KR102798978B1 - 가스 전달을 위한 모듈형 컴포넌트 시스템 - Google Patents

가스 전달을 위한 모듈형 컴포넌트 시스템 Download PDF

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KR102798978B1
KR102798978B1 KR1020217037133A KR20217037133A KR102798978B1 KR 102798978 B1 KR102798978 B1 KR 102798978B1 KR 1020217037133 A KR1020217037133 A KR 1020217037133A KR 20217037133 A KR20217037133 A KR 20217037133A KR 102798978 B1 KR102798978 B1 KR 102798978B1
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gas
primitive
port
substrate
substrates
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KR20210140779A (ko
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존 폴든 스텀프
데미안 롱
노르만 나카시마
칼 프레드릭 리저
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램 리써치 코포레이션
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    • H01L21/67017—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Pipeline Systems (AREA)
  • Compressor (AREA)
KR1020217037133A 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템 Active KR102798978B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020257012589A KR20250057125A (ko) 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962834241P 2019-04-15 2019-04-15
US62/834,241 2019-04-15
PCT/US2020/028158 WO2020214616A1 (en) 2019-04-15 2020-04-14 Modular-component system for gas delivery

Related Child Applications (1)

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KR1020257012589A Division KR20250057125A (ko) 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템

Publications (2)

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KR20210140779A KR20210140779A (ko) 2021-11-23
KR102798978B1 true KR102798978B1 (ko) 2025-04-21

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KR1020217037133A Active KR102798978B1 (ko) 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템
KR1020257012589A Pending KR20250057125A (ko) 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템

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KR1020257012589A Pending KR20250057125A (ko) 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템

Country Status (6)

Country Link
US (2) US11996301B2 (https=)
JP (2) JP7553468B2 (https=)
KR (2) KR102798978B1 (https=)
CN (2) CN113994460B (https=)
TW (1) TWI860346B (https=)
WO (1) WO2020214616A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102822934B1 (ko) 2018-05-07 2025-06-18 램 리써치 코포레이션 설정가능한 (configurable) 분산 인터록킹 시스템
CN113994460B (zh) * 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统
US20230238253A1 (en) * 2020-11-17 2023-07-27 Lam Research Corporation Gas box with cross-flow exhaust system
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
US20240183463A1 (en) * 2021-03-03 2024-06-06 Ichor Systems, Inc. Fluid delivery system
US20230139688A1 (en) * 2021-10-29 2023-05-04 Applied Materials, Inc. Modular multi-directional gas mixing block
KR20240158338A (ko) * 2022-03-10 2024-11-04 어플라이드 머티어리얼스, 인코포레이티드 모듈식 다방향 가스 혼합 블록
CN116293440A (zh) * 2023-03-16 2023-06-23 鸿舸半导体设备(上海)有限公司 一种集成安装座及输送设备与装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001503840A (ja) * 1996-10-30 2001-03-21 ユニット インスツルメンツ インコーポレイテッド ガスパネル

