KR102462639B1 - 복수의 이격된 (나노)채널을 포함하는 템플릿으로 밸브 금속층을 변형시키는 방법 및 복수의 이격된 (나노)채널 내부에 이격된 구조체를 형성하는 방법 - Google Patents

복수의 이격된 (나노)채널을 포함하는 템플릿으로 밸브 금속층을 변형시키는 방법 및 복수의 이격된 (나노)채널 내부에 이격된 구조체를 형성하는 방법 Download PDF

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KR102462639B1
KR102462639B1 KR1020197035387A KR20197035387A KR102462639B1 KR 102462639 B1 KR102462639 B1 KR 102462639B1 KR 1020197035387 A KR1020197035387 A KR 1020197035387A KR 20197035387 A KR20197035387 A KR 20197035387A KR 102462639 B1 KR102462639 B1 KR 102462639B1
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스타니슬라프 피오트르 잔코브스키
필립 엠. 비르켄
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아이엠이씨 브이제트더블유
카톨리에케 유니버시테이트 루벤
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KR1020197035387A 2017-07-18 2018-07-10 복수의 이격된 (나노)채널을 포함하는 템플릿으로 밸브 금속층을 변형시키는 방법 및 복수의 이격된 (나노)채널 내부에 이격된 구조체를 형성하는 방법 Active KR102462639B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
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