WO2021074792A1 - Acoustic transducer and method of manufacturing - Google Patents

Acoustic transducer and method of manufacturing Download PDF

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Publication number
WO2021074792A1
WO2021074792A1 PCT/IB2020/059611 IB2020059611W WO2021074792A1 WO 2021074792 A1 WO2021074792 A1 WO 2021074792A1 IB 2020059611 W IB2020059611 W IB 2020059611W WO 2021074792 A1 WO2021074792 A1 WO 2021074792A1
Authority
WO
WIPO (PCT)
Prior art keywords
metal layer
array
composite
piezoelectric composite
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2020/059611
Other languages
English (en)
French (fr)
Inventor
Jay HOPE
Graham Manders
Connor VANDENBERG
Jacob William ROSE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Darkvision Technologies Inc
Original Assignee
Darkvision Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Darkvision Technologies Inc filed Critical Darkvision Technologies Inc
Priority to US17/765,841 priority Critical patent/US12569884B2/en
Priority to CN202080070606.6A priority patent/CN114502927B/zh
Priority to JP2022516450A priority patent/JP2022552082A/ja
Priority to KR1020227007019A priority patent/KR102907521B1/ko
Priority to EP20876631.1A priority patent/EP4045880B1/en
Publication of WO2021074792A1 publication Critical patent/WO2021074792A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B06B1/0692—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF with a continuous electrode on one side and a plurality of electrodes on the other side
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application
    • B06B2201/73—Drilling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application
    • B06B2201/76—Medical, dental
    • E—FIXED CONSTRUCTIONS
    • E21—EARTH OR ROCK DRILLING; MINING
    • E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
    • E21B47/00—Survey of boreholes or wells
    • E21B47/002—Survey of boreholes or wells by visual inspection
    • E21B47/0025—Survey of boreholes or wells by visual inspection generating an image of the borehole wall using down-hole measurements, e.g. acoustic or electric

Definitions

  • the present disclosure relates to acoustic transducers, in particular to piezoelectric transducers, which may be incorporated into imaging probes for medical examination and nondestructive inspection of structures such as pipes, wells, or manufactured parts
  • the heat used in soldering to the transducer can affect the piezoelectric effect when it exceeds the Curie temperature.
  • the present inventors have also observed that operating in certain hostile environments, such as high temperature, high pressure and chemical presence can lead to cracking at the solder joint.
  • FIG. 2 is a cross-sectional view of a transducer stack according to prior art devices.
  • Fig 11 is a cross-sectional view of a downhole acoustic probe in a tubular.
  • manufacturing comprises combining various techniques for adding metal layers and then selectively removing portions to form individual electrodes for the elements, portions of which extend beyond the piezoelectric composite. Some methods use a support structure to deposit layers.
  • Figure 1 shows a side view of a transducer stack for a single element, where an array of elements would extend into the page.
  • Piezoelectric composite 22 is covered on a first major surface with a conductive material acting as a common electrode 23 for the array.
  • the opposing, second surface is covered on a per element basis with a second conductive material to form addressable (thin) electrodes 25. These electrodes activate the piezoelectric posts in composite 22 to vibrate generally perpendicular to both the first and second surfaces.
  • the stack of Figure 1 additionally comprises a thick conductive layer 26 in electrical contact with or part of the thin electrode layer 25.
  • the full electrode for each element is comprised of a first thin layer 25 and second thicker layer 26.
  • the layer 26 is at least an order of magnitude thicker than layer 25. Both layers extend across the elevation of each transducer element so as to activate the underlying piezoelectric material, and layer 26 extends past the piezoelectric composite, generally continuing in the direction of the elevation dimension to form lead portion 24.
  • FIG. 4A illustrates the initial stages of manufacture starting with a piezoelectric composite plate 22, ground flat on both major surfaces. Because the plate is typically quite wide, relative to a single array, plural strips 42 of the composite are diced (step 2) and then placed spaced-apart onto a base, preferably held in place and separated by a temporary, sacrificial support 37 (step 3).
  • the support material may be a wax, metal, epoxy or a plastic frame.
  • the support structure may have voids therein to hold the composite strips.
  • a thin layer 47 of conductive material is deposited on the top and bottom of composite surfaces as electrodes 23, 25, as well as over the support 37. These layers may be added to the composite plate earlier on in the process, as is typically done with commercially available piezoelectric composite. Because the composite is not conductive, forms of electroless depositions are used to add the thin electrode layers, such as vacuum deposition (including physical / chemical vapor deposition, evaporation deposition and sputtering), electroless plating by immersion or adhesion of a foil sheet or thin wireframe.
  • This layer 47 may be thin (i.e.
  • a thick electrode layer 48 is added to provide strength and robustness at elevated temperatures and pressures. This layer forms electrode 26, extending beyond the composite stack to provide an electrode lead portion 24 which can then be connected to the flex circuit wires.
  • the support 37 provides a ground to deposit and hold the extended portion, especially when the addressable elements are present or being formed.
  • the radial transducer is a 1D array of transducer elements 12 separated radially around the body of the device.
  • the geometry of the transducer (including any lens and reflector) directs a pulse outward to sonify the surface of the well, pipe or manufactured part.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Manufacturing & Machinery (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
PCT/IB2020/059611 2019-10-17 2020-10-13 Acoustic transducer and method of manufacturing Ceased WO2021074792A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US17/765,841 US12569884B2 (en) 2019-10-17 2020-10-13 Acoustic transducer and method of manufacturing
CN202080070606.6A CN114502927B (zh) 2019-10-17 2020-10-13 声换能器和制造方法
JP2022516450A JP2022552082A (ja) 2019-10-17 2020-10-13 音響トランスデューサ及び製造方法
KR1020227007019A KR102907521B1 (ko) 2019-10-17 2020-10-13 음향 변환기 및 제조 방법
EP20876631.1A EP4045880B1 (en) 2019-10-17 2020-10-13 Acoustic transducer and method of manufacturing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1915002.8A GB2588218B (en) 2019-10-17 2019-10-17 Acoustic transducer and method of manufacturing
GB1915002.8 2019-10-17