Family Cites Families (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5944048A (en) * 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
US6394138B1 (en) * 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
US6302141B1 (en) 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
JPH10220698A (ja) * 1996-12-03 1998-08-21 Nippon Aera Kk 流体制御装置
US5836355A (en) * 1996-12-03 1998-11-17 Insync Systems, Inc. Building blocks for integrated gas panel
US5860676A (en) * 1997-06-13 1999-01-19 Swagelok Marketing Co. Modular block assembly using angled fasteners for interconnecting fluid components
US6068016A (en) * 1997-09-25 2000-05-30 Applied Materials, Inc Modular fluid flow system with integrated pump-purge
US6142164A (en) * 1998-03-09 2000-11-07 Ultra Clean Technology Systems & Service, Inc. Method and apparatus for removing leaking gas in an integrated gas panel system
JP3780096B2 (ja) * 1998-04-27 2006-05-31 シーケーディ株式会社 プロセスガス供給ユニット
US7036528B2 (en) * 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
US6510351B1 (en) 1999-03-15 2003-01-21 Fisher-Rosemount Systems, Inc. Modifier function blocks in a process control system
US6186177B1 (en) * 1999-06-23 2001-02-13 Mks Instruments, Inc. Integrated gas delivery system
US6283155B1 (en) * 1999-12-06 2001-09-04 Insync Systems, Inc. System of modular substrates for enabling the distribution of process fluids through removable components
US20020134507A1 (en) * 1999-12-22 2002-09-26 Silicon Valley Group, Thermal Systems Llc Gas delivery metering tube
KR100714755B1 (ko) * 2000-03-10 2007-05-07 동경 엘렉트론 주식회사 유체 제어장치
JP3462842B2 (ja) 2000-05-25 2003-11-05 住友化学工業株式会社 プロセス制御方法、プロセス制御装置、プロセス制御システムおよびプロセス制御方法を実行するプログラムを記録した記録媒体
JP4156184B2 (ja) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー 集積化ガス制御装置
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
US6618628B1 (en) 2000-10-05 2003-09-09 Karl A. Davlin Distributed input/output control systems and methods
US6349744B1 (en) * 2000-10-13 2002-02-26 Mks Instruments, Inc. Manifold for modular gas box system
JP2002349797A (ja) * 2001-05-23 2002-12-04 Fujikin Inc 流体制御装置
JP4571350B2 (ja) 2001-09-12 2010-10-27 東京エレクトロン株式会社 インターロック機構，インターロック方法および熱処理装置
US20040015336A1 (en) 2002-07-19 2004-01-22 Kulesz James J. Automatic detection and assessment of chemical, biological, radiological and nuclear threats
US7834754B2 (en) 2002-07-19 2010-11-16 Ut-Battelle, Llc Method and system for monitoring environmental conditions
AU2003262953A1 (en) * 2002-08-27 2004-03-19 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
JP4092164B2 (ja) * 2002-09-20 2008-05-28 シーケーディ株式会社 ガス供給ユニット
WO2004036099A1 (ja) * 2002-10-21 2004-04-29 Ckd Corporation ガス集積弁
JP4331464B2 (ja) * 2002-12-02 2009-09-16 株式会社渡辺商行 気化器への原料溶液供給系及び洗浄方法
CA2547826C (en) * 2003-12-09 2008-02-12 Asiaworld Shipping Services Pty Ltd Residual gas removal method
US7370674B2 (en) * 2004-02-20 2008-05-13 Michael Doyle Modular fluid distribution system
US7048008B2 (en) * 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2006009969A (ja) * 2004-06-25 2006-01-12 Kitz Sct:Kk 集積化ガス制御装置用流路ブロックとその製造方法並びに集積化ガス制御装置
US7458397B2 (en) * 2004-07-09 2008-12-02 Michael Doyle Modular fluid distribution system
US7004199B1 (en) * 2004-08-04 2006-02-28 Fujikin Incorporated Fluid control apparatus
US7299825B2 (en) * 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2007034667A (ja) * 2005-07-27 2007-02-08 Surpass Kogyo Kk 流量コントローラ、これに用いるレギュレータユニット、バルブユニット
JP4722613B2 (ja) 2005-08-02 2011-07-13 株式会社ジェイテクト 分散制御システム
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
US7634320B2 (en) 2006-02-24 2009-12-15 Tokyo Electron Limited Interlock control apparatus
JP4256884B2 (ja) * 2006-06-23 2009-04-22 東京エレクトロン株式会社 気化器への原料液供給ユニット
CN101506561B (zh) * 2006-08-23 2012-04-18 株式会社堀场Stec 组合式气体分配盘装置
US20080078189A1 (en) 2006-09-28 2008-04-03 Sumitomo Heavy Industries, Ltd. Communication network system
JP4952228B2 (ja) 2006-12-18 2012-06-13 株式会社ジェイテクト Ｐｌｃ分散制御システム
JP5150628B2 (ja) * 2007-05-31 2013-02-20 東京エレクトロン株式会社 流体制御装置
US7784496B2 (en) * 2007-06-11 2010-08-31 Lam Research Corporation Triple valve inlet assembly
US7806143B2 (en) * 2007-06-11 2010-10-05 Lam Research Corporation Flexible manifold for integrated gas system gas panels
