KR102464713B1 - 고속 회전 기계용 적외선 온도 센서 - Google Patents

고속 회전 기계용 적외선 온도 센서 Download PDF

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Publication number
KR102464713B1
KR102464713B1 KR1020197006478A KR20197006478A KR102464713B1 KR 102464713 B1 KR102464713 B1 KR 102464713B1 KR 1020197006478 A KR1020197006478 A KR 1020197006478A KR 20197006478 A KR20197006478 A KR 20197006478A KR 102464713 B1 KR102464713 B1 KR 102464713B1
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KR
South Korea
Prior art keywords
infrared sensor
sensor system
temperature
rotor
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020197006478A
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English (en)
Korean (ko)
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KR20190044074A (ko
Inventor
브렌트 해슬럿
앤드류 그랜샘
제임스 헤이로크
Original Assignee
에드워즈 리미티드
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0022—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0088—Radiation pyrometry, e.g. infrared or optical thermometry in turbines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/026—Control of working procedures of a pyrometer, other than calibration; Bandwidth calculation; Gain control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/25—Devices for sensing temperature, or actuated thereby
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • G01J2005/063—Heating; Thermostating

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Radiation Pyrometers (AREA)
  • Control Of Electric Motors In General (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
KR1020197006478A 2016-09-06 2017-09-06 고속 회전 기계용 적외선 온도 센서 Expired - Fee Related KR102464713B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1615124.3 2016-09-06
GB1615124.3A GB2553374B (en) 2016-09-06 2016-09-06 Temperature sensor for a high speed rotating machine
PCT/GB2017/052596 WO2018046913A1 (en) 2016-09-06 2017-09-06 Infrared temperature sensor for a high speed rotating machine

Publications (2)

Publication Number Publication Date
KR20190044074A KR20190044074A (ko) 2019-04-29
KR102464713B1 true KR102464713B1 (ko) 2022-11-07

Family

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Family Applications (1)

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KR1020197006478A Expired - Fee Related KR102464713B1 (ko) 2016-09-06 2017-09-06 고속 회전 기계용 적외선 온도 센서

Country Status (9)

Country Link
US (1) US10837836B2 (enExample)
EP (1) EP3510369B1 (enExample)
JP (1) JP7273712B2 (enExample)
KR (1) KR102464713B1 (enExample)
CN (1) CN109642826B (enExample)
GB (1) GB2553374B (enExample)
SG (1) SG11201901869SA (enExample)
TW (1) TWI766879B (enExample)
WO (1) WO2018046913A1 (enExample)

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US20230043515A1 (en) * 2018-05-02 2023-02-09 Elatronic Ag Remote temperature measurement of cookware through a ceramic glass plate using an infrared sensor
JP7187186B2 (ja) * 2018-06-27 2022-12-12 エドワーズ株式会社 真空ポンプ、ステータコラム、ベースおよび真空ポンプの排気システム
US11031215B2 (en) * 2018-09-28 2021-06-08 Lam Research Corporation Vacuum pump protection against deposition byproduct buildup
EP3557073B1 (de) * 2019-03-07 2026-05-27 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3636933B1 (de) * 2019-09-11 2021-11-03 Pfeiffer Vacuum Gmbh Verfahren zum ermitteln einer temperatur mittels eines infrarot-sensors
EP3653885B1 (de) * 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh Verfahren zum ermitteln einer zustandsinformation in einem vakuumgerät
TWI804846B (zh) * 2021-04-09 2023-06-11 致揚科技股份有限公司 高可靠性的渦輪分子泵及其系統
TWI757158B (zh) * 2021-04-21 2022-03-01 致揚科技股份有限公司 高效率的渦輪分子泵裝置
CN114320989B (zh) * 2021-12-31 2022-12-02 北京中科科仪股份有限公司 一种分子泵测温装置、测温方法及运转部件的测温装置
US12068641B2 (en) 2022-06-15 2024-08-20 Livewire Ev, Llc Motor hotspot identification
CN116231972B (zh) * 2023-01-17 2023-12-19 华南理工大学 绕线式感应水轮发电机转子绕组温度检测的系统与方法

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JP2004116316A (ja) * 2002-09-24 2004-04-15 Boc Edwards Technologies Ltd 真空ポンプ
US20120146563A1 (en) * 2009-08-19 2012-06-14 Siemens Aktiengesellschaft Arrangement having an electric machine and method for operating an electric machine

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JP2004116316A (ja) * 2002-09-24 2004-04-15 Boc Edwards Technologies Ltd 真空ポンプ
US20120146563A1 (en) * 2009-08-19 2012-06-14 Siemens Aktiengesellschaft Arrangement having an electric machine and method for operating an electric machine

Also Published As

Publication number Publication date
US20190226914A1 (en) 2019-07-25
GB201615124D0 (en) 2016-10-19
KR20190044074A (ko) 2019-04-29
SG11201901869SA (en) 2019-03-28
TW201816371A (zh) 2018-05-01
JP7273712B2 (ja) 2023-05-15
EP3510369B1 (en) 2025-05-21
GB2553374A (en) 2018-03-07
GB2553374B (en) 2021-05-12
EP3510369A1 (en) 2019-07-17
JP2019529949A (ja) 2019-10-17
TWI766879B (zh) 2022-06-11
WO2018046913A1 (en) 2018-03-15
CN109642826B (zh) 2023-08-15
CN109642826A (zh) 2019-04-16
US10837836B2 (en) 2020-11-17

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