JP6880112B2 - Adsorption mechanism of mobile device - Google Patents

Description

The present invention relates to a suction mechanism, and more particularly to a suction mechanism of a moving device that sucks and moves a work by depressurizing a space facing the work.

Conventionally, a moving device equipped with a mechanism such as a robot arm for carrying or assembling on a production line or the like has been put into practical use. At the tip of such a mechanism such as a robot arm, a suction mechanism that sucks a work by decompression is often used.

For example, Patent Document 1 (see Japanese Patent Application Laid-Open No. 2019-024127) discloses a suitable adsorption mechanism when the work is a substrate. Further, Patent Document 2 (see Japanese Patent Application Laid-Open No. 2016-215285) discloses a suction mechanism suitable when the work to be moved is a bag-shaped object.

Japanese Unexamined Patent Publication No. 2019-024127 Japanese Unexamined Patent Publication No. 2016-215285

In particular, when the suction surface of the work is uneven, it is necessary to provide an elastic pad in the suction mechanism so that the suction force due to decompression can be surely applied to the suction surface of the work. However, the research by the inventors of the present application has revealed that various problems such as deformation of the pad and inefficiency of the replacement work may occur in the configuration in which the elastic pad is provided in the suction mechanism.

The present invention has been made in view of the above circumstances, and in a configuration in which an elastic pad is provided, the followability of the tip surface (the surface at the tip that contacts the work in a predetermined area, the same applies hereinafter) while properly maintaining the posture change of the entire pad. It is an object of the present invention to realize a suction mechanism that can exert a reliable suction force by increasing the pressure and can perform pad replacement work extremely easily.

The present invention solves the above problems by means of solutions as described below.

The suction mechanism of the disclosure is a suction mechanism of a moving device that sucks and moves a work by depressurizing a space portion provided at a position facing the work, and has a main body portion having the space portion communicating with a vacuum source. A pad fixed to the main body portion to form an outer peripheral portion of the space portion, and the main body portion has a base surface that abuts a support wall extending in a direction toward the work and a rear end of the pad. The pad is made of an elastic material and has an axial length whose tip protrudes toward the work side from the support wall and is formed in an annular shape continuous in the circumferential direction to form an outer circumference of the support wall. It is fitted in a portion or an inner peripheral portion and is in close contact with the work at the time of suction to seal the space portion. In the main body portion, the pad is fitted on the outer peripheral portion of the support wall. In the case of the configuration, the pad is pressed against the outer peripheral portion of the pad, and in the case of the configuration in which the pad is fitted to the inner peripheral portion of the support wall, the pad is pressed against the inner peripheral portion of the pad. In either case, a fixing portion for fixing the pad in close contact with the support wall and the base surface is attached, and the peripheral surface is radially oriented between the fixing portion and the base surface during suction. It is a requirement that a shelter space is provided to shelter the deformed region of the pad that deforms so as to swell.

According to the present invention, in a configuration in which an elastic pad is provided, a reliable suction force can be applied by improving the followability of the tip surface while properly maintaining the posture change of the entire pad, and the pad replacement work. A suction mechanism that can be performed extremely easily is realized.

It is a block diagram of the moving device provided with the suction mechanism which concerns on 1st Embodiment of this invention. It is the schematic (perspective view) which shows the example of the adsorption mechanism shown in FIG. It is the schematic (front sectional view) of the adsorption mechanism shown in FIG. It is the schematic (front sectional view) which shows the other example of the adsorption mechanism shown in FIG. It is the schematic (front sectional view) which shows the example of the adsorption mechanism which concerns on a comparative example. It is the schematic (front sectional view) which shows the other example of the adsorption mechanism which concerns on a comparative example. It is explanatory drawing explaining the problem of the adsorption mechanism which concerns on a comparative example. It is the schematic (front sectional view) which shows the other example of the adsorption mechanism which concerns on a comparative example. It is explanatory drawing explaining the problem of the adsorption mechanism which concerns on a comparative example. It is the schematic (front sectional view) which shows the other example of the pad of the suction mechanism shown in FIG. It is the schematic (front sectional view) which shows the example of the adsorption mechanism which concerns on the 2nd Embodiment of this invention. It is the schematic (front sectional view) which shows the other example of the adsorption mechanism shown in FIG. It is the schematic (perspective view) which shows the example of the adsorption mechanism which concerns on 3rd Embodiment of this invention.

(First Embodiment)
Hereinafter, the first embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a configuration example of a mobile device including a suction mechanism according to the first embodiment of the present invention. Further, FIG. 2 is a perspective view (schematic view) of the suction mechanism according to the first embodiment of the present invention, and FIG. 3 is a front sectional view (schematic view) thereof. In all the drawings for explaining the embodiment, members having the same function may be designated by the same reference numerals, and the repeated description thereof may be omitted.

First of all, the suction mechanism is equipped in a moving device that sucks and moves the work by decompression in order to carry out transportation and assembly in, for example, a production line of an industrial product. Examples of the mobile device include a transfer robot, a take-out machine, and the like.

As shown in FIG. 1, the moving device 1 according to the present embodiment includes a moving mechanism 12 composed of, for example, a robot arm or the like. Adsorption mechanisms 2 and 3 are arranged at the tip of the moving mechanism 12. Here, the suction mechanisms 2 and 3 are connected to the vacuum source (decompression source) 14 via the flow path 16, and the flow path switching valve 18 is provided in the flow path 16. The flow path switching valve 18 functions to switch between a position where the suction mechanisms 2 and 3 are evacuated (decompressed) and a position where the suction mechanisms 2 and 3 are opened to the atmosphere. According to this, the work can be adsorbed to the opening portion of the space portion by setting the space portion (described later) provided at the position facing the work in the suction mechanisms 2 and 3 to a vacuum, that is, a reduced pressure state. As the vacuum source (decompression source) 14, a vacuum pump (decompression pump) is used as an example, but the present invention is not limited to this. Further, as an example of the work, a product having a surface that can be adsorbed, a cardboard container in which the product is packed, or the like is assumed. In particular, in the case of heavy objects, the weight ranges from several kilograms to several tens of kilograms, so that the adsorption mechanism is required to have reliable adsorption performance.

The inventors of the present application have worked diligently on research and development of an adsorption mechanism, and have come up with an adsorption mechanism 3 according to a comparative example. FIG. 5 shows a configuration example of the suction mechanism 3.

The suction mechanism 3 includes a main body portion 22 in which a space portion 20 communicating with the vacuum source 14 is provided in a central region in the radial direction, and a pad fixed to the main body portion 22 to form an outer peripheral portion (that is, a peripheral wall portion) of the space portion 20. It has 30 and. The space portion 20 communicates with the vacuum source 14 via the flow path 16. Therefore, by operating the vacuum source 14, the space portion 20 can be put into a vacuum (decompression) state.

As shown in FIG. 5, the main body 22 has a base surface that abuts the support wall 26 extending in the direction toward the work W (that is, the peripheral surface is orthogonal to the radial direction) and the rear end 30d of the pad 30. It has 22a and 22a.

Here, the pad 30 has an axial length whose tip 30a projects toward the work W side from the support wall 26, is formed in an annular shape continuous in the circumferential direction, and is fitted on the outer peripheral portion of the support wall 26. .. At this time, the rear end 30d of the pad 30 is in contact with the base surface 22a. As an example, the pad 30 is formed to have a rectangular cross section by using a foam material using an elastic material, a sponge, or the like. Specific examples include rubber, elastomer, resin, and composite materials thereof.

Alternatively, as a modification, as shown in FIG. 6, a configuration is also conceivable in which the support wall 26 is provided in the main body portion 22 so that the pad 30 can be fitted in the inner peripheral portion.

According to the above comparative example (including a modified example), when the work W is adsorbed, even if the adsorption surface of the work W has irregularities, the pad 30 is brought into close contact with the adsorption surface while absorbing the irregularities by elasticity. The space portion 20 can be sealed. Therefore, the space portion 20 can be depressurized, and the work W can be attracted to the opening portion 20a of the space portion 20 and moved while being supported by the tip 30a of the pad 30 by the suction force due to the decompression.

On the other hand, regarding the suction mechanism 3, since the work W is pressed against the tip 30a of the pad 30 by the decompression of the space portion 20, the inner peripheral portion 30b of the pad 30 (particularly the intermediate region in the axial direction) is pressed as shown in FIG. It has become clear that the support wall 26 is deformed so as to deviate from the outer peripheral portion 26a, the posture cannot be changed appropriately, and the followability (adhesion) of the tip surface to the work W is lowered (adhesion). In the case of the modified example of FIG. 6, it is deformed in the opposite direction in the radial direction). Further, it has become clear that the pad 30 may fall off due to vibration in the moving work, impact when contacting the work W, or acting force when the work W is contacted from an oblique direction.

In order to solve this problem, as a comparative example, as shown in FIG. 8, a study was conducted on a configuration in which the main body 22 has two support walls 26A and 26B extending in the direction toward the work W. According to this configuration, since the pads 30 are fitted in contact with the two support walls 26A and 26B, the effect of preventing the pad 30 from falling off can be enhanced. However, on the other hand, since there is no escape in the radial direction, proper posture change is hindered when the work W comes into contact with the work W, and the followability (adhesion) of the tip surface (suction surface) to the work W is lowered. As a result, another problem arises.

In order to solve this problem, the inner peripheral portion 30b of the pad 30 and the outer peripheral portion 26a of the support wall 26 (note that in the case of the modified example of FIG. 6) with the arrangement configuration shown in FIG. Researched a structure for adhering the inner peripheral portion 26b) with an adhesive (including double-sided tape or the like). Further, a study was also conducted on a configuration in which the rear end 30d of the pad 30 and the main body 22 are bonded to each other. With either configuration, it is possible to prevent deformation in which the inner peripheral portion 30b of the pad 30 is separated from the outer peripheral portion 26a (inner peripheral portion 26b) of the support wall 26 when the work W is sucked by the suction mechanism 3. It became. In addition, it was possible to enhance the effect of preventing the pad 30 from falling off due to vibration or the like. Further, when the configuration in which the rear end 30d of the pad 30 and the main body 22 and the pad 30 are adhered to each other is added, the effect of preventing the pad 30 from falling off can be further enhanced.

However, when such a configuration is adopted, when the work W is pressed against the tip 30a of the pad 30 by the decompression of the space 20 with respect to the suction mechanism 3, the outer peripheral portion 30c of the pad 30 is as shown in FIG. The side region is not restricted by adhesion and can sufficiently exert elasticity, whereas the inner peripheral portion 30b side region of the pad 30 is adhered to the outer peripheral portion 26a of the support wall 26, and deformation in the compression direction is restricted and elastic. It was clarified that the state of being unable to fully exhibit the above (in the case of the modified example of FIG. 6, the outer peripheral portion 30c side is adhered and the deformation is regulated). Due to the difference in elastic performance depending on the radial position of the pad 30, it is not possible to change the posture properly, and the followability (adhesion) of the tip surface to the work W is lowered. The problem of getting rid of it became clear.

Further, since the pad 30 is a consumable item, replacement work is required as necessary in view of a state such as wear and deterioration. However, since the inner peripheral portion 30b of the pad 30 is adhered to the outer peripheral portion 26a of the support wall 26, it is necessary to remove the adhesive at the time of replacement. Therefore, it has become clear that the number of work man-hours increases and the time required to stop the device becomes long, which causes a decrease in production efficiency.

In order to solve these problems, the inventors of the present application have further worked diligently on research and development of the adsorption mechanism, and have come up with the adsorption mechanism 2 according to the embodiment of the present invention. FIG. 2 shows a perspective view (schematic view) of the suction mechanism 2, and FIG. 3 shows a front sectional view (schematic view) of the suction mechanism 2. The configuration diagram of the moving device including the suction mechanism 2 is as shown in FIG. 1 described above.

The suction mechanism 3 includes a main body portion 22 in which a space portion 20 communicating with the vacuum source 14 is provided in a central region in the radial direction, and a pad fixed to the main body portion 22 to form an outer peripheral portion (that is, a peripheral wall portion) of the space portion 20. It has 30 and. The space portion 20 communicates with the vacuum source 14 via the flow path 16. Therefore, by operating the vacuum source 14, the space portion 20 can be put into a vacuum (decompression) state. The main body 22 is integrally formed (may be a separate body) using a metal material (for example, aluminum alloy, stainless alloy, etc.) or a resin material (for example, PA, PBT, POM, etc.). ..

Further, the main body portion 22 has a support wall 26 extending in a direction toward the work W (that is, a direction in which the peripheral surface is orthogonal to the radial direction) and a base surface 22a that abuts the rear end 30d of the pad 30. ing.

Here, the pad 30 has an axial length whose tip 30a projects toward the work W side from the support wall 26, is formed in an annular shape continuous in the circumferential direction, and is fitted on the outer peripheral portion of the support wall 26. .. At this time, the rear end 30d of the pad 30 is in contact with the base surface 22a. As an example, the pad 30 is formed to have a rectangular cross section by using a foam material using an elastic material, a sponge, or the like. Specific examples include rubber, elastomer, resin, and composite materials thereof. The cross-sectional shape is not limited to a rectangular shape, and the tip 30a and the rear end 30d are curved as shown in FIG. 10A, or the tip 30a is shown in FIG. 10B. Various shapes can be adopted, such as those having a protruding shape that tapers so as to warp outward.

According to the above configuration, similarly to the suction mechanism 3 described above, when the work W is sucked, even if the suction surface of the work W has irregularities, the pad 30 is attached to the adsorption surface while absorbing the irregularities by elasticity. The space portion 20 can be brought into close contact with each other to be in a sealed state. That is, the space portion 20 can be depressurized, and the work W can be attracted to the opening portion 20a of the space portion 20 and moved while being supported by the tip 30a of the pad 30 by the suction force due to the decompression.

Further, as a configuration characteristic of the present embodiment, the suction mechanism 2 is brought into pressure contact with the outer peripheral portion 30c of the pad 30. The pad 30 is provided with a fixing portion 32 for fixing the pad 30 in close contact with both the support wall 26 and the base surface 22a. As an example, the fixing portion 32 is configured to be attached to the main body portion 22.

According to this, when the work W is pressed against the tip 30a of the pad 30 by the decompression of the space portion 20 when the work W is sucked, the inner peripheral portion 30b (or the outer peripheral portion 30c) of the pad 30 is supported by the support wall 26. It is possible to prevent the tip surface from being deformed so as to deviate from the outer peripheral portion 26a (or the inner peripheral portion 26b) and the followability of the tip surface is deteriorated without maintaining an appropriate posture change. At this time, it is not necessary to use an adhesive to bond the inner peripheral portion 30b (or outer peripheral portion 30c) of the pad 30 and the outer peripheral portion 26a (or inner peripheral portion 26b) of the support wall 26. Therefore, the above-mentioned problems, that is, the problem that the inner peripheral portion 30b side region (or the outer peripheral portion 30c side region) of the pad 30 cannot sufficiently exert elasticity by adhesion, and the work of removing the adhesive when the pad 30 is replaced are required. It is possible to solve any of the above problems.

Here, a configuration example of the fixing portion 32 will be described. The fixing portion 32 according to the present embodiment is configured as a fixing band having an inner diameter formed to be smaller than the outer diameter of the pad 30 by a predetermined dimension and pressed and contacted along the outer peripheral portion 30c of the pad 30. Specifically, it is formed in a continuous shape, for example, a continuous annular shape (ring shape) by using one part or by combining a plurality of parts without a gap. However, the present invention is not limited to this, and a discontinuous shape, for example, a shape in which one part is used and a slit is partially provided (so-called C-shaped shape, etc.), or a plurality of parts have a predetermined gap. As a combined shape, a discontinuous fixed band may be formed.

The fixing portion 32 has a predetermined dimension from the main body portion 22 (here, the base surface 22a) by being fixed to the main body portion 22 by using a fastening member 40 (bolts, screws, etc.) with a stud 34 interposed therebetween. It is arranged at a distant position. According to this, since it can be pressed by the fixing portion 32 over the entire circumference (including the case of almost the entire circumference) of the annular pad 30, reliable fixing is possible. Further, at that time, since the fixing portion 32 can be arranged in the intermediate region of the pad 30 which is likely to be deformed as shown in FIG. 7, the effect of suppressing the deformation can be enhanced. Further, when the pad 30 is replaced, the pad 30 can be removed by simply pulling it, and the pad 30 can be attached by simply pushing it in, so that the replacement work becomes extremely easy. The fixing portion 32 and the stud 34 are formed by using a metal material (for example, aluminum alloy, stainless alloy, etc.) or a resin material (for example, PA, PBT, POM, etc.).

Further, by providing the stud 34, a space (reservoir space 36) is provided between the outer peripheral surface 34a of the stud 34 and the peripheral surface of the pad facing the outer peripheral surface 34a (in this case, the surface of the outer peripheral portion 30c). Can be realized. Explaining the effect, when the work W is sucked, the work W is pressed against the tip 30a of the pad 30 by the decompression of the space portion 20, so that the pad 30 is compressed and swells outward in the radial direction as a whole. Deform. If the stud 34 is in contact with the outer peripheral portion 30c of the pad 30, the deformation is regulated so that the peripheral surface of the pad 30 (in this case, the surface of the outer peripheral portion 30c) bulges outward in the radial direction, and the elasticity is sufficient. It will be in a state where it cannot be demonstrated. On the other hand, according to the above configuration, the deformed region of the pad that deforms so as to bulge outward in the radial direction at the time of suction can be evacuated to the shelter space 36, so that the deformation is not restricted and the elasticity is sufficient. It will be possible to demonstrate it. Further, if the studs 34 having different lengths are used, the installation position of the fixing portion 32 can be easily changed.

As a modified example, the same effect can be obtained by a configuration in which an urging member such as a coil spring is provided instead of the stud (not shown).

As described above, according to the suction mechanism 2 according to the present embodiment, reliable suction performance can be exhibited by improving the followability of the tip surface while properly maintaining the posture change of the entire pad. Therefore, even when the work W is a heavy object or a product or container having an uneven suction surface (for example, a cardboard container or the like), the work W can be reliably sucked and moved.

Next, a modified example of the suction mechanism 2 is shown in FIG. In the above-mentioned example, the pad 30 is provided along the outer peripheral portion of the support wall 26, whereas in this modified example, the pad 30 is provided along the inner peripheral portion of the support wall 26. This is a configuration example of the case.

Regarding the suction mechanism 2, the pressure contact is made with the inner peripheral portion 30b of the pad 30. The pad 30 is provided with a fixing portion 32 for fixing the pad 30 in close contact with both the support wall 26 and the base surface 22a. As an example, the fixing portion 32 is configured to be attached to the main body portion 22.

Further, the fixing portion 32 is configured as a fixing band which is formed so that the outer diameter is larger than the inner diameter of the pad by a predetermined dimension and is provided by pressure contacting along the inner peripheral portion 30b of the pad. Specifically, it is formed in a continuous shape, for example, a continuous annular shape (ring shape) by using one part or by combining a plurality of parts without a gap. However, the present invention is not limited to this, and a discontinuous shape, for example, a shape in which one part is used and a slit is partially provided (so-called C-shaped shape, etc.), or a plurality of parts have a predetermined gap. As a combined shape, a discontinuous fixed band may be formed.

The fixing portion 32 has a predetermined dimension from the main body portion 22 (here, the base surface 22a) by being fixed to the main body portion 22 by using a fastening member 40 (bolts, screws, etc.) with a stud 34 interposed therebetween. It is arranged at a distant position.

Since other configurations and actions and effects are the same as those in the above-mentioned example, the repeated description will be omitted.

(Second embodiment)
Subsequently, the adsorption mechanism 2 according to the second embodiment of the present invention will be described. The adsorption mechanism 2 according to the present embodiment has the same basic configuration as the first embodiment described above, but has a difference in the configuration of the fixed portion and the fixed structure. Hereinafter, the present embodiment will be described with a focus on the differences. Here, FIG. 11 shows a front sectional view (schematic view) of the suction mechanism 2 according to the present embodiment. A configuration example of the mobile device 1 provided with the suction mechanism 2 according to the present embodiment is the same as that shown in FIG. 1, and is not shown.

Similar to the first embodiment described above, the fixing portion 32 according to the present embodiment is formed so that the inner diameter is smaller than the outer diameter of the pad 30 by a predetermined dimension and is provided by pressure contacting along the outer peripheral portion 30c of the pad 30. It is configured as a band. Specifically, it is formed in a continuous shape, for example, a continuous annular shape (ring shape) by using one part or by combining a plurality of parts without a gap. However, the present invention is not limited to this, and a discontinuous shape, for example, a shape in which one part is used and a slit is partially provided (so-called C-shaped shape, etc.), or a plurality of parts have a predetermined gap. As a combined shape, a discontinuous fixed band may be formed.

Here, the fixing portion 32 according to the present embodiment has a peripheral wall portion 32a extending from the outer peripheral portion thereof in the direction of the main body portion 22. The peripheral wall portion 32a may be provided on the outer periphery of the fixing portion 32 over the entire week, or may be partially provided.

According to the above configuration, by fixing the peripheral wall portion 32a to the main body portion by using the fastening member 42 (bolts, screws, etc.), the peripheral wall portion 32a is positioned at a position separated from the main body portion 22 (here, the base surface 22a) by a predetermined dimension. It is possible to dispose the fixed portion 32, and it is also possible to provide a shelter space 36. Further, since the stud required for fixing the fixing portion 32 to the main body portion 22 in the first embodiment described above can be omitted, the number of parts can be reduced.

Further, as a modification, as shown in FIG. 12, the fixing portion 32 (including the peripheral wall portion 32a) may be integrally formed with the main body portion 22. According to this, the number of parts and the assembly man-hours can be further reduced.

Since other configurations and actions and effects are the same as those in the first embodiment described above, the repeated description will be omitted.

(Third embodiment)
Subsequently, the adsorption mechanism 2 according to the third embodiment of the present invention will be described. The adsorption mechanism 2 according to the present embodiment has the same basic configuration as the first embodiment described above, but has a difference in a configuration including a plurality of space portions and the like. Hereinafter, the present embodiment will be described with a focus on the differences. Here, a perspective view (schematic view) of the suction mechanism 2 according to the present embodiment is shown in FIG. A configuration example of the mobile device 1 provided with the suction mechanism 2 according to the present embodiment is the same as that shown in FIG. 1, and is not shown.

In the present embodiment, one main body 22 is provided with a plurality of (for example, two) space portions 20A and 20B. Each of the space portions 20A and 20B is provided with the same support walls 26C and 26D as the above-mentioned support wall 26, respectively, and the same pads as the above-mentioned pad 30 are provided for the respective support walls 26C and 26D. 30A and 30B are fitted. However, the space portion is not limited to two, and can be similarly applied to a configuration in which three or more are provided.

Here, the fixing portion 32 according to the present embodiment has a configuration in which a plurality of pads 30A and 30B provided in the plurality of space portions 20A and 20B can be fixed at the same time (that is, collectively). As an example, a configuration including continuous or discontinuous (that is, when having a slit, etc.) fixed portions (fixing bands) 32A and 32B provided by pressure contacting along the outer peripheral portions 30Ac and 30Bc of the pads 30A and 30B, respectively. It has become. In the present embodiment, a plate material composed of one component in which the fixing portions 32A and 32B are formed in a substantially eight-shaped shape is used. However, the present invention is not limited to this, and the fixing portions 32A and 32B may be formed by using a plurality of parts.

Since other configurations and actions and effects are the same as those of the first embodiment and the second embodiment described above, the repeated description will be omitted.

As described above, according to the suction mechanism according to the present invention, in the configuration in which the elastic pad is provided, a reliable suction force is exerted by improving the followability of the tip surface while maintaining the posture change of the entire pad appropriately. At the same time, the pad can be replaced very easily. In particular, even when the work W is a heavy object or a product or container having an uneven suction surface, it can be reliably sucked and moved.

The present invention is not limited to the examples described above, and various modifications can be made without departing from the present invention.

1 Moving device 2, 3 Adsorption mechanism 12 Moving mechanism 14 Vacuum source (decompression source)
20, 20A, 20B Space part 22 Main body part 26, 26A, 26B, 26C, 26D Support wall 30, 30A, 30B Pad 32, 32A, 32B Fixed part 34 Stud 36 Reservation space W work

Claims (4)

It is a suction mechanism of a moving device that sucks and moves the work by depressurizing the space provided at the position facing the work.
The main body having the space that communicates with the vacuum source,
A pad fixed to the main body portion and forming an outer peripheral portion of the space portion is provided.
The main body has a support wall extending in a direction toward the work and a base surface for abutting the rear end of the pad.
The pad is made of an elastic material and has an axial length whose tip protrudes toward the work side from the support wall and is formed in an annular shape continuous in the circumferential direction on the outer peripheral portion or the inner peripheral portion of the support wall. It is configured to be fitted and brought into close contact with the work at the time of suction to seal the space.
The main body
In the case where the pad is fitted on the outer peripheral portion of the support wall, the pad is pressed against the outer peripheral portion of the pad.
In the case where the pad is fitted to the inner peripheral portion of the support wall, the pad is brought into pressure contact with the inner peripheral portion of the pad.
In either case, a fixing portion for fixing the pad in close contact with the support wall and the base surface is attached .
A suction space is provided between the fixed portion and the base surface to save a deformed region of the pad that is deformed so that the peripheral surface bulges in the radial direction at the time of suction. mechanism. The fixed part is
In the case where the pad is fitted on the outer peripheral portion of the support wall, the inner diameter is formed to be smaller than the outer diameter of the pad by a predetermined dimension and is provided by pressure contact along the outer peripheral portion of the pad. Has a discontinuous shape,
In the case where the pad is fitted to the inner peripheral portion of the support wall, the outer diameter is formed to be a predetermined dimension larger than the inner diameter of the pad and is continuously provided by pressure contacting along the inner peripheral portion of the pad. Has a shaped or discontinuous shape,
The suction mechanism according to claim 1, wherein in any case, the suction mechanism is arranged at a position separated by a predetermined dimension from the base surface in the direction toward the work. A plurality of the space portions are provided for one main body portion, and the corresponding pads are provided for each of the space portions.
The suction mechanism according to claim 1 or 2 , wherein the fixing portion is attached to the main body portion so that a plurality of the pads can be fixed at the same time. The adsorption mechanism according to any one of claims 1 to 3 , wherein the pad is formed of a porous rubber, elastomer, resin, or a composite material thereof.

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