KR102434876B1 - Cutting apparatus - Google Patents

Abstract

(Project) Maintaining the attraction force to the workpiece even if warpage occurs in the workpiece on the holding table.
(Solution) The cutting device 1 has a first pipe 65 that communicates the suction surface 41 with the first suction source 64, and an upper outlet 62 that connects the first pipe to the first suction source. ) and a branch pipe (61) branching to a lower outlet port (63) facing the second suction source (66), and a second pipe (67) for communicating the lower outlet port and the second suction source (66). By making the cross-sectional area (S1) of the branch pipe larger than the cross-sectional area (S2) of the first pipe, the flow rate of the fluid when it is transferred from the first pipe to the branch pipe is slowed, and the liquid is directed to the lower side of the branch pipe by the branch shape. by descending to the outlet of the , the gas and liquid are separated, and the gas is sucked at the first suction source and the liquid is sucked at the second suction source.

Description

CUTTING APPARATUS

The present invention relates to a cutting device that dresses a cutting blade using a dresser board.

In a cutting device, the cutting force of a cutting blade is maintained by regularly dressing a cutting blade during a cutting process. Dressing of the cutting blade is performed by cutting the cutting blade into the surface of the dresser board as the work piece that is sucked and held on the holding table (for example, refer to Patent Document 1). When a cutting groove is formed in the surface of the dresser board by the cutting blade, the stress balance of the front and back of the dresser board is disrupted, and one surface (upper surface) of the dresser board is bent in a concave shape. A gap is formed between the upper surface of the holding table and the lower surface of the dresser board due to the bending of the dresser board, and cutting water enters from the gap to decrease the suction force.

For this reason, a configuration in which the holding table regulates warpage of the dresser board accompanying the formation of the cutting groove is being studied so that a gap is not formed between the upper surface of the holding table and the lower surface of the dresser board. As a configuration for suppressing warpage of the dresser board, a configuration in which both ends of the dresser board are mechanically pressed on a holding table to regulate warpage of the dresser board has been studied (for example, refer to Patent Document 2). Similarly, a configuration in which one end of the dresser board is mechanically pressed on the holding table and the other end of the dresser board is strongly suctioned and held to regulate the warpage of the dresser board has been studied (for example, refer to Patent Document 3).

Japanese Patent Laid-Open No. 2013-22713 Japanese Patent Laid-Open No. 2011-258689 Japanese Patent No. 5350908 Publication

However, in the configuration in which the warpage of the dresser board is mechanically restricted as in Patent Documents 2 and 3, the configuration of the holding table is complicated. In order to suppress the warpage of the dresser board, it is conceivable to use a powerful suction pump, but there is a problem that a large installation is required. Moreover, in order to maintain a suction force without using a large suction pump, the structure which collects the cutting water which penetrated from a clearance gap in a tank, and drains it regularly is also conceivable. Usually, it is detected whether the cutting water is being sucked by a sensor or the like, and the cutting water is drained from the tank by switching the valve, but there is a problem that the suction force decreases with the short timing of the valve switching.

The present invention has been made in view of such a point, and an object of the present invention is to provide a cutting device capable of maintaining the attractive force to the workpiece even if warpage occurs in the workpiece on the holding table.

According to the present invention, as a cutting device, there is provided a holding table having a suction surface for sucking and holding a plate-shaped workpiece, and cutting for cutting the workpiece with a cutting blade while supplying cutting water to the workpiece sucked and held by the holding table. means and a suction force holding means for maintaining a suction force of the holding table for holding the workpiece by suction, the suction force holding means comprising: a first pipe for communicating the suction surface with a first suction source; and the first pipe In the middle, a branch pipe branching into an upper outlet facing the first suction source and a lower outlet facing the second suction source, and a second pipe communicating the lower outlet and the second suction source, The first suction source and the second suction source are ejectors, and communicate with a supply port for supplying air, an exhaust port for discharging air, and a negative pressure generating unit for generating negative pressure by flowing air from the supply port to the discharge port It has a suction port, the cross-sectional area of the branch pipe is made larger than the cross-sectional area of the first pipe, and due to the difference in the cross-sectional area, when the fluid is transferred from the first pipe to the branch pipe, the flow rate of the fluid becomes slow and the branch shape As a result, the gas sucked from the suction surface advances toward the outlet on the upper side of the branch pipe, and the liquid sucked from the suction face descends toward the outlet on the lower side of the branch pipe to separate the gas and liquid, respectively. There is provided a cutting device characterized in that the liquid is sucked from the second suction source and discharged from the second pipe to maintain the suction force of the suction surface by the first suction source.

