치대의 상기 온도는 상기 피처리체에 대하여 상기 성막공정이 상기 성막장치내에서 수행될 때의 처리온도와 대략 동일한 것을 특징으로 하는 프리코트막의 형성방법.
- 제 5 항에 있어서, 상기 성막장치내에서, Ti 막 또는 Ti 함유막이 상기 피처리체상에 증착되는 것을 특징으로 하는 프리코트막의 형성방법.
- 피처리체상에 Ti 막 또는 TiN 막을 형성하기 위하여 진공흡인가능한 처리용기내에서 표면상에 프리코트 TiN 막이 형성된 재치대를 가지는 성막장치의 아이들링 방법에 있어서, NH3함유가스가 상기 처리용기내로 공급되는 것을 특징으로 하는 성막장치의 아이들링 방법.
- 제 9 항에 있어서, 상기 재치대의 온도는 상기 처리용기내에서 수행되는 상기 성막공정시의 온도와 대략 동일한 온도로 유지됨을 특징으로 하는 성막장치의 아이들링 방법.
- 피처리체상에 Ti 막 또는 Ti 함유막을 증착하기 위한 성막공정을 수행하기 위한 성막장치의 재치대 구조에 있어서,상기 피처리체를 재치하기 위하여 설치된 재치대 및 상기 재치대의 표면에 안정화 처리가 실시된 프리코트 TiN 막을 포함하여 구성되는 것을 특징으로 하는 성막장치의 재치대 구조.
- 피처리체상에 Ti 막 또는 Ti 함유막을 형성하기 위한 성막장치로서:진공흡인가능한 처리용기와,필요한 처리가스를 상기 처리용기내로 공급하기 위한 가스공급수단과,상기 피처리체를 재치하기 위한 재치대와, 상기 재치대의 표면상에 형성되며 안정화 처리가 실시된 프리코트 TiN 막을 가지는 재치대 구조; 및상기 피처리체를 가열하기 위한 가열수단을 포함하여 구성되는 것을 특징으로 하는 성막장치.
- 진공흡인가능한 처리용기내에서 고융점의 금속화합물 가스 및 환원가스를 사용하여 피처리체의 표면상에 소정의 막을 증착하는 성막공정을 수행하기 위한 성막방법으로서,상기 성막공정동안 또는 성막공정의 직후에 상기 처리용기내로 산화가스를 공급하는 공정을 포함하여 구성되는 것을 특징으로 하는 성막방법.
- 제 13 항에 있어서, 상기 고융점 금속화합물은 TiCl4가스이며, 상기 환원가스는 NH3가스인 것을 특징으로 하는 성막방법.
- 제 13 항에 있어서, 상기 산화가스가 O2가스인 것을 특징으로 하는 성막방법.
- 제 13 항에 있어서, 상기 산화가스가 H2O 가스인 것을 특징으로 하는 성막방법.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP327059 | 1999-11-17 | ||
JP32705999A JP4547744B2 (ja) | 1999-11-17 | 1999-11-17 | プリコート膜の形成方法、成膜装置のアイドリング方法、載置台構造及び成膜装置 |
JP2000004993A JP2001192832A (ja) | 2000-01-13 | 2000-01-13 | 成膜方法 |
JP4993 | 2000-01-13 |
Publications (2)
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KR20010051723A true KR20010051723A (ko) | 2001-06-25 |
KR100709801B1 KR100709801B1 (ko) | 2007-04-23 |
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KR1020000067914A KR100709801B1 (ko) | 1999-11-17 | 2000-11-16 | 프리코트막의 형성방법, 성막장치의 아이들링 방법,재치대 구조, 성막장치 및 성막방법 |
Country Status (3)
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US (4) | US20030165620A1 (ko) |
KR (1) | KR100709801B1 (ko) |
TW (1) | TW484189B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100824088B1 (ko) * | 2003-01-31 | 2008-04-21 | 동경 엘렉트론 주식회사 | 성막 처리 방법 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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US6177023B1 (en) * | 1997-07-11 | 2001-01-23 | Applied Komatsu Technology, Inc. | Method and apparatus for electrostatically maintaining substrate flatness |
EP1127957A1 (en) * | 2000-02-24 | 2001-08-29 | Asm Japan K.K. | A film forming apparatus having cleaning function |
DE10043601A1 (de) * | 2000-09-01 | 2002-03-14 | Aixtron Ag | Vorrichtung und Verfahren zum Abscheiden insbesondere kristalliner Schichten auf insbesondere kristallinen Substraten |
EP1361604B1 (en) * | 2001-01-22 | 2009-03-18 | Tokyo Electron Limited | Device and method for treatment |
JP3990881B2 (ja) * | 2001-07-23 | 2007-10-17 | 株式会社日立製作所 | 半導体製造装置及びそのクリーニング方法 |
JP4121269B2 (ja) * | 2001-11-27 | 2008-07-23 | 日本エー・エス・エム株式会社 | セルフクリーニングを実行するプラズマcvd装置及び方法 |
KR100515052B1 (ko) * | 2002-07-18 | 2005-09-14 | 삼성전자주식회사 | 반도체 기판상에 소정의 물질을 증착하는 반도체 제조 장비 |
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2000
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- 2000-11-16 KR KR1020000067914A patent/KR100709801B1/ko active IP Right Grant
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2003
- 2003-03-28 US US10/400,660 patent/US20030165620A1/en not_active Abandoned
-
2004
- 2004-12-13 US US11/009,714 patent/US20050098109A1/en not_active Abandoned
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2005
- 2005-03-15 US US11/079,294 patent/US7514120B2/en not_active Expired - Fee Related
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KR100824088B1 (ko) * | 2003-01-31 | 2008-04-21 | 동경 엘렉트론 주식회사 | 성막 처리 방법 |
KR100892789B1 (ko) * | 2003-01-31 | 2009-04-10 | 도쿄엘렉트론가부시키가이샤 | 성막 처리 방법 |
KR100960162B1 (ko) * | 2003-01-31 | 2010-05-26 | 도쿄엘렉트론가부시키가이샤 | 성막 처리 방법 |
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US20030165620A1 (en) | 2003-09-04 |
US20080226822A1 (en) | 2008-09-18 |
TW484189B (en) | 2002-04-21 |
US20050221005A1 (en) | 2005-10-06 |
US20050098109A1 (en) | 2005-05-12 |
KR100709801B1 (ko) | 2007-04-23 |
US7514120B2 (en) | 2009-04-07 |
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