TW201442086A - Jig for breaking - Google Patents

Abstract

The present invention provides a jig for breaking, capable of breaking a substrate having a functional area without causing dislocation. The solution of the present invention comprises a means for arranging a substrate 10 on a base 20 having a convex part 21 through an elastic component 30; and a means for holding the periphery of the substrate 10 by a frame shaped component 40 matching an opening 41 of the substrate 10 and a pressing component 50 having comb shaped parts 52a-53b at its upper area. Thereby, the substrate can be correctly broken without the occurrence of dislocation or warp.

Description

Crack fixture

The present invention relates to a cracking jig for use in cracking a brittle material substrate such as a semiconductor wafer, and the brittle material substrate has a functional region (also referred to as an element region).

Patent Document 1 mentions a substrate breaking device in which a substrate on which a score line is formed is pressed from a back surface of a surface on which a score line is formed along a scribe line and perpendicularly to the surface Broken. In the following, an outline of the cracking by using such a cracking device will be disclosed. A plurality of functional regions are formed in the array on the substrate to be the object to be broken. In the case of breaking, first, the substrate is formed with scribe lines in the longitudinal direction and the lateral direction at equal intervals between the functional regions. Then, along the scribe line, the breaking device is used to break. Fig. 1(a) is a cross-sectional view showing the substrate placed on the breaking device before the breaking. As shown in the figure, scribe lines S1, S2, S3, . . . are formed between the functional regions 101a and 101b on the substrate 101. In the case of breaking, the adhesive tape 102 is adhered to the back surface of the substrate 101, and the protective film 103 is adhered to the surface. Then, at the time of the breakage, as shown in Fig. 1(b), the scribe line which should be broken is disposed in the middle of the receiving blade 105, 106, and in this case, the scribe line S2 is disposed, and from the upper portion thereof The blade 104 is lowered in an anastomosis manner, and the substrate 101 is pressed. In this manner, the breakage of the three points of the blade 105, 106 and the blade 104 is utilized.

Patent Document 1: Japanese Laid-Open Patent Publication No. 2004-39931

In the substrate breaking device having such a configuration, the substrate is formed in a lattice shape, and particularly when the peripheral portion is broken, when the blade is pressed down and pressed, the substrate is slightly moved outward. . At this time, there is a case where the end portion of the substrate is easily lifted up and the substrate fixing frame is attached to cause a vacuum leak. As a result, the position where the splitting bar is lowered and the position of the score line are misaligned, and there is a problem that the crack cannot be stably performed. Therefore, it is necessary to move the blade for rupture to minute intervals, to reposition the substrate, and the like, and there is a problem that not only the time is set in the setting, but also the functional area may be damaged in the case where the position is displaced.

The present invention has been made in view of such a problem, and it is an object of the invention to provide a jig for cracking a substrate in such a manner that the substrate can be broken without causing positional displacement even if the substrate is repeatedly broken.

In order to solve the problem, the jig for cracking of the present invention is a jig for cracking a substrate having a slashed brittle material, comprising: a susceptor on which the brittle material substrate is placed; and an elastic member having The same shape as the brittle material substrate is disposed on the base; the frame-shaped frame member has an opening corresponding to the outer shape of the elastic member at the center, and holds the elastic member placed on the base And the brittle material substrate that has been placed on the upper portion thereof; and the pressing member is disposed on the upper portion of the frame member, and the brittle material substrate is pressed from the periphery of the frame member.

Here, the brittle material substrate may have a functional region formed at a predetermined distance in the longitudinal direction and the lateral direction, and a scribe line formed in a lattice shape so that the functional region is located at the center; Having a distance between functional regions corresponding to the substrate of the brittle material An opening arranged at intervals; the elastic member has a through hole at a position corresponding to the opening of the base.

Here, the susceptor may have a protrusion having the same shape as the brittle material substrate, and the opening of the pedestal penetrates the protrusion.