Publications (1)

Publication Number Publication Date
WO2021074792A1 true WO2021074792A1 (en) 2021-04-22

Family

ID=68728157

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2020/059611 Ceased WO2021074792A1 (en) 2019-10-17 2020-10-13 Acoustic transducer and method of manufacturing

Country Status (7)

Country Link
US (1) US12569884B2 (https=)
EP (1) EP4045880B1 (https=)
JP (1) JP2022552082A (https=)
KR (1) KR102907521B1 (https=)
CN (1) CN114502927B (https=)
GB (1) GB2588218B (https=)
WO (1) WO2021074792A1 (https=)

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US11197655B2 (en) * 2016-10-13 2021-12-14 Fujifilm Corporation Ultrasound probe and method of manufacturing ultrasound probe
US12000266B2 (en) 2020-03-13 2024-06-04 Geonomic Technologies Inc. Method and apparatus for measuring a wellbore

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115474128B (zh) * 2022-10-19 2024-03-08 哈尔滨工业大学（威海） 一种高灵敏度水声换能器
KR102737599B1 (ko) * 2022-12-30 2024-12-05 (주)아이블포토닉스 음향광학 가변 필터 제조 방법
WO2025117505A1 (en) * 2023-11-27 2025-06-05 Sonocharge Energy, Inc. Acoustic devices and methods of fabrication

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CA3092535A1 (en) * 2018-03-02 2019-09-06 Novosound Ltd Ultrasound array transducer manufacturing

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11197655B2 (en) * 2016-10-13 2021-12-14 Fujifilm Corporation Ultrasound probe and method of manufacturing ultrasound probe
US12000266B2 (en) 2020-03-13 2024-06-04 Geonomic Technologies Inc. Method and apparatus for measuring a wellbore
US12326080B2 (en) 2020-03-13 2025-06-10 Geonomic Technologies Inc. Method and apparatus for measuring a wellbore

Also Published As

Publication number Publication date
KR102907521B1 (ko) 2026-01-05
US20220339670A1 (en) 2022-10-27
GB201915002D0 (en) 2019-12-04
EP4045880A1 (en) 2022-08-24
EP4045880B1 (en) 2026-03-04
KR20220082808A (ko) 2022-06-17
EP4045880A4 (en) 2023-11-01
US12569884B2 (en) 2026-03-10
GB2588218B (en) 2021-10-27
EP4045880C0 (en) 2026-03-04
CN114502927B (zh) 2025-04-29
CN114502927A (zh) 2022-05-13
JP2022552082A (ja) 2022-12-15
GB2588218A (en) 2021-04-21

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