CN201183292Y - Worktable having symmetrical arcs and clamping structure - Google Patents
Worktable having symmetrical arcs and clamping structure Download PDFInfo
- Publication number
- CN201183292Y CN201183292Y CNU2008200047737U CN200820004773U CN201183292Y CN 201183292 Y CN201183292 Y CN 201183292Y CN U2008200047737 U CNU2008200047737 U CN U2008200047737U CN 200820004773 U CN200820004773 U CN 200820004773U CN 201183292 Y CN201183292 Y CN 201183292Y
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- arc
- cutting workbench
- anchor clamps
- symmetrical
- workbench
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Abstract
The utility model discloses a cutting worktable with a symmetrical arc and a clamping structure, which is used for solving the problems that the prior clamping device and cutting worktable present a round or rectangular shape, the equipment fails to be effectively utilized, the output fails to be increased, a large amount of equipment is needed and the equipment cost is high. An arc protrudes outward on the periphery symmetrical with at least one group of opposite sides of the main working space of the cutting worktable, the side of the main working space is additionally provided with an arc-shaped working space, the outer periphery symmetrical with the hollow hole of the clamping device is provided with an outward-protruding arc, and the symmetrical side is additionally provided with an arc-shaped hollow part. The main working space and the arc-shaped working space of the cutting worktable pass through the hollow hole of the clamping device and the arc-shaped hollow part respectively, and the clamping device is positioned and restricted by the fixing device of the cutting worktable. The cutting worktable and clamping structure with a symmetrical arc can utilize the equipment effectively, increase the output and reduce the equipment cost.
Description
Technical field
Utility model relates to a kind of cutting workbench, relates in particular to a kind of cutting workbench and clamp structure with symmetrical arc.
Background technology
General IC wafer assemblies such as semiconductor, the setting of its use is more and more littler with design, so that be used on the various electronic product, make design of electronic products also can significantly dwindle, thereby be convenient for carrying, but IC wafer assemblies such as semiconductor are adding man-hour, convenient and the raising output for processing procedure, the a plurality of arrangements of IC wafer assembly such as semiconductor are once produced, the a plurality of semi-finished product semiconductor of a slice after intact to be produced is again through cutting mode, one one is cut open, the finished product semiconductor uses to make a plurality of half-finished semiconductors become independently, and the cutting of semiconductor subassembly in the past, all be used in and a cutting workbench be set on the slide in order to fix anchor clamps, utilize adhesive tape that wafer is fixed with anchor clamps again, make cutting tool that wafer can be provided with on the workbench with cutting one by one cutting and separating become independent fritter, slide can drive the cutting workbench and produce displacement, and the cutting workbench presents circle or rectangular-shaped, and be provided with fixture in periphery, this fixture will be fixed the anchor clamps that can change and be used, so use the vacuum slot design of fast changable usually, it is fixing to utilize the suction of vacuum slot that anchor clamps can be adsorbed, anchor clamps cooperate the circular or rectangular-shaped of cutting workbench, central authorities have a saturating emptying aperture, this saturating emptying aperture utilizes adhesive tape from bottom to top to stick, wafer is positioned on the adhesive tape of this saturating emptying aperture again, make anchor clamps and wafer with the cutting movable workbench, wafer can be moved in regular turn be cut cutter and cut open.
Yet this anchor clamps present circle or rectangular-shaped with the cutting workbench, and are wherein circular when rectangular piece carries out the multi-disc attaching, can't effectively utilize the space; Rectangle then when circular or irregular workpiece attach, can't effectively utilize the space; Therefore, can't effectively utilize equipment and increase output, and have the many and high problem of equipment cost of process equipment quantity, not meet economic benefit.
The utility model content
The purpose of this utility model provides a kind of cutting workbench and clamp structure with symmetrical arc, in order to the problem that solves is that known anchor clamps are rounded or rectangular-shaped with the cutting workbench, for circle is carried out multi-disc when attaching at rectangular piece, can't effectively utilize the space, rectangle then is when circular or irregular workpiece attach, and can't effectively utilize the space, therefore can't effectively utilize equipment and increase output, and process equipment quantity demand is many, the equipment cost height.
