KR102645968B1 - 물품 반송차 - Google Patents
물품 반송차 Download PDFInfo
- Publication number
- KR102645968B1 KR102645968B1 KR1020190082989A KR20190082989A KR102645968B1 KR 102645968 B1 KR102645968 B1 KR 102645968B1 KR 1020190082989 A KR1020190082989 A KR 1020190082989A KR 20190082989 A KR20190082989 A KR 20190082989A KR 102645968 B1 KR102645968 B1 KR 102645968B1
- Authority
- KR
- South Korea
- Prior art keywords
- fork
- guide rail
- fixed
- guide
- respect
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2018-197080 | 2018-10-19 | ||
JP2018197080A JP7099245B2 (ja) | 2018-10-19 | 2018-10-19 | 物品搬送車 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20200044669A KR20200044669A (ko) | 2020-04-29 |
KR102645968B1 true KR102645968B1 (ko) | 2024-03-11 |
Family
ID=70310237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020190082989A KR102645968B1 (ko) | 2018-10-19 | 2019-07-10 | 물품 반송차 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7099245B2 (zh) |
KR (1) | KR102645968B1 (zh) |
CN (1) | CN111071713B (zh) |
TW (1) | TWI800663B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102235517B1 (ko) | 2020-11-02 | 2021-04-01 | 시너스텍 주식회사 | 오버헤드 호이스트 방식의 스토커 시스템 |
KR102534409B1 (ko) * | 2020-11-23 | 2023-05-18 | 세메스 주식회사 | 이송 장치 |
WO2023051808A1 (zh) * | 2021-09-30 | 2023-04-06 | 弥费科技(上海)股份有限公司 | 横向移载装置、空中运输设备及自动物料搬送系统 |
CN114132704A (zh) * | 2021-12-14 | 2022-03-04 | 华芯(嘉兴)智能装备有限公司 | 一种轨道小车的双向伸缩装置 |
WO2023218757A1 (ja) * | 2022-05-10 | 2023-11-16 | 村田機械株式会社 | 天井搬送車 |
WO2023233863A1 (ja) * | 2022-06-01 | 2023-12-07 | 村田機械株式会社 | 天井搬送車 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005008336A (ja) * | 2003-06-18 | 2005-01-13 | Line Kogyo Kk | スライドフォーク使用の搬送装置 |
JP2008127200A (ja) * | 2006-11-27 | 2008-06-05 | Murata Mach Ltd | 天井走行車 |
WO2018055883A1 (ja) * | 2016-09-26 | 2018-03-29 | 村田機械株式会社 | 天井搬送システム、及び天井搬送車 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW299766U (en) * | 1996-03-08 | 1997-03-01 | Yau Cheng Co Ltd | Automatic material feeding/withdrawing mechanism of warehouse |
KR100743194B1 (ko) * | 2006-03-22 | 2007-07-27 | 삼성전자주식회사 | 이송시스템 |
CN104960820B (zh) * | 2009-11-27 | 2017-05-31 | 株式会社大福 | 顶棚输送车 |
KR20120003368A (ko) * | 2010-07-02 | 2012-01-10 | 무라텍 오토메이션 가부시키가이샤 | 천정 반송차의 그리퍼 장치 및 천정 반송차 |
JP5590422B2 (ja) * | 2012-06-13 | 2014-09-17 | 株式会社ダイフク | 物品搬送設備 |
CN204297477U (zh) * | 2014-09-24 | 2015-04-29 | 东莞市冠佳电子设备有限公司 | 电源适配器自动老化设备 |
JP6586936B2 (ja) * | 2016-09-21 | 2019-10-09 | 株式会社ダイフク | 物品搬送設備 |
CN108005204A (zh) * | 2018-01-11 | 2018-05-08 | 邵丽丹 | 一种小便池自动清洗装置 |
-
2018
- 2018-10-19 JP JP2018197080A patent/JP7099245B2/ja active Active
-
2019
- 2019-07-02 TW TW108123321A patent/TWI800663B/zh active
- 2019-07-10 KR KR1020190082989A patent/KR102645968B1/ko active IP Right Grant
- 2019-09-24 CN CN201910902721.4A patent/CN111071713B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005008336A (ja) * | 2003-06-18 | 2005-01-13 | Line Kogyo Kk | スライドフォーク使用の搬送装置 |
JP2008127200A (ja) * | 2006-11-27 | 2008-06-05 | Murata Mach Ltd | 天井走行車 |
WO2018055883A1 (ja) * | 2016-09-26 | 2018-03-29 | 村田機械株式会社 | 天井搬送システム、及び天井搬送車 |
Also Published As
Publication number | Publication date |
---|---|
JP2020065015A (ja) | 2020-04-23 |
JP7099245B2 (ja) | 2022-07-12 |
CN111071713B (zh) | 2022-10-28 |
KR20200044669A (ko) | 2020-04-29 |
TWI800663B (zh) | 2023-05-01 |
CN111071713A (zh) | 2020-04-28 |
TW202015998A (zh) | 2020-05-01 |
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E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant |