TWI733020B - Work clamp - Google Patents

Abstract

[Problem] It is designed to prevent the occurrence of the following situation: the sealing member is pressed toward the holding surface side when holding the plate-shaped workpiece on the table for holding the plate-shaped workpiece to contact the held surface of the workpiece, thereby causing the leakage of the attraction force. . [Solution] A work chuck is installed on a processing device for processing a warped plate-shaped workpiece, and is provided with: a base; a plate-shaped holding part with a suction path, which is equipped with A holding surface on the base with an area slightly smaller than the area of the workpiece is connected to the suction source; and a ring-shaped sealing part that surrounds the holding part and the upper end is more protruding than the holding surface. The ring-shaped sealing part is connected to the holding surface at the suction source When the attraction force acts on the holding surface, it contacts the outer peripheral part of the lower surface of the workpiece, and the upper end moves away from the center of the holding surface in the direction of the holding surface, so that the holding surface and the upper end become the same height and contact the workpiece The state of the lower surface attracts and holds the workpiece.

Description

Work clamp

FIELD OF THE INVENTION The present invention relates to a work chuck table for attracting and holding plate-shaped workpieces.

BACKGROUND OF THE INVENTION The holding surface of the work chuck is used to attract and hold the lower surface of a plate-shaped workpiece whose outer peripheral portion has been warped upward, and the upper surface of the plate-shaped work that has been sucked and held on the work chuck is ground with a grindstone. In the grinding device, due to the warpage of the plate-shaped workpiece, a gap may appear between the outer peripheral portion of the lower surface of the plate-shaped workpiece and the holding surface of the work clamp table. In addition, there is a problem that the suction force of the work chuck table leaks from the gap and it becomes impossible to attract and hold the plate-shaped workpiece. In order to deal with this problem, there is a work chuck that closes the gap so that the suction force does not leak (see, for example, Patent Document 1). Prior Art Documents Patent Documents

Patent Document 1: Japanese Patent Laid-Open No. 2014-072510

SUMMARY OF THE INVENTION Problems to be Solved by the Invention The work chuck described in Patent Document 1 described above is provided with a sealing member formed in a ring shape to close the gap so that the suction force does not leak. This is because by setting the attraction force greater than the warping force of the plate-shaped workpiece to act on the plate-shaped workpiece, the sealing member is deformed and compressed, and the upper end of the sealing member is flush with the holding surface, thus The function of forming a sealing member as a seal can be exerted.

However, for example, by pressing the sealing member toward the holding surface side of the work chuck, there are cases where the sealing member does not sufficiently perform its function as a seal, that is, there is a leakage that tends to generate attractive force. Although the sealing member has a certain degree of elasticity as a countermeasure, the sealing member with such a certain degree of elasticity will accumulate the rebound force in the direction that causes the plate-shaped workpiece to move away from the holding surface due to being squeezed during suction and holding. . Therefore, the attractive force acting on the plate-shaped workpiece in the attracting and holding must be set larger than the rebound force.

Accordingly, there is a problem of preventing the occurrence of the following situation: in the work chuck table that sucks and holds the plate-shaped workpiece, the sealing member is pressed toward the holding surface side during suction and holding, and contacts the held surface of the plate-shaped workpiece (below Surface), and produce attractive leakage. Means to solve the problem

The present invention to solve the above-mentioned problems is a work chuck table, which is installed on a processing device for processing a warped plate-shaped workpiece by a processing mechanism equipped with a tool, and has a suction and holding plate shape The holding surface of the workpiece, the work chuck is equipped with: a base; a plate-shaped holding part is provided with a suction path that is arranged on the base and has an area slightly smaller than the area of the plate-shaped workpiece The holding surface communicates with the suction source; and a ring-shaped sealing portion that surrounds the holding portion and the upper end is more protruding than the holding surface, the ring-shaped sealing portion is when the suction source is connected to the holding surface and attracting force acts on the holding surface Contact with the outer peripheral portion of the lower surface of the plate-shaped workpiece, and the upper end moves away from the center of the holding surface in the direction of the holding surface, and the holding surface and the upper end become the same height and contact the plate-shaped workpiece The state of the lower surface to prevent the leakage of the attraction force and to attract and hold the plate-shaped workpiece. Invention effect

The work chuck of the present invention has a base; a plate-shaped holding part is provided with a suction path that communicates with a holding surface arranged on the base and having an area slightly smaller than the area of the plate-shaped workpiece To the suction source; and the ring-shaped sealing part, which surrounds the holding part and the upper end is more protruding than the holding surface. The ring-shaped sealing part is in contact with the lower surface of the plate-shaped workpiece when the suction source is connected to the holding surface so that the attractive force acts on the holding surface The upper end moves away from the center of the holding surface in the direction of the holding surface, and the holding surface and the upper end are at the same height and are in contact with the lower surface of the plate-shaped workpiece to attract and hold the plate-shaped workpiece, so It is possible to attract and hold a plate-shaped workpiece without causing a leakage of attraction. In addition, although the plate-shaped workpiece during suction and holding has the force of rebounding from the holding surface due to warpage, there is no rebound force of the ring-shaped seal part (the force to return from the deformed state to the original state) If it is further applied to the plate-shaped workpiece, it becomes possible to attract and hold the plate-shaped workpiece more reliably.

Mode for Carrying Out the Invention Fig. 1 is an exploded perspective view showing a work chuck table 3 having a holding surface 310 for sucking and holding a plate-shaped workpiece W, and Fig. 2 is a perspective view showing the work chuck table 3 in an assembled state. The work chuck 3 includes a base 30, a plate-shaped holding portion 31, and a ring-shaped sealing portion 32. The plate-shaped holding portion 31 is provided on the base 30 and has an area larger than that of the plate-shaped workpiece W. The slightly smaller holding surface 310 communicates with the suction path 311 (not shown in FIG. 1) of the suction source 7, and the annular sealing portion 32 surrounds the holding portion 31. Although the work chuck 3 is arranged on a manual grinding device for grinding a warped plate-shaped workpiece W by, for example, a processing mechanism equipped with a grinding wheel as a tool, it is equipped with The processing device provided is not limited to this processing device.

The plate-shaped workpiece W is, for example, a workpiece that becomes a circuit board (PCB) after processing, and has a rectangular outer shape with a length of tens of centimeters each, and is formed such that the upper surface Wa has not yet been assembled with devices or wiring, etc. status. In the example shown in FIG. 1, although the outer peripheral portion of the plate-shaped workpiece W on both sides in the Y-axis direction is warped upward, all the outer peripheral portions of the four sides may be warped upward.

The base 30 is, for example, a base formed by forming a predetermined alloy or the like into a disc shape, and on its upper surface 30a, a plurality of (10 in the example shown in FIG. 1) screw holes 300 are interposed therebetween. The interval is formed into a substantially quadrangular ring.

The plate-shaped holding portion 31 is, for example, a rectangular flat plate made of a metal material such as stainless steel (SUS), and the upper surface of the holding surface 310 can attract and hold the plate-shaped workpiece W, and the area of the holding surface 310 is formed as The area is slightly smaller than the area of the plate-shaped workpiece W. The holding portion 31 is fixed to the center of the upper surface 30a of the base 30 with a bolt not shown in the figure, or is fixed with an adhesive. On the holding surface 310, a plurality of suction holes 310c are formed vertically and horizontally at predetermined intervals. As shown in FIG. 5, each suction hole 310c communicates with the suction path 311 formed inside the plate-shaped holding portion 31, and at one end of the suction path 311 that opens on the lower surface of the holding portion 31, it penetrates the base 30. In addition, a suction source 7 composed of a vacuum generator, a compressor, and the like is communicated.

The ring-shaped sealing portion 32 shown in FIG. 1 having a quadrangular ring shape is formed of a member with moderate elasticity such as rubber or sponge, and is provided with an opening 320 for the fitting and holding portion 31, surrounding the The deformed portion 321 of the holding portion 31 fitted to the opening 320 and the rectangular extension portion 322 extending horizontally from the lower end of the deformed portion 321 toward the outside of the opening 320.

In the deformed portion 321 composed of four rectangular side walls in a side view, a notch in the longitudinal direction (Z-axis direction) is formed in the joint portion (corner portion) of each side wall, so that each side wall can face the opening 320 The outer side bends.

The ring-shaped sealing portion 32 is formed by, for example, four fixing plates 35 shown in FIG. 1 to surround the holding portion 31 and be fixed to the upper surface 30 a of the base 30. The fixing plate 35 has, for example, an outer shape having a substantially L-shaped longitudinal section, and is provided with a flat plate portion 350 and a support portion 351 formed by penetrating the bolt insertion hole 350c in the thickness direction (Z-axis direction), and the support portion 351 is a lower part of the deformed portion 321 that is erected on the flat plate portion 350 and supports the annular seal portion 32 from the side. Furthermore, the four fixing plates 35 may be integrally formed into a four-corner ring shape, and the fixing plates 35 and the annular seal portion 32 may be integrally formed. In addition, the deformable portion 321 composed of four side walls may be integrally formed into a quadrangular ring shape. Furthermore, in the case of integrally forming the deforming portion 321, the corner portion of the side wall preferably has a material or shape that is more easily deformed than the central portion. As an example of a case where the corner portion of the side wall of the deforming portion 321 is formed of a material that is more easily deformed than the central portion, as shown in FIG. 3, the central portion of the side wall is formed of a rubber plate G, and will be in contact with the rubber plate G The corners of φ are made of sponge P, and the corners of sponge P are made easy to deform. As an example of a case where the corner portion of the side wall of the deformed portion 321 is formed into a shape that is easier to deform than the central portion, as shown in FIG. 4, compared to the central portion of the deformed portion 321 formed entirely of rubber sheet or sponge Thickness, the thickness of the corner part is made thin to make it easy to deform.

The holding portion 31 on the base 30 is fitted into the opening 320 of the annular sealing portion 32, and the annular sealing portion 32 is placed on the upper surface 30 a of the base 30. Next, each of the four fixing plates 35 is placed on the extended portion 322 of the ring-shaped sealing portion 32 along the deforming portion 321, and the screw holes 300 of the base 30 are inserted through the bolts of the fixing plates 35. The holes 350c coincide. In addition, 10 fixing bolts 36 (only one is shown in FIG. 1) are inserted through each bolt insertion hole 350c and screwed into each screw hole 300, thereby forming a gap on the flat plate portion 350 of the fixing plate 35 The extended portion 322 of the annular sealing portion 32 is sandwiched between the lower surface and the upper surface 30a of the base 30, and as shown in FIG. 2, the annular sealing portion 32 is fixed to the base 30. As shown in FIG. 2, when the ring-shaped seal portion 32 is fixed to the base 30 in a state surrounding the holding portion 31, the upper end 321a of the deformed portion 321 of the ring-shaped seal portion 32 is positioned more than the holding surface of the holding portion 31. The state 310 is further upward by a predetermined distance, that is, it is in a state that protrudes upward than the holding surface 310.

Hereinafter, the operation of the work chuck table 3 when the plate-shaped workpiece W shown in FIG. 5 is sucked and held is described. First, the plate-shaped workpiece W is transferred to the work chuck table 3 and positioned so that the center of the plate-shaped work W is approximately at the center of the holding surface 310 of the work chuck table 3. Next, the plate-shaped workpiece W is placed on the holding surface 310 with the lower surface Wb facing the lower side.

By actuating the suction source 7, the suction force generated by the suction source 7 is transmitted to the suction hole 310 c through the suction path 311, so that the suction force acts on the holding surface 310. With the attraction force transmitted to the holding surface 310, the plate-shaped workpiece W is corrected while being warped, and the holding surface 310 is sucked and held from the center of the lower surface Wb to further make the deformed portion of the annular seal portion 32 The upper end 321a of the 321 is in contact with the outer peripheral portion of the lower surface Wb of the plate-shaped workpiece W.

Because the warpage of the outer peripheral portion of the lower surface Wb of the plate-shaped workpiece W is corrected, the upper end 321a of the deformed portion 321 is contacted, so that the upper end 321a of the deformed portion 321 faces the direction of the holding surface from the holding surface 310. When the center moves away from the center, the upper end 321a of the deforming portion 321 is bent outward as shown in FIG. 6, and the holding surface 310 and the upper end 321a have the same height. As a result, the ring-shaped seal portion 32 is in contact with the outer peripheral portion of the lower surface Wb of the plate-shaped workpiece W without a gap to fully function as a seal, and an appropriate suction force can be applied to the lower surface of the plate-shaped workpiece W. Surface Wb. Furthermore, no matter if the corner portion of the side wall of the deformed portion 321 is formed of a material that is easier to deform than the central portion as shown in FIG. 3, or the side wall of the deformed portion 321 is formed as shown in FIG. 4 When the corner portions of the s are formed into a shape that is easier to deform than the central portion, the plate-shaped workpiece W is held by suction, so that the upper end 321a is bent outward along with the deformation of the corner portion of the deforming portion 321, and the holding The surface 310 and the upper end 321a have the same height, and the ring-shaped seal portion 32 is in a state where it fully functions as a seal.

The work clamp table 3 of the present invention is provided with a base 30; a plate-shaped holding portion 31 is provided with a suction path 311 which is arranged on the base 30 and has an area larger than that of the plate-shaped workpiece W The slightly smaller holding surface 310 is connected to the suction source 7; and the ring-shaped sealing portion 32 surrounds the holding portion 31 and the upper end 321a is more protruding than the holding surface 310. The ring-shaped sealing portion 32 is connected to the holding surface 310 when the suction source 7 When the attraction force acts on the holding surface 310, it contacts the outer peripheral portion of the lower surface Wb of the plate-shaped workpiece W, and the upper end 321a moves away from the center of the holding surface in the direction of the holding surface 310, and the holding surface 310 and the upper end 321a move away from the center of the holding surface. The plate-shaped workpiece W is sucked and held in a state of being at the same height and in contact with the lower surface Wb of the plate-shaped workpiece W. Therefore, the plate-shaped workpiece W can be sucked and held without causing the leakage of the attraction force. In addition, at the time of suction and holding, the operator does not need to press the plate-shaped workpiece W toward the holding surface 310 from above. The plate-shaped workpiece W at the time of suction and holding has the force of rebounding from the holding surface 310 (the force to lift the outer peripheral portion of the plate-shaped workpiece W upward) due to warpage, and the ring-shaped seal portion 32 has the The direction of the force to return from the deformed state to the original state is not perpendicular to the +Z direction with respect to the plate-shaped workpiece W attracted and held by the holding surface 310, but approaching the center of the holding surface 310 Therefore, the restoring force of the annular seal portion 32 will not be further applied to the force of the rebound from the holding surface 310 due to the warpage of the plate-shaped workpiece W. Therefore, it becomes possible to suck and hold the plate-shaped workpiece W more reliably.

The work chuck table of the present invention is not limited to the work chuck table of the example described above, and the various configurations of the work chuck table 3 shown in the attached drawings are not limited to this, and can be used Change as appropriate within the scope of the effects of the present invention.

3‧‧‧Working clamp table 30‧‧‧Abutment 30a‧‧‧Upper surface of the abutment 300‧‧‧Screw hole 31‧‧‧Retaining part 310‧‧‧Retaining surface 310c‧‧‧Suction hole 311‧‧‧ Suction road 32‧‧‧Annular sealing part 320‧‧‧Opening 321‧‧‧Deformation part 321a‧‧Upper end 322‧‧‧Extension part 35‧‧‧Fix plate 350‧‧‧Plate part 350c‧‧ Bolt insertion Through hole 351‧‧‧Support part 36‧‧‧Fixed bolt 7‧‧‧Suction source G‧‧‧Rubber plate P‧‧‧Sponge W‧‧‧Plate workpiece Wa‧‧‧Upper surface of plate workpiece Wb‧ ‧‧The lower surface of the plate-shaped workpiece X, +X, -X, +Y, -Y, +Z, -Z‧‧‧direction

Fig. 1 is an exploded perspective view showing an example of the structure of a work clamp table. Fig. 2 is a perspective view showing an example of a work clamp table. Fig. 3 is a perspective view partially showing an example of a case where the corner portion of the deformed portion of the ring-shaped seal is formed of a material that is easily deformed. 4 is a perspective view partially showing an example of a case where the corner portion of the deformed portion of the ring-shaped seal portion is formed into a shape that is easily deformed. Fig. 5 is a cross-sectional view showing a state in which a plate-shaped workpiece is placed on a work chuck. Fig. 6 is a cross-sectional view showing a state in which a plate-shaped workpiece is sucked and held by a work clamp.

3‧‧‧Working clamp table

30‧‧‧Abutment

30a‧‧‧The upper surface of the abutment

31‧‧‧Retention Department

32‧‧‧Annular seal

36‧‧‧Fixed bolt

310‧‧‧Keep the noodles

310c‧‧‧Suction hole

311‧‧‧Attraction Road

321‧‧‧Deformation Department

321a‧‧‧Upper

322‧‧‧Extension Department

7‧‧‧Attraction source

W‧‧‧Plate workpiece

Wa‧‧‧The upper surface of the plate-shaped workpiece

Wb‧‧‧The bottom surface of the plate-shaped workpiece

X, +Y, -Y, +Z, -Z‧‧‧direction

Claims (1)

A working chuck table is set on a processing device that processes a warped plate-shaped workpiece by installing a tool-added processing mechanism, and has a holding surface for attracting and holding the plate-shaped workpiece. The working chuck has : A base; a plate-shaped holding portion provided with a suction path that connects the holding surface arranged on the base and having an area slightly smaller than the area of the plate-shaped workpiece to the suction source; and ring-shaped The sealing part surrounds the holding part and the upper end protrudes more than the holding surface. The annular sealing part contacts the lower surface of the plate-shaped workpiece when the suction source is connected to the holding surface so that the attractive force acts on the holding surface The upper end moves away from the center of the holding surface in the direction of the holding surface, and the holding surface and the upper end are at the same height and are in contact with the lower surface of the plate-shaped workpiece to prevent the The attraction leaks and attracts and maintains the plate-shaped workpiece.

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