KR102907521B1 - 음향 변환기 및 제조 방법 - Google Patents

음향 변환기 및 제조 방법

Info

Publication number
KR102907521B1
KR102907521B1 KR1020227007019A KR20227007019A KR102907521B1 KR 102907521 B1 KR102907521 B1 KR 102907521B1 KR 1020227007019 A KR1020227007019 A KR 1020227007019A KR 20227007019 A KR20227007019 A KR 20227007019A KR 102907521 B1 KR102907521 B1 KR 102907521B1
Authority
KR
South Korea
Prior art keywords
metal layer
acoustic transducer
transducer array
manufacturing
composite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020227007019A
Other languages
English (en)
Korean (ko)
Other versions
KR20220082808A (ko
Inventor
제이 호프
그라함 맨더스
코너 밴던버그
제이콥 윌리엄 로즈
Original Assignee
다크비전 테크놀러지스 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다크비전 테크놀러지스 인크. filed Critical 다크비전 테크놀러지스 인크.
Publication of KR20220082808A publication Critical patent/KR20220082808A/ko
Application granted granted Critical
Publication of KR102907521B1 publication Critical patent/KR102907521B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B06B1/0692Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF with a continuous electrode on one side and a plurality of electrodes on the other side
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2437Piezoelectric probes
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70Specific application
    • B06B2201/73Drilling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70Specific application
    • B06B2201/76Medical, dental
    • EFIXED CONSTRUCTIONS
    • E21EARTH OR ROCK DRILLING; MINING
    • E21BEARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
    • E21B47/00Survey of boreholes or wells
    • E21B47/002Survey of boreholes or wells by visual inspection
    • E21B47/0025Survey of boreholes or wells by visual inspection generating an image of the borehole wall using down-hole measurements, e.g. acoustic or electric

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Manufacturing & Machinery (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
KR1020227007019A 2019-10-17 2020-10-13 음향 변환기 및 제조 방법 Active KR102907521B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1915002.8A GB2588218B (en) 2019-10-17 2019-10-17 Acoustic transducer and method of manufacturing
GB1915002.8 2019-10-17
PCT/IB2020/059611 WO2021074792A1 (en) 2019-10-17 2020-10-13 Acoustic transducer and method of manufacturing

Publications (2)

Publication Number Publication Date
KR20220082808A KR20220082808A (ko) 2022-06-17
KR102907521B1 true KR102907521B1 (ko) 2026-01-05

Family

ID=68728157

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227007019A Active KR102907521B1 (ko) 2019-10-17 2020-10-13 음향 변환기 및 제조 방법

Country Status (7)

Country Link
US (1) US12569884B2 (https=)
EP (1) EP4045880B1 (https=)
JP (1) JP2022552082A (https=)
KR (1) KR102907521B1 (https=)
CN (1) CN114502927B (https=)
GB (1) GB2588218B (https=)
WO (1) WO2021074792A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3528511B1 (en) * 2016-10-13 2025-01-08 FUJIFILM Corporation Ultrasonic probe and method for manufacturing ultrasonic probe
CA3175094A1 (en) 2020-03-13 2021-09-16 Geonomic Technologies Inc. Method and apparatus for measuring a wellbore
CN115474128B (zh) * 2022-10-19 2024-03-08 哈尔滨工业大学(威海) 一种高灵敏度水声换能器
KR102737599B1 (ko) * 2022-12-30 2024-12-05 (주)아이블포토닉스 음향광학 가변 필터 제조 방법
WO2025117505A1 (en) * 2023-11-27 2025-06-05 Sonocharge Energy, Inc. Acoustic devices and methods of fabrication