According to this configuration, the cross-sectional area of the branch pipe is made larger than that of the first pipe to generate a difference in the cross-sectional area, so that when the flow rates of gas and liquid sucked from the suction surface of the holding table are transferred from the first pipe to the branch pipe, slows down Due to the decrease in the flow rate, the gas advances toward the outlet on the upper side of the branch pipe, and the liquid descends toward the outlet on the lower side of the branch pipe by its own weight, so that the gas and the liquid are properly separated. Since the liquid separated from the branch pipe is sucked by the second suction source, the suction force by the first suction source for sucking and holding the workpiece on the holding table is maintained even when the liquid is sucked together with the gas from the suction surface of the holding table. . Accordingly, there is no need to use a large suction device such as a pump having a strong suction power, and an ejector having a relatively weak suction power can be used for the first suction source and the second suction source. Accordingly, it is possible to reduce the size of the suction equipment for the workpiece.

According to the present invention, by forming the cross-sectional area of the branch pipe larger than the cross-sectional area of the first pipe and appropriately separating the gas and liquid, the suction force to the workpiece can be maintained even if the liquid is sucked together with the gas from the suction surface of the holding table. .

BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view of the cutting device which concerns on this embodiment.
It is a schematic sectional drawing of the holding table which concerns on this embodiment, and a suction path|route.
3 is a cross-sectional view showing transition of a dress operation by the cutting device according to the present embodiment.
4 is a cross-sectional view for explaining a dress procedure with respect to the dresser board according to the present embodiment.

Hereinafter, with reference to an accompanying drawing, the cutting device which concerns on this embodiment is demonstrated. 1 is a perspective view of a cutting device according to the present embodiment. In addition, the cutting device which concerns on this embodiment is not limited to the structure shown in FIG. Here, although a cutting device provided with a pair of cutting blades is illustrated, it is not limited to this structure. INDUSTRIAL APPLICABILITY The present invention can be applied to any cutting device as long as it is a cutting device that performs dressing of a cutting blade using a dresser board as a workpiece.

As shown in FIG. 1 , the cutting device 1 relatively moves a pair of cutting means 5 having a cutting blade 52 and a chuck table 3 holding a workpiece W to obtain a workpiece W . It is configured to cut The work W is carried into the cutting device 1 in a state supported by the ring frame 98 via the dicing tape 97 . Note that the work W may be a semiconductor wafer in which a semiconductor device is formed on a semiconductor substrate such as silicon or gallium arsenide, or an optical device wafer in which an optical device is formed in a substrate of an inorganic material such as ceramic, glass, or sapphire. Note that the work W may be a semiconductor substrate or an inorganic material substrate before device formation.

The center of the upper surface of the base 2 of the cutting device 1 is opened in a rectangular shape so as to extend in the X-axis direction, and the moving plate 31 and the waterproof cover 32 are formed so as to cover the opening. has been A chuck table 3 rotatable about the Z-axis is formed on the moving plate 31 . Below the waterproof cover 32 and the moving plate 31, a processing transfer means (not shown) for moving the chuck table 3 in the X-axis direction is formed. A holding surface 33 for holding the work W is formed on the upper surface of the chuck table 3 . Around the chuck table 3, four clamp portions 34 for clamping the ring frame 98 around the work W are formed.

Further, in the vicinity of the chuck table 3 on the moving plate 31 , a holding table 4 having a suction surface 41 is formed, and on the suction surface 41 , a dresser board 91 serving as a plate-shaped workpiece is provided. is maintained by suction. A plurality of suction grooves and suction holes are formed on the suction surface 41 of the holding table 4 , and the dresser board 91 is suctioned and held by the negative pressure generated on the suction surface 41 . The dresser board 91 is formed by solidifying green carborundum (GC) and white alderum (WA)-based abrasive grains into a rectangular plate shape when viewed from the top with a bonding agent such as a resin bond. The cutting blade 52 is dressed by cutting the cutting blade 52 into the dresser board 91 .

Moreover, on the upper surface of the base 2, the columnar column part 21 which stood up so that the opening extended in the X-axis direction might be spanned and formed is formed. In the columnar part 21 in the shape of a column, index feed means 7 for moving a pair of cutting means 5 in the Y-axis direction, and cutting feed means for moving a pair of cutting means 5 in the Z-axis direction (8) is formed. The index conveying means 7 is provided slidably on a pair of guide rails 71 parallel to the Y-axis direction, and a pair of guide rails 71 arranged on the front surface of the column part 21 . It has a pair of Y-axis tables 72 of a motor drive. The cutting feed means 8 is a pair of guide rails 81 parallel to the Z-axis direction arranged on the front surface of each Y-axis table 72, and a motor slidably provided on the pair of guide rails 81. It has a Z-axis table 82 of the drive.

The cutting means 5 for cutting the workpiece|work W is formed in the lower part of each Z-axis table 82. As shown in FIG. Moreover, a nut part (not shown) is formed in the back side of each Y-axis table 72, and the ball screw 73 is screwed into these nut parts. Moreover, on the back side of each Z-axis table 82, the nut part (not shown) is formed, and the ball screw 83 is screwed into these nut parts. Drive motors 74 and 84 are respectively connected to one end of the ball screw 73 for the Y-axis table 72 and the ball screw 83 for the Z-axis table 82 . The ball screws 73 and 83 are rotationally driven by these drive motors 74 and 84, whereby the pair of cutting means 5 is moved along the guide rails 71 and 81 in the Y-axis direction and the Z-axis direction. .

The pair of cutting means 5 is constituted by rotatably mounting a cutting blade 52 to the tip of a spindle (not shown) protruding from the housing 51 . The cutting blade 52 hardens|hardens a diamond abrasive grain with resin bond, and is shape|molded in the disk shape, for example. Moreover, in the housing 51 of the cutting means 5, the imaging means 53 which image the upper surface of the workpiece|work W is formed, and based on the image captured by the imaging means 53, with respect to the workpiece|work W. The cutting blade 52 is aligned. A pair of cutting means 5 cuts the workpiece|work W with the cutting blade 52, spraying cutting water to the workpiece|work W from a cutting nozzle (not shown).

In the cutting device 1 configured in this way, since it starts to be consumed from the point which contributes to cutting of the cutting blade 52 and the tip shape of the cutting blade 52 is disturbed, the dresser is regularly applied to the tip of the cutting blade 52 A dress is performed using the board 91 . The dress of the cutting blade 52 is performed by using the cutting blade 52 rotated at high speed while supplying cutting water to the dresser board 91 that is sucked and held on the suction surface 41 of the holding table 4 . This is done by cutting Thereby, the cutting blade 52 is raised, and the tip shape of the cutting blade 52 consumed by the cutting process is adjusted.

At this time, a fine gap is formed between the dresser board 91 and the holding table 4 due to the unevenness of the abrasive grain, but only a small amount of cutting water enters, and the suction force of the holding table 4 is not adversely affected. However, if the dress is repeated and the dresser board 91 is bent in a concave shape, a relatively large gap is formed between the dresser board 91 and the holding table 4, and the cutting water is sucked together with the gas to maintain the suction power. There is a fear that there will be no For this reason, although the structure which suppresses the curvature of the dresser board 91 and prevents the entry of the liquid into the holding table 4, and maintains a suction force is examined, the holding table 4 becomes a complicated structure.

Therefore, the present inventor studied a configuration in which the attractive force to the dresser board 91 is maintained even when the dresser board 91 is bent. In the cutting device 1, a T-shaped branch pipe 61 (refer to Fig. 2) is formed in the middle of the pipe path from the suction surface 41 to the suction source to divide the path through which the gas passes and the path through which the cutting water passes. , while holding the dresser board 91 by sucking gas from one suction source, and draining cutting water from the other suction source to suppress a decrease in the suction force. As a result, even when liquid is sucked from the holding table 4 together with the gas, the suction force of the holding table 4 can be maintained. 91) can be continuously suctioned.

Hereinafter, the suction path|route of a holding table is demonstrated in detail. It is a schematic diagram of the holding table which concerns on this embodiment, and a suction path|route. In addition, the holding table which concerns on this embodiment and a suction path|route are not limited to this structure, A change is possible suitably.

Below the holding table 4 , a suction force holding means 6 for holding the suction force of the holding table 4 with respect to the dresser board 91 is provided. The suction force holding means 6 includes a first pipe 65 that communicates the suction surface 41 of the holding table 4 with the first suction source 64 , and a first suction source in the middle of the first pipe 65 . A T-shaped branch pipe 61 branching into an upper outlet 62 facing toward 64 and an outlet 63 at a lower side facing the second suction source 66, the lower outlet 63 and the second A second pipe 67 through which the suction source 66 communicates is provided. That is, the branch pipe 61 formed in the middle of the first pipe 65 branches into a suction path toward the first suction source 64 and a suction path toward the second suction source 66 .

The first and second suction sources 64 and 66 are so-called ejectors, and the air supplied from the supply ports 11a and 15a is discharged from the discharge ports 11b and 15b. Air supply sources 13 and 17 are connected to supply ports 11a and 15a via valves 12 and 16, respectively, and exhaust boxes 14 and 18 are connected to exhaust ports 11b and 15b, respectively. In addition, in the middle portion between the supply ports 11a, 15a and the discharge ports 11b, 15b, a negative pressure generating unit for generating a negative pressure by narrowing the cross-sectional area and circulating air from the supply ports 11a, 15a to the discharge ports 11b, 15b (11c, 15c) is formed. At the side surfaces of the first and second suction sources 64 and 66, suction ports 11d, 15d communicating with the negative pressure generating portions 11c, 15c are formed.

The suction path of the first pipe 65 communicates with the negative pressure generating portion 11c of the first suction source 64 via the suction port 11d. As the air supplied from the air supply source 13 flows from the supply port 11a to the discharge port 11b, the fluid is drawn from the suction path of the first pipe 65 through the suction port 11d. Similarly, the suction path of the second pipe 67 communicates with the negative pressure generating portion 15c of the second suction source 66 through the suction port 15d. As the air supplied from the air supply source 17 flows from the supply port 15a to the discharge port 15b, the fluid is drawn from the suction path of the second pipe 67 through the suction port 15d. In the fluid discharged from the discharge ports 11b and 15b, dust and moisture mixed into the fluid are collected by the filters of the exhaust boxes 14 and 18.

In this way, when the suction paths of the first and second pipes 65 and 67 become negative pressure, a suction force is generated in the suction surface 41 of the holding table 4 . The cross-sectional area S1 of the branch pipe 61 is formed to be larger than the cross-sectional area S2 of the first pipe 65 . Due to the difference between the cross-sectional area of the branch pipe 61 and the cross-sectional area of the first pipe 65 , the fluid sucked from the suction surface 41 of the holding table 4 is transferred from the first pipe 65 to the branch pipe 61 . When the flow rate of the fluid slows down. Therefore, even if a warpage occurs in the dresser board 91 and the fluid including air (gas) and cutting water (liquid) is sucked from the suction surface 41 of the holding table 4 , the fluid in the branch pipe 61 is Air and cutting water are properly separated by the lowering of the flow rate.

And, due to the branching shape of the branch pipe 61, the air sucked from the suction face 41 advances toward the outlet 62 on the upper side of the branch pipe 61, and the cutting water sucked from the suction face 41 is minute. It descends by its own weight toward the outlet 63 of the lower side of the engine 61. As shown in FIG. The cutting water separated from the branch pipe (61) is sucked by the second suction source (66) and discharged from the second pipe (67), whereby the suction power of the suction surface (41) by the first suction source (64) is maintained. . Therefore, even if warpage occurs in the dresser board 91 (2 dashed-dotted lines in the drawing), the suction power of the suction surface 41 by the first suction source 64 does not decrease, and the dresser board ( 91) can be continuously suctioned and maintained.

Next, a dress of a cutting blade using a dresser board will be described in detail with reference to FIGS. 3 and 4 . Fig. 3 is a transition diagram of the dress operation according to the present embodiment. 4 is an explanatory diagram of a cutting procedure for the dresser board according to the present embodiment.

As shown in FIG. 3A , the valves 12 and 16 are opened to supply air from the air supply sources 13 and 17, and the first and second suction sources 64 and 66 2 Fluid in piping 65, 67 is drawn in. A negative pressure is generated on the suction surface 41 of the holding table 4 by the first and second suction sources 64 and 66 , and the dresser board 91 on the holding table 4 is attracted to the suction surface 41 . maintain. Then, a cutting groove 92 is formed by being cut from one end side of the dresser board 91 by the cutting blade 52 . When the cutting blade 52 cuts into the dresser board 91 , the outer peripheral surface of the cutting blade 52 is raised, and the tip shape of the cutting blade 52 is adjusted.

A cutting groove 92 is formed in the dresser board 91 by cutting by the cutting blade 52 . This cutting groove 92 is formed only on the surface side of the dresser board 91 , so that the The front and back stress balance is beginning to collapse. However, in the initial stage of this dress operation, the rigidity of the dresser board 91 itself and the suction force by the suction surface 41 are stronger than the contraction force on the surface side of the dresser board 91, so the dresser board 91 is not bent. and is held on the holding table (4). Accordingly, the cutting water is not drawn into the first and second suction sources 64 and 66 through the suction surface 41 .

As shown in FIG. 3B , as the cutting blade 52 cuts into the dresser board 91 repeatedly, the contracting force on the surface side of the dresser board 91 increases. The stress balance of the dresser board 91 is completely collapsed because the contracting force on the surface side of the dresser board 91 becomes stronger than the rigidity of the dresser board 91 itself or the attraction force by the suction surface 41 . Warpage occurs at one end of the Thereby, a gap is formed between the suction surface 41 of the holding table 4 and the lower surface of the dresser board 91, and from this gap, a fluid containing air indicated by a broken arrow and cutting water indicated by a solid arrow is discharged from the gap. It is attracted|sucked by the suction surface (41).

The fluid sucked from the suction surface 41 passes through the internal flow path 42 of the holding table 4 and is sent to the branch pipe 61 formed in the middle of the first pipe 65 . The cross-sectional area of the flow path of the branch pipe 61 is formed larger than the cross-sectional area of the flow path of the first pipe 65, and when the fluid enters the branch pipe 61 from the first pipe 65, the speed of the fluid decreases. . Then, the air in the fluid goes straight through the branch pipe 61 and is sucked from the upper outlet 62 to the first suction source 64 , and the cutting water in the fluid is drawn downward by its own weight in the branch pipe 61 . It is sucked from the lower outlet port 63 to the second suction source 66 . In this way, in the branch pipe 61, the air and the cutting water are appropriately separated, and are respectively sucked by different suction paths.

In this way, the second suction source 66 mainly sucks the cutting water and the first suction source 64 sucks air, thereby suppressing a decrease in the suction force by the first suction source 64 . Therefore, even when the dresser board 91 is deflected and air and cutting water are sucked from the suction surface 41 of the holding table 4, the cutting water is sucked by the second suction source 66 and the first suction source (64) can be continuously sucked air. Therefore, it is not necessary to form a suction facility with a strong suction power such as a suction pump as the suction source, and the dresser board 91 can be held by suction using an ejector having a relatively weak suction power.

The same ejectors may be used as the first and second suction sources 64 and 66 , and ejectors having different suction powers may be used as the first and second suction sources 64 and 66 . For example, an existing ejector may be used as the first suction source 64 , and an ejector having a suction force capable of sucking at least cutting water may be used as the second suction source 66 . Accordingly, as the second suction source 66 , it is also possible to use a small ejector having a weaker suction force than that of the first suction source 64 . Even with such a structure, since the fall of the attraction|suction force of the 1st suction source 64 is suppressed, even if the dresser board 91 is bent, it can continue to suction and hold appropriately.

Next, the dress procedure of the cutting blade 52 with respect to the dresser board 91 is demonstrated. FIG. 4A shows a case in which the dresser board 91 is used for a dress in a left-right balance from the center of the dresser board 91 toward both sides. In this case, cut is performed from the center of the dresser board 91 so that the cutting grooves 92 of the dresser board 91 are not biased to either side, so that the contracting force on the surface side of the dresser board 91 is partially strong. making sure not to support it. However, since the plurality of cutting grooves 92 are formed in the dresser board 91 , small warpage occurs at both ends of the dresser board 91 , and a gap is formed between the holding table 4 and the dresser board 91 . .

Even if a gap is formed between the holding table 4 and the dresser board 91 , the dresser board 91 can be sucked and held by the suction surface 41 . ) cannot be used for the dress of That is, in this dressing procedure, the area A1 on both ends of the dresser board 91 that is not cut into the cutting blade 52 cannot be used for the dressing of the cutting blade 52 . Accordingly, the remaining area usable for the dress of the cutting blade 52 is limited to the area A2 inside the area A1. In such a dress procedure, the dresser board 91 cannot be effectively used.

FIG. 4B shows a case where the plate-shaped dresser board 91 is sequentially used for a dress from one end side. In this case, the cut-out is performed from one end side of the dresser board 91 , and the cutting grooves 92 of the dresser board 91 are intensively formed on the one end side. For this reason, the stress balance of the dresser board 91 collapses at an early stage, and a large warpage occurs at one end of the dresser board 91 , so that the suction surface 41 of the holding table 4 and the dresser board 91 are A gap is formed between the lower surfaces of In addition, a cutting groove 92 is already formed on one end side of the dresser board 91 , and it is not used for dressing the cutting blade 52 .

As described above, even when a gap is formed between the holding table 4 and the dresser board 91 , the dresser board 91 can be sucked and held by the suction surface 41 . At this time, the point at which the dresser board 91 is bent is a point already used for dressing the cutting blade 52 , and no bending occurred at the point where the cutting blade 52 is not used for dress. That is, in this dress procedure, since warpage occurs in the area A3 in which the cutting groove 92 is already formed of the dresser board 91, the remaining area A4 in which the warpage does not occur is used for the dressing of the cutting blade 52. can be used for The dresser board 91 can be effectively utilized by such a dress procedure.

In the configuration on the assumption that the dresser board 91 is bent on the holding table 4 as in the present embodiment, the dress is performed in the dress order shown in FIG. 4B rather than the dress order shown in FIG. 4A. , it is possible to effectively utilize the entire dresser board 91 .

As mentioned above, in the cutting device 1 which concerns on this embodiment, the cross-sectional area of the branch pipe 61 is formed larger than the cross-sectional area of the 1st pipe 65, and by generating a difference in the cross-sectional area, suction of the holding table 4 is carried out. When the flow velocity of the air sucked from the surface 41 and the cutting water is transferred from the first pipe 65 to the branch pipe 61 , it becomes slow. Due to the decrease in the flow rate, air advances toward the outlet port 62 on the upper side of the branch pipe 61, and the cutting water descends toward the outlet port 63 at the lower side of the branch pipe 61 by its own weight. numbers are properly separated. The cutting water separated from the branch pipe 61 is sucked by the second suction source 66 to hold the dresser board 91 even when the cutting water is sucked along with the air from the suction surface 41 of the holding table 4 . The suction force by the 1st suction source 64 which is suction-held by the table 4 is maintained. Therefore, it is not necessary to use a large suction facility such as a pump with a large suction amount, and an ejector with a relatively small suction amount can be used for the first suction source 64 and the second suction source 66 .

In addition, this invention is not limited to the said embodiment, It is possible to carry out with various changes. In the said embodiment, about the size, shape, etc. shown in an accompanying drawing, it is not limited to this, It is possible to change suitably within the range which exhibits the effect of this invention. In addition, as long as it does not deviate from the objective range of this invention, it can change suitably and implement.

For example, in the above-described embodiment, the air supply sources 13 and 17 and the valves 12 and 16 are individually connected to each of the first and second suction sources 64 and 66, but in this configuration not limited For example, a common air supply source and a valve may be provided in the first and second suction sources 64 and 66 . By making the air supply source and the valve common to the first and second suction sources 64 and 66, the device configuration can be simplified. Even in such a configuration, it is possible to suppress a decrease in the suction force in the holding table 4 when the dresser board 91 is warped on the holding table 4 .

Moreover, although the T-shaped branch pipe 61 was used in said embodiment, the shape of the branch pipe 61 is not limited to a T-shape. The branch pipe 61 has a larger cross-sectional area than the first pipe 65, and may be branched so as to be able to separate gas and liquid by the upper outlet 62 and the lower outlet 63 . For example, the branch pipe 61 may be formed in the horizontal Y-shape branched diagonally upward and diagonally downward, and the branch pipe 61 may be formed in the horizontal direction T-shape branched up and down. In addition, the branch pipe 61 may branch into two or more branches as long as gas and liquid are separable.

Moreover, although the cutting device for blade dicing was illustrated as the cutting device 1 in said embodiment, it is not limited to this structure. The cutting device 1 may be a cutting device for edge trimming. In the case of the cutting device for edge trimming, the flat dress which shapes the front-end|tip of a cutting blade to a flat may be implemented.

Moreover, although the dresser board 91 was illustrated and demonstrated as a to-be-processed object in the above-mentioned embodiment, it is not limited to this structure. A to-be-processed object may just be a plate-shaped object hold|maintained by the suction surface 41 of the holding table 4, for example, the dummy work used as a sample for setup may be sufficient as it.

As described above, the present invention has the effect that the suction force to the workpiece can be maintained even when the workpiece on the holding table is bent, and in particular, in a cutting device for dressing the cutting blade using a dresser board. useful.

1: cutting device
4: holding table
5: cutting means
6: Suction force maintenance means
11a: supply port of the first suction source
11b: outlet of the first suction source
11c: negative pressure generating part of the first suction source
11d: suction port of the first suction source
15a: supply port of the second suction source
15b: outlet of the second suction source
15c: negative pressure generating part of the second suction source
15d: suction port of the second suction source
41: suction surface of the holding table
52: cutting blade
61: branch pipe
62: outlet at the upper side of the branch pipe
63: outlet under the branch pipe
64: first suction source (ejector)
65: first pipe
66: second suction source (ejector)
67: second pipe
91: Dresser board (workpiece)
W: work

Claims (1)

A cutting device comprising:
a holding table having a suction surface for sucking and holding a plate-shaped workpiece;
cutting means for cutting the workpiece with a cutting blade while supplying cutting water to the workpiece sucked and held by the holding table;
a suction force holding means for maintaining the suction force of the holding table for holding the workpiece by suction;
The suction force holding means includes a first pipe communicating the suction surface to the first suction source, and an upper outlet facing the first suction source and a lower outlet facing the second suction source in the middle of the first pipe. and a second pipe for communicating the branching pipe and the outlet at the lower side and the second suction source,
The first suction source and the second suction source are ejectors, and are connected to a supply port for supplying air, an exhaust port for discharging air, and a negative pressure generating unit for generating negative pressure by flowing air from the supply port to the discharge port. have a suction port,
The cross-sectional area of the branch pipe is made larger than the cross-sectional area of the first pipe, and when transferred from the first pipe to the branch pipe having a larger cross-sectional area than the first pipe, the flow rate of the fluid containing gas and liquid is slowed Due to the shape of the branch pipe, in the fluid sucked from the suction surface, the gas advances toward the outlet on the upper side of the branch pipe and is sucked at the first suction source, and the liquid is drawn at the lower side of the branch pipe A cutting device, characterized in that it descends toward the outlet of the , and is sucked from the second suction source and drained from the outlet of the second suction source to maintain the suction power of the suction surface.

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