JP7007816B2 - Chuck table - Google Patents

Description

The present invention relates to a chuck table that sucks and holds a plate-shaped work.

In a grinding machine in which the lower surface of a plate-shaped work having a warped outer peripheral portion is suction-held by the holding surface of the chuck table and the upper surface of the plate-shaped work sucked and held by the chuck table is ground with a grindstone, the plate-shaped work is used. Due to the warp, a gap is created between the outer peripheral portion of the lower surface of the plate-shaped work and the holding surface of the chuck table. Then, there is a problem that the suction force of the chuck table leaks from this gap and the plate-shaped work cannot be sucked and held. In order to deal with this problem, there is a chuck table (see, for example, Patent Document 1) in which this gap is closed to prevent the suction force from leaking.

Japanese Unexamined Patent Publication No. 2014-072510

In the chuck table described in Patent Document 1, the gap is closed with a sealing member formed in an annular shape so that the suction force does not leak. This is done by applying a suction force larger than the warping force of the plate-shaped work to the plate-shaped work to deform the seal member so that it is crushed so that the upper end of the seal member and the holding surface are flush with each other. It is intended to exert the function as a seal of the member.

However, for example, when the seal member is crushed toward the holding surface side of the chuck table, the seal member may not function sufficiently as a seal, that is, a suction force leak may easily occur. As a countermeasure, the seal member is given a certain amount of elasticity, but the seal member having such a certain amount of elasticity stores a repulsive force in the direction of separating the plate-shaped work from the holding surface by being crushed during suction holding. It ends up. Therefore, the suction force acting on the plate-shaped work during suction holding needs to be larger than the repulsive force.

Therefore, in the chuck table that sucks and holds the plate-shaped work, the seal member collapses toward the holding surface side during suction holding and comes into contact with the held surface (lower surface) of the plate-shaped work, so that the suction force leaks. There is a problem of preventing the occurrence of such a situation.

The present invention for solving the above problems is provided in a processing apparatus for processing a polygonal plate-shaped work having a warp by a processing means equipped with a processing tool, and a chuck having a holding surface for sucking and holding the plate-shaped work. A table having a base and a plate-shaped holding portion provided on the base and provided with a suction path for communicating the holding surface having an area slightly smaller than the area of the plate-shaped work to the suction source. The annular seal portion is sandwiched and fixed by an annular seal portion that surrounds the holding portion and has an upper end protruding from the holding surface, and an outer surface of the holding portion that is arranged outside the holding portion on the base. The annular sealing portion is formed in a polygonal annular shape in a plan view by a plurality of side walls, and the annular sealing portion allows a suction source to communicate with the holding surface and exerts a suction force on the holding surface. Sometimes it comes into contact with the outer peripheral portion of the lower surface of the plate-shaped work, and the upper end is pushed toward the holding surface by the plate-shaped work, so that the upper end moves in a direction away from the center of the holding surface in the holding surface direction. The plate-shaped work can be suction-held and fixed by preventing the suction force from leaking in a state where the holding surface and the upper end thereof are at the same height and are in contact with the lower surface of the plate-shaped work. By removing the plate from the base, the annular seal portion can be easily replaced , and the annular seal portion becomes the plate-shaped work due to the suction force acting on the holding surface. When a force is applied in a direction approaching the holding surface and the upper end is pushed toward the holding surface by the plate-shaped work, the upper end of the side wall is outward from the holding portion in the holding surface direction. The upper end side of the side wall is a chuck table whose corner portion is thinner than the central portion or whose corner portion is made of a material softer than the central portion so as to be easily deformed toward the side. ..
It is preferable that the annular seal portion includes a protruding portion that extends horizontally from the lower end in the direction extending outward from the center of the holding portion, and the protruding portion is sandwiched between the upper surface of the base and the lower surface of the fixing plate.

The chuck table according to the present invention has a plate-like shape provided with a base and a suction path for communicating a holding surface having an area slightly smaller than the area of the polygonal plate-shaped work to the suction source. A fixing plate that sandwiches and fixes the annular seal portion by the holding portion, the annular seal portion that surrounds the holding portion and the upper end of which protrudes from the holding surface, and the outer surface of the holding portion that is arranged outside the holding portion on the base. The annular seal portion is formed in a polygonal annular shape in a plan view by a plurality of side walls, and the annular seal portion is a lower surface of the plate-shaped work when a suction source is communicated with the holding surface and a suction force is applied to the holding surface. When the upper end is pushed toward the holding surface by the plate-shaped work, the upper end moves in the direction away from the center of the holding surface in the holding surface direction and bends outward, and the holding surface and the upper end are the same. Since the plate-shaped work is sucked and held in a state where it reaches a height and is in contact with the lower surface of the plate-shaped work, the plate-shaped work can be sucked and held without causing a leakage of suction force. Further, the plate-shaped work during suction holding has a force of repulsion from the holding surface due to warpage, but the repulsive force of the annular seal portion (force to restore the deformed state to the original state) is the plate. Since it is not further added to the shaped work, the plate-shaped work can be sucked and held more reliably. In addition, by removing the fixing plate from the base, it is possible to release the fixing of the annular seal portion by the outer surface of the holding portion and the inner surface of the fixing plate, and the annular seal portion that easily wears when it comes into contact with the plate-shaped work. Can be easily replaced with a new annular seal. Further, on the upper end side of the side wall of the annular seal portion, the corner portion is thinner than the central portion, or the corner portion is made of a material softer than the central portion, so that suction force acts on the holding surface. As a result, a force is applied to the plate-shaped work in the direction approaching the holding surface, and when the upper end is pushed toward the holding surface by the plate-shaped work, the upper end of the side wall faces outward from the holding portion in the holding surface direction. This makes it easier to deform, and the plate-shaped work can be sucked and held more reliably without causing a leakage of suction force.
Further, the annular seal portion is provided with a protruding portion that extends horizontally from the lower end in the direction from the center of the holding portion to the outside, so that the protruding portion is sandwiched between the upper surface of the base and the lower surface of the fixing plate to form an annular seal. It is possible to firmly fix the part on the base while surrounding the holding part.

It is an exploded perspective view which shows an example of the structure of a chuck table. It is a perspective view which shows an example of a chuck table. It is a perspective view which partially shows an example of the case where the corner portion of the deformed portion of the annular seal portion is made of a material that is easily deformed. It is a perspective view partially showing an example of the case where the corner portion of the deformed portion of the annular seal portion has a shape that is easily deformed. It is sectional drawing which shows the state which the plate-shaped work is placed on the chuck table. It is sectional drawing which shows the state which the plate-shaped work is sucked and held by the chuck table.

FIG. 1 is an exploded perspective view of a chuck table 3 having a holding surface 310 for sucking and holding a plate-shaped work W, and FIG. 2 is a perspective view showing a chuck table 3 in an assembled state. The chuck table 3 is a suction path 311 (not shown in FIG. 1) that is arranged on the base 30 and allows the holding surface 310 having an area slightly smaller than the area of the plate-shaped work W to communicate with the suction source 7. It is provided with a plate-shaped holding portion 31 provided with (not shown) and an annular sealing portion 32 surrounding the holding portion 31.
The chuck table 3 is arranged in, for example, a manual type grinding apparatus for grinding a plate-shaped work W having a warp by a processing means equipped with a grinding wheel as a processing tool. Not limited to.

The plate-shaped work W is, for example, a work that becomes a PCB or the like after processing, and has a rectangular outer shape having a vertical and horizontal length of several tens of centimeters, and the upper surface Wa is still mounted with devices, wiring, and the like. It is in a state where it is not. In the example shown in FIG. 1, in the plate-shaped work W, the outer peripheral portions on both sides in the Y-axis direction are warped upward, but all the outer peripheral portions on all four sides may be warped upward.

The base 30 is, for example, formed from a predetermined alloy or the like in a disk shape, and a plurality of (10 in the example shown in FIG. 1) screw holes 300 are spaced apart from each other on the upper surface 30a. It is formed in a substantially square ring shape.

The plate-shaped holding portion 31 is a rectangular flat plate made of a metal material such as SUS, and the plate-shaped work W can be sucked and held by the holding surface 310 which is the upper surface thereof, and the area of the holding surface 310 is a plate. The area is slightly smaller than the area of the shaped work W. The holding portion 31 is fixed to the center of the upper surface 30a of the base 30 with a bolt (not shown) or fixed with an adhesive. A plurality of suction holes 310c are formed on the holding surface 310 at predetermined intervals in the vertical and horizontal directions. As shown in FIG. 5, each suction hole 310c communicates with a suction path 311 formed inside the plate-shaped holding portion 31, and at one end of the suction path 311 opened on the lower surface of the holding portion 31, A suction source 7 composed of a vacuum generator, a compressor and the like communicates with each other via a base 30.

The annular seal portion 32 shown in FIG. 1 having a square annular outer shape is formed of, for example, a member having appropriate elasticity such as rubber or sponge, and for example, an opening 320 into which the holding portion 31 fits and an opening 320. It is provided with a deformed portion 321 that surrounds the holding portion 31 fitted to the above, and a rectangular protruding portion 322 that extends horizontally from the lower end of the deformed portion 321 toward the outside of the opening 320.

Since the deformed portion 321 composed of four side walls having a rectangular shape in the side view has a vertical (Z-axis direction) notch formed at the joint portion (corner portion) of each side wall, each side wall is outside the opening 320. It is possible to bend toward.

The annular seal portion 32 is fixed to the upper surface 30a of the base 30 so as to surround the holding portion 31 by, for example, the four fixing plates 35 shown in FIG. The fixed plate 35 has, for example, an outer shape having a substantially L-shaped vertical cross section, and a flat plate portion 350 and a flat plate portion 350 in which the bolt insertion hole 350c is formed through in the thickness direction (Z-axis direction). It is provided with a support portion 351 that is erected in the ring-shaped seal portion 32 and supports the lower portion of the deformed portion 321 of the annular seal portion 32 from the side. The four fixing plates 35 may be integrally formed in a square annular shape, or the fixing plate 35 and the annular seal portion 32 may be integrally formed.
Further, the deformed portion 321 composed of the four side walls may be integrally formed in a square ring shape. When the deformable portion 321 is integrally formed, it is preferable that the corner portion of the side wall is made of a material or shape that is more easily deformed than the central portion.
As an example of the case where the corner portion of the side wall of the deformable portion 321 is made of a material that is more easily deformed than the central portion, as shown in FIG. 3, the central portion of the side wall is formed of a rubber plate G and is a rubber plate. The corner portion connected to G is formed of the sponge P, and the corner portion formed of the sponge P is easily deformed.
As an example of the case where the corner portion of the side wall of the deformable portion 321 has a shape that is more easily deformed than the central portion, as shown in FIG. 4, the center of the deformable portion 321 which is entirely formed of a rubber plate or a sponge. The thickness of the corner portion is made thinner than the thickness of the portion to facilitate deformation.

The holding portion 31 on the base 30 is fitted into the opening 320 of the annular seal portion 32, and the annular seal portion 32 is placed on the upper surface 30a of the base 30. Next, each of the four fixing plates 35 is placed on the protruding portion 322 of the annular seal portion 32 so as to be along the deformed portion 321. Further, the screw hole 300 of the base 30 and the bolt insertion hole of each fixing plate 35 are placed. Overlap with 350c. Then, by passing 10 fixing bolts 36 (only one is shown in FIG. 1) through each bolt insertion hole 350c and screwing them into each screw hole 300, the lower surface and the base of the flat plate portion 350 of the fixing plate 35 are formed. The protruding portion 322 of the annular seal portion 32 is sandwiched between the upper surface 30 a of the 30 and the annular seal portion 32 is fixed on the base 30 as shown in FIG.
As shown in FIG. 2, when the annular seal portion 32 is fixed on the base 30 in a state of surrounding the holding portion 31, the upper end 321a of the deformed portion 321 of the annular seal portion 32 becomes the holding surface 310 of the holding portion 31. It is in a state of being positioned upward by a predetermined distance, that is, a state of protruding upward from the holding surface 310.

The operation of the chuck table 3 when sucking and holding the plate-shaped work W shown in FIG. 5 will be described below. First, the plate-shaped work W is conveyed onto the chuck table 3 and is positioned so that the center of the plate-shaped work W is approximately located at the center of the holding surface 310 of the chuck table 3. Next, the plate-shaped work W is placed on the holding surface 310 with the lower surface Wb facing downward.

By operating the suction source 7, the suction force generated by the suction source 7 is transmitted to the suction hole 310c via the suction path 311 and the suction force acts on the holding surface 310. The plate-shaped work W is sucked and held by the holding surface 310 from the center side of the lower surface Wb while the warp is corrected by the suction force transmitted to the holding surface 310, and further, the outer peripheral portion of the lower surface Wb of the plate-shaped work W. The upper end 321a of the deformed portion 321 of the annular seal portion 32 comes into contact with.

Since the warp of the outer peripheral portion of the lower surface Wb of the plate-shaped work W is corrected and comes into contact with the upper end 321a of the deformed portion 321, the upper end 321a of the deformed portion 321 moves in a direction away from the center of the holding surface 310 in the holding surface direction. Then, the upper end 321a of the deformed portion 321 bends outward as shown in FIG. 6, and the holding surface 310 and the upper end 321a become the same height. As a result, the annular seal portion 32 comes into contact with the outer peripheral portion of the lower surface Wb of the plate-shaped work W without a gap and sufficiently exerts the function as a seal, and is appropriately attracted to the lower surface Wb of the plate-shaped work W. Force acts.
As shown in FIG. 3, when the corner portion of the side wall of the deformed portion 321 is formed of a material that is more easily deformed than the central portion, or as shown in FIG. 4, the corner portion of the side wall of the deformed portion 321 is deformed from the central portion. Even when the shape is easy to shape, by sucking and holding the plate-shaped work W, the upper end 321a bends outward along with the deformation of the corner portion of the deformed portion 321, and the holding surface 310 and the upper end 321a have the same height. Then, the annular seal portion 32 is in a state of fully exerting the function as a seal.

The chuck table 3 according to the present invention includes a base 30 and a suction path 311 that is arranged on the base 30 and has a holding surface 310 having an area slightly smaller than the area of the plate-shaped work W so as to communicate with the suction source 7. The plate-shaped holding portion 31 and the annular sealing portion 32 surrounding the holding portion 31 and having the upper end 321a protruding from the holding surface 310 are provided, and the annular sealing portion 32 communicates the suction source 7 with the holding surface 310. When a suction force is applied to the holding surface 310, it comes into contact with the outer peripheral portion of the lower surface Wb of the plate-shaped work W, the upper end 321a moves in a direction away from the center of the holding surface 310 in the holding surface direction, and the holding surface 310 and the upper end 321a Since the plate-shaped work W is sucked and held in a state where the two are at the same height and are in contact with the lower surface Wb of the plate-shaped work W, the plate-shaped work W can be sucked and held without causing a leakage of suction force. .. Further, it is not necessary for the operator to press the plate-shaped work W from above toward the holding surface 310 at the time of suction holding.
The plate-shaped work W at the time of suction holding has a force repelling from the holding surface 310 due to warpage (a force to lift the outer peripheral portion of the plate-shaped work W upward), but the deformation of the annular seal portion 32. The direction of the force to restore the original state from the state of being sucked is not the + Z direction perpendicular to the plate-shaped work W sucked and held by the holding surface 310, but the direction approaching the center of the holding surface 310. Therefore, the restoring force of the annular seal portion 32 is not further applied to the force repelling from the holding surface 310 due to the warp of the plate-shaped work W. Therefore, the plate-shaped work W can be more reliably sucked and held.

The chuck table according to the present invention is not limited to the above-described example, and the configuration and the like of the chuck table 3 shown in the attached drawings are not limited to this, and the effects of the present invention are exhibited. It can be changed as appropriate within the range that can be done.

W: Plate-shaped work Wa: Upper surface of plate-shaped work Wb: Lower surface of plate-shaped work 3: Chuck table
30: Base 30a: Top surface of base 300: Screw hole 31: Holding part 310: Holding surface 310c: Suction hole 311: Suction path 35: Fixed plate 350: Flat plate part 350c: Bolt insertion hole 351: Support part 32: Circular Seal part 320: Fitting hole 321: Deformed part 321a: Upper end 322: Overhanging part 36: Fixing bolt 7: Suction source

Claims (2)

A chuck table provided in a processing apparatus for processing a polygonal plate-shaped work having a warp by a processing means equipped with a processing tool, and having a holding surface for sucking and holding the plate-shaped work.
A base, a plate-shaped holding portion provided on the base and having a suction path for communicating the holding surface having an area slightly smaller than the area of the plate-shaped work to the suction source, and the holding portion. An annular seal portion having the upper end of the enclosure protruding from the holding surface, and a fixing plate arranged outside the holding portion on the base and fixing the annular seal portion by sandwiching the annular seal portion with the outer surface of the holding portion. Equipped with
The annular seal portion is formed in a polygonal annular shape in a plan view by a plurality of side walls.
The annular seal portion contacts the outer peripheral portion of the lower surface of the plate-shaped work when the suction source is communicated with the holding surface and a suction force is applied to the holding surface, and the plate-shaped work is directed toward the holding surface. When the upper end is pushed, the upper end moves in the direction away from the center of the holding surface in the holding surface direction and bends outward, so that the holding surface and the upper end become the same height and the lower surface of the plate-shaped work. The plate-shaped work can be sucked and held in contact with the suction force, and the annular seal portion can be easily replaced by removing the fixing plate from the base. and,
In the annular seal portion, a force in a direction approaching the holding surface is applied to the plate-shaped work by the suction force acting on the holding surface, and the upper end thereof is directed toward the holding surface by the plate-shaped work. At the upper end side of the side wall, the corner portion is thinner than the central portion so that the upper end of the side wall is easily deformed outward from the holding portion in the holding surface direction when pressed. Or a chuck table whose corners are made of a softer material than the central part . The annular seal portion comprises a protruding portion that extends horizontally from the lower end in the outward direction from the center of the holding portion.
The chuck table according to claim 1, wherein the protruding portion is sandwiched between the upper surface of the base and the lower surface of the fixing plate and fixed.

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