Here, the pressing member may have a central opening smaller than the brittle material substrate, and a protrusion extending from the periphery toward the center and having a pitch corresponding to a distance between the functional regions of the brittle material substrate. And a comb portion formed by a slit; the frame member is provided with a groove corresponding to a pitch between the functional regions on the periphery thereof.

Here, the elastic member may be a transparent elastic plate having a certain thickness and the same shape as the brittle material substrate.

When the jig for the crack of the present invention having such a feature is used, the brittle material substrate is positioned and broken by the frame member and the pressing member of the jig for the periphery of the crack, so that even when the crack is broken, There is also no case where the position of the substrate end is misaligned. Therefore, it is possible to obtain an effect of breaking the brittle material substrate along the score line without requiring repeated positioning even if the number of cracks is performed.

10‧‧‧Battery material substrate

11‧‧‧ functional area

20‧‧‧ Pedestal

21‧‧‧Protruding

22, 24‧‧‧ openings

23, 25‧‧‧ catheter

30‧‧‧Flexible components

31, 32‧‧‧through holes

40‧‧‧Frame members

41‧‧‧ openings

42a, 42b, 43a, 43b‧‧‧ trench

50‧‧‧ Pressing members

51‧‧‧ openings

52a, 52b, 53a, 53b‧‧‧ comb

Fig. 1 is a cross-sectional view showing a state in which a conventional substrate is broken.

Fig. 2 is a front elevational view showing an example of a substrate to be cracked in the present invention.

Fig. 3A is a perspective view showing a part of a jig for a splitting according to an embodiment of the present invention.

Fig. 3B is a perspective view showing a part of the jig for cracking of the embodiment and a substrate to be cracked.

Fig. 4 is a cross-sectional view showing a state in which a substrate is placed on the jig for cracking of the embodiment.

In the substrate 10 to be cracked in the embodiment of the present invention, as shown in FIG. 2, in the manufacturing step, a substrate having a plurality of functional regions 11 is formed in a lattice shape along the x-axis and the y-axis. This functional area 11 is set, for example, to have a function as an LED. Further, in order to separate the functional regions into LED chips, the scribing means is formed such that the longitudinal direction marks S _y1 to S _yn and the horizontal scribe lines S are formed so that the functional regions are located at the center. _X1 ~ S _xm are orthogonal to each other. Therefore, the distance between the lines S _x1 to S _xm and S _y1 to S _{yn is} the same as the distance between the x-axis and the y-axis direction of the functional region.

Next, the jig for cracking of the present embodiment used when the substrate 10 is broken will be described. 3A and 3B are perspective views showing the jig 1 for cracking of the embodiment. As shown in FIG. 3B, the jig for cracking has a square base 20 and an elastic member 30 disposed at an upper portion thereof, a frame member 40 holding the periphery of the elastic member 30 shown in FIG. 3A, and a frame having a frame. The member 40 is substantially the same outer diameter pressing member 50. The cracking jig 1 is used to fix the substrate 10, and is used when the substrate is broken by a blade (not shown) from the upper portion thereof.

Next, each member will be described in more detail. The susceptor 20 is formed of a transparent member and has a hollow inside. A rectangular projection 21 having the same rectangular shape as the substrate 10 is provided at the center of the upper surface of the susceptor 20, and a plurality of openings 22 are annularly provided on the surface of the projection 21. All of the openings 22 communicate with each other and are connected to a duct 23 provided on the side of the susceptor 20. Further, a plurality of openings 24 arranged in the x-axis and y-axis directions are provided inside the opening 22. These openings 24 are all connected internally, and are connected to the duct 25 on the outside. These ducts 23 and 25 are connected to a vacuum suction device (not shown).

Next, the elastic member 30 has the same shape as the protrusion 21 and has a certain An elastic member such as a rubber having a thickness is provided with a through hole 31 provided along four sides of the periphery and a plurality of through holes 32 arranged in a lattice shape on the inner side. The through hole 31 is provided at a position corresponding to the above-described opening 22, and the through hole 32 is provided at a position corresponding to each opening 24. Therefore, when the elastic member 30 is held vertically above the protrusion 21, the positions of the through hole 31 and the opening 22, the through hole 32, and the opening 24 are respectively matched. In order to confirm the position of the scribe line of the substrate 10 on which the elastic member 30 is placed, the elastic member 30 is preferably a transparent member.

The opening 22 of the susceptor 20, when the substrate 10 has been correctly positioned and disposed directly above the protrusion 21 and the elastic member 30, the scribe lines S _y1 , S _yn and the lateral direction at both ends in the longitudinal direction The ends are scribed on the outer sides of S _x1 and S _xm . The openings 22 and the through holes 31 are used to attract portions of the end plates of the substrate 10 outside the LED chips when they have been broken along the score line.

Further, the opening 24 of the susceptor 20 passes through the scribe line S _x2 to S _{x (m-1)} formed on the substrate 10 when the substrate 10 has been correctly positioned and disposed directly above the protrusion 21 and the elastic member 30. _{), S y2 ~ S y (} n-1) adjacent to the opening 24 of the middle, and each functional area 10 of the substrate 11 are provided at positions corresponding to the respective openings 24.

Next, as shown in FIG. 3A, the frame member 40 is a flat member, and an opening 41 having the same rectangular shape as the substrate 10 and the elastic member 30 is provided at the center thereof. When the elastic member 30 is held in the center opening 41 around the frame member 40, a plurality of depths are formed in parallel along the center line of the through holes 31 and 32 parallel to the x-axis and parallel to the x-axis. Grooves 42a, 42b. Further, when the elastic member 30 is held by the opening 41, a plurality of grooves 43a and 43b having a certain depth are formed in parallel along the center line of the through holes 31 and 32 parallel to the y-axis in the y-axis. Further, the thickness of the frame member 40 corresponds to the sum of the thickness of the projection 21 of the susceptor 20, the elastic member 30, and the substrate 10.

Next, the pressing member 50 is a thin flat plate having an outer shape substantially the same as that of the frame member 40, and an opening 51 slightly smaller than the opening 41 of the frame member 40 is provided at the center. Further, comb portions 52a, 52b, 53a, 53b in which slits and projections are alternately provided toward the edge of the opening 51 are formed around the periphery. The distance between the slit and the projection of the comb portion is the same as the distance between the scribe lines S _x1 to S _xm and S _y1 to S _yn of the substrate 10 to be cracked, and has a certain width.

Further, when the frame member 40 and the pressing member 50 are overlapped so that the outer circumference thereof coincides, the slits of the comb portions 52a to 53b and the grooves 42a to 43b of the frame member 40 respectively correspond to each other. Further, when the substrate 10 is held in the opening of the frame member 40, the extension line of the scribe line of the substrate 10 is a position passing through the groove of the frame member 40 and the center of the slit of the pressing member 50.

Next, a case where the substrate 10 is cracked by using the jig 1 for cracking will be described. First, the substrate 10 is scribed as shown in FIG. The scoring can be used to scribe the front end of the blade that rotates the scoring wheel, or to scribe the laser using laser light.

Next, as shown in the cross-sectional view shown in FIG. 4, the susceptor 20 of the jig 1 for cracking is placed on the upper surface of the platform 60 of the breaking device. Then, the elastic member 30 is placed on the protruding portion 21 of the susceptor 20, and the substrate 10 is laminated thereon so that the surface on which the scribe line is formed is below. Then, in a state where the elastic member 30 and the substrate 10 are placed on the protruding portion 21 of the susceptor 20, the frame-shaped member 40 is placed on the outer side, and then the pressing member 50 is placed. At this time, the lower surface of the frame member 40 is disposed to directly contact the periphery of the protrusions 21 of the susceptor 20. Accordingly, the score line is positioned to be located in the middle of each opening 22. Next, a screw groove is provided in the four sides of the pressing member 50 and the frame member 40, and the base 20 is coupled and fixed by screws.

At this time, since the opening 51 of the pressing member 50 is larger than the opening 41 of the frame member 40 Since it is slightly small, the protrusions of the comb portions 52a to 53b are placed so as to be coated around the substrate 10. Then, a vacuum suction device (not shown) is operated to suck the periphery of the substrate 10 from the conduit 23, and the functional regions of the substrate are sucked from the conduit 25 to hold the substrate 10.

At this time, the scribe line of the substrate 10 is confirmed by a CCD camera, an infrared camera, or the like through the transparent susceptor 20 and the elastic member 30 from below, and the blade 61 of the rupturing device is directly from the upper side of the scribe line of the substrate 10 from the upper portion. Break down and break. Accordingly, the blade 61 is pressed downward at a position corresponding to the slit of the pressing member 50 or the grooves 42a, 42b, 43a, 43b of the frame member 40. Therefore, the substrate 10 can be broken while the blade 61 is not in contact with the pressing member 50 or the frame member 40. Further, the end portion of the substrate 10 is pressed by the front end of the protrusion of any comb portion of the pressing member 50, so that even when the crack is broken, the position of the separated substrate is not displaced and remains at the original position. Further, it is possible to form an elongated _{segment by} repeatedly breaking along the scribe lines S _x1 to S _xm . Once the cracking in the x-axis direction is completed, individual LED wafers can be generated by repeatedly breaking along the scribe lines S _y1 to S _yn .

Further, although the end material is generated when the scribe lines S _x1 , S _xm , S _y1 , and _Syn are broken, the frame member 40 and the pressing member 50 are held, and the end material is further transmitted through the opening 22, The through hole 31 is adsorbed by the vacuum adsorption device, so that positional misalignment does not occur. In this way, since the positional displacement of the divided piece is hardly generated at the time of the breakage, the breaking operation can be surely performed.

Further, in this embodiment, the protrusions 21 having the same shape as the substrate 10 are provided on the susceptor 20. However, if the elastic members 30 are relatively thick, it is not necessary to provide the protrusions.

Further, in this embodiment, the cracking of the substrate in which the functional region is formed in a lattice shape has been described, but the functional region is not limited. In addition, the present invention is also applicable to LTCC substrates, alumina, aluminum nitride, barium titanate, tantalum nitride, eucalyptus A variety of brittle material substrates such as grease.

When the brittle material substrate having the region to be protected is scribed and cracked, the present invention can be cracked without causing positional displacement even if the end portion is broken, so that it is effective. A cracking device applied to a substrate.

40‧‧‧Frame members

41‧‧‧ openings

42a, 42b, 43a, 43b‧‧‧ trench

50‧‧‧ Pressing members

51‧‧‧ openings

52a, 52b, 53a, 53b‧‧‧ comb

Claims (5)

A cracking jig for breaking a brittle material substrate having a score line, comprising: a base on which the brittle material substrate is placed; and an elastic member having the same shape as the brittle material substrate; And arranged on the base; the frame-shaped frame member has an opening corresponding to the outer shape of the elastic member in the center, and holds the elastic member that has been placed on the base and is placed on the upper portion thereof. The brittle material substrate and the pressing member are disposed on the upper portion of the frame member, and the brittle material substrate is pressed from the periphery of the frame member. The jig for a crack according to the first aspect of the invention, wherein the brittle material substrate has a functional region formed at a predetermined interval in the longitudinal direction and the lateral direction, and a lattice-like shape in which the functional region is located at the center. The pedestal has an opening arranged at an interval corresponding to a distance between functional regions of the brittle material substrate; the elastic member has a through hole at a position corresponding to the opening of the susceptor. The jig for cracking according to the second aspect of the invention, wherein the base has a protrusion having the same shape as the substrate of the brittle material; and the opening of the base penetrates the protrusion. The jig for cracking according to the second aspect of the invention, wherein the pressing member has a central opening smaller than the brittle material substrate, and an opening from the periphery toward the center and is equivalent to the brittle material substrate. The spacing between the functional areas a comb portion formed by a rising portion and a slit; the frame member having a groove corresponding to a pitch between the functional regions on the periphery thereof. The jig for cracking according to any one of claims 1 to 4, wherein the elastic member is a transparent elastic plate having a certain thickness and the same shape as the substrate of the brittle material.