KR101619876B1 - Suction pad for transferring device and the transferring device comprising the same - Google Patents

Suction pad for transferring device and the transferring device comprising the same Download PDF

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Publication number
KR101619876B1
KR101619876B1 KR1020140047393A KR20140047393A KR101619876B1 KR 101619876 B1 KR101619876 B1 KR 101619876B1 KR 1020140047393 A KR1020140047393 A KR 1020140047393A KR 20140047393 A KR20140047393 A KR 20140047393A KR 101619876 B1 KR101619876 B1 KR 101619876B1
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South Korea
Prior art keywords
structures
base plate
fine
microciliary
ciliary structures
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KR1020140047393A
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Korean (ko)
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KR20150121482A (en
Inventor
정훈의
Original Assignee
울산과학기술원
(주)엠프리시젼
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Priority to KR1020140047393A priority Critical patent/KR101619876B1/en
Priority to PCT/KR2014/011390 priority patent/WO2015163554A1/en
Publication of KR20150121482A publication Critical patent/KR20150121482A/en
Application granted granted Critical
Publication of KR101619876B1 publication Critical patent/KR101619876B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a suction pad for a transfer device, and more particularly, to a suction pad for a transfer device for transferring a transfer subject to a laminated container, comprising: a base plate; Micro-ciliary structures that are spaced apart from each other by a predetermined interval in a predetermined center area on the base plate and are adsorbed to the object to be transferred; And a barrier disposed at an edge region of the base plate and surrounding the microciliary structures to prevent damage to the microciliary structures located adjacent to the edge region of the microciliary structures, And an adsorption pad.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an adsorption pad for a transfer device and a transfer device having the same,

The present invention relates to a suction pad for a transfer apparatus and a transfer apparatus having the same, and more particularly, to a suction pad for a transfer apparatus capable of transferring a transfer object safely by adsorbing fine ciliary structures with a transfer object, And a transfer device having the same.

In order to provide a semiconductor device, a substrate processing apparatus for processing wafers uses a sealed wafer container such as a cassette or a carrier to store wafers and protect wafers from foreign substances or chemical contamination in the atmosphere. In order to transfer a wafer to a sealed wafer container such as a cassette or a carrier, a transfer device capable of supporting and transporting the wafer is required.

A mechanical chuck and an electrostatic chuck are used in a conventional transfer device. In the case of a mechanical chuck, the wafer is normally held in the vertical direction to support the wafer. However, as in the case of the former, when the wafer is fixedly supported in the vertical direction of the wafer, the chuck directly contacts the wafer surface, causing a problem that the wafer surface is scratched by the chuck.

On the other hand, in the case of the electrostatic chuck, the central portion of the back surface of the wafer is brought into contact with the attracting portion of the electrostatic chuck to fix the wafer to a sufficient force for supporting the wafer. However, in the case of using the electrostatic chuck, there is a fear that the back central portion of the wafer is fixed in contact with the adsorbing portion of the vertical chuck so that foreign matter adheres to the central portion or scratches may occur. Particularly, when the residual electric current flows in the electric field of the leakage, the wafer may have a force to attract foreign matter. In order to solve these problems, recently, an apparatus for transferring wafers using fine ciliary structures has been developed.

However, the adsorption pad 10 for a transfer device manufactured using micro-ciliated structures may cause the microciliary structures 11 to slide in the horizontal direction when the wafer adsorbed on the micro-ciliated structures 11 is separated, Separate the structures. At this time, the fine ciliary structures 11 located in the edge region of the adsorption pad 10 are subjected to strong stress and frictional force by sliding movement. The strong stress and the frictional force applied to the fine ciliary structures 11 located in the edge region of the adsorption pad 10 cause a problem of damaging the fine ciliary structures 11 as shown in Figs.

Japanese Laid-Open Patent Publication No. 2012-89837

An object of the present invention is to provide a suction pad for a transfer device and a transfer device including the same, which are capable of transferring a transfer object safely by adsorbing fine ciliary structures with a transfer object.

The present invention relates to a suction pad for a transfer device for transferring a transfer subject to a laminated container, the suction pad comprising: a base plate; Micro-ciliary structures that are spaced apart from each other by a predetermined interval in a predetermined center area on the base plate and are adsorbed to the object to be transferred; And a barrier disposed at an edge region of the base plate and surrounding the microciliary structures to prevent damage to the microciliary structures located adjacent to the edge region of the microciliary structures, Thereby providing an adsorption pad.

According to another aspect of the present invention, there is provided an adsorption pad for a transfer device for transferring a transfer object to a laminated container, comprising: a base plate; Micro-ciliary structures that are spaced apart from each other by a predetermined interval in a predetermined center area on the base plate and are adsorbed to the object to be transferred; And a plurality of microciliary microstructures disposed on the edge of the base plate and adsorbed on the microciliary microstructures to prevent damage to the microciliary structures located near the edge region, The present invention also provides an adsorption pad for a transfer device comprising microcapsule structures.

According to another aspect of the present invention, there is provided an adsorption pad for a transfer device for transferring a transfer object to a laminated container, comprising: a base plate; Micro-ciliary structures that are spaced apart from each other by a predetermined interval in a predetermined center area on the base plate and are adsorbed to the object to be transferred; And a micro-ciliary lens structure surrounding the micro-ciliary structures to prevent damage to the micro-ciliary structures located in the set edge region on the base plate and adsorbed on the transferred object and located near the edge region of the fine ciliary structures, The present invention provides an adsorption pad for a transfer device including damage-preventing fine ciliary structures having a density higher than that of the fine ciliary structures.

The suction pad for a transfer device and the transfer device having the same according to the present invention have the following effects.

First, it has an effect of preventing damage to microciliary structures due to stress and frictional force generated when the microciliary structures and the object to be transferred are separated from each other by providing damage preventing means for wrapping microciliary structures on the base plate.

Particularly, the damage prevention microciliary structures can be adjusted in size and number so as to correspond to the stress and friction force generated in the edge region, thereby preventing microciliary structures and damage-preventing microciliary structures from being damaged by stress and frictional forces, It is possible to enhance the attraction force and securely transfer the object to be conveyed.

1 and 2 are partially enlarged views of a portion of a conventional suction pad for a transfer device.
3 is a plan view and a cross-sectional view illustrating an adsorption pad for a transfer apparatus according to an embodiment of the present invention.
4 is a plan view and a cross-sectional view illustrating an adsorption pad for a transfer apparatus according to another embodiment of the present invention.
5 is a plan view and a cross-sectional view illustrating an adsorption pad for a transfer apparatus according to another embodiment of the present invention.

3 to 5 show an adsorption pad for a transfer device according to the present invention.

Although not shown in the drawings, the transfer apparatus further includes a main body (not shown) and a robot arm (not shown) together with the adsorption pad 100. [ The main body (not shown) is coupled to the robot arm (not shown), and the main body (not shown) is provided with an operation control unit (not shown) for controlling the operation of the robot arm . When the operation control unit (not shown) is installed, an operator can directly operate the operation control unit (not shown) to control the operation of the robot arm (not shown). However, the operation of the robot arm (not shown) is not limited to that performed by an operator, but may be automatically performed according to preset settings.

The shape of the main body (not shown) is not specified, and may be formed in various forms in which the robot arm (not shown) can be coupled by a manufacturer. In the beginning, the size of the main body (not shown) was generally made large, but recently, the size of the main body (not shown) has been gradually reduced in order to improve the technology development and space utilization.

The robot arm (not shown) is coupled to the main body (not shown) and includes the suction pad 100 for the transfer apparatus according to the present invention, as described above. The shape of the lobe arm (not shown) may be formed in a plurality of directions, but it is generally formed as a structure having joints, so that the adsorption pad 100 and the adsorption pad 100 The transfer object can be moved. The object to be transferred to the adsorption pad 100 for the transfer device may be, for example, a wafer, a display panel, or the like. In the detailed description of the present invention, it is assumed that the transfer object is a wafer.

First, referring to FIG. 3, an adsorption pad for a transfer apparatus according to an embodiment of the present invention will be described. 3 (a) is a plan view of a suction pad for a transfer apparatus according to an embodiment of the present invention, and FIG. 3 (b) is a sectional view of a section A-A 'of FIG. 3, the adsorption pad 100 of the adsorption pad for the adsorption pad transfer apparatus for the transfer apparatus according to an embodiment of the present invention includes a base plate 101, fine ciliary structures 110, ). The base plate 101 supports the fine ciliary structures 110 and the barrier ribs 130. The minute ciliary structures 110 and the barrier ribs 130 are installed on the base plate 101 and the adsorption pad 100 is moved by the base plate 101 toward the robot 100. [ (Not shown).

In this embodiment, the base plate 101 is formed in the shape of a plate having a circular cross section. The base plate 101 is formed only in the shape of a circular cross section. However, the base plate 101 is not necessarily formed in the shape of a plate having a circular cross section.

The fine ciliary structures 110 are attached on the base plate 101. As shown in FIG. 3, the fine ciliary structures 110 are spaced apart from each other by a predetermined interval. More specifically, each of the fine ciliary structures 110 includes a column 111 and a contact 113. The column portion 111 is vertically installed on the base plate 101. The column portion 111 is formed in the shape of a cylinder having a circular cross section, for example, in the longitudinal direction. However, the present invention is not limited thereto, and the columnar section 111 may be formed in a columnar shape having various cross-sectional shapes such as a triangular shape or a square shape.

The contact portion 113 is provided at the tip of the column portion 111, and is attracted to the object to be conveyed. When the set pressure is applied, the abutting portion 113 is brought into close contact with the conveying object and sucked to the conveying object. The contact portion 113 has a surface 113a which is in contact with the object to be conveyed. However, this is merely an example, and it is not limited to being formed concavely, and it can be formed in a form having various shapes such as a plane shape, a convex shape, and the like. A protrusion 113b is formed at the tip of the surface 113a that is in contact with the object to be transferred. In this embodiment, the contact portion 113 is shown to be downward. However, when the absorption pad 100 transports the object to be transported, the absorption pad 100 is rotated 180 ° so that the contact portion 113 is upward, . However, the present invention is not limited thereto, and the contact portion 113 may be in contact with the object to be conveyed in a downward direction.

As described above, the contact portion 113 is provided at the tip of the column portion 111 so as to be closely contacted with and attracted to the conveyed object. When the protrusion 1113b of the contact portion 113 comes into contact with the object to be transported, an air layer is formed between the object to be transported and the contacting surface 113a. At this time, when the set pressure is applied to the object to be transferred, air in the air layer is removed between the object to be transferred and the contact surface 113a, and the contact surface 113a is closely attached to the object to be transferred.

As described above, the micro-ciliary structures 110 are spaced apart from each other by a predetermined distance. For example, the micro-ciliary structures 110 are arranged in a matrix so as to form a plurality of columns and a plurality of cells. do. The number of micro-ciliary structures 110 formed depends on the size of the base plate 101, the size of the contact portion 113, and the size of the object to be transferred to the adsorption pad 100.

The barrier ribs 130 prevent damage to the fine ciliary structures 110. More specifically, the barrier ribs 130 are provided on the base plate 101, and particularly, on the edge regions of the base plate 101. The barrier ribs 130 are provided on the edge regions of the base plate 101 to prevent damage to the fine ciliary structures 110 located near the edge regions.

The partition 130 protrudes from the base plate 101 by the edge area. And is formed to surround the fine ciliary structures 110 along the circumferential direction of the base plate 101. In this embodiment, since the base plate 101 is formed in a plate shape having a circular cross section, the partition wall 101 is formed along the circumferential direction of the base plate 101 and formed in the shape of a ring.

Generally, the height of the barrier ribs 130 is equal to the height of the fine ciliary structures 110. Since the barrier ribs 130 are formed to prevent damage to the fine cilia structures 110, the height of the barrier ribs 130 should not be lower than the height of the fine cilia structures 110. If the height of the barrier ribs 130 is lower than the height of the fine cilia structures 110, stress and frictional force when the fine cilia structures 110 are separated from the conveyance object are not dispersed in the barrier ribs 130 The microciliary structures 110 are damaged due to stress and frictional force.

In addition, if the barrier ribs 130 are higher than the height of the fine ciliary structures 110, the fine ciliary structures 110 can not be adsorbed with the transported objects, and the transported objects can not be transported. Therefore, the height of the partition wall 130 is equal to the height of the fine cilia structures 110, so that the stress and the frictional force when the fine cilia structures 110 are separated from the conveyance object are dispersed in the partition wall 130 Thereby preventing the fine ciliary structures 110 from being damaged.

Meanwhile, the height of the fine ciliary structures 110 may be several nanometers to several hundreds of micrometers higher than the height of the barrier ribs 130. In this case, the fine ciliary structure 110 is pressed down by the weight of the conveyed object and the acceleration due to the operation of the conveying device, so that the fine ciliary structure 110 and the partition 130 are separated from the conveyed object 130). In addition, the fine ciliary structures 110 and the transfer object 130 can be easily separated in the vertical direction due to the elasticity generated by the pressing of the fine ciliary structures 110.

4 shows a suction pad 100 'for a transfer device according to another embodiment of the present invention. FIG. 4A is a plan view of an adsorption pad for a transfer apparatus according to another embodiment of the present invention, and FIG. 4B is a sectional view of section B-B 'of FIG. Referring to FIG. 4, the suction pad 100 'for a transfer device according to another embodiment of the present invention includes a base plate 101, fine ciliary structures 110, Damage micro-ciliary structures 130 '. Since the base plate 101 and the fine ciliary structures 110 have the same configuration as that of the adsorption pad 100 for a transfer apparatus according to the above-described embodiment, the same reference numerals are used for the same and the detailed description thereof will be omitted .

The damage-preventing microcapsule structures 130 'have the same structure as the microcapsule structures 110. That is, each of the damage preventive fine ciliary structures 130 includes a column 131 'and a contact 133'. The contact 133 includes a contact surface 133 'a and a contact 133' ).

The cross-sectional area of each of the anti-damage microsphere structures 130 'is larger than the cross-sectional area of the microsphere structures 110. More specifically, the contact portion 133 'of the damage preventive fine ciliary structure 130' is formed to be larger than the contact portion 113 of the microciliary structure 110. The size of the pillars 131 of the damage-preventing microcapsule structure 130 is greater than or equal to the size of the pillars 111 of the microcapsule structure 110.

Like the fine ciliary structures 110, the damage-preventing fine ciliary structures 130 are spaced apart from each other by an interval set in the edge region, and are arranged in a matrix so as to form a plurality of columns and a plurality of chambers . However, the arrangement pitch of the damage-preventing fine ciliary structures 130 ', that is, the spacing between the neighboring damage-preventing fine ciliary structures 130', may be different from the arrangement pitch of the fine ciliary structures 110, Lt; RTI ID = 0.0 > 110 < / RTI >

As described above, when the adsorption pad 110 'is adsorbed and separated from the transported object, a large stress and a frictional force are generated in the edge region. Since the damage preventive fine ciliary structures 130 are formed to be larger than the fine ciliary structures 110, the stress generated in the edge region and the force to resist the frictional force are greater than those of the fine ciliary structures 110. Therefore, And also prevents damage to the microciliary structures 110 without being easily damaged by frictional forces. Accordingly, the size of the damage-preventing microciliary structure 130 'is determined in consideration of the stress and the frictional force generated in the edge region.

5 shows a suction pad 100 " for a transfer device according to another embodiment of the present invention. FIG. 5A is a plan view of a suction pad for a transfer apparatus according to another embodiment of the present invention, and FIG. 5B is a sectional view of a section C-C 'of FIG. 5, a suction pad 100 "for a transfer device according to another embodiment of the present invention includes a base plate 101, fine ciliary structures 110, and damage-preventing fine ciliary structures 130" do. Since the base plate 101 and the fine ciliary structures 110 of the present embodiment have the same configuration as the adsorption pad 100 for a transfer apparatus according to the above-described embodiment, the same reference numerals are used to omit the description thereof.

In this embodiment, the damaged microcirrus structures 130 " are the same size as the microciliary structures 110. That is, the size of the contact portion 133 '' of the damage prevention micro-ciliary structure 130 '' and the size of the contact portion 113 of the micro ciliary structure 110 are the same.

5, the density of the fine ciliary structures 110 installed in the central region of the base plate 101 and the density of the fine ciliary structures 110 installed on the edge region of the base plate 101 The densities of the ciliary structures 130 " are different from each other. As shown in FIG. 5A, the first density of the damage prevention micro-ciliary structures 130 " installed in the edge region is determined by the density of the micro-ciliary structures 110 Is greater than the second density.

In other words, a spacing distance between the minute cilia structures 110 is widened in the central region of the base plate 101, and a spacing distance between the minute cilia structures 110 is narrowed in the edge region of the base plate 101 . Therefore, the density of the damage-preventing fine ciliary structures 130 'installed in the edge region is larger than the density of the fine ciliary structures 110 installed in the central region.

Also, although not shown in the drawing, the damage-preventing fine ciliary structures 130 '' may be provided so that the density of the damage-preventing fine ciliary structures 130 'gradually increases from the central region to the edge region.

If the density of the damage-preventing fine ciliary structures 130 'provided in the edge region is increased, the distribution of the stress and the frictional force generated in the edge region becomes more uniform, and the damage-preventing fine ciliary structures 130' It is possible to prevent damage to the fine ciliary structures 110 and to prevent damage to the fine ciliary structures 110.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

100, 100`, 100 ": adsorption pad for conveying device
101: Base plate
110: microciliary structure
111: column portion 113: contact portion
130:
130`, 130 ": Prevention of damage Microfilm structure

Claims (14)

A suction pad for a transfer device for transferring a transfer object to a laminated container,
A base plate;
Micro-ciliary structures that are spaced apart from each other by a predetermined interval in a predetermined center area on the base plate and are adsorbed to the object to be transferred; And
A plurality of fine ciliary structures arranged on a predetermined edge region of the base plate, the height of the fine ciliary structures being equal to the height of the fine ciliary structures to prevent damage to the fine ciliary structures located near the edge region, And a partition wall surrounding the microciliary structures and having a transverse width width greater than a transverse width of the microciliary structure,
And a stress and a frictional force generated when the fine ciliary structures are separated from the conveyed object are dispersed in the partition wall. The method according to claim 1,
Wherein the partition wall is protruded and formed on the base plate by the edge area. delete A suction pad for a transfer device for transferring a transfer object to a laminated container,
A base plate;
Micro-ciliary structures that are spaced apart from each other by a predetermined interval in a predetermined center area on the base plate and are adsorbed to the object to be transferred; And
A plurality of fine ciliary structures arranged on an edge region of the base plate to be attracted to the object to be transported, the micro ciliary structures surrounding the fine ciliary structures, Including microciliary structures,
The height of the damage-preventing microciliary structures is the same as the height of the microciliary structures,
The size of the cross-sectional area of the damage-preventing micro-ciliary structure is larger than the size of the cross-sectional area of the micro-ciliary structure so that the force to resist the stress and the frictional force generated in the edge area when the object is separated from the attracted object The adsorption pad for the conveying device. delete delete The method of claim 4,
And the arrangement pitch of the damage-preventing fine ciliary structures is formed to be the same as the arrangement pitch of the fine ciliary structures provided in the central region. delete delete delete The method according to claim 1,
The micro-
A column portion vertically installed on the base plate; And
And a contact portion provided at a tip of the column portion and brought into close contact with the conveying object when a predetermined pressure is applied. The method of claim 4,
Wherein the microciliary structure and the microcirrhosis-
A column portion vertically installed on the base plate; And
And a contact portion provided at a tip of the column portion and brought into close contact with the conveying object when a predetermined pressure is applied. The method according to claim 11 or 12,
Wherein the contact portion has a concave surface that is in contact with the conveying object,
Wherein air is adsorbed while the air between the object to be conveyed and the contact portion is removed when a pressure set at the upper side of the object to be conveyed is applied. delete
KR1020140047393A 2014-04-21 2014-04-21 Suction pad for transferring device and the transferring device comprising the same KR101619876B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020140047393A KR101619876B1 (en) 2014-04-21 2014-04-21 Suction pad for transferring device and the transferring device comprising the same
PCT/KR2014/011390 WO2015163554A1 (en) 2014-04-21 2014-11-26 Adsorption pad for transfer device and transfer device having same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140047393A KR101619876B1 (en) 2014-04-21 2014-04-21 Suction pad for transferring device and the transferring device comprising the same

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KR20150121482A KR20150121482A (en) 2015-10-29
KR101619876B1 true KR101619876B1 (en) 2016-05-11

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WO (1) WO2015163554A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10804132B2 (en) 2017-09-08 2020-10-13 Samsung Electronics Co., Ltd. Apparatus for manufacturing semiconductor
KR102214706B1 (en) * 2020-10-11 2021-02-10 주식회사 지논 Pad Structure for Transfering Flat Panel

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Publication number Priority date Publication date Assignee Title
JP2008074565A (en) 2006-09-21 2008-04-03 Nippon Electric Glass Co Ltd Suction-holding method and suction-holding pad for plate-like object
KR101025696B1 (en) 2009-11-30 2011-03-30 서울대학교산학협력단 Fine ciliary structure for vacuum adhesion, method of using the same and method of manufacturing the same

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Publication number Priority date Publication date Assignee Title
US8524092B2 (en) * 2006-12-14 2013-09-03 Carnegie Mellon University Dry adhesives and methods for making dry adhesives
KR100864732B1 (en) * 2007-03-21 2008-10-23 (주)바로텍 chuck using nano-scale cilium, fabricating method and chucking/de-chucking method for the same
KR20120124700A (en) * 2011-05-04 2012-11-14 엠.씨.케이 (주) Pad for adsorbing the substrate and manufacturing method thereof

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Publication number Priority date Publication date Assignee Title
JP2008074565A (en) 2006-09-21 2008-04-03 Nippon Electric Glass Co Ltd Suction-holding method and suction-holding pad for plate-like object
KR101025696B1 (en) 2009-11-30 2011-03-30 서울대학교산학협력단 Fine ciliary structure for vacuum adhesion, method of using the same and method of manufacturing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10804132B2 (en) 2017-09-08 2020-10-13 Samsung Electronics Co., Ltd. Apparatus for manufacturing semiconductor
KR102214706B1 (en) * 2020-10-11 2021-02-10 주식회사 지논 Pad Structure for Transfering Flat Panel
US11784083B2 (en) 2020-10-11 2023-10-10 G-NONE.Co.Ltd. Pad structure for transferring flat panel

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WO2015163554A1 (en) 2015-10-29

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