For solving the problems of the technologies described above, the utility model adopts following technical scheme:
Cutting workbench and clamp structure that the utility model provides with symmetrical arc, be fixed with described anchor clamps on the described cutting workbench, and correspondence is provided with a cutter tool on the cutting workbench, wherein cutting workbench is basic quadrangle, it is tetragonal groundwork space that central authorities have without exception, and the cutting workbench distributes in the neighboring and is provided with fixture, and anchor clamps cooperate the shape setting of cutting workbench, and it is tetragonal emptying aperture that central authorities have without exception;
At least one group of relative edge in groundwork space of described cutting workbench the outwards outstanding arcuation of symmetrical periphery, this limit, groundwork space increases by an arc working space, the saturating emptying aperture symmetry neighboring of anchor clamps is provided with the outwards outstanding arcuation of cooperation, and symmetrical limit increases the saturating portion of arc;
The groundwork space of described cutting workbench cooperates the saturating emptying aperture of anchor clamps and the saturating portion of arc to pass respectively with the arc working space, and the fixture that anchor clamps are cut workbench limits and locatees.
The utility model is provided with the arc working space by cutting the general of workbench at least one symmetrical limit, quadrangle groundwork space increases, and the saturating emptying aperture of the anchor clamps that cooperate also is equipped with the saturating portion of arc, whereby, a plurality of wafers circular and rectangle can more effectively be provided, has the effect that enlarges working space, the sharing of using is good, is not limited to the wafer of circle or rectangle, effectively utilizes equipment and increases output and reduce equipment cost.
Description of drawings
Fig. 1 the utlity model has the cutting workbench of symmetrical arc and the three-dimensional exploded view of clamp structure;
Fig. 2 the utlity model has the cutting workbench of symmetrical arc and solid half constitutional diagram of clamp structure;
Fig. 3 the utlity model has the cutting workbench of symmetrical arc and the three-dimensional combination figure of clamp structure;
Cutting workbench and the anchor clamps of clamp structure and the plane that cutting workbench provide rectangle wafer arrange of Fig. 4 for the utlity model has symmetrical arc;
Cutting workbench and the anchor clamps of clamp structure and the plane that cutting workbench provide circular wafers arrange of Fig. 5 for the utlity model has symmetrical arc.
The specific embodiment
In order to make those skilled in the art person understand the utility model scheme better, and above-mentioned purpose of the present utility model, feature and advantage can be become apparent more, the utility model is described in further detail below in conjunction with drawings and Examples.
See also shown in Figure 1, the utlity model has the cutting workbench of symmetrical arc and the preferred embodiment of clamp structure, present embodiment is applicable to cutting crystal wafer 10, it comprises that one is arranged on the cutting workbench 20 on the slide, one anchor clamps 30 are fixed on the cutting workbench 20, anchor clamps 30 provide wafer 10 to bind fixing with the adhesive tape 40 of special use, and on slide and the cutting workbench 20 and the corresponding cutter tool that is provided with, wherein, slide can be controlled the appropriateness that produces orientation and move, on the slide and for the carrying of cutting workbench 20, cutting workbench 20 presents basic quadrangle, central authorities have outstanding for tetragonal groundwork space 21 without exception, and the outwards outstanding arcuation in symmetrical neighboring, each edge long limit around making increases by an arc working space 22 respectively, and cutting workbench 20 is in arc working space 22 neighborings and distribute and to be provided with fixture 23, should be used for fixing anchor clamps 30 with deciding device 23, be generally the design of vacuum slot, it is fixing to utilize the suction of vacuum slot that anchor clamps 30 can be adsorbed, and at least one place, other position, arc working space 22 neighborings of cutting workbench 20 also is provided with reference column 24, anchor clamps 30 cooperate the shape setting of cutting workbench 20, it is tetragonal emptying aperture 31 that central authorities have without exception, and saturating emptying aperture 31 symmetrical neighboring be outwards to give prominence to arcuation, each edge long limit around making increases the saturating portion 32 of an arc respectively, the outer peripheral edges of other anchor clamps 30 also are provided with the corresponding location slot part 33 that cuts the reference column 24 of workbench 20, and adhesive tape 40 one sides have adhesion and are matched with anchor clamps 30 belows.
When present embodiment uses, as shown in Figure 2, adhesive tape 40 from bottom to top is bonding on earlier anchor clamps 30 belows, the whole emptying aperture 31 of anchor clamps 30 all is covered with by adhesive tape 40 together with the saturating portion 32 of arc, 10 saturating emptying apertures 31 by anchor clamps 30 of wafer are put into the saturating portion 32 of arc, and fall within on the adhesive tape 40 cemented, as shown in Figure 3, anchor clamps 30 are positioned on the cutting workbench 20 together with wafer 10 with adhesive tape 40, make wafer 10 can the position in the groundwork space 21 and arc working space 22 of cutting workbench 20, and the fixture 23 of cutting workbench 20 can be inhaled anchor clamps 30 solid, and the reference column 24 of the location slot part 33 of anchor clamps 30 and corresponding cutting workbench 20, wafer 10 utilizes the cemented of adhesive tape 40 and tension force effect, can steadily be fixed in cutting workbench 20 end faces, and therefore anchor clamps 30 and meeting be adsorbed sinking, can use cutting tool to carry out the cutting of wafer 10 with this, and sink because of anchor clamps 30 absorption, therefore only have wafer 10 to be positioned at the top of cutting workbench 20, can make anchor clamps 30 can not cut and decrease and reuse.
As shown in Figure 4, this provides the wafer 10 of rectangular shape to arrange cutting and uses, and cooperates with the saturating portion 32 of arc with the saturating emptying aperture 31 of arc working space 22 and anchor clamps 30 with the groundwork space 21 of cutting workbench 20, can provide the wafer 10 of some rectangular shapes to arrange.
As shown in Figure 5, this provides round-shaped wafer 10 to arrange cutting and uses, groundwork space 21 with cutting workbench 20 cooperates with the saturating portion 32 of arc with the saturating emptying aperture 31 of arc working space 22 and anchor clamps 30, and the space that can enlarge working space 21 is provided with so that more than one round-shaped wafer 10 to be provided.
The arc working space 22 and the saturating portion 32 of anchor clamps 30 arcs that cooperates of its cutting workbench 20, this at least wherein two limits be a prescription formula symmetry, can only there be two limits to be provided with, or four the limit be symmetrical arranged for two groups, also wherein a symmetrical limit is the arc variation of a size, and the arc that another symmetrical limit is other size changes.
The utlity model has following beneficial effect:
The utility model is provided with arc working space 22 by cutting the general of workbench 20 for tetragonal groundwork space 21 symmetry peripheries increase, and the anchor clamps 30 that cooperate are that tetragonal emptying aperture 31 cooperates with the saturating portion 32 of arc generally, the placement of a plurality of wafer 10 can not only be provided, also can enlarge four limit central space of working space 21, to provide more than one round-shaped wafer 10 to be provided with, the use sharing is good, be not limited to the wafer 10 of circle or rectangle, and can effectively provide a plurality of arbitrary shape wafers 10 to arrange in the space, can effectively utilize equipment and increase output, do not need too much process equipment, can reduce equipment cost relatively.
The above; it only is the preferable specific embodiment of the utility model; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement all should be encompassed within the protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claim.
Claims (7)
1, a kind of cutting workbench and clamp structure with symmetrical arc, be fixed with described anchor clamps on the described cutting workbench, and correspondence is provided with a cutter tool on the cutting workbench, wherein cutting workbench is basic quadrangle, and it is tetragonal groundwork space that central authorities have without exception, and distribution is provided with fixture in the neighboring to cut workbench, anchor clamps cooperate the shape setting of cutting workbench, it is tetragonal emptying aperture that central authorities have without exception, it is characterized in that
At least one group of relative edge in groundwork space of described cutting workbench the outwards outstanding arcuation of symmetrical periphery, this limit, groundwork space increases by an arc working space, the saturating emptying aperture symmetry neighboring of anchor clamps is provided with the outwards outstanding arcuation of cooperation, and symmetrical limit increases the saturating portion of arc;
The groundwork space of described cutting workbench cooperates the saturating emptying aperture of anchor clamps and the saturating portion of arc to pass respectively with the arc working space, and the fixture that anchor clamps are cut workbench limits and locatees.
2, cutting workbench and the clamp structure with symmetrical arc according to claim 1 is characterized in that, the fixture of described cutting workbench is a vacuum slot.
3, cutting workbench and the clamp structure with symmetrical arc according to claim 1, it is characterized in that, at least one place of the outer peripheral position of described cutting workbench is provided with reference column, in addition the outer peripheral edges of anchor clamps and be provided with the location slot part of corresponding described reference column.
4, cutting workbench and the clamp structure with symmetrical arc according to claim 1 is characterized in that, the arc working space of described cutting workbench and the saturating portion of the arc of the anchor clamps that cooperate are provided with one group of two limit symmetric mode.
5, cutting workbench and the clamp structure with symmetrical arc according to claim 1 is characterized in that, the arc working space of described cutting workbench and the saturating portion of the arc of the anchor clamps that cooperate are provided with two group of four limit symmetric mode.
6, cutting workbench and the clamp structure with symmetrical arc according to claim 5 is characterized in that, the saturating portion of arc of the arc working space of described cutting workbench and anchor clamps, and its arc specification of two groups is identical.
7, cutting workbench and the clamp structure with symmetrical arc according to claim 5 is characterized in that, the saturating portion of arc of the arc working space of described cutting workbench and anchor clamps, and its arc specification of two groups is inequality.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200047737U CN201183292Y (en) | 2008-01-29 | 2008-01-29 | Worktable having symmetrical arcs and clamping structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200047737U CN201183292Y (en) | 2008-01-29 | 2008-01-29 | Worktable having symmetrical arcs and clamping structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201183292Y true CN201183292Y (en) | 2009-01-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200047737U Expired - Fee Related CN201183292Y (en) | 2008-01-29 | 2008-01-29 | Worktable having symmetrical arcs and clamping structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201183292Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102903679A (en) * | 2012-11-09 | 2013-01-30 | 日月光半导体制造股份有限公司 | Incision fixing fixture |
| CN104129002A (en) * | 2013-04-30 | 2014-11-05 | 三星钻石工业股份有限公司 | Fixture for breaking |
| CN106370679A (en) * | 2016-11-02 | 2017-02-01 | 中国电子科技集团公司第四十六研究所 | Semiconductor wafer notch groove crystal orientation measuring device and use method |
-
2008
- 2008-01-29 CN CNU2008200047737U patent/CN201183292Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102903679A (en) * | 2012-11-09 | 2013-01-30 | 日月光半导体制造股份有限公司 | Incision fixing fixture |
| CN104129002A (en) * | 2013-04-30 | 2014-11-05 | 三星钻石工业股份有限公司 | Fixture for breaking |
| CN106370679A (en) * | 2016-11-02 | 2017-02-01 | 中国电子科技集团公司第四十六研究所 | Semiconductor wafer notch groove crystal orientation measuring device and use method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: DEJI PRECISION MACHINERY CO., LTD. Free format text: FORMER OWNER: QIYI TECHNOLOGY INTERNATIONAL CO., LTD. Effective date: 20090724 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20090724 Address after: Lane 16, Lane 296, Lane 50, Taiping Road, Taiping County, Taichung County, Taiwan Province, china: Patentee after: DEJI PRECISION MACHINERY CO., LTD. Address before: Taiping County, Taichung City, China 16 Industrial Road, No. 19, Taiwan: Patentee before: Qiyi Technology International Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090121 Termination date: 20130129 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |