KR19980703121A - 읽기전용 메모리셀 어레이 및 그 제조공정 - Google Patents
읽기전용 메모리셀 어레이 및 그 제조공정 Download PDFInfo
- Publication number
- KR19980703121A KR19980703121A KR1019970706523A KR19970706523A KR19980703121A KR 19980703121 A KR19980703121 A KR 19980703121A KR 1019970706523 A KR1019970706523 A KR 1019970706523A KR 19970706523 A KR19970706523 A KR 19970706523A KR 19980703121 A KR19980703121 A KR 19980703121A
- Authority
- KR
- South Korea
- Prior art keywords
- longitudinal trenches
- adjacent
- mos transistors
- memory cell
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 230000015654 memory Effects 0.000 title claims abstract description 52
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000000034 method Methods 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 23
- 238000002513 implantation Methods 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 12
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 11
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 238000002347 injection Methods 0.000 claims description 8
- 239000007924 injection Substances 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 3
- 238000003491 array Methods 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 239000007943 implant Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- WNEODWDFDXWOLU-QHCPKHFHSA-N 3-[3-(hydroxymethyl)-4-[1-methyl-5-[[5-[(2s)-2-methyl-4-(oxetan-3-yl)piperazin-1-yl]pyridin-2-yl]amino]-6-oxopyridin-3-yl]pyridin-2-yl]-7,7-dimethyl-1,2,6,8-tetrahydrocyclopenta[3,4]pyrrolo[3,5-b]pyrazin-4-one Chemical compound C([C@@H](N(CC1)C=2C=NC(NC=3C(N(C)C=C(C=3)C=3C(=C(N4C(C5=CC=6CC(C)(C)CC=6N5CC4)=O)N=CC=3)CO)=O)=CC=2)C)N1C1COC1 WNEODWDFDXWOLU-QHCPKHFHSA-N 0.000 description 1
- 229910017855 NH 4 F Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B20/00—Read-only memory [ROM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B20/00—Read-only memory [ROM] devices
- H10B20/27—ROM only
- H10B20/30—ROM only having the source region and the drain region on the same level, e.g. lateral transistors
- H10B20/38—Doping programmed, e.g. mask ROM
- H10B20/383—Channel doping programmed
Landscapes
- Semiconductor Memories (AREA)
- Read Only Memory (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19510042.5 | 1995-03-20 | ||
| DE19510042A DE19510042C2 (de) | 1995-03-20 | 1995-03-20 | Festwert-Speicherzellenanordnung und Verfahren zu deren Herstellung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR19980703121A true KR19980703121A (ko) | 1998-10-15 |
Family
ID=7757156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019970706523A Ceased KR19980703121A (ko) | 1995-03-20 | 1996-03-04 | 읽기전용 메모리셀 어레이 및 그 제조공정 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5920099A (forum.php) |
| EP (1) | EP0815594B1 (forum.php) |
| JP (1) | JPH11502370A (forum.php) |
| KR (1) | KR19980703121A (forum.php) |
| CN (1) | CN1079994C (forum.php) |
| AR (1) | AR001255A1 (forum.php) |
| DE (2) | DE19510042C2 (forum.php) |
| IN (1) | IN187131B (forum.php) |
| WO (1) | WO1996029739A1 (forum.php) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19545903C2 (de) * | 1995-12-08 | 1997-09-18 | Siemens Ag | Festwertspeicherzellenanordnung und Verfahren zu deren Herstellung |
| DE19630050B4 (de) * | 1996-07-25 | 2005-03-10 | Infineon Technologies Ag | Herstellverfahren für eine Lackmaske auf einem Substrat mit einem Graben |
| DE19640235C2 (de) | 1996-09-30 | 2001-10-25 | Infineon Technologies Ag | Halbleiter-Festwertspeicher mit in Grabenseitenwänden vertikal verlaufenden Transistoren und Verfahren zu seiner Herstellung |
| DE19652547C2 (de) * | 1996-12-17 | 2002-04-25 | Infineon Technologies Ag | Speicherzellenanordnung mit Grabenstruktur und einem Gatedielektrikum, das ein Material mit Ladungsträger-Haftstellen enthält, und Verfahren zu deren Herstellung |
| KR19980084469A (ko) * | 1997-05-23 | 1998-12-05 | 문정환 | 마스크 롬 및 그의 제조방법 |
| DE19742397C2 (de) * | 1997-09-25 | 2000-07-06 | Siemens Ag | Verfahren zur Herstellung einer Halbleiterstruktur mit einer Mehrzahl von Gräben |
| TW406419B (en) * | 1998-01-15 | 2000-09-21 | Siemens Ag | Memory-cells arrangement and its production method |
| DE19805712A1 (de) | 1998-02-12 | 1999-08-26 | Siemens Ag | Speicherzellenanordnung und entsprechendes Herstellungsverfahren |
| DE19807776A1 (de) * | 1998-02-24 | 1999-09-02 | Siemens Ag | Halbleitervorrichtung und entsprechendes Herstellungsverfahren |
| DE19807920A1 (de) | 1998-02-25 | 1999-09-02 | Siemens Ag | Speicherzellenanordnung und entsprechendes Herstellungsverfahren |
| EP1068644B1 (de) | 1998-03-24 | 2015-07-08 | Infineon Technologies AG | Speicherzellenanordnung und verfahren zu ihrer herstellung |
| DE19843979C1 (de) * | 1998-09-24 | 2000-03-02 | Siemens Ag | Speicherzellenanordnung mit ferroelektrischem oder dynamischen Speicherzellen und entsprechendes Herstellungsverfahren |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04226071A (ja) * | 1990-05-16 | 1992-08-14 | Ricoh Co Ltd | 半導体メモリ装置 |
| JPH04354159A (ja) * | 1991-05-31 | 1992-12-08 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
| JPH05102436A (ja) * | 1991-10-09 | 1993-04-23 | Ricoh Co Ltd | 半導体メモリ装置とその製造方法 |
| JPH05110036A (ja) * | 1991-10-18 | 1993-04-30 | Ricoh Co Ltd | 半導体メモリ装置とその製造方法 |
-
1995
- 1995-03-20 DE DE19510042A patent/DE19510042C2/de not_active Expired - Fee Related
-
1996
- 1996-01-31 IN IN165CA1996 patent/IN187131B/en unknown
- 1996-03-04 JP JP8527962A patent/JPH11502370A/ja not_active Ceased
- 1996-03-04 KR KR1019970706523A patent/KR19980703121A/ko not_active Ceased
- 1996-03-04 CN CN96192693A patent/CN1079994C/zh not_active Expired - Fee Related
- 1996-03-04 WO PCT/DE1996/000380 patent/WO1996029739A1/de not_active Application Discontinuation
- 1996-03-04 EP EP96905680A patent/EP0815594B1/de not_active Expired - Lifetime
- 1996-03-04 US US08/913,332 patent/US5920099A/en not_active Expired - Fee Related
- 1996-03-04 DE DE59602872T patent/DE59602872D1/de not_active Expired - Fee Related
- 1996-03-15 AR AR33577196A patent/AR001255A1/es unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE59602872D1 (de) | 1999-09-30 |
| EP0815594B1 (de) | 1999-08-25 |
| JPH11502370A (ja) | 1999-02-23 |
| CN1079994C (zh) | 2002-02-27 |
| IN187131B (forum.php) | 2002-02-09 |
| US5920099A (en) | 1999-07-06 |
| WO1996029739A1 (de) | 1996-09-26 |
| AR001255A1 (es) | 1997-09-24 |
| DE19510042A1 (de) | 1996-09-26 |
| CN1179234A (zh) | 1998-04-15 |
| EP0815594A1 (de) | 1998-01-07 |
| DE19510042C2 (de) | 1997-01-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 19970919 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20010219 Comment text: Request for Examination of Application |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20040329 Patent event code: PE09021S01D |
|
| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
Patent event date: 20040629 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 20040329 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |