KR20010002667A - 반도체 소자의 제조방법 - Google Patents
반도체 소자의 제조방법 Download PDFInfo
- Publication number
- KR20010002667A KR20010002667A KR1019990022578A KR19990022578A KR20010002667A KR 20010002667 A KR20010002667 A KR 20010002667A KR 1019990022578 A KR1019990022578 A KR 1019990022578A KR 19990022578 A KR19990022578 A KR 19990022578A KR 20010002667 A KR20010002667 A KR 20010002667A
- Authority
- KR
- South Korea
- Prior art keywords
- film
- semiconductor substrate
- high melting
- gapping
- melting point
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 29
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 25
- 239000002184 metal Substances 0.000 claims abstract description 25
- 238000002844 melting Methods 0.000 claims abstract description 19
- 230000008018 melting Effects 0.000 claims abstract description 19
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 10
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract 2
- 229910052718 tin Inorganic materials 0.000 claims abstract 2
- 238000010438 heat treatment Methods 0.000 claims description 25
- 238000005468 ion implantation Methods 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 8
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 229910052785 arsenic Inorganic materials 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 3
- 230000006641 stabilisation Effects 0.000 abstract 1
- 238000011105 stabilization Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 85
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 38
- 229910017052 cobalt Inorganic materials 0.000 description 37
- 239000010941 cobalt Substances 0.000 description 37
- 239000010936 titanium Substances 0.000 description 17
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 16
- 238000009826 distribution Methods 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 229920005591 polysilicon Polymers 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910019044 CoSix Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 230000015271 coagulation Effects 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28035—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities
- H01L21/28044—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer
- H01L21/28052—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer the conductor comprising a silicide layer formed by the silicidation reaction of silicon with a metal layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
Claims (7)
- 반도체 기판상에 고융점 금속막을 형성하는 단계;상기 고융점 금속막상에 갭핑막을 형성하는 단계;상기 갭핑막위에 4족 원자를 이온주입하여 상기 갭핑막의 원자를 고융점 금속막내로 침투시키는 단계;상기 반도체 기판과 고융점 금속막의 계면에 금속 실리사이드막을 형성하는 단계를 포함하여 형성함을 특징으로 하는 반도체 소자의 제조방법.
- 제 1 항에 있어서, 상기 고융점 금속막은 Co, Ti, W, Ta, Mo, Cr, Ni, Zr, Hf, Pd, Pt 등중에서 어느 하나를 사용하는 것을 특징으로 하는 반도체 소자의 제조방법.
- 제 1 항에 있어서, 상기 갭핑막은 TiN, Ti, W, Ta, Mo, Cr, Ni, Zr, Hf, Pd, Pt 등중에서 어느 하나를 사용하여 이온주입시 고융점 금속막내로 녹온시키는 것을 특징으로 하는 반도체 소자의 제조방법.
- 제 1 항에 있어서, 상기 4족 원자는 Si, Ge, Ar, As, P, Sb, N 등중에서 어느 하나를 사용하는 것을 특징으로 하는 반도체 소자의 제조방법.
- 제 1 항에 있어서, 상기 4족 원자의 이온주입은 약 1keV ~ 300keV, 1E13 ~ 1E16/㎠의 조건으로 주입하는 것을 특징으로 하는 반도체 소자의 제조방법.
- 반도체 기판상에 게이트 절연막을 개재하여 게이트 전극을 형성하는 단계;상기 게이트 전극의 양측면에 절연막 측벽을 형성하는 단계;상기 게이트 전극 양측의 반도체 기판 표면내에 소오스/드레인 불순물영역을 형성하는 단계;상기 게이트 전극을 포함한 반도체 기판의 전면에 고융점 금속막과 갭핑막을 차례로 형성하는 단계;상기 갭핑막위에 4족 원자를 이온주입하여 상기 갭핑막의 원자를 고융점 금속막내로 침투시키는 단계;상기 반도체 기판에 1차 열처리 공정을 실시하여 상기 고융점 금속막과 상기 게이트 전극 및 반도체 기판을 각각 반응시키어 금속 실리사이드막을 형성하는 단계;상기 게이트 전극 및 반도체 기판과 반응하지 않는 갭핑막 및 고융점 금속막을 선택적으로 제거하는 단계;상기 반도체 기판에 2차 열처리 공정을 실시하여 금속 실리사이드막의 저항을 낮추는 단계를 포함하여 형성함을 특징으로 하는 반도체 소자의 제조방법.
- 제 6 항에 있어서, 상기 1차 열처리 공정은 2차 열처리 공정보다 낮은 온도에서 실시하는 것을 특징으로 하는 반도체 소자의 제조방법.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-1999-0022578A KR100396692B1 (ko) | 1999-06-16 | 1999-06-16 | 반도체 소자의 제조방법 |
US09/524,394 US6251780B1 (en) | 1999-06-16 | 2000-03-13 | Method for fabricating thin film at high temperature |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-1999-0022578A KR100396692B1 (ko) | 1999-06-16 | 1999-06-16 | 반도체 소자의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010002667A true KR20010002667A (ko) | 2001-01-15 |
KR100396692B1 KR100396692B1 (ko) | 2003-09-02 |
Family
ID=19592854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-1999-0022578A KR100396692B1 (ko) | 1999-06-16 | 1999-06-16 | 반도체 소자의 제조방법 |
Country Status (2)
Country | Link |
---|---|
US (1) | US6251780B1 (ko) |
KR (1) | KR100396692B1 (ko) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030056215A (ko) * | 2001-12-27 | 2003-07-04 | 동부전자 주식회사 | Mos 소자의 샐리사이드층 형성 방법 |
KR100699595B1 (ko) * | 2005-10-28 | 2007-03-23 | 매그나칩 반도체 유한회사 | 반도체 소자의 실리사이드 제조방법 |
KR100714481B1 (ko) * | 2005-07-15 | 2007-05-04 | 삼성전자주식회사 | 반도체 소자 및 이의 제조 방법 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6830976B2 (en) | 2001-03-02 | 2004-12-14 | Amberwave Systems Corproation | Relaxed silicon germanium platform for high speed CMOS electronics and high speed analog circuits |
JP3626115B2 (ja) * | 2001-06-14 | 2005-03-02 | 沖電気工業株式会社 | チタン化合物を含有するcvdチタン膜の形成方法 |
US6743721B2 (en) * | 2002-06-10 | 2004-06-01 | United Microelectronics Corp. | Method and system for making cobalt silicide |
AU2003247513A1 (en) * | 2002-06-10 | 2003-12-22 | Amberwave Systems Corporation | Growing source and drain elements by selecive epitaxy |
US6982474B2 (en) | 2002-06-25 | 2006-01-03 | Amberwave Systems Corporation | Reacted conductive gate electrodes |
JP4275395B2 (ja) * | 2002-12-11 | 2009-06-10 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
JP2004221204A (ja) * | 2003-01-10 | 2004-08-05 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
US20050130177A1 (en) * | 2003-12-12 | 2005-06-16 | 3M Innovative Properties Company | Variable valve apparatus and methods |
KR100690910B1 (ko) * | 2005-06-13 | 2007-03-09 | 삼성전자주식회사 | 샐리사이드 공정 및 이를 사용한 반도체 소자의 제조 방법 |
CN100416778C (zh) * | 2005-07-20 | 2008-09-03 | 上海华虹Nec电子有限公司 | 超大规模集成电路难熔金属硅化物的形成方法 |
JP2011155168A (ja) * | 2010-01-28 | 2011-08-11 | Sony Corp | 半導体素子及びその製造方法、並びに固体撮像装置 |
TW202145344A (zh) * | 2020-04-08 | 2021-12-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於選擇性蝕刻氧化矽膜之設備及方法 |
US11476124B2 (en) * | 2021-01-05 | 2022-10-18 | Taiwan Semiconductor Manufacturing Company Ltd. | Etchant for etching a cobalt-containing member in a semiconductor structure and method of etching a cobalt-containing member in a semiconductor structure |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63164242A (ja) * | 1986-12-26 | 1988-07-07 | Fujitsu Ltd | 半導体装置とその製造方法 |
-
1999
- 1999-06-16 KR KR10-1999-0022578A patent/KR100396692B1/ko not_active IP Right Cessation
-
2000
- 2000-03-13 US US09/524,394 patent/US6251780B1/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030056215A (ko) * | 2001-12-27 | 2003-07-04 | 동부전자 주식회사 | Mos 소자의 샐리사이드층 형성 방법 |
KR100714481B1 (ko) * | 2005-07-15 | 2007-05-04 | 삼성전자주식회사 | 반도체 소자 및 이의 제조 방법 |
KR100699595B1 (ko) * | 2005-10-28 | 2007-03-23 | 매그나칩 반도체 유한회사 | 반도체 소자의 실리사이드 제조방법 |
Also Published As
Publication number | Publication date |
---|---|
KR100396692B1 (ko) | 2003-09-02 |
US6251780B1 (en) | 2001-06-26 |
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