CN114502927B - 声换能器和制造方法 - Google Patents
声换能器和制造方法 Download PDFInfo
- Publication number
- CN114502927B CN114502927B CN202080070606.6A CN202080070606A CN114502927B CN 114502927 B CN114502927 B CN 114502927B CN 202080070606 A CN202080070606 A CN 202080070606A CN 114502927 B CN114502927 B CN 114502927B
- Authority
- CN
- China
- Prior art keywords
- metal layer
- layer
- acoustic transducer
- composite material
- transducer array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
- B06B1/0692—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF with a continuous electrode on one side and a plurality of electrodes on the other side
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/73—Drilling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/76—Medical, dental
-
- E—FIXED CONSTRUCTIONS
- E21—EARTH OR ROCK DRILLING; MINING
- E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
- E21B47/00—Survey of boreholes or wells
- E21B47/002—Survey of boreholes or wells by visual inspection
- E21B47/0025—Survey of boreholes or wells by visual inspection generating an image of the borehole wall using down-hole measurements, e.g. acoustic or electric
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Acoustics & Sound (AREA)
- Manufacturing & Machinery (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1915002.8A GB2588218B (en) | 2019-10-17 | 2019-10-17 | Acoustic transducer and method of manufacturing |
| GB1915002.8 | 2019-10-17 | ||
| PCT/IB2020/059611 WO2021074792A1 (en) | 2019-10-17 | 2020-10-13 | Acoustic transducer and method of manufacturing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114502927A CN114502927A (zh) | 2022-05-13 |
| CN114502927B true CN114502927B (zh) | 2025-04-29 |
Family
ID=68728157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202080070606.6A Active CN114502927B (zh) | 2019-10-17 | 2020-10-13 | 声换能器和制造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US12569884B2 (https=) |
| EP (1) | EP4045880B1 (https=) |
| JP (1) | JP2022552082A (https=) |
| KR (1) | KR102907521B1 (https=) |
| CN (1) | CN114502927B (https=) |
| GB (1) | GB2588218B (https=) |
| WO (1) | WO2021074792A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3528511B1 (en) * | 2016-10-13 | 2025-01-08 | FUJIFILM Corporation | Ultrasonic probe and method for manufacturing ultrasonic probe |
| CA3175094A1 (en) | 2020-03-13 | 2021-09-16 | Geonomic Technologies Inc. | Method and apparatus for measuring a wellbore |
| CN115474128B (zh) * | 2022-10-19 | 2024-03-08 | 哈尔滨工业大学(威海) | 一种高灵敏度水声换能器 |
| KR102737599B1 (ko) * | 2022-12-30 | 2024-12-05 | (주)아이블포토닉스 | 음향광학 가변 필터 제조 방법 |
| WO2025117505A1 (en) * | 2023-11-27 | 2025-06-05 | Sonocharge Energy, Inc. | Acoustic devices and methods of fabrication |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3952387A (en) * | 1973-07-03 | 1976-04-27 | Tokyo Shibaura Electric Co., Ltd. | Method of manufacturing an ultrasonic probe |
| EP1145772A2 (de) * | 2000-04-13 | 2001-10-17 | intelligeNDT Systems & Services GmbH & Co. KG | Ultraschallwandler und Verfahren zur Herstellung eines Ultraschallwandlers |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4206994A (en) * | 1978-09-20 | 1980-06-10 | Xerox Corporation | Belt tensioning system |
| EP0040374A1 (de) | 1980-05-21 | 1981-11-25 | Siemens Aktiengesellschaft | Ultraschallwandleranordnung und Verfahren zu seiner Herstellung |
| JPS60143358U (ja) * | 1984-03-05 | 1985-09-24 | 呉羽化学工業株式会社 | アレイ型超音波探触子 |
| DE3808017A1 (de) | 1988-03-10 | 1989-09-21 | Siemens Ag | Piezokeramischer ultraschallwandler und verfahren zu seiner herstellung |
| US5457863A (en) | 1993-03-22 | 1995-10-17 | General Electric Company | Method of making a two dimensional ultrasonic transducer array |
| US5592730A (en) | 1994-07-29 | 1997-01-14 | Hewlett-Packard Company | Method for fabricating a Z-axis conductive backing layer for acoustic transducers using etched leadframes |
| JP3526486B2 (ja) | 1995-04-28 | 2004-05-17 | 株式会社東芝 | 超音波探触子,この探触子を備えた超音波プローブ,およびこれらの製造方法 |
| EP0796669A3 (de) | 1996-03-19 | 1998-04-29 | Siemens Aktiengesellschaft | Ultraschallwandler |
| US5755909A (en) * | 1996-06-26 | 1998-05-26 | Spectra, Inc. | Electroding of ceramic piezoelectric transducers |
| JP3673035B2 (ja) | 1996-10-25 | 2005-07-20 | 株式会社東芝 | 超音波トランスジューサ |
| JP2001223556A (ja) * | 2000-02-14 | 2001-08-17 | Ueda Japan Radio Co Ltd | 圧電振動子及びアレイ型圧電振動子 |
| JP2001340340A (ja) | 2000-06-02 | 2001-12-11 | Toshiba Corp | 超音波診断装置 |
| US7036363B2 (en) | 2003-07-03 | 2006-05-02 | Pathfinder Energy Services, Inc. | Acoustic sensor for downhole measurement tool |
| US7224104B2 (en) * | 2003-12-09 | 2007-05-29 | Kabushiki Kaisha Toshiba | Ultrasonic probe and ultrasonic diagnostic apparatus |
| JP4769127B2 (ja) | 2005-05-30 | 2011-09-07 | 株式会社東芝 | 超音波プローブ及び超音波プローブ製造方法 |
| JP2006345312A (ja) | 2005-06-09 | 2006-12-21 | Denso Corp | 超音波センサ及び超音波振動子 |
| US20070041273A1 (en) | 2005-06-21 | 2007-02-22 | Shertukde Hemchandra M | Acoustic sensor |
| JP4842726B2 (ja) | 2006-07-18 | 2011-12-21 | 富士フイルム株式会社 | 超音波検査装置 |
| JP5002402B2 (ja) | 2007-10-03 | 2012-08-15 | 株式会社東芝 | 超音波探触子及び超音波診断装置 |
| WO2010044312A1 (ja) * | 2008-10-17 | 2010-04-22 | コニカミノルタエムジー株式会社 | アレイ型超音波振動子 |
| US20110257532A1 (en) * | 2008-12-25 | 2011-10-20 | Konica Minolta Medical & Graphic, Inc. | Ultrasonic probe and method of preparing ultrasonic probe |
| JP5099175B2 (ja) | 2010-05-28 | 2012-12-12 | 株式会社村田製作所 | 超音波センサ |
| JP6519136B2 (ja) | 2014-09-26 | 2019-05-29 | ブラザー工業株式会社 | 圧電アクチュエータ、及び、圧電アクチュエータの製造方法 |
| JP6261820B2 (ja) * | 2015-05-11 | 2018-01-17 | 富士フイルム株式会社 | 電気音響変換フィルム原反、電気音響変換フィルム、および、その製造方法 |
| JP2017099664A (ja) * | 2015-12-02 | 2017-06-08 | セイコーエプソン株式会社 | 超音波プローブユニット、超音波プローブ、及び超音波装置 |
| JP2017176311A (ja) * | 2016-03-29 | 2017-10-05 | セイコーエプソン株式会社 | 超音波デバイス、超音波測定装置、及び超音波画像表示装置 |
| GB2571361B (en) * | 2018-03-02 | 2020-04-22 | Novosound Ltd | Ultrasound array transducer manufacturing |
| WO2020102564A1 (en) * | 2018-11-14 | 2020-05-22 | Invensense, Inc. | Dual electrode piezoelectric micromachined ultrasound transducer device |
-
2019
- 2019-10-17 GB GB1915002.8A patent/GB2588218B/en active Active
-
2020
- 2020-10-13 KR KR1020227007019A patent/KR102907521B1/ko active Active
- 2020-10-13 US US17/765,841 patent/US12569884B2/en active Active
- 2020-10-13 EP EP20876631.1A patent/EP4045880B1/en active Active
- 2020-10-13 WO PCT/IB2020/059611 patent/WO2021074792A1/en not_active Ceased
- 2020-10-13 JP JP2022516450A patent/JP2022552082A/ja active Pending
- 2020-10-13 CN CN202080070606.6A patent/CN114502927B/zh active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3952387A (en) * | 1973-07-03 | 1976-04-27 | Tokyo Shibaura Electric Co., Ltd. | Method of manufacturing an ultrasonic probe |
| EP1145772A2 (de) * | 2000-04-13 | 2001-10-17 | intelligeNDT Systems & Services GmbH & Co. KG | Ultraschallwandler und Verfahren zur Herstellung eines Ultraschallwandlers |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102907521B1 (ko) | 2026-01-05 |
| US20220339670A1 (en) | 2022-10-27 |
| GB201915002D0 (en) | 2019-12-04 |
| EP4045880A1 (en) | 2022-08-24 |
| EP4045880B1 (en) | 2026-03-04 |
| KR20220082808A (ko) | 2022-06-17 |
| EP4045880A4 (en) | 2023-11-01 |
| US12569884B2 (en) | 2026-03-10 |
| GB2588218B (en) | 2021-10-27 |
| EP4045880C0 (en) | 2026-03-04 |
| WO2021074792A1 (en) | 2021-04-22 |
| CN114502927A (zh) | 2022-05-13 |
| JP2022552082A (ja) | 2022-12-15 |
| GB2588218A (en) | 2021-04-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |