WO2015163554A1

WO2015163554A1 - Adsorption pad for transfer device and transfer device having same

Info

Publication number: WO2015163554A1
Application number: PCT/KR2014/011390
Authority: WO
Inventors: 정훈의
Original assignee: 국립대학법인 울산과학기술대학교 산학협력단; 주식회사 엠프리시젼
Priority date: 2014-04-21
Filing date: 2014-11-26
Publication date: 2015-10-29
Also published as: KR20150121482A; KR101619876B1

Abstract

The present invention relates to an adsorption pad for a transfer device and, more particularly, to an adsorption pad for a transfer device, which transfers an object to be transferred to a stacking container, the adsorption pad comprising: a base plate; micro ciliary structures installed in a predetermined central area on the base plate while being spaced from each other by a predetermined interval and adsorbed to the object to be transferred; and a barrier installed in a predetermined peripheral area on the base plate and formed to surround the micro ciliary structures such that, among the micro ciliary structures, micro ciliary structures positioned adjacent to the peripheral area are prevented from being damaged.

Description

Suction pad for transfer device and transfer device with same

The present invention relates to a suction pad for a transfer device and a transfer device having the same, and more particularly, to a suction device for a transfer device that is composed of micro-cili structures, the micro-cili structures are adsorbed with a transfer object to safely transfer the transfer object. And it relates to a transfer device having the same.

In order to provide a semiconductor device, a substrate processing apparatus for processing a wafer protects the wafer from foreign matter or chemical contamination in the air, and uses a closed wafer container such as a cassette or a carrier to store and transport the wafer. In order to transfer the wafer to a closed wafer container such as a cassette or a carrier, a transfer apparatus capable of supporting and transferring the wafer is required.

Mechanical chucks and electrostatic chucks are used in conventional transfer devices. In the case of a mechanical chuck, the wafer is generally supported by fixing the wafer in the vertical direction. However, as in the case of the former, when fixed and supported in the vertical direction of the wafer, a problem occurs that the chuck directly touches the wafer surface and the wafer surface is damaged by the chuck.

On the other hand, in the case of the electrostatic chuck, the center of the back surface of the wafer is brought into contact with the adsorption portion of the electrostatic chuck in order to exert sufficient force for supporting the wafer. However, in the case of using the electrostatic chuck, while the center of the back surface of the wafer is fixed in contact with the adsorption portion of the chuck, foreign matter may be attached to the center or a wound may occur. In particular, when a residual electric charge or a leakage electric field flows, a problem may arise in that the wafer has a force for attracting a foreign material. Recently, in order to solve these problems, an apparatus for transferring wafers using a microciliary structure has been developed.

However, the adsorption pad 10 for the transfer device manufactured using the micro-ciliary structures may slide the micro-ciliary structures 11 in a horizontal direction while separating the wafers adsorbed to the micro-liquid structures 11, and thus, the wafer and the micro-liquids. Isolate the structures. At this time, the micro-ciliary structures 11 positioned in the edge region of the adsorption pad 10 are subjected to strong stress and frictional force by the slide movement. The strong stress and frictional force applied to the microciliary structures 11 positioned at the edge region of the suction pad 10 cause problems of damaging the microciliar structures 11 as shown in FIGS. 1 and 2.

It is an object of the present invention to provide a suction device for a transfer device and a transfer device having the same, which consists of micro-ciliary structures, which are capable of safely transporting the transfer object by adsorbing with the transfer object.

The present invention provides a suction pad for a transfer device for transferring a transfer object to a stacked container, the suction plate comprising: a base plate; Micro-ciliary structures that are spaced apart from each other by a set interval in a set central region on the base plate and are adsorbed with the transfer object; And a partition wall disposed at a predetermined edge region on the base plate, the barrier rib being formed to surround the microciliary structures to prevent damage of the microciliar structures located near the edge region of the microciliar structures. Provide a suction pad.

According to another aspect of the present invention, the present invention, the suction pad for the transfer device for transferring the transfer object to the laminated container, the base plate; Micro-ciliary structures that are spaced apart from each other by a set interval in a set central region on the base plate and are adsorbed with the transfer object; And damages formed in the set edge region on the base plate so as to be adsorbed to the transfer object and surround the micro-cilia structures so as to prevent damage of the micro-cilia structures positioned close to the edge region of the micro-cilia structures. Provided is an adsorption pad for a transfer device comprising anti-micro fine structures.

According to another aspect of the invention, the present invention, the suction pad for the transfer device for transferring the transfer object to the stacked container, the base plate; Micro-ciliary structures that are spaced apart from each other by a set interval in a set central region on the base plate and are adsorbed with the transfer object; And installed in the set edge region on the base plate is adsorbed to the transfer object, is formed surrounding the micro-ciliary structures to prevent damage to the micro-cili structures that are located close to the edge region of the micro-cili structures, Provided is an adsorption pad for a transfer device including damage preventing microciliary structures having a higher density than the microciliar structures.

Adsorption pad for a transfer device and a transfer device having the same according to the present invention has the following effects.

First, by providing a damage preventing means for enclosing the micro-ciliary structures on the base plate has an effect of preventing the micro-ciliary structures are damaged by the stress and friction generated when the micro-cili structure and the object to be transferred is separated.

In particular, the damage preventing micro fine structures are adjusted in size and number so as to correspond to the stresses and frictional forces generated in the edge region, thereby preventing the micro fine structures and the damage preventing micro fine structures from being damaged by stress and friction, It may have the effect of safely transporting the transport object by improving the adsorption force.

1 and 2 are enlarged views of a portion of a conventional suction pad for a transfer apparatus photographed.

3 is a plan view and a cross-sectional view showing a suction pad for a transfer device according to an embodiment of the present invention.

4 is a plan view and a cross-sectional view showing a suction pad for a transfer device according to another embodiment of the present invention.

5 is a plan view and a cross-sectional view showing a suction pad for a transfer device according to another embodiment of the present invention.

3 to 5 there is shown a suction pad for the transfer device according to the present invention.

Although not shown in the drawings before the adsorption pad for the transport apparatus according to the present invention is described first, the transport apparatus further includes a main body (not shown) and a robot arm (not shown) together with the adsorption pad 100. The main body (not shown) is the robot arm (not shown) is coupled, the main body (not shown) is provided with an operation control unit (not shown) for controlling the operation of the robot arm (not shown) Can be. When the operation control unit (not shown) is installed, the operator can directly control the operation control unit (not shown) to control the operation of the robot arm (not shown). However, the operation of the robot arm (not shown) is not limited to being performed by an operator, but may be automatically performed according to a pre-stored setting.

The shape of the main body (not shown) is not specific, and may be formed in various forms in which the robot arm (not shown) may be coupled by a manufacturer. In the early days, the size of the main body (not shown) was generally large, but recently, the size of the main body (not shown) gradually decreases in order to improve the technology and space utilization.

As described above, the robot arm (not shown) is coupled to the main body (not shown) and provided with a suction pad 100 for the transfer device according to the present invention. The robot arm (not shown) may be formed in various forms, but is generally formed in a structure having a joint, and the suction pad 100 and the suction pad 100 in various directions of up, down, left, and right. The transfer object adsorbed in the) can be moved. The transfer object for transferring to the suction pad 100 for the transfer device may be, for example, a wafer, a display panel, or the like. In the detailed description of the present invention, the transfer object is a wafer.

First, with reference to Figure 3 will be described with respect to the adsorption pad for the transfer apparatus according to an embodiment of the present invention. Figure 3 (a) is a plan view of a suction pad for a transfer device according to an embodiment of the present invention, (b) is a cross-sectional view of section A-A` of (a). Referring to FIG. 3, the adsorption pad 100 for the transport apparatus according to the exemplary embodiment of the present invention includes a base plate 101, microspil structures 110, and a partition wall 130. The base plate 101 supports the microciliary structures 110 and the partition wall 130. More specifically, the micro-ciliary structures 110 and the partition wall 130 are installed on the base plate 101, and the suction pad 100 is moved by the base plate 101 to the robot arm (not shown). Is provided).

In the present embodiment, the base plate 101 is formed in a plate shape of a circular cross section. The base plate 101 is formed only in the form of a plate having a circular cross section is limited to this embodiment, and the base plate 101 does not always need to be formed in a plate shape of a circular cross section.

The microciliary structures 110 are attached on the base plate 101. As shown in FIG. 3, the microciliary structures 110 are provided in plurality, spaced apart from each other by a predetermined interval. Looking in more detail with respect to each micro fine structure 110, each micro fine structure 110 includes a pillar portion 111 and the contact portion 113. The pillar portion 111 is vertically installed on the base plate 101. The pillar portion 111 is formed in the form of a cylindrical cylinder having a circular cross section that crosses the longitudinal direction. However, this is merely an example and need not be limited thereto. The cross section of the pillar part 111 may be formed in a pillar shape having various cross-sectional shapes such as a triangle or a quadrangle.

The contact portion 113 is provided at the tip of the pillar portion 111 and is adsorbed with the transfer object. When the set pressure is applied, the contact portion 113 is in close contact with the transfer object and is adsorbed with the transfer object. The contact portion 113 is formed with a concave surface 113a in contact with the transfer object. However, this is only an example, and is not limited to being concave, but may be formed in a shape having various shapes such as planar shape and convex shape. And the protrusion 113b is formed in the front-end | tip of the surface 113a which contacts the said transfer object. Although the contact part 113 is shown to be provided downward in this embodiment, when the adsorption pad 100 transports the object to be conveyed, the adsorption pad 100 is 180 ° such that the contact part 113 is upward. Is rotated. However, the present invention is not limited thereto, and the contact part 113 may be in contact with the transfer object in a downward state.

As described above, the contact portion 113 is provided at the tip of the pillar portion 111 to be in close contact with the transfer object. When the protrusion 113b of the contact portion 113 is in contact with the transfer object, an air layer is formed between the transfer object and the contact surface 113a. In this case, when the pressure set on the transfer object is applied, the contact surface 113a comes into close contact with the transfer object while the air of the air layer is removed between the transfer object and the contact surface 113a.

As described above, the micro-ciliary structures 110 are provided in plural numbers spaced apart from each other by a predetermined interval. For example, the micro-ciliary structures 110 are arranged in a matrix form so as to form a plurality of rows and a plurality of compartments. do. The number of the micro-ciliary structures 110 is formed according to the size of the base plate 101, the size of the contact portion 113, the size of the object to be transferred to the suction pad 100.

The partition wall 130 serves to prevent damage of the micro-ciliary structures 110. In more detail, the partition wall 130 is installed on the base plate 101. In particular, the partition wall 130 is installed at a predetermined edge region of the base plate 101. The partition wall 130 is installed in the edge region of the base plate 101 to prevent damage to the micro-ciliary structures 110 positioned close to the edge region.

The partition wall 130 protrudes and extends on the base plate 101 by the edge area. And it is formed to surround the micro-ciliary structures 110 in the circumferential direction of the base plate 101. In the present embodiment, since the base plate 101 is formed in the shape of a plate having a circular cross section, the partition 101 is also formed along the circumferential direction of the base plate 101 to form a ring-like shape.

In general, the height of the partition 130 is the same as the height of the micro-ciliary structures (110). Since the partition wall 130 is formed to prevent damage of the micro-ciliary structures 110, the height of the partition wall 130 should not be lower than the height of the micro-ciliary structures 110. If the height of the barrier 130 is lower than the height of the micro-ciliary structures 110, the stress and frictional force when the micro-ciliary structures 110 are separated from the object to be transferred are not distributed to the barrier 130. Due to the stress and friction force, the micro-ciliary structures 110 are damaged.

In addition, when the partition wall 130 is higher than the height of the microciliary structures 110, the microciliar structures 110 may not be adsorbed with the transfer object and thus cannot transfer the transfer object. Therefore, the height of the barrier 130 is the same as the height of the micro-ciliary structures 110 so that the stress and frictional force when the micro-ciliary structures 110 are separated from the transfer object to be distributed to the partition 130 Thereby preventing the microciliary structures 110 from being damaged.

Meanwhile, the height of the microciliary structures 110 may be several nanometers to several hundred micrometers larger than the height of the partition wall 130. In this case, the height of the microciliary structure 110 is reduced by the weight of the object to be transferred and the acceleration according to the operation of the conveying device, thereby lowering the height of the microciliar structure 110 and the partition wall 130. 130) may be uniformly contacted. In addition, the microciliary structure 110 and the transfer object 130 may be easily separated in the vertical direction by elasticity generated by pressing the microciliar structure 110.

Figure 4 shows a suction pad 100` for the transfer apparatus according to another embodiment of the present invention. Figure 4 (a) is a plan view of a suction pad for a transfer device according to another embodiment of the present invention, (b) is a cross-sectional view of section B-B` of (a). Looking at the adsorption pad 100` for the transport apparatus according to another embodiment of the present invention with reference to Figure 4, the adsorption pad 100` for the transport apparatus is a base plate 101, micro-ciliary structures 110 and Damage prevention microciliary structures 130 ′. Since the base plate 101 and the micro-ciliary structures 110 have the same configuration as the adsorption pad 100 for the transfer apparatus according to the above-described embodiment, the same reference numerals as in the exemplary embodiment are used, and detailed description thereof will be omitted. .

The damage preventing microciliary structures 130 ′ are formed in the same structure as the microciliar structures 110. That is, each of the damage preventing micro fine structures 130 ′ also includes a pillar portion 131 ′ and a contact portion 133 ′, and the contact portion 133 ′ is in contact with the surface 133 ′ a and the protrusion 133 ′. b).

The cross-sectional area of each of the damage preventing microciliary structures 130 ′ is larger than the cross-sectional area of each of the microciliar structures 110. More specifically, the contact portion 133 ′ of the damage preventing microciliary structure 130 ′ is formed to be larger than the contact portion 113 of the microciliar structure 110. The size of the pillar portion 131 ′ of the damage preventing microciliary structure 130 ′ is greater than or equal to the size of the pillar portion 111 of the microciliar structure 110.

Like the micro fine structures 110, the damage preventing micro fine structures 130 ′ are also spaced apart from each other by a predetermined interval in the edge region, and are arranged in a matrix form to form a plurality of rows and a plurality of compartments. . However, the arrangement pitch of the damage preventing micro fine structures 130 ′, that is, the spacing between adjacent damage preventing micro fine structures 130 ′ is an arrangement pitch of the micro fine structures 110, that is, the adjacent fine fibers. Equal to the spacing between the ciliary structures 110.

As described above, when the adsorption pad 100 ′ is separated from the transport object after being adsorbed, a large stress and friction force are generated in the edge region. Since the damage preventing microciliary structures 130 ′ are formed larger than the microciliar structures 110, the stress and frictional force generated in the edge region are greater than the microciliar structures 110. It also prevents damage to the microciliary structures 110 without being easily damaged by excessive friction. Therefore, the size of the damage prevention micro fine structure (130`) is determined in consideration of the stress and friction generated in the edge region.

5 shows a suction pad 100 ″ for a transfer device according to another embodiment of the present invention. Figure 5 (a) is a plan view of a suction pad for a transfer device according to another embodiment of the present invention, (b) is a cross-sectional view of section C-C` of (a). Adsorption pad 100 ″ for a transfer apparatus according to still another embodiment of the present invention with reference to FIG. 5 includes a base plate 101, microciliary structures 110, and damage preventing microciliar structures 130 ″. do. Since the base plate 101 and the micro-ciliary structures 110 of the present embodiment also have the same configuration as the adsorption pad 100 for the transfer apparatus according to the above-described embodiment, the description thereof will be omitted using the same reference numerals.

The damage preventing microciliary structures 130 ″ in the present embodiment have the same size as those of the microciliar structures 110. That is, the size of the contact portion 133 ″ of the damage preventing micro fine structure 130 ″ and the size of the contact portion 113 of the micro fine structure 110 are formed to be the same.

In this embodiment, as shown in Figure 5, the density of the micro-ciliary structure 110 is installed in the central region of the base plate 101 and the damage preventing fine installed in the edge region of the base plate 101 The densities of the ciliary structures 130 ″ differ from each other. For example, as shown in (a) of FIG. 5, a first density of the damage preventing microciliary structures 130 ″ installed in the edge region may correspond to those of the microciliar structures 110 installed in the central region. Greater than the second density.

That is, the spacing of the micro-ciliary structures 110 is widened in the central region of the base plate 101, and the spacing of the micro-ciliary structures 110 is narrowed in the edge region of the base plate 101. Install it. Therefore, the density of the damage preventing micro fine structures 130 ″ installed in the edge region is greater than that of the micro fine structures 110 installed in the central region.

In addition, although not shown in the drawings, the damage preventing micro-settle structures 130 ″ may be installed such that the density of the damage preventing micro-settle structures 130 ″ gradually increases from the central area to the edge area.

As the density of the damage preventing micro fine structures 130 ″ installed in the edge region is increased, the distribution of stress and frictional force generated in the edge area is evenly distributed, thereby preventing the damage preventing micro fine structure 130 130 ″. It may be prevented from being damaged, and may have an effect of preventing damage to the microciliary structures 110.

Although the present invention has been described with reference to the embodiments shown in the drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

By using the adsorption pad for the conveying apparatus according to the present invention, it is possible to develop a conveying apparatus which can safely transport the conveying object by improving the adsorption force and prolong the life.

Claims

In the suction pad for the transfer device for transferring the transfer object to the stacked container,

Base plate;

Micro-ciliary structures that are spaced apart from each other by a set interval in a set central region on the base plate and are adsorbed with the transfer object; And

Adsorption for a transfer device is installed in the set edge region on the base plate, including a partition wall surrounding the micro-cili structures to prevent damage of the micro-cili structures that are located close to the edge region of the micro-cili structures pad.
The method according to claim 1,

The partition wall is a suction pad for the transfer device is formed to protrude and extend on the base plate by the edge area.
The method according to claim 1,

The height of the partition wall is the same as the height of the micro-cili structures, the suction pad for the transfer device is formed by a set height lower than the height of the micro-cili structures.
In the suction pad for the transfer device for transferring the transfer object to the stacked container,

Base plate;

Micro-ciliary structures that are spaced apart from each other by a set interval in a set central region on the base plate and are adsorbed with the transfer object; And

The damage prevention is formed in the set edge region on the base plate is adsorbed to the transfer object, and is formed around the micro-cili structures to prevent damage of the micro-cili structures that are located close to the edge region of the micro-cili structures Adsorption pad for transfer device comprising micro-ciliary structures.
The method according to claim 4,

The height of the damage prevention micro-cili structure is the same as the height of the micro-cili structure structure adsorption pad for the device.
The method according to claim 4,

The size of the cross-sectional area of each of the damage prevention microciliary structure is larger than the size of the cross-sectional area of the micro-cili structure structure adsorption pads.
The method according to claim 4,

The damage pitch of the damage prevention micro fine structures are formed to be the same as the array pitch of the micro fine structures installed in the central region.
In the suction pad for the transfer device for transferring the transfer object to the stacked container,

Base plate;

Micro-ciliary structures that are spaced apart from each other by a set interval in a set central region on the base plate and are adsorbed with the transfer object; And

Is installed in the set edge region on the base plate is adsorbed to the transfer object, and formed to surround the micro-cili structures to prevent damage of the micro-cili structures that are located close to the edge region of the micro-cili structures, Adsorption pads for transfer devices comprising damage resistant microciliary structures having a higher density than microciliar structures.
The method according to claim 8,

And a cross-sectional area of each of the damage preventing microciliary structures and a cross-sectional area of each of the microciliary structures have the same size.
The method according to claim 8,

The density of the anti-damage micro-ciliary structures is gradually increased from the central region to the edge region adsorption pad for the transfer device.
The method according to claim 8,

The density in the area where the microciliary structures are installed is the same as the whole,

Adsorption pad for the transfer device, the overall density is also the same in the area where the damage prevention micro-ciliary structures are installed.
The method according to any one of claims 1, 4 or 8,

The micro-ciliary structures and the damage preventing micro-cilia structures,

A pillar portion vertically installed on the base plate; And

And a contact portion provided at the front end of the pillar, the contact portion in close contact with the transfer object when a predetermined pressure is applied thereto.
The method according to claim 12,

The contact portion is formed to be concave in contact with the transfer object,

Adsorption pad for a transfer apparatus is adsorbed while the air between the transfer object and the contact is removed when the pressure set from the upper side of the transfer object is applied.
A transfer apparatus comprising a suction pad for a transfer apparatus of claim 1.