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001223556A (ja) * 2000-02-14 2001-08-17 Ueda Japan Radio Co Ltd 圧電振動子及びアレイ型圧電振動子
JP2010233224A (ja) * 2008-10-17 2010-10-14 Konica Minolta Medical & Graphic Inc アレイ型超音波振動子
JP6261820B2 (ja) * 2015-05-11 2018-01-17 富士フイルム株式会社 電気音響変換フィルム原反、電気音響変換フィルム、および、その製造方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512254B2 (https=) 1973-07-03 1980-03-31
US4206994A (en) * 1978-09-20 1980-06-10 Xerox Corporation Belt tensioning system
EP0040374A1 (de) 1980-05-21 1981-11-25 Siemens Aktiengesellschaft Ultraschallwandleranordnung und Verfahren zu seiner Herstellung
JPS60143358U (ja) * 1984-03-05 1985-09-24 呉羽化学工業株式会社 アレイ型超音波探触子
DE3808017A1 (de) 1988-03-10 1989-09-21 Siemens Ag Piezokeramischer ultraschallwandler und verfahren zu seiner herstellung
US5457863A (en) 1993-03-22 1995-10-17 General Electric Company Method of making a two dimensional ultrasonic transducer array
US5592730A (en) 1994-07-29 1997-01-14 Hewlett-Packard Company Method for fabricating a Z-axis conductive backing layer for acoustic transducers using etched leadframes
JP3526486B2 (ja) 1995-04-28 2004-05-17 株式会社東芝 超音波探触子,この探触子を備えた超音波プローブ,およびこれらの製造方法
EP0796669A3 (de) 1996-03-19 1998-04-29 Siemens Aktiengesellschaft Ultraschallwandler
US5755909A (en) * 1996-06-26 1998-05-26 Spectra, Inc. Electroding of ceramic piezoelectric transducers
JP3673035B2 (ja) 1996-10-25 2005-07-20 株式会社東芝 超音波トランスジューサ
DE10018355A1 (de) * 2000-04-13 2001-12-20 Siemens Ag Ultraschallwandler und Verfahren zur Herstellung eines Ultraschallwandlers
JP2001340340A (ja) 2000-06-02 2001-12-11 Toshiba Corp 超音波診断装置
US7036363B2 (en) 2003-07-03 2006-05-02 Pathfinder Energy Services, Inc. Acoustic sensor for downhole measurement tool
US7224104B2 (en) * 2003-12-09 2007-05-29 Kabushiki Kaisha Toshiba Ultrasonic probe and ultrasonic diagnostic apparatus
JP4769127B2 (ja) 2005-05-30 2011-09-07 株式会社東芝 超音波プローブ及び超音波プローブ製造方法
JP2006345312A (ja) 2005-06-09 2006-12-21 Denso Corp 超音波センサ及び超音波振動子
US20070041273A1 (en) 2005-06-21 2007-02-22 Shertukde Hemchandra M Acoustic sensor
JP4842726B2 (ja) 2006-07-18 2011-12-21 富士フイルム株式会社 超音波検査装置
JP5002402B2 (ja) 2007-10-03 2012-08-15 株式会社東芝 超音波探触子及び超音波診断装置
US20110257532A1 (en) * 2008-12-25 2011-10-20 Konica Minolta Medical & Graphic, Inc. Ultrasonic probe and method of preparing ultrasonic probe
JP5099175B2 (ja) 2010-05-28 2012-12-12 株式会社村田製作所 超音波センサ
JP6519136B2 (ja) 2014-09-26 2019-05-29 ブラザー工業株式会社 圧電アクチュエータ、及び、圧電アクチュエータの製造方法
JP2017099664A (ja) * 2015-12-02 2017-06-08 セイコーエプソン株式会社 超音波プローブユニット、超音波プローブ、及び超音波装置
JP2017176311A (ja) * 2016-03-29 2017-10-05 セイコーエプソン株式会社 超音波デバイス、超音波測定装置、及び超音波画像表示装置
GB2571361B (en) * 2018-03-02 2020-04-22 Novosound Ltd Ultrasound array transducer manufacturing
WO2020102564A1 (en) * 2018-11-14 2020-05-22 Invensense, Inc. Dual electrode piezoelectric micromachined ultrasound transducer device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001223556A (ja) * 2000-02-14 2001-08-17 Ueda Japan Radio Co Ltd 圧電振動子及びアレイ型圧電振動子
JP2010233224A (ja) * 2008-10-17 2010-10-14 Konica Minolta Medical & Graphic Inc アレイ型超音波振動子
JP6261820B2 (ja) * 2015-05-11 2018-01-17 富士フイルム株式会社 電気音響変換フィルム原反、電気音響変換フィルム、および、その製造方法

Also Published As

Publication number Publication date
US20220339670A1 (en) 2022-10-27
GB201915002D0 (en) 2019-12-04
EP4045880A1 (en) 2022-08-24
EP4045880B1 (en) 2026-03-04
KR20220082808A (ko) 2022-06-17
EP4045880A4 (en) 2023-11-01
US12569884B2 (en) 2026-03-10
GB2588218B (en) 2021-10-27
EP4045880C0 (en) 2026-03-04
WO2021074792A1 (en) 2021-04-22
CN114502927B (zh) 2025-04-29
CN114502927A (zh) 2022-05-13
JP2022552082A (ja) 2022-12-15
GB2588218A (en) 2021-04-21

Similar Documents

Publication Publication Date Title
KR102907521B1 (ko) 음향 변환기 및 제조 방법
JP4043882B2 (ja) 可変の音響インピーダンスを有する超音波変換器ウェハー
US7732992B2 (en) Curved capacitive membrane ultrasound transducer array
JP3210671B2 (ja) 超音波変換器アレーとその製造方法
US6437487B1 (en) Transducer array using multi-layered elements and a method of manufacture thereof
JP4433378B2 (ja) 音響バッキング材料を介して超音波変換器に電気的に接続する方法
EP1453103B1 (en) Large dimension, flexible piezoelectric ceramic tapes
US5920972A (en) Interconnection method for a multilayer transducer array
JP4758634B2 (ja) 多層セラミック音響変換器の製造方法
KR102569596B1 (ko) 고주파 초음파 트랜스듀서
CN1283547C (zh) 减少声能横向传播的微加工的超声换能器和方法
JP2013501405A (ja) 集積電気接続を備えた超音波イメージング変換器音響スタック
US20010041837A1 (en) Ultrasonic probe and method of manufacturing the same
JP2009515439A (ja) アレイ超音波トランスデューサ
WO2018070159A1 (ja) 超音波探触子および超音波探触子の製造方法
JP4703382B2 (ja) 振動子アレイの構造、およびその作製方法、並びに超音波プローブ
CN1304340A (zh) 包括复合导电镀层的多元件声探针及其制作方法
CN111147989A (zh) 具有用于多维换能器阵列的中介层的阵列上芯片
JP2001509901A (ja) 音響プローブの製造方法
JP5132333B2 (ja) 超音波探触子及び超音波探触子の製造方法
US20240416386A1 (en) Ultrasound interconnect stack and method of manufacturing same
US20070230275A1 (en) Method for manufacturing an ultrasound test head with an ultrasonic transducer configuration with a curved send and receive surface
CN1481284A (zh) 一种利用金属化和烧蚀聚合体膜作为接地面来制造多元件探声管的方法
Gregory et al. High density interconnect for polymer based ultrasound transducers

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

D22 Grant of ip right intended

Free format text: ST27 STATUS EVENT CODE: A-1-2-D10-D22-EXM-PE0701 (AS PROVIDED BY THE NATIONAL OFFICE)

PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

F11 Ip right granted following substantive examination

Free format text: ST27 STATUS EVENT CODE: A-2-4-F10-F11-EXM-PR0701 (AS PROVIDED BY THE NATIONAL OFFICE)

PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

U12 Designation fee paid

Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U12-OTH-PR1002 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

Q13 Ip right document published

Free format text: ST27 STATUS EVENT CODE: A-4-4-Q10-Q13-NAP-PG1601 (AS PROVIDED BY THE NATIONAL OFFICE)