KR102546223B1 - 다수의 다이들을 포함하는 pop(package-on-package) 구조 - Google Patents
다수의 다이들을 포함하는 pop(package-on-package) 구조 Download PDFInfo
- Publication number
- KR102546223B1 KR102546223B1 KR1020187002486A KR20187002486A KR102546223B1 KR 102546223 B1 KR102546223 B1 KR 102546223B1 KR 1020187002486 A KR1020187002486 A KR 1020187002486A KR 20187002486 A KR20187002486 A KR 20187002486A KR 102546223 B1 KR102546223 B1 KR 102546223B1
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- Prior art keywords
- die
- conductive path
- layer
- pid
- pop structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5384—Conductive vias through the substrate with or without pins, e.g. buried coaxial conductors
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- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
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- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Geometry (AREA)
- Packages (AREA)
- Medical Preparation Storing Or Oral Administration Devices (AREA)
- Die Bonding (AREA)
- Packaging Frangible Articles (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Hybrid Cells (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Optical Measuring Cells (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/812,476 | 2015-07-29 | ||
| US14/812,476 US9401350B1 (en) | 2015-07-29 | 2015-07-29 | Package-on-package (POP) structure including multiple dies |
| PCT/US2016/044487 WO2017019866A1 (en) | 2015-07-29 | 2016-07-28 | Package-on-package (pop) structure including multiple dies |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20180035806A KR20180035806A (ko) | 2018-04-06 |
| KR102546223B1 true KR102546223B1 (ko) | 2023-06-20 |
Family
ID=56411293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020187002486A Active KR102546223B1 (ko) | 2015-07-29 | 2016-07-28 | 다수의 다이들을 포함하는 pop(package-on-package) 구조 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9401350B1 (enExample) |
| EP (2) | EP3329512A1 (enExample) |
| JP (1) | JP6914245B2 (enExample) |
| KR (1) | KR102546223B1 (enExample) |
| CN (1) | CN107851588B (enExample) |
| BR (1) | BR112018001783B8 (enExample) |
| CA (1) | CA2990470A1 (enExample) |
| WO (1) | WO2017019866A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017209761A1 (en) * | 2016-06-03 | 2017-12-07 | Intel IP Corporation | Wireless module with antenna package and cap package |
| US9837341B1 (en) * | 2016-09-15 | 2017-12-05 | Intel Corporation | Tin-zinc microbump structures |
| WO2018182610A1 (en) * | 2017-03-30 | 2018-10-04 | Intel Corporation | Package architecture utilizing photoimageable dielectric (pid) for reduced bump pitch |
| EP3602642A4 (en) * | 2017-03-31 | 2020-12-23 | 3M Innovative Properties Company | ELECTRONIC DEVICES INCLUDING SOLID SEMICONDUCTOR CHIPS |
| ES2936243T3 (es) | 2018-07-23 | 2023-03-15 | Borealis Ag | Película de polipropileno multicapa |
| US10665572B2 (en) * | 2018-08-15 | 2020-05-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor package and manufacturing method thereof |
| US20200083154A1 (en) | 2018-09-10 | 2020-03-12 | At&S Austria Technologie & Systemtechnik Aktiengesellschaft | Component Carrier With a Photoimageable Dielectric Layer and a Structured Conductive Layer Being Used as a Mask for Selectively Exposing the Photoimageable Dielectric Layer With Electromagnetic Radiation |
| WO2020103147A1 (zh) | 2018-11-23 | 2020-05-28 | 北京比特大陆科技有限公司 | 芯片散热结构、芯片结构、电路板和超算设备 |
| EP3723459A1 (en) | 2019-04-10 | 2020-10-14 | AT & S Austria Technologie & Systemtechnik Aktiengesellschaft | Component carrier with high passive intermodulation (pim) performance |
| CN113924211B (zh) | 2019-06-05 | 2023-09-22 | 北欧化工公司 | 多层聚丙烯膜 |
| KR102764370B1 (ko) | 2019-12-26 | 2025-02-07 | 삼성전자주식회사 | 반도체 패키지 |
| CN112867243A (zh) * | 2021-01-06 | 2021-05-28 | 英韧科技(上海)有限公司 | 多层电路板 |
| US20240222142A1 (en) * | 2022-12-28 | 2024-07-04 | Applied Materials, Inc. | Efficient autocatalytic metallization of polymeric surfaces |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010205893A (ja) * | 2009-03-03 | 2010-09-16 | Nec Corp | 半導体装置及びその製造方法 |
| US20130234322A1 (en) | 2012-03-08 | 2013-09-12 | Stats Chippac, Ltd. | Thin 3D Fan-Out Embedded Wafer Level Package (EWLB) for Application Processor and Memory Integration |
| JP2014195076A (ja) * | 2013-03-28 | 2014-10-09 | Intel Corp | パッケージ、方法、及び装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5798909A (en) | 1995-02-15 | 1998-08-25 | International Business Machines Corporation | Single-tiered organic chip carriers for wire bond-type chips |
| US6437433B1 (en) | 2000-03-24 | 2002-08-20 | Andrew C. Ross | CSP stacking technology using rigid/flex construction |
| US6404043B1 (en) | 2000-06-21 | 2002-06-11 | Dense-Pac Microsystems, Inc. | Panel stacking of BGA devices to form three-dimensional modules |
| US7122904B2 (en) * | 2002-04-25 | 2006-10-17 | Macronix International Co., Ltd. | Semiconductor packaging device and manufacture thereof |
| US7388294B2 (en) | 2003-01-27 | 2008-06-17 | Micron Technology, Inc. | Semiconductor components having stacked dice |
| US20090008792A1 (en) * | 2004-11-19 | 2009-01-08 | Industrial Technology Research Institute | Three-dimensional chip-stack package and active component on a substrate |
| US20080157316A1 (en) * | 2007-01-03 | 2008-07-03 | Advanced Chip Engineering Technology Inc. | Multi-chips package and method of forming the same |
| US20110024890A1 (en) * | 2007-06-29 | 2011-02-03 | Stats Chippac, Ltd. | Stackable Package By Using Internal Stacking Modules |
| TWI338941B (en) * | 2007-08-22 | 2011-03-11 | Unimicron Technology Corp | Semiconductor package structure |
| JPWO2010101163A1 (ja) * | 2009-03-04 | 2012-09-10 | 日本電気株式会社 | 機能素子内蔵基板及びそれを用いた電子デバイス |
| US8558374B2 (en) | 2011-02-08 | 2013-10-15 | Endicott Interconnect Technologies, Inc. | Electronic package with thermal interposer and method of making same |
| US8883561B2 (en) * | 2011-04-30 | 2014-11-11 | Stats Chippac, Ltd. | Semiconductor device and method of embedding TSV semiconductor die within encapsulant with TMV for vertical interconnect in POP |
| US20130186676A1 (en) * | 2012-01-20 | 2013-07-25 | Futurewei Technologies, Inc. | Methods and Apparatus for a Substrate Core Layer |
| CN202871783U (zh) * | 2012-08-31 | 2013-04-10 | 江阴长电先进封装有限公司 | 一种芯片嵌入式堆叠圆片级封装结构 |
| US20140246781A1 (en) * | 2013-03-04 | 2014-09-04 | Kabushiki Kaisha Toshiba | Semiconductor device, method of forming a packaged chip device and chip package |
| KR102065008B1 (ko) * | 2013-09-27 | 2020-01-10 | 삼성전자주식회사 | 적층형 반도체 패키지 |
| US20150255411A1 (en) * | 2014-03-05 | 2015-09-10 | Omkar G. Karhade | Die-to-die bonding and associated package configurations |
-
2015
- 2015-07-29 US US14/812,476 patent/US9401350B1/en active Active
-
2016
- 2016-07-28 EP EP16751411.6A patent/EP3329512A1/en not_active Ceased
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- 2016-07-28 WO PCT/US2016/044487 patent/WO2017019866A1/en not_active Ceased
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- 2016-07-28 EP EP24194383.6A patent/EP4439634A3/en active Pending
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- 2016-07-28 CN CN201680044487.0A patent/CN107851588B/zh active Active
- 2016-07-28 BR BR112018001783A patent/BR112018001783B8/pt active IP Right Grant
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010205893A (ja) * | 2009-03-03 | 2010-09-16 | Nec Corp | 半導体装置及びその製造方法 |
| US20130234322A1 (en) | 2012-03-08 | 2013-09-12 | Stats Chippac, Ltd. | Thin 3D Fan-Out Embedded Wafer Level Package (EWLB) for Application Processor and Memory Integration |
| JP2014195076A (ja) * | 2013-03-28 | 2014-10-09 | Intel Corp | パッケージ、方法、及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3329512A1 (en) | 2018-06-06 |
| JP2018523919A (ja) | 2018-08-23 |
| EP4439634A3 (en) | 2025-01-15 |
| CA2990470A1 (en) | 2017-02-02 |
| KR20180035806A (ko) | 2018-04-06 |
| BR112018001783B1 (pt) | 2023-01-31 |
| JP6914245B2 (ja) | 2021-08-04 |
| US9401350B1 (en) | 2016-07-26 |
| BR112018001783B8 (pt) | 2023-02-14 |
| WO2017019866A1 (en) | 2017-02-02 |
| EP4439634A2 (en) | 2024-10-02 |
| CN107851588A (zh) | 2018-03-27 |
| CN107851588B (zh) | 2020-10-16 |
| BR112018001783A2 (pt) | 2018-09-11 |
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