US20090076628A1 (en) 2007-09-18 2009-03-19 David Mark Smith Methods and apparatus to upgrade and provide control redundancy in process plants
US8322380B2 (en) 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
US20090120364A1 (en) * 2007-11-09 2009-05-14 Applied Materials, Inc. Gas mixing swirl insert assembly
WO2009085866A2 (en) * 2007-12-27 2009-07-09 Lam Research Corporation Gas transport delay resolution for short etch recipes
JP5141905B2 (ja) 2007-12-28 2013-02-13 オムロン株式会社 安全マスタ
JP2010084854A (ja) * 2008-09-30 2010-04-15 Tokyo Electron Ltd ガス供給装置
US8307854B1 (en) * 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) * 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
US8916995B2 (en) 2009-12-02 2014-12-23 General Electric Company Method and apparatus for switching electrical power
US8950433B2 (en) * 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
JP5933936B2 (ja) * 2011-06-17 2016-06-15 株式会社堀場エステック 流量測定システム、流量制御システム、及び、流量測定装置
US9447536B2 (en) 2011-10-14 2016-09-20 Delaware Capital Formation, Inc. Intelligent network for chemical dispensing system
JP5868219B2 (ja) * 2012-02-29 2016-02-24 株式会社フジキン 流体制御装置
US9091397B2 (en) * 2012-03-27 2015-07-28 Lam Research Corporation Shared gas panels in plasma processing chambers employing multi-zone gas feeds
JP6012247B2 (ja) 2012-04-27 2016-10-25 株式会社フジキン 流体制御装置
EP2664933B1 (de) 2012-05-15 2014-06-25 Omicron electronics GmbH Testgerät, Testsystem und Verfahren zum Testen eines energietechnischen Prüflings
US8916988B2 (en) 2012-10-23 2014-12-23 General Electric Company Systems and methods for use in operating power generation systems
JP6526374B2 (ja) 2013-04-25 2019-06-05 株式会社堀場エステック 流体制御装置
JP6442843B2 (ja) 2014-03-14 2018-12-26 オムロン株式会社 制御装置
US10402358B2 (en) 2014-09-30 2019-09-03 Honeywell International Inc. Module auto addressing in platform bus
JP6789932B2 (ja) * 2014-10-17 2020-11-25 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 調整可能ガスフロー制御のためのガス分離器を含むガス供給配送配置
US10557197B2 (en) * 2014-10-17 2020-02-11 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor
JP6443190B2 (ja) 2015-04-06 2018-12-26 オムロン株式会社 プログラマブルロジックコントローラ、プログラマブルロジックコントローラの制御方法、及び、制御プログラム
US10443128B2 (en) * 2015-04-18 2019-10-15 Versum Materials Us, Llc Vessel and method for delivery of precursor materials
US9952948B2 (en) 2016-03-23 2018-04-24 GM Global Technology Operations LLC Fault-tolerance pattern and switching protocol for multiple hot and cold standby redundancies
SG10202012083YA (en) * 2016-04-04 2021-01-28 Ichor Systems Inc Liquid delivery system
CN109312874B (zh) * 2016-06-21 2020-11-03 株式会社富士金 流体控制装置
US10303189B2 (en) * 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
JP6938034B2 (ja) * 2016-09-12 2021-09-22 株式会社フジキン 流体制御装置、これに用いるベースブロックおよび流体制御装置の製造方法
KR20190116372A (ko) * 2017-03-15 2019-10-14 가부시키가이샤 후지킨 조인트 및 유체 제어 장치
WO2018180449A1 (ja) * 2017-03-28 2018-10-04 株式会社フジキン 継手ブロックおよびこれを用いた流体制御装置
KR20190130008A (ko) * 2017-03-29 2019-11-20 가부시키가이샤 후지킨 변환 조인트, 그 변환 조인트를 가지는 집적형 유체 공급 장치 및 유체용 부품의 장착 방법
CN109104875B (zh) 2017-04-20 2021-07-02 株式会社V泰克斯 真空容器内压力多控制装置与真空容器内压力多控制方法
KR102822934B1 (ko) 2018-05-07 2025-06-18 램 리써치 코포레이션 설정가능한 (configurable) 분산 인터록킹 시스템
WO2020016817A1 (en) * 2018-07-17 2020-01-23 Compart Systems Pte. Ltd. Mounting structures for flow substrates
CA3126775A1 (en) * 2019-01-29 2020-08-06 Compart Systems Pte. Ltd. Weld cap and plug welds fluid delivery systems
CN113994460B (zh) 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001503840A (ja) * 1996-10-30 2001-03-21 ユニット インスツルメンツ インコーポレイテッド ガスパネル

Also Published As

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JP2022529263A (ja) 2022-06-20
US20240347349A1 (en) 2024-10-17
US11996301B2 (en) 2024-05-28
TWI860346B (zh) 2024-11-01
WO2020214616A1 (en) 2020-10-22
KR20250057125A (ko) 2025-04-28
KR20210140779A (ko) 2021-11-23
US20220199431A1 (en) 2022-06-23
TW202516126A (zh) 2025-04-16
CN120473408A (zh) 2025-08-12
CN113994460B (zh) 2025-05-20
JP2024174940A (ja) 2024-12-17
JP7553468B2 (ja) 2024-09-18
CN113994460A (zh) 2022-01-28
TW202120861A (zh) 2021-06-01

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